JP2013533949A5 - - Google Patents

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Publication number
JP2013533949A5
JP2013533949A5 JP2013513790A JP2013513790A JP2013533949A5 JP 2013533949 A5 JP2013533949 A5 JP 2013533949A5 JP 2013513790 A JP2013513790 A JP 2013513790A JP 2013513790 A JP2013513790 A JP 2013513790A JP 2013533949 A5 JP2013533949 A5 JP 2013533949A5
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JP
Japan
Prior art keywords
tube
liquid
heat exchanger
reactive members
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013513790A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013533949A (ja
Filing date
Publication date
Priority claimed from US12/796,360 external-priority patent/US20110300050A1/en
Application filed filed Critical
Publication of JP2013533949A publication Critical patent/JP2013533949A/ja
Publication of JP2013533949A5 publication Critical patent/JP2013533949A5/ja
Pending legal-status Critical Current

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JP2013513790A 2010-06-08 2011-06-02 トリクロロシラン気化システム Pending JP2013533949A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/796,360 2010-06-08
US12/796,360 US20110300050A1 (en) 2010-06-08 2010-06-08 Trichlorosilane Vaporization System
PCT/IB2011/052430 WO2011154879A2 (en) 2010-06-08 2011-06-02 Trichlorosilane vaporization system

Publications (2)

Publication Number Publication Date
JP2013533949A JP2013533949A (ja) 2013-08-29
JP2013533949A5 true JP2013533949A5 (enExample) 2014-07-10

Family

ID=45064625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013513790A Pending JP2013533949A (ja) 2010-06-08 2011-06-02 トリクロロシラン気化システム

Country Status (7)

Country Link
US (2) US20110300050A1 (enExample)
EP (1) EP2580159A4 (enExample)
JP (1) JP2013533949A (enExample)
KR (1) KR20130103672A (enExample)
CN (1) CN103025656B (enExample)
TW (1) TWI512240B (enExample)
WO (1) WO2011154879A2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011006116A1 (de) * 2011-03-25 2012-09-27 Evonik Degussa Gmbh Verwendung von Brennern mit Strahlrohr in Reaktoren zur Umsetzung von Chlorsilanen
US20140165928A1 (en) * 2012-12-17 2014-06-19 Conocophillips Company Heat exchange for indirect boiling
JP6114685B2 (ja) * 2013-11-27 2017-04-12 タニコー株式会社 アクアガス発生ユニット
CN109780526B (zh) * 2016-08-31 2020-06-23 青岛科技大学 一种干燥机管箱加热功率的控制方法
CN109780522B (zh) * 2016-08-31 2020-03-24 青岛科技大学 一种管束间距控制加热均匀性的蒸汽干燥机
CN109780525B (zh) * 2016-08-31 2020-06-23 青岛科技大学 一种干燥机管束管径的控制方法
CN113899236A (zh) * 2021-11-10 2022-01-07 哈尔滨工程大学 一种球形颗粒填充的微肋换热管
CN113899237A (zh) * 2021-11-10 2022-01-07 哈尔滨工程大学 一种采用中空结构球床的强化换热管

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