JP2014076527A5 - - Google Patents
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- JP2014076527A5 JP2014076527A5 JP2012226669A JP2012226669A JP2014076527A5 JP 2014076527 A5 JP2014076527 A5 JP 2014076527A5 JP 2012226669 A JP2012226669 A JP 2012226669A JP 2012226669 A JP2012226669 A JP 2012226669A JP 2014076527 A5 JP2014076527 A5 JP 2014076527A5
- Authority
- JP
- Japan
- Prior art keywords
- mems
- sensor
- shows
- vibrator
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012226669A JP2014076527A (ja) | 2012-10-12 | 2012-10-12 | Memsセンサー、および電子機器、ロボット、移動体 |
| US14/044,992 US9176013B2 (en) | 2012-10-12 | 2013-10-03 | Sensor, electronic apparatus, robot, and mobile object |
| CN201310473902.2A CN103728058A (zh) | 2012-10-12 | 2013-10-11 | 传感器、电子设备、机器人、及移动体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012226669A JP2014076527A (ja) | 2012-10-12 | 2012-10-12 | Memsセンサー、および電子機器、ロボット、移動体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014076527A JP2014076527A (ja) | 2014-05-01 |
| JP2014076527A5 true JP2014076527A5 (enExample) | 2014-06-19 |
Family
ID=50452233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012226669A Pending JP2014076527A (ja) | 2012-10-12 | 2012-10-12 | Memsセンサー、および電子機器、ロボット、移動体 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9176013B2 (enExample) |
| JP (1) | JP2014076527A (enExample) |
| CN (1) | CN103728058A (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE202014009315U1 (de) * | 2014-11-24 | 2014-12-18 | Siemens Aktiengesellschaft | Medizinisches Untersuchungs- und/oder Behandlungsgerät |
| US11231441B2 (en) * | 2015-05-15 | 2022-01-25 | Invensense, Inc. | MEMS structure for offset minimization of out-of-plane sensing accelerometers |
| JP6950444B2 (ja) * | 2017-10-18 | 2021-10-13 | セイコーエプソン株式会社 | 物理量センサー、電子機器、および移動体 |
| JP7087479B2 (ja) * | 2018-03-09 | 2022-06-21 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体 |
| EP3561606B1 (fr) * | 2018-04-27 | 2022-01-26 | The Swatch Group Research and Development Ltd | Protection antichoc d'un résonateur à lames a pivot rcc |
| JP7192292B2 (ja) * | 2018-07-30 | 2022-12-20 | セイコーエプソン株式会社 | ロボットおよびロボットの異常検出方法 |
| CN109540348A (zh) * | 2018-11-19 | 2019-03-29 | 南京邮电大学 | 一种基于弹簧天线的应力测量传感器 |
| CN110441550B (zh) * | 2019-09-06 | 2024-06-25 | 北京信息科技大学 | 一种电路内嵌式12电极石英加速度计 |
| JP2021063674A (ja) * | 2019-10-11 | 2021-04-22 | 株式会社鷺宮製作所 | Mems構造を有する振動デバイスの試験装置および駆動性能提示方法 |
| US12281953B2 (en) * | 2020-02-28 | 2025-04-22 | Smart Skin Technologies Inc. | Systems and methods for sensing impacts applied to an article during production |
| JP7112796B1 (ja) | 2022-01-13 | 2022-08-04 | 株式会社Premo R&D | 情報処理装置、情報処理方法及びそのプログラム |
| JP7108352B1 (ja) | 2022-01-13 | 2022-07-28 | 株式会社Premo R&D | 情報処理装置、情報処理方法及びプログラム |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4006597A (en) * | 1975-08-20 | 1977-02-08 | The United States Of America As Represented By The Secretary Of The Navy | Method for microwave transmission of energy with superconducting apparatus |
| US3995433A (en) * | 1975-08-20 | 1976-12-07 | The United States Of America As Represented By The Secretary Of The Navy | Superconducting apparatus for converting microwaves into work |
| US4751849A (en) * | 1986-06-17 | 1988-06-21 | Paroscientific, Inc. | Force-sensitive resonator load cell |
| JPH06248399A (ja) | 1993-02-23 | 1994-09-06 | Kyowa Electron Instr Co Ltd | ひずみゲージ用アモルファス合金およびひずみゲージ |
| DE4333099A1 (de) * | 1993-09-29 | 1995-03-30 | Bosch Gmbh Robert | Kraftsensor und Verfahren zur Herstellung eines Kraftsensors |
| DE19539049A1 (de) * | 1995-10-20 | 1997-04-24 | Bosch Gmbh Robert | Verfahren zur Herstellung eines Coriolis-Drehratensensors |
| US6819103B2 (en) * | 2001-04-26 | 2004-11-16 | The Johns Hopkins University | Lorentz force driven mechanical filter/mixer designs for RF applications |
| KR100787233B1 (ko) * | 2006-11-16 | 2007-12-21 | 삼성전자주식회사 | 집적 소자 및 그 제조 방법 |
| US7994594B2 (en) | 2007-03-15 | 2011-08-09 | Seiko Epson Corporation | Electronic device, resonator, oscillator and method for manufacturing electronic device |
| US7999635B1 (en) * | 2008-07-29 | 2011-08-16 | Silicon Laboratories Inc. | Out-of plane MEMS resonator with static out-of-plane deflection |
| JP2011189423A (ja) | 2010-03-12 | 2011-09-29 | Seiko Epson Corp | Mems素子および発振器 |
| JP5408447B2 (ja) | 2010-04-14 | 2014-02-05 | セイコーエプソン株式会社 | 電子装置 |
| JP5482423B2 (ja) * | 2010-05-11 | 2014-05-07 | 株式会社デンソー | 電動機 |
-
2012
- 2012-10-12 JP JP2012226669A patent/JP2014076527A/ja active Pending
-
2013
- 2013-10-03 US US14/044,992 patent/US9176013B2/en not_active Expired - Fee Related
- 2013-10-11 CN CN201310473902.2A patent/CN103728058A/zh active Pending
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