JP2014081522A - 反射防止膜を備えた光学部材およびその製造方法 - Google Patents

反射防止膜を備えた光学部材およびその製造方法 Download PDF

Info

Publication number
JP2014081522A
JP2014081522A JP2012229873A JP2012229873A JP2014081522A JP 2014081522 A JP2014081522 A JP 2014081522A JP 2012229873 A JP2012229873 A JP 2012229873A JP 2012229873 A JP2012229873 A JP 2012229873A JP 2014081522 A JP2014081522 A JP 2014081522A
Authority
JP
Japan
Prior art keywords
layer
optical member
transparent
thin film
refractive index
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012229873A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014081522A5 (enExample
Inventor
Shinichiro Sonoda
慎一郎 園田
Shinya Hakuta
真也 白田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Priority to JP2012229873A priority Critical patent/JP2014081522A/ja
Priority to PCT/JP2013/006048 priority patent/WO2014061236A1/ja
Publication of JP2014081522A publication Critical patent/JP2014081522A/ja
Priority to US14/686,309 priority patent/US20150219798A1/en
Publication of JP2014081522A5 publication Critical patent/JP2014081522A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676—Oxynitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/77—Coatings having a rough surface
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C03C2218/322—Oxidation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Inorganic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Surface Treatment Of Glass (AREA)
JP2012229873A 2012-10-17 2012-10-17 反射防止膜を備えた光学部材およびその製造方法 Pending JP2014081522A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012229873A JP2014081522A (ja) 2012-10-17 2012-10-17 反射防止膜を備えた光学部材およびその製造方法
PCT/JP2013/006048 WO2014061236A1 (ja) 2012-10-17 2013-10-10 反射防止膜を備えた光学部材およびその製造方法
US14/686,309 US20150219798A1 (en) 2012-10-17 2015-04-14 Optical member with antireflection film, and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012229873A JP2014081522A (ja) 2012-10-17 2012-10-17 反射防止膜を備えた光学部材およびその製造方法

Publications (2)

Publication Number Publication Date
JP2014081522A true JP2014081522A (ja) 2014-05-08
JP2014081522A5 JP2014081522A5 (enExample) 2015-07-02

Family

ID=50487816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012229873A Pending JP2014081522A (ja) 2012-10-17 2012-10-17 反射防止膜を備えた光学部材およびその製造方法

Country Status (3)

Country Link
US (1) US20150219798A1 (enExample)
JP (1) JP2014081522A (enExample)
WO (1) WO2014061236A1 (enExample)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014196148A1 (ja) * 2013-06-03 2014-12-11 富士フイルム株式会社 反射防止膜を備えた光学部材
WO2016031167A1 (ja) * 2014-08-25 2016-03-03 富士フイルム株式会社 反射防止膜および反射防止膜を備えた光学部材
WO2016031133A1 (ja) * 2014-08-27 2016-03-03 富士フイルム株式会社 反射防止膜を備えた光学部材およびその製造方法
JP2016048296A (ja) * 2014-08-27 2016-04-07 キヤノン株式会社 反射防止膜およびそれを有する光学素子、光学系、光学機器
JPWO2016136262A1 (ja) * 2015-02-27 2017-11-30 富士フイルム株式会社 反射防止膜およびその製造方法、並びに光学部材
JPWO2016136261A1 (ja) * 2015-02-27 2017-12-14 富士フイルム株式会社 反射防止膜および光学部材
WO2019187416A1 (ja) * 2018-03-29 2019-10-03 富士フイルム株式会社 反射防止膜および光学部材
KR20190130688A (ko) * 2014-05-12 2019-11-22 코닝 인코포레이티드 내구성 및 내-스크래치성 반사-방지 제품
US11231526B2 (en) 2013-05-07 2022-01-25 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US11567237B2 (en) 2018-08-17 2023-01-31 Corning Incorporated Inorganic oxide articles with thin, durable anti-reflective structures
US11698475B2 (en) 2015-09-14 2023-07-11 Corning Incorporated Scratch-resistant anti-reflective articles
US12195384B2 (en) 2013-05-07 2025-01-14 Corning Incorporated Scratch-resistant laminates with retained optical properties
US12352924B2 (en) 2020-07-09 2025-07-08 Corning Incorporated Display articles with diffractive, antiglare surfaces and methods of making the same
US12421398B2 (en) 2014-05-12 2025-09-23 Corning Incorporated Durable anti-reflective articles

