JP2013533949A - トリクロロシラン気化システム - Google Patents

トリクロロシラン気化システム Download PDF

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Publication number
JP2013533949A
JP2013533949A JP2013513790A JP2013513790A JP2013533949A JP 2013533949 A JP2013533949 A JP 2013533949A JP 2013513790 A JP2013513790 A JP 2013513790A JP 2013513790 A JP2013513790 A JP 2013513790A JP 2013533949 A JP2013533949 A JP 2013533949A
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JP
Japan
Prior art keywords
tube
liquid
heat exchanger
trichlorosilane
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013513790A
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English (en)
Japanese (ja)
Other versions
JP2013533949A5 (enExample
Inventor
アバラジス・ハリ
グ・ジーホイ
サティシュ・ブサラプ
ティモシー・ディン・トゥルオング
プニート・グプタ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SunEdison Inc
Original Assignee
MEMC Electronic Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MEMC Electronic Materials Inc filed Critical MEMC Electronic Materials Inc
Publication of JP2013533949A publication Critical patent/JP2013533949A/ja
Publication of JP2013533949A5 publication Critical patent/JP2013533949A5/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F22—STEAM GENERATION
    • F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
    • F22B1/00—Methods of steam generation characterised by form of heating method
    • F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
    • F22B1/288—Instantaneous electrical steam generators built-up from heat-exchange elements arranged within a confined chamber having heat-retaining walls
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D1/00—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators
    • F28D1/02—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid
    • F28D1/04—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with tubular conduits
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F1/00—Tubular elements; Assemblies of tubular elements
    • F28F1/10—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses
    • F28F1/40—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses the means being only inside the tubular element
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
    • F28F13/003—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by using permeable mass, perforated or porous materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Sustainable Energy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Geometry (AREA)
  • Silicon Compounds (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP2013513790A 2010-06-08 2011-06-02 トリクロロシラン気化システム Pending JP2013533949A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/796,360 2010-06-08
US12/796,360 US20110300050A1 (en) 2010-06-08 2010-06-08 Trichlorosilane Vaporization System
PCT/IB2011/052430 WO2011154879A2 (en) 2010-06-08 2011-06-02 Trichlorosilane vaporization system

Publications (2)

Publication Number Publication Date
JP2013533949A true JP2013533949A (ja) 2013-08-29
JP2013533949A5 JP2013533949A5 (enExample) 2014-07-10

Family

ID=45064625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013513790A Pending JP2013533949A (ja) 2010-06-08 2011-06-02 トリクロロシラン気化システム

Country Status (7)

Country Link
US (2) US20110300050A1 (enExample)
EP (1) EP2580159A4 (enExample)
JP (1) JP2013533949A (enExample)
KR (1) KR20130103672A (enExample)
CN (1) CN103025656B (enExample)
TW (1) TWI512240B (enExample)
WO (1) WO2011154879A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015102308A (ja) * 2013-11-27 2015-06-04 タニコー株式会社 アクアガス発生ユニット

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011006116A1 (de) * 2011-03-25 2012-09-27 Evonik Degussa Gmbh Verwendung von Brennern mit Strahlrohr in Reaktoren zur Umsetzung von Chlorsilanen
US20140165928A1 (en) * 2012-12-17 2014-06-19 Conocophillips Company Heat exchange for indirect boiling
CN109780526B (zh) * 2016-08-31 2020-06-23 青岛科技大学 一种干燥机管箱加热功率的控制方法
CN109780522B (zh) * 2016-08-31 2020-03-24 青岛科技大学 一种管束间距控制加热均匀性的蒸汽干燥机
CN109780525B (zh) * 2016-08-31 2020-06-23 青岛科技大学 一种干燥机管束管径的控制方法
CN113899236A (zh) * 2021-11-10 2022-01-07 哈尔滨工程大学 一种球形颗粒填充的微肋换热管
CN113899237A (zh) * 2021-11-10 2022-01-07 哈尔滨工程大学 一种采用中空结构球床的强化换热管

