JP2014216182A5 - - Google Patents

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Publication number
JP2014216182A5
JP2014216182A5 JP2013092484A JP2013092484A JP2014216182A5 JP 2014216182 A5 JP2014216182 A5 JP 2014216182A5 JP 2013092484 A JP2013092484 A JP 2013092484A JP 2013092484 A JP2013092484 A JP 2013092484A JP 2014216182 A5 JP2014216182 A5 JP 2014216182A5
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JP
Japan
Prior art keywords
charged particle
electrode
electron gun
electron
source
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Application number
JP2013092484A
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English (en)
Japanese (ja)
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JP6340165B2 (ja
JP2014216182A (ja
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Priority claimed from JP2013092484A external-priority patent/JP6340165B2/ja
Priority to JP2013092484A priority Critical patent/JP6340165B2/ja
Priority to DE112014002139.3T priority patent/DE112014002139B4/de
Priority to CN201480023185.6A priority patent/CN105144336B/zh
Priority to US14/787,263 priority patent/US9570268B2/en
Priority to PCT/JP2014/060575 priority patent/WO2014175087A1/ja
Publication of JP2014216182A publication Critical patent/JP2014216182A/ja
Publication of JP2014216182A5 publication Critical patent/JP2014216182A5/ja
Publication of JP6340165B2 publication Critical patent/JP6340165B2/ja
Application granted granted Critical
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JP2013092484A 2013-04-25 2013-04-25 電子銃、荷電粒子銃およびそれらを用いた荷電粒子線装置 Active JP6340165B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2013092484A JP6340165B2 (ja) 2013-04-25 2013-04-25 電子銃、荷電粒子銃およびそれらを用いた荷電粒子線装置
PCT/JP2014/060575 WO2014175087A1 (ja) 2013-04-25 2014-04-14 電子銃、荷電粒子銃およびそれらを用いた荷電粒子線装置
CN201480023185.6A CN105144336B (zh) 2013-04-25 2014-04-14 电子枪、带电粒子枪及利用该电子枪、带电粒子枪的带电粒子束装置
US14/787,263 US9570268B2 (en) 2013-04-25 2014-04-14 Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun
DE112014002139.3T DE112014002139B4 (de) 2013-04-25 2014-04-14 Elektronenkanone, Ladungsteilchenkanone und Ladungsteilchenstrahlvorrichtung unter Verwendung der Elektronenkanone und der Ladungsteilchenkanone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013092484A JP6340165B2 (ja) 2013-04-25 2013-04-25 電子銃、荷電粒子銃およびそれらを用いた荷電粒子線装置

Publications (3)

Publication Number Publication Date
JP2014216182A JP2014216182A (ja) 2014-11-17
JP2014216182A5 true JP2014216182A5 (enExample) 2016-04-28
JP6340165B2 JP6340165B2 (ja) 2018-06-06

Family

ID=51791666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013092484A Active JP6340165B2 (ja) 2013-04-25 2013-04-25 電子銃、荷電粒子銃およびそれらを用いた荷電粒子線装置

Country Status (5)

Country Link
US (1) US9570268B2 (enExample)
JP (1) JP6340165B2 (enExample)
CN (1) CN105144336B (enExample)
DE (1) DE112014002139B4 (enExample)
WO (1) WO2014175087A1 (enExample)

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US9805909B1 (en) * 2016-09-20 2017-10-31 Applied Materials Israel Ltd. Method for detecting voids in interconnects and an inspection system
DE102016015829B4 (de) 2016-12-16 2025-02-20 Ketek Gmbh Vorrichtung zur Erzeugung eines Quellenstroms von Ladungsträgern mittels Feldemission und Verfahren zur Stabilisierung eines mittels eines Feldemissionselements emittierten Quellenstroms von Ladungsträgern
DE102016124673B3 (de) 2016-12-16 2018-05-30 Ketek Gmbh Vorrichtung zur Erzeugung eines Quellenstroms von Ladungsträgern mittels Feldemission und Verfahren zur Stabilisierung eines mittels eines Feldemissionselements emittierten Quellenstroms von Ladungsträgern
US9934933B1 (en) * 2017-01-19 2018-04-03 Kla-Tencor Corporation Extractor electrode for electron source
JP2019003863A (ja) * 2017-06-16 2019-01-10 株式会社島津製作所 電子ビーム装置、ならびに、これを備えるｘ線発生装置および走査電子顕微鏡
CN107768218A (zh) * 2017-09-15 2018-03-06 华中科技大学 一种低能强流栅控电子枪
JP6943701B2 (ja) * 2017-09-15 2021-10-06 日本電子株式会社 冷陰極電界放出型電子銃の調整方法
JP7029933B2 (ja) * 2017-11-02 2022-03-04 日本電子株式会社 電子顕微鏡および電子顕微鏡の制御方法
CN108554632B (zh) * 2018-01-08 2020-09-29 合肥工业大学 一种利用电荷施加法对样品颗粒进行静电收集的装置
US10573481B1 (en) * 2018-11-28 2020-02-25 Nuflare Technology, Inc. Electron guns for electron beam tools
WO2020235003A1 (ja) * 2019-05-21 2020-11-26 株式会社日立ハイテク 電子銃および電子銃を備えた荷電粒子線装置
CN110416043B (zh) * 2019-07-15 2021-08-27 中国电子科技集团公司第三十八研究所 一种用于电子源系统的真空结构
US12266500B2 (en) * 2019-12-13 2025-04-01 Hitachi High-Tech Corporation Charged particle gun and charged particle beam device
DE112020006608B4 (de) * 2020-04-07 2025-04-17 Hitachi High-Tech Corporation Ladungsteilchenkanone, ladungsteilchenstrahlsystem und arretierungsmutter
WO2023201580A1 (zh) * 2022-04-20 2023-10-26 华为技术有限公司 电源系统、电子光学镜组和扫描电子显微镜

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JPH071681B2 (ja) * 1990-04-19 1995-01-11 株式会社日立製作所 荷電粒子線装置
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JP4538441B2 (ja) * 2003-09-10 2010-09-08 株式会社日立ハイテクノロジーズ 電子線応用装置
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