JP2014031865A5 - - Google Patents

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Publication number
JP2014031865A5
JP2014031865A5 JP2012174198A JP2012174198A JP2014031865A5 JP 2014031865 A5 JP2014031865 A5 JP 2014031865A5 JP 2012174198 A JP2012174198 A JP 2012174198A JP 2012174198 A JP2012174198 A JP 2012174198A JP 2014031865 A5 JP2014031865 A5 JP 2014031865A5
Authority
JP
Japan
Prior art keywords
air bearing
coating
exhaust
bearing device
figurine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012174198A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014031865A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012174198A priority Critical patent/JP2014031865A/ja
Priority claimed from JP2012174198A external-priority patent/JP2014031865A/ja
Priority to KR20157003630A priority patent/KR20150040924A/ko
Priority to CN201380041409.1A priority patent/CN104583618A/zh
Priority to PCT/JP2013/067076 priority patent/WO2014024583A1/ja
Priority to TW102127675A priority patent/TW201412409A/zh
Publication of JP2014031865A publication Critical patent/JP2014031865A/ja
Publication of JP2014031865A5 publication Critical patent/JP2014031865A5/ja
Pending legal-status Critical Current

Links

JP2012174198A 2012-08-06 2012-08-06 エアベアリング装置及び塗布装置 Pending JP2014031865A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012174198A JP2014031865A (ja) 2012-08-06 2012-08-06 エアベアリング装置及び塗布装置
KR20157003630A KR20150040924A (ko) 2012-08-06 2013-06-21 에어 베어링 장치 및 도포 장치
CN201380041409.1A CN104583618A (zh) 2012-08-06 2013-06-21 空气轴承装置及涂布装置
PCT/JP2013/067076 WO2014024583A1 (ja) 2012-08-06 2013-06-21 エアベアリング装置及び塗布装置
TW102127675A TW201412409A (zh) 2012-08-06 2013-08-01 空氣軸承裝置及塗布裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012174198A JP2014031865A (ja) 2012-08-06 2012-08-06 エアベアリング装置及び塗布装置

Publications (2)

Publication Number Publication Date
JP2014031865A JP2014031865A (ja) 2014-02-20
JP2014031865A5 true JP2014031865A5 (enExample) 2015-09-17

Family

ID=50067824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012174198A Pending JP2014031865A (ja) 2012-08-06 2012-08-06 エアベアリング装置及び塗布装置

Country Status (5)

Country Link
JP (1) JP2014031865A (enExample)
KR (1) KR20150040924A (enExample)
CN (1) CN104583618A (enExample)
TW (1) TW201412409A (enExample)
WO (1) WO2014024583A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201539620A (zh) * 2014-02-18 2015-10-16 Oiles Industry Co Ltd 空氣軸承裝置及測定裝置
US11097974B2 (en) 2014-07-31 2021-08-24 Corning Incorporated Thermally strengthened consumer electronic glass and related systems and methods
US12338159B2 (en) 2015-07-30 2025-06-24 Corning Incorporated Thermally strengthened consumer electronic glass and related systems and methods
JP6923555B2 (ja) 2016-01-12 2021-08-18 コーニング インコーポレイテッド 薄厚熱強化及び化学強化ガラス系物品
US11795102B2 (en) 2016-01-26 2023-10-24 Corning Incorporated Non-contact coated glass and related coating system and method
TWI785156B (zh) 2017-11-30 2022-12-01 美商康寧公司 具有高熱膨脹係數及對於熱回火之優先破裂行為的非離子交換玻璃
EP3719443B1 (en) 2019-04-03 2021-06-09 Hexagon Technology Center GmbH Coordinate-measuring machine with self-cleaning air bearing
KR20210154825A (ko) 2019-04-23 2021-12-21 코닝 인코포레이티드 확정 응력 프로파일을 갖는 유리 라미네이트 및 그 제조방법
US11697617B2 (en) 2019-08-06 2023-07-11 Corning Incorporated Glass laminate with buried stress spikes to arrest cracks and methods of making the same
CN111894983A (zh) * 2020-07-30 2020-11-06 西安工业大学 微孔节流的静压气体止推轴承
CN114251362A (zh) * 2020-09-24 2022-03-29 武汉科技大学 一种微纳多孔节流气浮球面轴承
FR3139869A1 (fr) * 2022-09-16 2024-03-22 Micro-Contrôle - Spectra-Physics Appareil pour la réduction des vibrations dans un système de régulation de mouvement à coussin d’air

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60113816A (ja) * 1983-11-22 1985-06-20 Miyoutoku:Kk エア−スライド装置
JPH07109217B2 (ja) * 1986-01-31 1995-11-22 京セラ株式会社 静圧気体直線案内装置
JPH09222124A (ja) * 1996-02-19 1997-08-26 Nippon Seiko Kk 静圧気体軸受
US6287004B1 (en) * 1999-11-22 2001-09-11 Nikon Corporation Fluid bearing operable in a vacuum region
TWI222423B (en) * 2001-12-27 2004-10-21 Orbotech Ltd System and methods for conveying and transporting levitated articles
JP2004019760A (ja) * 2002-06-14 2004-01-22 Nsk Ltd 静圧軸受
JP4468059B2 (ja) * 2004-04-23 2010-05-26 太平洋セメント株式会社 静圧軸受け装置
JP2008149238A (ja) * 2006-12-15 2008-07-03 Chugai Ro Co Ltd 塗布装置
US7607647B2 (en) * 2007-03-20 2009-10-27 Kla-Tencor Technologies Corporation Stabilizing a substrate using a vacuum preload air bearing chuck
JP2011133724A (ja) * 2009-12-25 2011-07-07 Nikon Corp 流体静圧軸受、移動体装置、露光装置、デバイス製造方法、及び清掃装置

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