JP2014192405A - プローブ装置 - Google Patents
プローブ装置 Download PDFInfo
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- JP2014192405A JP2014192405A JP2013067811A JP2013067811A JP2014192405A JP 2014192405 A JP2014192405 A JP 2014192405A JP 2013067811 A JP2013067811 A JP 2013067811A JP 2013067811 A JP2013067811 A JP 2013067811A JP 2014192405 A JP2014192405 A JP 2014192405A
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- probe
- contact
- mounting table
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Environmental & Geological Engineering (AREA)
Abstract
【解決手段】載置台と、載置台の半導体ウエハの載置面に形成された載置台電極と、複数のプローブを有するプローブカードと、載置台を駆動する駆動機構と、載置台の上方に配設され環状に形成された電極板と、上面に凹凸が形成され電極板に当接される当接部と、当接部の下側に当接部と一体に構成され載置台電極と電気的に接続されたケーブルを接続するためのケーブル接続部とを有し、ケーブル接続部の下方に配設された付勢部材によって当接部とケーブル接続部とが上下動自在に構成され、載置台の側方に配設されたコンタクトプローブとを具備し、載置台を上昇させて半導体デバイスの電極にプローブを接触させた際に、コンタクトプローブの当接部と電極板とを当接可能とされている。
【選択図】図1
Description
Claims (7)
- 半導体ウエハに形成された半導体デバイスと電気的な接続を形成し、テスタにより電気的な検査を行うプローブ装置であって、
前記半導体ウエハを載置するための載置台と、
前記載置台の前記半導体ウエハの載置面に形成され、前記半導体デバイスの裏面側に形成された裏面側電極と接触される載置台電極と、
前記載置台の上方に配設され、前記テスタと電気的に接続される複数のプローブを有するプローブカードと、
前記載置台を駆動し、当該載置台に載置された前記半導体ウエハの前記半導体デバイスの電極に前記プローブを接触させる駆動機構と、
前記載置台の上方に配設され、前記テスタと電気的に接続される電極板と、
上面に凹凸が形成され前記電極板に当接される当接部と、前記当接部の下側に当該当接部と一体に構成され前記載置台電極と電気的に接続されたケーブルを接続するためのケーブル接続部とを有し、前記ケーブル接続部の下方に配設された付勢部材によって前記当接部と前記ケーブル接続部とが上下動自在に構成され、前記載置台の側方に配設されたコンタクトプローブとを具備し、
前記載置台を上昇させて前記半導体デバイスの電極に前記プローブを接触させた際に、前記コンタクトプローブの前記当接部と前記電極板とを当接させ、前記裏面側電極と前記テスタとの電気的な接続を行う
ことを特徴とするプローブ装置。 - 請求項1記載のプローブ装置であって、
前記コンタクトプローブが、前記載置台の周方向に間隔を設けて複数配設されている
ことを特徴とするプローブ装置。 - 請求項1又は2記載のプローブ装置であって、
前記コンタクトプローブを上下動させる昇降機構を具備した
ことを特徴とするプローブ装置。 - 請求項3記載のプローブ装置であって、
昇降機構は、前記コンタクトプローブの高さを多段階で調整可能とされている
ことを特徴とするプローブ装置。 - 請求項1〜4いずれか1項記載のプローブ装置であって、
前記当接部が円板状に形成され前記当接部の直下に直方体形状の前記ケーブル接続部が配設され、前記ケーブル接続部の側面に前記ケーブルを接続するためのねじ部が配設されている
ことを特徴とするプローブ装置。 - 請求項1〜5いずれか1項記載のプローブ装置であって、
前記当接部及び前記ケーブル接続部の表面に金メッキ層が形成されている
ことを特徴とするプローブ装置。 - 請求項1〜6いずれか1項記載のプローブ装置であって、
前記当接部の側面と前記ケーブル接続部の側面との間の抵抗値が0.1mΩ以下である
ことを特徴とするプローブ装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013067811A JP6042761B2 (ja) | 2013-03-28 | 2013-03-28 | プローブ装置 |
PCT/JP2014/058150 WO2014157121A1 (ja) | 2013-03-28 | 2014-03-18 | プローブ装置 |
KR1020157026586A KR101808395B1 (ko) | 2013-03-28 | 2014-03-18 | 프로브 장치 |
EP14774764.6A EP2980838A4 (en) | 2013-03-28 | 2014-03-18 | PROBE DEVICE |
US14/781,021 US9759762B2 (en) | 2013-03-28 | 2014-03-18 | Probe device |
