JP2014225317A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2014225317A5 JP2014225317A5 JP2014095193A JP2014095193A JP2014225317A5 JP 2014225317 A5 JP2014225317 A5 JP 2014225317A5 JP 2014095193 A JP2014095193 A JP 2014095193A JP 2014095193 A JP2014095193 A JP 2014095193A JP 2014225317 A5 JP2014225317 A5 JP 2014225317A5
- Authority
- JP
- Japan
- Prior art keywords
- microactuator
- adhesive layer
- passivation layer
- substrate
- titanium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012790 adhesive layer Substances 0.000 claims 5
- 239000010410 layer Substances 0.000 claims 5
- 238000002161 passivation Methods 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical group CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 239000000725 suspension Substances 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/886,780 US8854772B1 (en) | 2013-05-03 | 2013-05-03 | Adhesion enhancement of thin film PZT structure |
| US13/886,780 | 2013-05-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014225317A JP2014225317A (ja) | 2014-12-04 |
| JP2014225317A5 true JP2014225317A5 (enExample) | 2015-04-23 |
Family
ID=50630658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014095193A Pending JP2014225317A (ja) | 2013-05-03 | 2014-05-02 | マイクロアクチュエータおよびディスクドライブ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8854772B1 (enExample) |
| EP (1) | EP2800095A1 (enExample) |
| JP (1) | JP2014225317A (enExample) |
| KR (1) | KR101552279B1 (enExample) |
| CN (1) | CN104218146A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9786308B1 (en) | 2016-06-07 | 2017-10-10 | Seagate Technology Llc | Interconnect interposer attachable to a trailing edge of a slider |
| CN112201280B (zh) * | 2019-07-08 | 2024-07-09 | 马格内康普公司 | 用于谐振改善的多层执行器电极构型 |
| US11152024B1 (en) | 2020-03-30 | 2021-10-19 | Western Digital Technologies, Inc. | Piezoelectric-based microactuator arrangement for mitigating out-of-plane force and phase variation of flexure vibration |
| WO2022118575A1 (ja) * | 2020-12-01 | 2022-06-09 | ローム株式会社 | トランスデューサ |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1027446A (ja) * | 1996-07-08 | 1998-01-27 | Nec Corp | キャリッジ機構及び該キャリッジ機構を備えた磁気ディスク装置 |
| GB2324882B (en) | 1997-04-29 | 2001-05-23 | Daewoo Electronics Co Ltd | Array of thin film actuated mirrors and method for the manufacture thereof |
| JP4501170B2 (ja) * | 1999-03-18 | 2010-07-14 | ソニー株式会社 | 半導体装置およびその製造方法 |
| US7383727B2 (en) * | 1999-05-20 | 2008-06-10 | Seiko Epson Corporation | Liquid cotainer having a liquid consumption detecting device therein |
| JP4362859B2 (ja) * | 2001-01-26 | 2009-11-11 | セイコーエプソン株式会社 | インクジェット式記録ヘッドおよびプリンタ |
| CA2438360C (en) * | 2001-12-18 | 2010-02-09 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric element, ink jet head, angular velocity sensor, manufacturing method thereof, and ink jet printing apparatus |
| JP4146811B2 (ja) * | 2004-03-03 | 2008-09-10 | Ｔｄｋ株式会社 | サスペンション、及びハードディスク装置 |
| JP2007200534A (ja) * | 2006-01-26 | 2007-08-09 | Shinka Jitsugyo Kk | 高密度磁気記録用スライダ |
| WO2007093921A2 (en) * | 2006-02-14 | 2007-08-23 | Delphi Technologies, Inc. | Barrier coatings for a piezoelectric device |
| GB0602955D0 (en) * | 2006-02-14 | 2006-03-29 | Delphi Tech Inc | Piezoelectric actuator |
| JP2008173924A (ja) * | 2007-01-22 | 2008-07-31 | Fuji Xerox Co Ltd | 液滴吐出ヘッド |
| JP5844026B2 (ja) * | 2008-03-21 | 2016-01-13 | 富士フイルム株式会社 | 圧電素子の製造方法 |
| JP4897767B2 (ja) * | 2008-10-21 | 2012-03-14 | Ｔｄｋ株式会社 | 薄膜圧電体素子及びその製造方法並びにそれを用いたヘッドジンバルアセンブリ、及びそのヘッドジンバルアセンブリを用いたハードディスクドライブ |
| JP5085623B2 (ja) * | 2009-09-18 | 2012-11-28 | Ｔｄｋ株式会社 | 薄膜素子の製造方法及び薄膜素子並びにその薄膜素子を用いたヘッドジンバルアセンブリ、及び、ハードディスクドライブ |
| JP5541450B2 (ja) * | 2010-03-16 | 2014-07-09 | セイコーエプソン株式会社 | 圧電素子の製造方法 |
| US8422172B1 (en) * | 2010-10-01 | 2013-04-16 | Western Digital Technologies, Inc. | Actuator trace through a die |
| US8289652B2 (en) | 2010-10-22 | 2012-10-16 | Seagate Technology Llc | Compact microactuator head assembly |
| JP2012174955A (ja) * | 2011-02-23 | 2012-09-10 | Stanley Electric Co Ltd | 圧電アクチュエータ及びその製造方法 |
| JP5592289B2 (ja) * | 2011-02-25 | 2014-09-17 | Ｔｄｋ株式会社 | 圧電素子及びその製造方法並びにその圧電素子を搭載したヘッドジンバルアセンブリ |
| JP5360129B2 (ja) * | 2011-05-11 | 2013-12-04 | Ｔｄｋ株式会社 | ヘッド支持機構 |
| US8310790B1 (en) * | 2011-06-11 | 2012-11-13 | Nhk Spring Co., Ltd | Remote drive rotary head dual stage actuator |
| US8716858B2 (en) | 2011-06-24 | 2014-05-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Bump structure with barrier layer on post-passivation interconnect |
| US9553195B2 (en) | 2011-06-30 | 2017-01-24 | Applied Materials, Inc. | Method of IGZO and ZNO TFT fabrication with PECVD SiO2 passivation |
-
2013
- 2013-05-03 US US13/886,780 patent/US8854772B1/en active Active
-
2014
- 2014-05-01 EP EP14166801.2A patent/EP2800095A1/en not_active Withdrawn
- 2014-05-02 JP JP2014095193A patent/JP2014225317A/ja active Pending
- 2014-05-04 CN CN201410354090.4A patent/CN104218146A/zh active Pending
- 2014-05-07 KR KR1020140054371A patent/KR101552279B1/ko not_active Expired - Fee Related