JP2013526474A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2013526474A5 JP2013526474A5 JP2013510045A JP2013510045A JP2013526474A5 JP 2013526474 A5 JP2013526474 A5 JP 2013526474A5 JP 2013510045 A JP2013510045 A JP 2013510045A JP 2013510045 A JP2013510045 A JP 2013510045A JP 2013526474 A5 JP2013526474 A5 JP 2013526474A5
- Authority
- JP
- Japan
- Prior art keywords
- nanowire
- nanowires
- catalyst
- gas
- seed crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002070 nanowire Substances 0.000 claims 26
- 238000000034 method Methods 0.000 claims 15
- 239000002245 particle Substances 0.000 claims 14
- 239000003054 catalyst Substances 0.000 claims 13
- 239000013078 crystal Substances 0.000 claims 11
- 239000007789 gas Substances 0.000 claims 9
- 239000002243 precursor Substances 0.000 claims 9
- 238000010249 in-situ analysis Methods 0.000 claims 4
- 238000006243 chemical reaction Methods 0.000 claims 3
- 239000000470 constituent Substances 0.000 claims 3
- 239000000203 mixture Substances 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 239000012159 carrier gas Substances 0.000 claims 2
- 238000010924 continuous production Methods 0.000 claims 2
- 239000002019 doping agent Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000003786 synthesis reaction Methods 0.000 claims 2
- 239000000443 aerosol Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 239000000376 reactant Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE1050466 | 2010-05-11 | ||
| SE1050466-0 | 2010-05-11 | ||
| PCT/SE2011/050599 WO2011142717A1 (en) | 2010-05-11 | 2011-05-11 | Gas-phase synthesis of wires |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016016818A Division JP2016121065A (ja) | 2010-05-11 | 2016-02-01 | ワイヤーの気相合成 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013526474A JP2013526474A (ja) | 2013-06-24 |
| JP2013526474A5 true JP2013526474A5 (enExample) | 2014-06-26 |
| JP6313975B2 JP6313975B2 (ja) | 2018-04-18 |
Family
ID=44914587
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013510045A Active JP6313975B2 (ja) | 2010-05-11 | 2011-05-11 | ワイヤーの気相合成 |
| JP2016016818A Pending JP2016121065A (ja) | 2010-05-11 | 2016-02-01 | ワイヤーの気相合成 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016016818A Pending JP2016121065A (ja) | 2010-05-11 | 2016-02-01 | ワイヤーの気相合成 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US9447520B2 (enExample) |
| EP (1) | EP2569466A4 (enExample) |
| JP (2) | JP6313975B2 (enExample) |
| KR (1) | KR101777894B1 (enExample) |
| CN (2) | CN107090593A (enExample) |
| WO (1) | WO2011142717A1 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011142717A1 (en) * | 2010-05-11 | 2011-11-17 | Qunano Ab | Gas-phase synthesis of wires |
| US9610456B2 (en) | 2011-11-30 | 2017-04-04 | Neuronano Ab | Nanowire-based devices for light-induced and electrical stimulation of biological cells |
| US20140345686A1 (en) * | 2012-02-03 | 2014-11-27 | Qunano Ab | High-throughput continuous gas-phase synthesis of nanowires with tunable properties |
| TWI480224B (zh) * | 2012-02-03 | 2015-04-11 | Nat Univ Tsing Hua | 半導體奈米線製作方法與半導體奈米結構 |
| CN104380469B (zh) | 2012-04-12 | 2018-06-22 | 索尔伏打电流公司 | 纳米线官能化、分散和附着方法 |
| EP2855742B1 (en) | 2012-05-25 | 2016-12-14 | Sol Voltaics AB | Concentric flow reactor |
| US9224920B2 (en) | 2012-11-23 | 2015-12-29 | Lg Display Co., Ltd. | Quantum rod and method of fabricating the same |
| US9012883B2 (en) | 2012-12-21 | 2015-04-21 | Sol Voltaics Ab | Recessed contact to semiconductor nanowires |