TW103110463A TWI620939B (zh) | 2013-03-28 | 2014-03-20 | Probe device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013067811A JP6042761B2 (ja) | 2013-03-28 | 2013-03-28 | プローブ装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014192405A true JP2014192405A (ja) | 2014-10-06 |
JP2014192405A5 JP2014192405A5 (ja) | 2016-02-12 |
JP6042761B2 JP6042761B2 (ja) | 2016-12-14 |
Family
ID=51624093
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013067811A Active JP6042761B2 (ja) | 2013-03-28 | 2013-03-28 | プローブ装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9759762B2 (ja) |
EP (1) | EP2980838A4 (ja) |
JP (1) | JP6042761B2 (ja) |
KR (1) | KR101808395B1 (ja) |
TW (1) | TWI620939B (ja) |
WO (1) | WO2014157121A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107102181B (zh) * | 2017-07-07 | 2019-10-15 | 京东方科技集团股份有限公司 | 测试探针、测试装置及测试方法 |
JP7274350B2 (ja) * | 2019-05-28 | 2023-05-16 | 東京エレクトロン株式会社 | 搬送システム、検査システム及び検査方法 |
CN113053774A (zh) | 2019-12-27 | 2021-06-29 | 迪科特测试科技(苏州)有限公司 | 探测装置 |
KR20220022668A (ko) * | 2020-08-19 | 2022-02-28 | (주)포인트엔지니어링 | 양극산화막 몰드 및 이를 포함하는 몰드구조체, 이를 이용한 성형물의 제조방법 및 그 성형물 |
KR102583949B1 (ko) * | 2021-04-01 | 2023-10-05 | 주식회사 케이아이 | 전기적 특성 검사 장치 |
Citations (2)
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WO2011111834A1 (ja) * | 2010-03-12 | 2011-09-15 | 東京エレクトロン株式会社 | プローブ装置 |
WO2013018910A1 (ja) * | 2011-08-01 | 2013-02-07 | 東京エレクトロン株式会社 | パワーデバイス用のプローブカード |
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-
2013
- 2013-03-28 JP JP2013067811A patent/JP6042761B2/ja active Active
-
2014
- 2014-03-18 EP EP14774764.6A patent/EP2980838A4/en not_active Withdrawn
- 2014-03-18 US US14/781,021 patent/US9759762B2/en active Active
- 2014-03-18 WO PCT/JP2014/058150 patent/WO2014157121A1/ja active Application Filing
- 2014-03-18 KR KR1020157026586A patent/KR101808395B1/ko active IP Right Grant
- 2014-03-20 TW TW103110463A patent/TWI620939B/zh active
Patent Citations (2)
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---|---|---|---|---|
WO2011111834A1 (ja) * | 2010-03-12 | 2011-09-15 | 東京エレクトロン株式会社 | プローブ装置 |
WO2013018910A1 (ja) * | 2011-08-01 | 2013-02-07 | 東京エレクトロン株式会社 | パワーデバイス用のプローブカード |
Also Published As
Publication number | Publication date |
---|---|
KR101808395B1 (ko) | 2018-01-18 |
US9759762B2 (en) | 2017-09-12 |
TW201504633A (zh) | 2015-02-01 |
US20160061882A1 (en) | 2016-03-03 |
JP6042761B2 (ja) | 2016-12-14 |
WO2014157121A1 (ja) | 2014-10-02 |
KR20150135312A (ko) | 2015-12-02 |
EP2980838A1 (en) | 2016-02-03 |
TWI620939B (zh) | 2018-04-11 |
EP2980838A4 (en) | 2016-11-16 |
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