JP2014086583A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/7682—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing the dielectric comprising air gaps
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- H01—ELECTRIC ELEMENTS
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76885—By forming conductive members before deposition of protective insulating material, e.g. pillars, studs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/5329—Insulating materials
- H01L23/53295—Stacked insulating layers
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32139—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer using masks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
【解決手段】実施形態にかかる半導体装置は、半導体基板上方の第1の絶縁膜と、第1の絶縁膜上の複数の配線であって、それぞれ第1の絶縁膜上の金属膜と、金属膜上のハードマスクとを有する複数の配線と、各配線の間のエアギャップと、各配線及び各エアギャップ上の第2の絶縁膜とを有する。ハードマスクは、金属膜上に形成された第1の層と、第1の層上に形成された第2の層とを有し、第2の層の配線の幅に沿った断面において第2の層の下面と側面とがなす内角の角度は、第1の層の配線の幅に沿った断面において第1の層の下面と側面とがなす内角の角度よりも小さく、エアギャップの上面の高さは金属膜の上面の高さよりも高い。
【選択図】図1
Description
図1を用いて本実施形態の半導体装置1を説明する。ここでは、NAND型フラッシュメモリやMRAM(Magnetoresistive Random Access Memory)等の半導体記憶装置の多層配線に適用した例を説明するが、本発明はこれに限定されるものではなく、他の半導体装置の様々な部位に適用することができる。
さらに、CVD法によりエアギャップ40を形成した場合には、エアギャップ40の上面における中央部は、エアギャップ40の上面における外周部に比べて高くなる傾向があることが知られている。
第2の実施形態は、第2の絶縁膜50の形成をSOD(Spin On Dielectric)法により行うことが、第1の実施形態と異なる。SOD法は面内均一性が高いことから、半導体装置1の製造において歩留まりを向上させることができる。
2 リーク電流の経路
10 半導体基板
20 第1の絶縁膜
30 配線
31 金属膜
32 ハードマスク
40 エアギャップ
50 第2の絶縁膜
60 リソスタック
70 レジスト
80 カバー膜
321 第1の層
322 第2の層
921 第1の膜
922 第2の膜
Claims (6)
- 半導体基板上方に形成された第1の絶縁膜と、
前記第1の絶縁膜上に形成された複数の配線であって、それぞれ、前記第1の絶縁膜上に形成された金属膜と、前記金属膜上に形成されたハードマスクとを有する複数の配線と、
隣り合う前記各配線の間に形成されたエアギャップと、
前記各配線と前記各エアギャップとの上に形成された第2の絶縁膜と、
を備える半導体装置であって、
前記ハードマスクは、前記金属膜上に形成された第1の層と、前記第1の層上に形成された第2の層とを有し、
前記第2の層の前記配線の幅に沿った断面において前記第2の層の下面と側面とがなす内角の角度は、前記第1の層の前記配線の幅に沿った断面において前記第1の層の下面と側面とがなす内角の角度よりも小さく、
前記エアギャップの上面の高さは前記金属膜の上面の高さよりも高い、
ことを特徴とする半導体装置。 - 前記第1の層の前記断面は、長方形、正方形、又は、上底が下底よりも短い台形の形状であり、前記第2の層の前記断面は、上底が下底よりも短い台形、三角形、又は、直径を下に向けている半円の形状である、ことを特徴とする請求項1に記載の半導体装置。
- 前記エアギャップの上面における外周部の高さは、前記第1の層の上面の高さと同じである、ことを特徴とする請求項1又は2に記載の半導体装置。
- 前記第1の層と前記第2の層とは異なる材料からなることを特徴とする請求項1から3のいずれか1つに記載の半導体装置。
- 前記複数の配線は、所定の距離で互いに隔てられており、前記第1の層の厚さは、前記所定の距離の半分以上である、ことを特徴とする請求項1から4のいずれか1つに記載の半導体装置。
- 金属膜と、第1の層及び第2の層からなるハードマスクとを有する複数の配線と、隣り合う前記各配線の間に複数のエアギャップとを備える半導体装置の製造方法であって、
半導体基板の上に第1の絶縁膜を形成し、
前記第1の絶縁膜の上に、前記金属膜と前記第1の層の材料膜と前記第2の層の材料膜とを順次形成し、
前記金属膜と前記第1の層の材料膜と前記第2の層の材料膜とをRIE法を用いて加工して、前記第2の層の前記配線の幅に沿った断面における前記第2の層の下面と側面とがなす内角の角度を、前記第1の層の前記配線の幅に沿った断面における前記第1の層の下面と側面とがなす内角の角度よりも小さくし、
隣り合う前記各配線の間に前記エアギャップが形成されるように、前記第2の層の上に第2の絶縁膜を形成する、
ことを特徴とする半導体装置の製造方法。
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JP2012234699A JP5932604B2 (ja) | 2012-10-24 | 2012-10-24 | 半導体装置及びその製造方法 |
US13/909,665 US8816472B2 (en) | 2012-10-24 | 2013-06-04 | Semiconductor device and method for manufacturing the same |