| US9574135B2 (en) * | 2013-08-22 | 2017-02-21 | Nanoco Technologies Ltd. | Gas phase enhancement of emission color quality in solid state LEDs |
| WO2016071762A1 (en) * | 2014-11-07 | 2016-05-12 | Sol Voltaics Ab | Shell-enabled vertical alignment and precision-assembly of a close-packed colloidal crystal film |
| US9951420B2 (en) * | 2014-11-10 | 2018-04-24 | Sol Voltaics Ab | Nanowire growth system having nanoparticles aerosol generator |
| EP3260414A1 (en) | 2016-06-21 | 2017-12-27 | Sol Voltaics AB | Method for transferring nanowires from a fluid to a substrate surface |
| US20200295356A1 (en) * | 2019-03-11 | 2020-09-17 | Nanotek Instruments, Inc. | Process for producing semiconductor nanowires and carbon/semiconductor nanowire hybrid materials |
| EP3822395A1 (en) * | 2019-11-13 | 2021-05-19 | Fundación Imdea Materiales | Nanowires network |
| CN112820634B (zh) * | 2021-01-14 | 2024-01-16 | 镓特半导体科技(上海)有限公司 | 半导体结构、自支撑氮化镓层及其制备方法 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001155999A (ja) | 1999-11-25 | 2001-06-08 | Kanegafuchi Chem Ind Co Ltd | 半導体層の積層方法及び該積層装置 |
| US7301199B2 (en) * | 2000-08-22 | 2007-11-27 | President And Fellows Of Harvard College | Nanoscale wires and related devices |
| WO2002017362A2 (en) * | 2000-08-22 | 2002-02-28 | President And Fellows Of Harvard College | Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors and fabricating such devices |
| US7374730B2 (en) * | 2001-03-26 | 2008-05-20 | National Research Council Of Canada | Process and apparatus for synthesis of nanotubes |
| US20020184969A1 (en) * | 2001-03-29 | 2002-12-12 | Kodas Toivo T. | Combinatorial synthesis of particulate materials |
| US6872645B2 (en) * | 2002-04-02 | 2005-03-29 | Nanosys, Inc. | Methods of positioning and/or orienting nanostructures |
| US7335908B2 (en) * | 2002-07-08 | 2008-02-26 | Qunano Ab | Nanostructures and methods for manufacturing the same |
| US7534488B2 (en) | 2003-09-10 | 2009-05-19 | The Regents Of The University Of California | Graded core/shell semiconductor nanorods and nanorod barcodes |
| US7335344B2 (en) * | 2003-03-14 | 2008-02-26 | Massachusetts Institute Of Technology | Method and apparatus for synthesizing filamentary structures |
| CA2522358A1 (en) * | 2003-04-04 | 2004-10-14 | Startskottet 22286 Ab | Precisely positioned nanowhiskers and nanowhisker arrays and method for preparing them |
| US20070157873A1 (en) * | 2003-09-12 | 2007-07-12 | Hauptmann Jonas R | Method of fabrication and device comprising elongated nanosize elements |
| KR100708644B1 (ko) | 2004-02-26 | 2007-04-17 | 삼성에스디아이 주식회사 | 박막 트랜지스터, 이를 구비한 평판 표시장치, 박막트랜지스터의 제조방법, 평판 표시장치의 제조방법, 및도너 시트의 제조방법 |
| FI121334B (fi) | 2004-03-09 | 2010-10-15 | Canatu Oy | Menetelmä ja laitteisto hiilinanoputkien valmistamiseksi |
| WO2006078281A2 (en) * | 2004-07-07 | 2006-07-27 | Nanosys, Inc. | Systems and methods for harvesting and integrating nanowires |
| FR2876751B1 (fr) | 2004-10-15 | 2007-01-19 | Centre Nat Rech Scient Cnrse | Appareil pour convertir l'energie des vagues en energie electrique |
| JP5483887B2 (ja) | 2006-03-08 | 2014-05-07 | クナノ アーベー | Si上のエピタキシャルな半導体ナノワイヤの金属無しでの合成方法 |
| JP4871177B2 (ja) * | 2006-03-28 | 2012-02-08 | コリア インスティチュート オブ エナジー リサーチ | 超音波振動方式を用いたカーボンナノチューブ合成方法とその装置 |
| WO2008057558A2 (en) * | 2006-11-07 | 2008-05-15 | Nanosys, Inc. | Systems and methods for nanowire growth |
| US8409659B2 (en) * | 2006-12-01 | 2013-04-02 | GM Global Technology Operations LLC | Nanowire supported catalysts for fuel cell electrodes |