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58173387A (ja) * 1982-03-31 1983-10-12 Takashi Miyagawa 熱交換器
JPS61500132A (ja) * 1983-10-05 1986-01-23 ベイパ−　コ−ポレ−シヨン 円筒多管式伝熱装置およびその方法
JPS6317392A (ja) * 1986-07-09 1988-01-25 Isao Yamamoto 熱交換器
JPH01120071U (enExample) * 1988-02-08 1989-08-15
JPH05118777A (ja) * 1991-10-29 1993-05-14 Fujikura Ltd ループ型ヒートパイプの蒸発部の構造
US20010047541A1 (en) * 2000-04-11 2001-12-06 Johns David Jessie Fluid heating apparatus and methods for using same
JP2002039695A (ja) * 2000-07-26 2002-02-06 Mitsubishi Kakoki Kaisha Ltd 廃熱を利用した液化ガス気化システム及び廃熱供給方法
JP2002340484A (ja) * 2001-05-15 2002-11-27 Nippon Sanso Corp 蒸発器
JP2003021477A (ja) * 2001-07-10 2003-01-24 Toshiba Corp 熱交換器およびその製造方法
JP2003149384A (ja) * 2001-11-19 2003-05-21 Japan Nuclear Cycle Development Inst States Of Projects 中間熱交換器組込型蒸気発生器
JP2003347289A (ja) * 2002-05-24 2003-12-05 Stec Inc 気化器
JP2006300234A (ja) * 2005-04-21 2006-11-02 Fujikin Inc 配管部材
JP2008516181A (ja) * 2004-10-07 2008-05-15 ブルックス オートメーション インコーポレイテッド 冷凍プロセスのための高効率の熱交換器

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JPH0652747B2 (ja) * 1990-02-05 1994-07-06 インターナショナル・ビジネス・マシーンズ・コーポレイション 断熱装置
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KR100825825B1 (ko) * 2006-12-13 2008-04-28 한경희 순간 가열식 스팀보일러
EP2965001B1 (en) * 2007-09-28 2019-12-18 Steamex Group Sverige AB Method and device for producing a gaseous medium comprising steam
JP5316290B2 (ja) * 2008-08-05 2013-10-16 三菱マテリアル株式会社 トリクロロシラン製造装置及び製造方法
JP5633160B2 (ja) * 2009-03-11 2014-12-03 三菱マテリアル株式会社 トリクロロシランの製造装置
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Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58173387A (ja) * 1982-03-31 1983-10-12 Takashi Miyagawa 熱交換器
JPS61500132A (ja) * 1983-10-05 1986-01-23 ベイパ−　コ−ポレ−シヨン 円筒多管式伝熱装置およびその方法
JPS6317392A (ja) * 1986-07-09 1988-01-25 Isao Yamamoto 熱交換器
JPH01120071U (enExample) * 1988-02-08 1989-08-15
JPH05118777A (ja) * 1991-10-29 1993-05-14 Fujikura Ltd ループ型ヒートパイプの蒸発部の構造
US20010047541A1 (en) * 2000-04-11 2001-12-06 Johns David Jessie Fluid heating apparatus and methods for using same
JP2002039695A (ja) * 2000-07-26 2002-02-06 Mitsubishi Kakoki Kaisha Ltd 廃熱を利用した液化ガス気化システム及び廃熱供給方法
JP2002340484A (ja) * 2001-05-15 2002-11-27 Nippon Sanso Corp 蒸発器
JP2003021477A (ja) * 2001-07-10 2003-01-24 Toshiba Corp 熱交換器およびその製造方法
JP2003149384A (ja) * 2001-11-19 2003-05-21 Japan Nuclear Cycle Development Inst States Of Projects 中間熱交換器組込型蒸気発生器
JP2003347289A (ja) * 2002-05-24 2003-12-05 Stec Inc 気化器
JP2008516181A (ja) * 2004-10-07 2008-05-15 ブルックス オートメーション インコーポレイテッド 冷凍プロセスのための高効率の熱交換器
JP2006300234A (ja) * 2005-04-21 2006-11-02 Fujikin Inc 配管部材

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015102308A (ja) * 2013-11-27 2015-06-04 タニコー株式会社 アクアガス発生ユニット

Also Published As

Publication number Publication date
CN103025656B (zh) 2016-02-10
US20110300050A1 (en) 2011-12-08
EP2580159A4 (en) 2015-12-02
TWI512240B (zh) 2015-12-11
KR20130103672A (ko) 2013-09-24
WO2011154879A3 (en) 2012-03-15
WO2011154879A2 (en) 2011-12-15
EP2580159A2 (en) 2013-04-17
CN103025656A (zh) 2013-04-03
TW201217707A (en) 2012-05-01
US20130195432A1 (en) 2013-08-01

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