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JP2017220642A (ja) * | 2016-06-10 | 2017-12-14 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置、プログラムおよび記録媒体 |
Families Citing this family (6)
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US9704803B2 (en) * | 2015-09-17 | 2017-07-11 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor structure and method for forming the same |
US9876075B2 (en) * | 2015-10-16 | 2018-01-23 | International Business Machines Corporation | Method of forming dielectric with air gaps for use in semiconductor devices |
US9653348B1 (en) | 2015-12-30 | 2017-05-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9881870B2 (en) * | 2015-12-30 | 2018-01-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and manufacturing method thereof |
WO2018125063A1 (en) * | 2016-12-27 | 2018-07-05 | Intel Corporation | Encapsulation of air gaps in interconnects |
CN110880475B (zh) * | 2018-09-06 | 2023-06-16 | 长鑫存储技术有限公司 | 空气隙形成方法 |
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JP2002158280A (ja) * | 2000-11-17 | 2002-05-31 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2006269925A (ja) * | 2005-03-25 | 2006-10-05 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2009094519A (ja) * | 2007-10-09 | 2009-04-30 | Applied Materials Inc | Rc遅延を減少するために誘電体層にエアギャップを生成する方法及び装置 |
JP2012009490A (ja) * | 2010-06-22 | 2012-01-12 | Toshiba Corp | 半導体装置およびその製造方法 |
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JP3686325B2 (ja) * | 2000-10-26 | 2005-08-24 | 松下電器産業株式会社 | 半導体装置及びその製造方法 |
US20050181604A1 (en) * | 2002-07-11 | 2005-08-18 | Hans-Peter Sperlich | Method for structuring metal by means of a carbon mask |
JP4106048B2 (ja) | 2004-10-25 | 2008-06-25 | 松下電器産業株式会社 | 半導体装置の製造方法及び半導体装置 |
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JP2008021862A (ja) | 2006-07-13 | 2008-01-31 | Renesas Technology Corp | 半導体装置およびその製造方法 |
KR20120137861A (ko) * | 2011-06-13 | 2012-12-24 | 삼성전자주식회사 | 비휘발성 기억 소자 및 그 제조 방법 |
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JP2002158280A (ja) * | 2000-11-17 | 2002-05-31 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2006269925A (ja) * | 2005-03-25 | 2006-10-05 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2009094519A (ja) * | 2007-10-09 | 2009-04-30 | Applied Materials Inc | Rc遅延を減少するために誘電体層にエアギャップを生成する方法及び装置 |
JP2012009490A (ja) * | 2010-06-22 | 2012-01-12 | Toshiba Corp | 半導体装置およびその製造方法 |
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JP2017220642A (ja) * | 2016-06-10 | 2017-12-14 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置、プログラムおよび記録媒体 |
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US20140110850A1 (en) | 2014-04-24 |
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