JP2009037910A5 - - Google Patents
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- Publication number
- JP2009037910A5 JP2009037910A5 JP2007201905A JP2007201905A JP2009037910A5 JP 2009037910 A5 JP2009037910 A5 JP 2009037910A5 JP 2007201905 A JP2007201905 A JP 2007201905A JP 2007201905 A JP2007201905 A JP 2007201905A JP 2009037910 A5 JP2009037910 A5 JP 2009037910A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- ion
- charged particle
- irradiation system
- ion beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims 12
- 239000002245 particle Substances 0.000 claims 10
- 150000002500 ions Chemical class 0.000 claims 9
- 238000010894 electron beam technology Methods 0.000 claims 8
- 239000007789 gas Substances 0.000 claims 8
- 239000002131 composite material Substances 0.000 claims 7
- 230000001678 irradiating effect Effects 0.000 claims 4
- 238000001514 detection method Methods 0.000 claims 3
- 239000001307 helium Substances 0.000 claims 3
- 229910052734 helium Inorganic materials 0.000 claims 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 230000001154 acute effect Effects 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000000605 extraction Methods 0.000 claims 1
- -1 helium ions Chemical class 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007201905A JP2009037910A (ja) | 2007-08-02 | 2007-08-02 | 複合荷電粒子ビーム装置及び加工観察方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007201905A JP2009037910A (ja) | 2007-08-02 | 2007-08-02 | 複合荷電粒子ビーム装置及び加工観察方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009037910A JP2009037910A (ja) | 2009-02-19 |
| JP2009037910A5 true JP2009037910A5 (enExample) | 2010-07-08 |
Family
ID=40439628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007201905A Pending JP2009037910A (ja) | 2007-08-02 | 2007-08-02 | 複合荷電粒子ビーム装置及び加工観察方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009037910A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5432028B2 (ja) * | 2010-03-29 | 2014-03-05 | 株式会社日立ハイテクサイエンス | 集束イオンビーム装置、チップ先端構造検査方法及びチップ先端構造再生方法 |
| JP5448971B2 (ja) * | 2010-03-29 | 2014-03-19 | 株式会社日立ハイテクサイエンス | 荷電粒子ビーム装置、チップ再生方法、及び試料観察方法 |
| JP2011222426A (ja) * | 2010-04-13 | 2011-11-04 | Sii Nanotechnology Inc | 複合荷電粒子ビーム装置 |
| KR101161956B1 (ko) * | 2010-05-03 | 2012-07-04 | 삼성전기주식회사 | 화학성분 분석 방법 및 화학성분 분석 장치 |
| DE102010024625A1 (de) * | 2010-06-22 | 2011-12-22 | Carl Zeiss Nts Gmbh | Verfahren zum Bearbeiten eines Objekts |
| CN113163564B (zh) * | 2021-04-30 | 2024-06-04 | 中国科学院电工研究所 | 一种具有静电消除功能的电子束加工装置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58164135A (ja) * | 1982-03-25 | 1983-09-29 | Agency Of Ind Science & Technol | 収束イオンビ−ムを用いた半導体加工装置 |
| JP2810370B2 (ja) * | 1988-01-12 | 1998-10-15 | 株式会社 日立製作所 | 集束イオンビーム加工方法 |
| JPH0254851A (ja) * | 1988-08-17 | 1990-02-23 | Fujitsu Ltd | 電界電離型ガスイオン源の制御方法 |
| JP3119959B2 (ja) * | 1993-02-05 | 2000-12-25 | セイコーインスツルメンツ株式会社 | 集束イオンビーム装置および加工観察装置 |
| JP3564717B2 (ja) * | 1993-03-10 | 2004-09-15 | 株式会社日立製作所 | 集束イオンビーム発生手段を用いた処理方法及びその装置 |
| JPH0721955A (ja) * | 1993-06-29 | 1995-01-24 | Jeol Ltd | イオンビーム装置 |
| JP4178741B2 (ja) * | 2000-11-02 | 2008-11-12 | 株式会社日立製作所 | 荷電粒子線装置および試料作製装置 |
| JP2004087174A (ja) * | 2002-08-23 | 2004-03-18 | Seiko Instruments Inc | イオンビーム装置およびイオンビーム加工方法 |
-
2007
- 2007-08-02 JP JP2007201905A patent/JP2009037910A/ja active Pending
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