JP2013524552A - ハーフエッチングされた金属リードフレーム上に組み立てられたチップを有するボールグリッドアレイデバイス - Google Patents

ハーフエッチングされた金属リードフレーム上に組み立てられたチップを有するボールグリッドアレイデバイス Download PDF

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Publication number
JP2013524552A
JP2013524552A JP2013505049A JP2013505049A JP2013524552A JP 2013524552 A JP2013524552 A JP 2013524552A JP 2013505049 A JP2013505049 A JP 2013505049A JP 2013505049 A JP2013505049 A JP 2013505049A JP 2013524552 A JP2013524552 A JP 2013524552A
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JP
Japan
Prior art keywords
lead
lead frame
terminal
terminals
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013505049A
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English (en)
Japanese (ja)
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JP2013524552A5 (https=
Inventor
シー ハビエル レイナルド
ケイ コドゥリ スリーニーバサン
Original Assignee
日本テキサス・インスツルメンツ株式会社
テキサス インスツルメンツ インコーポレイテッド
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Filing date
Publication date
Application filed by 日本テキサス・インスツルメンツ株式会社, テキサス インスツルメンツ インコーポレイテッド filed Critical 日本テキサス・インスツルメンツ株式会社
Publication of JP2013524552A publication Critical patent/JP2013524552A/ja
Publication of JP2013524552A5 publication Critical patent/JP2013524552A5/ja
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/411Chip-supporting parts, e.g. die pads
    • H10W70/415Leadframe inner leads serving as die pads
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01Manufacture or treatment
    • H10W70/04Manufacture or treatment of leadframes
    • H10W70/042Etching
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/421Shapes or dispositions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/421Shapes or dispositions
    • H10W70/424Cross-sectional shapes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/456Materials
    • H10W70/457Materials of metallic layers on leadframes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/531Shapes of wire connectors
    • H10W72/5366Shapes of wire connectors the bond wires having kinks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/541Dispositions of bond wires
    • H10W72/5449Dispositions of bond wires not being orthogonal to a side surface of the chip, e.g. fan-out arrangements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/884Die-attach connectors and bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/931Shapes of bond pads
    • H10W72/932Plan-view shape, i.e. in top view
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/722Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between stacked chips
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/736Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Lead Frames For Integrated Circuits (AREA)
JP2013505049A 2010-04-12 2011-04-12 ハーフエッチングされた金属リードフレーム上に組み立てられたチップを有するボールグリッドアレイデバイス Pending JP2013524552A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US32308810P 2010-04-12 2010-04-12
US61/323,088 2010-04-12
US12/902,306 US20110248392A1 (en) 2010-04-12 2010-10-12 Ball-Grid Array Device Having Chip Assembled on Half-Etched metal Leadframe
US12/902,306 2010-10-12
PCT/US2011/032094 WO2011130252A2 (en) 2010-04-12 2011-04-12 Ball-grid array device having chip assembled on half-etched metal leadframe

Publications (2)

Publication Number Publication Date
JP2013524552A true JP2013524552A (ja) 2013-06-17
JP2013524552A5 JP2013524552A5 (https=) 2014-05-29

Family

ID=44760335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013505049A Pending JP2013524552A (ja) 2010-04-12 2011-04-12 ハーフエッチングされた金属リードフレーム上に組み立てられたチップを有するボールグリッドアレイデバイス

Country Status (4)

Country Link
US (1) US20110248392A1 (https=)
JP (1) JP2013524552A (https=)
CN (1) CN102844860A (https=)
WO (1) WO2011130252A2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112022002753T5 (de) 2021-05-24 2024-03-07 Aoi Electronics Co., Ltd. Halbleiterbauelement und verfahren zur herstellung desselben

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102879246A (zh) * 2012-09-28 2013-01-16 无锡江南计算技术研究所 封装芯片金相制样方法以及金相样品模具
US8710636B1 (en) * 2013-02-04 2014-04-29 Freescale Semiconductor, Inc. Lead frame array package with flip chip die attach
US10345343B2 (en) 2013-03-15 2019-07-09 Allegro Microsystems, Llc Current sensor isolation
US9190606B2 (en) * 2013-03-15 2015-11-17 Allegro Micosystems, LLC Packaging for an electronic device
CN104465593B (zh) * 2014-11-13 2018-10-19 苏州日月新半导体有限公司 半导体封装体及封装方法
US9640468B2 (en) * 2014-12-24 2017-05-02 Stmicroelectronics S.R.L. Process for manufacturing a package for a surface-mount semiconductor device and semiconductor device
CN105720035A (zh) * 2016-03-25 2016-06-29 上海凯虹科技电子有限公司 引线框架及采用该引线框架的封装体
US11081429B2 (en) * 2019-10-14 2021-08-03 Texas Instruments Incorporated Finger pad leadframe
JP2022140870A (ja) * 2021-03-15 2022-09-29 株式会社村田製作所 回路モジュール
US11768230B1 (en) 2022-03-30 2023-09-26 Allegro Microsystems, Llc Current sensor integrated circuit with a dual gauge lead frame

