JP2014107363A - プラズマ処理装置およびプラズマ処理方法 - Google Patents
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- 238000003672 processing method Methods 0.000 title claims abstract description 15
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- 238000005530 etching Methods 0.000 description 63
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
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- 230000005284 excitation Effects 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
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Abstract
【解決手段】本発明は、試料をプラズマ処理する処理室と、プラズマ生成用の第一の高周波電力を前記処理室内に供給する第一の高周波電源と、前記試料を載置する試料台に第二の高周波電力を供給する第二の高周波電源と、前記第一の高周波電力を時間変調させる第一のパルスと前記第二の高周波電力を時間変調させる第二のパルスを発生させるパルス発生装置と、を備えるプラズマ処理装置において、前記パルス発生装置は、前記第一のパルスの周波数を前記第二のパルスの周波数より高くするとともに前記第二のパルスのオン期間が前記第一のパルスのオン期間内に含まれるように前記第一のパルスと前記第二のパルスを制御する制御部を具備することを特徴とする。
【選択図】図3
Description
Claims (10)
- 試料をプラズマ処理する処理室と、プラズマ生成用の第一の高周波電力を前記処理室内に供給する第一の高周波電源と、前記試料を載置する試料台に第二の高周波電力を供給する第二の高周波電源と、前記第一の高周波電力を時間変調させる第一のパルスと前記第二の高周波電力を時間変調させる第二のパルスを発生させるパルス発生装置と、を備えるプラズマ処理装置において、
前記パルス発生装置は、前記第一のパルスの周波数を前記第二のパルスの周波数より高くするとともに前記第二のパルスのオン期間が前記第一のパルスのオン期間内に含まれるように前記第一のパルスと前記第二のパルスを制御する制御部を具備することを特徴とするプラズマ処理装置。 - 請求項1記載のプラズマ処理装置において、
前記第一のパルスの周波数は、アフターグロー放電を維持できる周波数とすることを特徴とするプラズマ処理装置。 - 請求項1記載のプラズマ処理装置において、
前記第二のパルスのオン期間は、前記第一のパルスのオン期間より短いことを特徴とするプラズマ処理装置。 - 請求項3記載のプラズマ処理装置において、
前記第二のパルスのオン期間は、前記第一のパルスのオン期間に対して遅延時間が設けられていることを特徴とするプラズマ処理装置。 - 請求項1記載のプラズマ処理装置において、
前記パルス発生装置は、前記第二の高周波電源から前記試料台に印加された高周波電圧のピークトウピーク電圧であるVppをモニタし、予め設定された値よりモニタされたVppが高くなった場合に前記第一のパルスの周波数を高くして前記予め設定された値より前記モニタされたVppを低くすることを特徴とするプラズマ処理装置。 - 試料をプラズマ処理する処理室と、プラズマ生成用の第一の高周波電力を前記処理室内に供給する第一の高周波電源と、前記試料を載置する試料台に第二の高周波電力を供給する第二の高周波電源と、前記第一の高周波電力を時間変調させる第一のパルスと前記第二の高周波電力を時間変調させる第二のパルスを発生させるパルス発生装置と、を備えるプラズマ処理装置を用いて前記試料をプラズマ処理するプラズマ処理方法において、
前記第一のパルスにより時間変調されたプラズマを用いて前記第二のパルスにより時間変調された高周波電力を前記試料台に供給しながら前記試料をプラズマ処理し、
前記第一のパルスの周波数は、前記第二のパルスの周波数より高くされるとともに前記第二のパルスのオン期間が前記第一のパルスのオン期間内に含まれるようにすることを特徴とするプラズマ処理方法。 - 請求項6記載のプラズマ処理方法において、
前記第一のパルスの周波数は、アフターグロー放電を維持できる周波数とすることを特徴とするプラズマ処理方法。 - 請求項6記載のプラズマ処理方法において、
前記第二のパルスのオン期間は、前記第一のパルスのオン期間より短いことを特徴とするプラズマ処理方法。 - 請求項8記載のプラズマ処理方法において、
前記第二のパルスのオン期間は、前記第一のパルスのオン期間に対して遅延時間が設けられていることを特徴とするプラズマ処理方法。 - 請求項6記載のプラズマ処理方法において、
前記第二の高周波電源から前記試料台に印加された高周波電圧のピークトウピーク電圧であるVppを前記パルス発生装置でモニタし、予め設定された値よりモニタされたVppが高くなった場合に前記第一のパルスの周波数を高くして前記予め設定された値より前記モニタされたVppを低くすることを特徴とするプラズマ処理方法。
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JP2012258086A JP6002556B2 (ja) | 2012-11-27 | 2012-11-27 | プラズマ処理装置およびプラズマ処理方法 |
TW101148068A TWI508168B (zh) | 2012-11-27 | 2012-12-18 | Plasma processing device and plasma processing method |
KR1020130007790A KR101425307B1 (ko) | 2012-11-27 | 2013-01-24 | 플라즈마 처리 장치 및 플라즈마 처리 방법 |
US13/749,784 US8992724B2 (en) | 2012-11-27 | 2013-01-25 | Plasma processing apparatus and plasma processing method |
US14/609,807 US9502217B2 (en) | 2012-11-27 | 2015-01-30 | Plasma processing apparatus and plasma processing method |
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Cited By (5)
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JP2017069542A (ja) * | 2015-09-29 | 2017-04-06 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置およびプラズマ処理方法 |
WO2020100818A1 (ja) * | 2018-11-14 | 2020-05-22 | 株式会社エスイー | プラズマを用いた処理装置及び処理対象物にプラズマを照射する処理を行う処理方法 |
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KR101425307B1 (ko) | 2014-08-01 |
US20150144594A1 (en) | 2015-05-28 |
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