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9790593B2 (en) 2014-08-01 2017-10-17 Corning Incorporated Scratch-resistant materials and articles including the same
WO2016159290A1 (ja) * 2015-03-31 2016-10-06 富士フイルム株式会社 反射防止膜及びその製造方法
WO2021014669A1 (ja) 2019-07-22 2021-01-28 日本碍子株式会社 接合体および弾性波素子
JP2021162728A (ja) * 2020-03-31 2021-10-11 デクセリアルズ株式会社 光学体、光学体の製造方法及び光学デバイス
US11714212B1 (en) * 2020-09-14 2023-08-01 Apple Inc. Conformal optical coatings for non-planar substrates
US12379524B2 (en) 2021-09-01 2025-08-05 Largan Precision Co., Ltd. Optical imaging lens assembly comprising a gradient refractive coating having a plurality of holes, imaging apparatus and electronic device
GB2639458A (en) * 2022-11-20 2025-09-24 Rebuck Daniel Apparatus with replaceable tensioning cords for transporting, carrying, picking up, collecting, and storing balls
CN118915201A (zh) * 2024-10-10 2024-11-08 宁波舜宇车载光学技术有限公司 光学元件及其制备方法

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001281415A (ja) * 2000-03-31 2001-10-10 Sony Corp 反射防止フィルタ及びその製造方法
JP2002323605A (ja) * 2001-02-07 2002-11-08 Samsung Sdi Co Ltd 光学的電気的特性を有する機能性薄膜
JP2006259711A (ja) * 2005-02-18 2006-09-28 Canon Inc 光学用透明部材及びそれを用いた光学系
JP2007017668A (ja) * 2005-07-07 2007-01-25 Konica Minolta Holdings Inc 光学フィルム
JP2007248562A (ja) * 2006-03-14 2007-09-27 Shincron:Kk 光学物品およびその製造方法
JP2010169918A (ja) * 2009-01-23 2010-08-05 Alps Electric Co Ltd 光学素子アレイ及びその製造方法
JP2010271533A (ja) * 2009-05-21 2010-12-02 Canon Inc 光学素子及びそれを有する光学系
JP2011090225A (ja) * 2009-10-23 2011-05-06 Canon Inc 光学部材、及びその製造方法
JP2012073590A (ja) * 2010-08-31 2012-04-12 Canon Inc 光学部材、その製造方法及び光学系
JP2012132044A (ja) * 2010-12-20 2012-07-12 Central Glass Co Ltd 酸窒化ケイ素膜の形成方法
WO2012127744A1 (ja) * 2011-03-18 2012-09-27 富士フイルム株式会社 光学部材及びその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6589658B1 (en) * 2001-11-29 2003-07-08 Guardian Industries Corp. Coated article with anti-reflective layer(s) system
JP2010169914A (ja) * 2009-01-23 2010-08-05 Seiko Epson Corp プロジェクター

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001281415A (ja) * 2000-03-31 2001-10-10 Sony Corp 反射防止フィルタ及びその製造方法
JP2002323605A (ja) * 2001-02-07 2002-11-08 Samsung Sdi Co Ltd 光学的電気的特性を有する機能性薄膜
JP2006259711A (ja) * 2005-02-18 2006-09-28 Canon Inc 光学用透明部材及びそれを用いた光学系
JP2007017668A (ja) * 2005-07-07 2007-01-25 Konica Minolta Holdings Inc 光学フィルム
JP2007248562A (ja) * 2006-03-14 2007-09-27 Shincron:Kk 光学物品およびその製造方法
JP2010169918A (ja) * 2009-01-23 2010-08-05 Alps Electric Co Ltd 光学素子アレイ及びその製造方法
JP2010271533A (ja) * 2009-05-21 2010-12-02 Canon Inc 光学素子及びそれを有する光学系
JP2011090225A (ja) * 2009-10-23 2011-05-06 Canon Inc 光学部材、及びその製造方法
JP2012073590A (ja) * 2010-08-31 2012-04-12 Canon Inc 光学部材、その製造方法及び光学系
JP2012132044A (ja) * 2010-12-20 2012-07-12 Central Glass Co Ltd 酸窒化ケイ素膜の形成方法
WO2012127744A1 (ja) * 2011-03-18 2012-09-27 富士フイルム株式会社 光学部材及びその製造方法