| CN101681813B (zh) * | 2007-01-12 | 2012-07-11 | 昆南诺股份有限公司 | 氮化物纳米线及其制造方法 |
| DE102007010286B4 (de) * | 2007-03-02 | 2013-09-05 | Freiberger Compound Materials Gmbh | Verfahren zum Herstellen eines Verbindungshalbleiterwerkstoffs, einer III-N-Schicht oder eines III-N-Bulkkristalls, Reaktor zur Herstellung des Verbindungshalbleiterwerkstoffs, Verbindungshalbleiterwerkstoff, III-N-Bulkkristall und III-N-Kristallschicht |
| KR101345440B1 (ko) * | 2007-03-15 | 2013-12-27 | 삼성전자주식회사 | 메조세공 템플릿을 이용한 나노 구조체의 대량 제조방법 및그에 의해 제조된 나노 구조체 |
| KR101475524B1 (ko) * | 2008-08-05 | 2014-12-23 | 삼성전자주식회사 | 실리콘 풍부산화물을 포함하는 나노와이어 및 그의제조방법 |
| WO2011142717A1 (en) | 2010-05-11 | 2011-11-17 | Qunano Ab | Gas-phase synthesis of wires |
-
2011
- 2011-05-11 WO PCT/SE2011/050599 patent/WO2011142717A1/en not_active Ceased
- 2011-05-11 CN CN201710173361.XA patent/CN107090593A/zh active Pending
- 2011-05-11 EP EP11780888.1A patent/EP2569466A4/en not_active Withdrawn
- 2011-05-11 US US13/696,611 patent/US9447520B2/en not_active Expired - Fee Related
- 2011-05-11 JP JP2013510045A patent/JP6313975B2/ja active Active
- 2011-05-11 KR KR1020127031304A patent/KR101777894B1/ko not_active Expired - Fee Related
- 2011-05-11 CN CN201180034310.XA patent/CN102971452B/zh not_active Expired - Fee Related
-
2016
- 2016-02-01 JP JP2016016818A patent/JP2016121065A/ja active Pending
- 2016-09-02 US US15/255,766 patent/US10036101B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2013526474A5 (enExample) | ||
| JP6449458B2 (ja) | ナノ粒子エアロゾル生成器を有するナノワイヤ成長システム | |
| EP2855742B1 (en) | Concentric flow reactor | |
| Fang et al. | The influence of growth temperature on ZnO nanowires | |
| JP5059589B2 (ja) | 窒化ホウ素ナノ繊維及びその製造方法 | |
| Cai et al. | GaN nanowires: CVD synthesis and properties | |
| CN107109711A (zh) | 用于产生碳化硅的装置和方法 | |
| WO2010124625A1 (zh) | 生产大颗粒金刚石的方法和设备 | |
| Zhang et al. | A new understanding of carbon nanotube growth: Activation and deactivation of a catalyst | |
| JP5364904B2 (ja) | カーボンナノファイバー集合体の製造方法 | |
| EP3305723B1 (en) | Method for producing carbon nanotube-containing composition | |
| RU2013138480A (ru) | Способ получения эпитаксиального слоя бинарного полупроводникового материала на монокристаллической подложке посредством металлоорганического химического осаждения из газовой фазы | |
| Li et al. | The effect of substrate positions in chemical vapor deposition reactor on the growth of carbon nanotube arrays | |
| Zhao et al. | Growth of well-aligned carbon nanotubes with different shapes | |
| Niu et al. | Tiny SiO2 nano-wires synthesized on Si (111) wafer | |
| WO2013114218A3 (en) | High-throughput continuous gas-phase synthesis of nanowires with tunable properties | |
| An et al. | Unusual Rh nanocrystal morphology control by hetero-epitaxially growing Rh on Au@ Pt nanowires with numerous vertical twinning boundaries | |
| JP2018016521A (ja) | 単層カーボンナノチューブ含有組成物の製造方法 | |
| Li et al. | Facile route to well-aligned ZnO nanowire arrays | |
| FR2983846B1 (fr) | Procede de synthese ameliore de nanotubes de carbone sur multi-supports | |
| JP2011231402A (ja) | チタンの製造方法及び製造装置 | |
| Park et al. | The growth behavior of GaN NWs on Si (1 1 1) by the dispersion of Au colloid catalyst using pulsed MOCVD | |
| Park et al. | Morphology control of single crystalline rutile TiO 2 nanowires | |
| Choi et al. | Synthesis of ZnO nanorods by a hot-wall high-temperature metalorganic chemical vapor deposition process | |
| JP2009174092A (ja) | カーボンファイバ製造方法 |