JP2014138067A5 - - Google Patents
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- Publication number
- JP2014138067A5 JP2014138067A5 JP2013005613A JP2013005613A JP2014138067A5 JP 2014138067 A5 JP2014138067 A5 JP 2014138067A5 JP 2013005613 A JP2013005613 A JP 2013005613A JP 2013005613 A JP2013005613 A JP 2013005613A JP 2014138067 A5 JP2014138067 A5 JP 2014138067A5
- Authority
- JP
- Japan
- Prior art keywords
- filter layer
- color filter
- forming
- layer
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003384 imaging method Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013005613A JP6057728B2 (ja) | 2013-01-16 | 2013-01-16 | 固体撮像装置の製造方法 |
| US14/148,063 US9236413B2 (en) | 2013-01-16 | 2014-01-06 | Manufacturing method of solid-state imaging apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013005613A JP6057728B2 (ja) | 2013-01-16 | 2013-01-16 | 固体撮像装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014138067A JP2014138067A (ja) | 2014-07-28 |
| JP2014138067A5 true JP2014138067A5 (enExample) | 2016-02-12 |
| JP6057728B2 JP6057728B2 (ja) | 2017-01-11 |
Family
ID=51165451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013005613A Expired - Fee Related JP6057728B2 (ja) | 2013-01-16 | 2013-01-16 | 固体撮像装置の製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9236413B2 (enExample) |
| JP (1) | JP6057728B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102506837B1 (ko) * | 2017-11-20 | 2023-03-06 | 삼성전자주식회사 | 이미지 센서 및 그 제조 방법 |
| US11245823B2 (en) | 2019-08-13 | 2022-02-08 | Omnivision Technologies, Inc. | Fully buried color filter array of image sensor |
| US10957731B1 (en) * | 2019-10-04 | 2021-03-23 | Visera Technologies Company Limited | Sensor device and method for manufacturing the same |
| JP2021150837A (ja) * | 2020-03-19 | 2021-09-27 | 株式会社リコー | 固体撮像素子、画像読取装置、及び画像形成装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4834941B2 (ja) * | 2001-09-03 | 2011-12-14 | ソニー株式会社 | カラーフィルタおよびその製造方法 |
| US7443005B2 (en) * | 2004-06-10 | 2008-10-28 | Tiawan Semiconductor Manufacturing Co., Ltd. | Lens structures suitable for use in image sensors and method for making the same |
| JP5364989B2 (ja) * | 2007-10-02 | 2013-12-11 | ソニー株式会社 | 固体撮像装置およびカメラ |
| JP2009111225A (ja) * | 2007-10-31 | 2009-05-21 | Fujifilm Corp | 固体撮像素子及びその製造方法 |
| US7816641B2 (en) * | 2007-12-28 | 2010-10-19 | Candela Microsystems (S) Pte. Ltd. | Light guide array for an image sensor |
| JP4835719B2 (ja) * | 2008-05-22 | 2011-12-14 | ソニー株式会社 | 固体撮像装置及び電子機器 |
| JP2010067827A (ja) * | 2008-09-11 | 2010-03-25 | Fujifilm Corp | 固体撮像素子及び撮像装置 |
| MX2010007359A (es) * | 2009-07-02 | 2011-06-02 | Tay Hioknam | Matriz de guia de luz para un sensor de imagen. |
| JP5430387B2 (ja) * | 2009-12-22 | 2014-02-26 | キヤノン株式会社 | 固体撮像装置及び固体撮像装置の製造方法 |
| WO2011142065A1 (ja) * | 2010-05-14 | 2011-11-17 | パナソニック株式会社 | 固体撮像装置及びその製造方法 |
-
2013
- 2013-01-16 JP JP2013005613A patent/JP6057728B2/ja not_active Expired - Fee Related
-
2014
- 2014-01-06 US US14/148,063 patent/US9236413B2/en not_active Expired - Fee Related
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