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12195384B2 (en) 2013-05-07 2025-01-14 Corning Incorporated Scratch-resistant laminates with retained optical properties
US11231526B2 (en) 2013-05-07 2022-01-25 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US11714213B2 (en) 2013-05-07 2023-08-01 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
WO2014196148A1 (ja) * 2013-06-03 2014-12-11 富士フイルム株式会社 反射防止膜を備えた光学部材
US12421398B2 (en) 2014-05-12 2025-09-23 Corning Incorporated Durable anti-reflective articles
KR102188706B1 (ko) * 2014-05-12 2020-12-09 코닝 인코포레이티드 내구성 및 내-스크래치성 반사-방지 제품
KR20190130688A (ko) * 2014-05-12 2019-11-22 코닝 인코포레이티드 내구성 및 내-스크래치성 반사-방지 제품
JPWO2016031167A1 (ja) * 2014-08-25 2017-07-13 富士フイルム株式会社 反射防止膜および反射防止膜を備えた光学部材
US10228492B2 (en) 2014-08-25 2019-03-12 Fujifilm Corporation Antireflection film and optical member including antireflection film
WO2016031167A1 (ja) * 2014-08-25 2016-03-03 富士フイルム株式会社 反射防止膜および反射防止膜を備えた光学部材
JPWO2016031133A1 (ja) * 2014-08-27 2017-06-08 富士フイルム株式会社 反射防止膜を備えた光学部材およびその製造方法
JP2016048296A (ja) * 2014-08-27 2016-04-07 キヤノン株式会社 反射防止膜およびそれを有する光学素子、光学系、光学機器
WO2016031133A1 (ja) * 2014-08-27 2016-03-03 富士フイルム株式会社 反射防止膜を備えた光学部材およびその製造方法
US10564323B2 (en) 2015-02-27 2020-02-18 Fujifilm Corporation Antireflection film and method of producing the same, and optical member
US10518501B2 (en) 2015-02-27 2019-12-31 Fujifilm Corporation Antireflection film and optical member
JPWO2016136261A1 (ja) * 2015-02-27 2017-12-14 富士フイルム株式会社 反射防止膜および光学部材
JPWO2016136262A1 (ja) * 2015-02-27 2017-11-30 富士フイルム株式会社 反射防止膜およびその製造方法、並びに光学部材
US11698475B2 (en) 2015-09-14 2023-07-11 Corning Incorporated Scratch-resistant anti-reflective articles
CN111902739A (zh) * 2018-03-29 2020-11-06 富士胶片株式会社 防反射膜及光学部件
JPWO2019187416A1 (ja) * 2018-03-29 2021-03-11 富士フイルム株式会社 反射防止膜および光学部材
CN111902739B (zh) * 2018-03-29 2022-05-13 富士胶片株式会社 防反射膜及光学部件
WO2019187416A1 (ja) * 2018-03-29 2019-10-03 富士フイルム株式会社 反射防止膜および光学部材
US11567237B2 (en) 2018-08-17 2023-01-31 Corning Incorporated Inorganic oxide articles with thin, durable anti-reflective structures
US11906699B2 (en) 2018-08-17 2024-02-20 Corning Incorporated Inorganic oxide articles with thin, durable anti reflective structures
US12352924B2 (en) 2020-07-09 2025-07-08 Corning Incorporated Display articles with diffractive, antiglare surfaces and methods of making the same

Also Published As

Publication number Publication date
WO2014061236A9 (ja) 2015-06-04
WO2014061236A1 (ja) 2014-04-24
US20150219798A1 (en) 2015-08-06

Similar Documents

Publication Publication Date Title
JP2014081522A (ja) 反射防止膜を備えた光学部材およびその製造方法
JP6189612B2 (ja) 反射防止膜を備えた光学部材およびその製造方法
CN106574986B (zh) 具备防反射膜的光学部件及其制造方法
JP6411517B2 (ja) 反射防止膜および反射防止膜を備えた光学部材
JP6255531B2 (ja) 反射防止膜及びその製造方法
JP2013083871A (ja) 反射防止膜及び反射防止膜の製造方法
CN104977632A (zh) 硬质抗反射涂层及其制造和用途
KR20070075296A (ko) 반사방지막을 갖는 광학소자
CN115421295A (zh) 超透镜的设计方法、超透镜及加工工艺
EP3006969A1 (en) Optical member provided with anti-reflection film
WO2019217814A1 (en) Curved surface films and methods of manufacturing the same
JP2014021146A (ja) 光学膜、光学素子、光学系および光学機器
WO2019187416A1 (ja) 反射防止膜および光学部材
US10196302B2 (en) Method for manufacturing antireflection function-equipped lens
WO2005124887A2 (en) Led with improved light emission profile
JP7065995B2 (ja) 反射防止膜の製造方法、および微細凹凸構造の形成方法
JP6989289B2 (ja) 親水性反射防止膜付きレンズ及びその製造方法
JP7563019B2 (ja) カバーガラス
JP2019070687A5 (enExample)
RU209445U1 (ru) Оптическое зеркало
WO2024203250A1 (ja) 光学部材及び光学部材の製造方法
JP6664299B2 (ja) 反射防止膜およびその製造方法、並びに光学部材
JP2024027591A (ja) 光学部材の製造方法
JP2015138179A (ja) 微細構造体および微細構造体の製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150514

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150514

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160524

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160715

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20161227