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1174404A (ja) * 1997-08-28 1999-03-16 Nec Corp ボールグリッドアレイ型半導体装置
JPH11233683A (ja) * 1998-02-10 1999-08-27 Dainippon Printing Co Ltd 樹脂封止型半導体装置とそれに用いられる回路部材および樹脂封止型半導体装置の製造方法
JP2004031650A (ja) * 2002-06-26 2004-01-29 Sony Corp リードレスパッケージおよび半導体装置
JP2005116687A (ja) * 2003-10-06 2005-04-28 Renesas Technology Corp リードフレーム、半導体装置及び半導体装置の製造方法
JP2007243220A (ja) * 2007-05-14 2007-09-20 Renesas Technology Corp 樹脂封止型半導体パッケージ
JP2009164594A (ja) * 2007-12-11 2009-07-23 Dainippon Printing Co Ltd 半導体装置用基板、樹脂封止型半導体装置、半導体装置用基板の製造方法および樹脂封止型半導体装置の製造方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980043246A (ko) * 1996-12-02 1998-09-05 김광호 패터닝된 리드 프레임을 이용한 볼 그리드 어레이 패키지
US6025640A (en) * 1997-07-16 2000-02-15 Dai Nippon Insatsu Kabushiki Kaisha Resin-sealed semiconductor device, circuit member for use therein and method of manufacturing resin-sealed semiconductor device
US6281568B1 (en) * 1998-10-21 2001-08-28 Amkor Technology, Inc. Plastic integrated circuit device package and leadframe having partially undercut leads and die pad
JP4034073B2 (ja) * 2001-05-11 2008-01-16 株式会社ルネサステクノロジ 半導体装置の製造方法
US20040080025A1 (en) * 2002-09-17 2004-04-29 Shinko Electric Industries Co., Ltd. Lead frame, method of manufacturing the same, and semiconductor device manufactured with the same
US8129222B2 (en) * 2002-11-27 2012-03-06 United Test And Assembly Test Center Ltd. High density chip scale leadframe package and method of manufacturing the package
US6927483B1 (en) * 2003-03-07 2005-08-09 Amkor Technology, Inc. Semiconductor package exhibiting efficient lead placement
US7259460B1 (en) * 2004-06-18 2007-08-21 National Semiconductor Corporation Wire bonding on thinned portions of a lead-frame configured for use in a micro-array integrated circuit package
US7161232B1 (en) * 2004-09-14 2007-01-09 National Semiconductor Corporation Apparatus and method for miniature semiconductor packages
US7217991B1 (en) * 2004-10-22 2007-05-15 Amkor Technology, Inc. Fan-in leadframe semiconductor package
KR101146973B1 (ko) * 2005-06-27 2012-05-22 페어차일드코리아반도체 주식회사 패키지 프레임 및 그를 이용한 반도체 패키지
US7608482B1 (en) * 2006-12-21 2009-10-27 National Semiconductor Corporation Integrated circuit package with molded insulation
US7687893B2 (en) * 2006-12-27 2010-03-30 Amkor Technology, Inc. Semiconductor package having leadframe with exposed anchor pads
US8110905B2 (en) * 2007-12-17 2012-02-07 Stats Chippac Ltd. Integrated circuit packaging system with leadframe interposer and method of manufacture thereof
US8063470B1 (en) * 2008-05-22 2011-11-22 Utac Thai Limited Method and apparatus for no lead semiconductor package
KR101088554B1 (ko) * 2009-03-06 2011-12-05 카이신 아이엔씨. 고밀도 콘택트를 가지는 리드리스 집적회로 패키지

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1174404A (ja) * 1997-08-28 1999-03-16 Nec Corp ボールグリッドアレイ型半導体装置
JPH11233683A (ja) * 1998-02-10 1999-08-27 Dainippon Printing Co Ltd 樹脂封止型半導体装置とそれに用いられる回路部材および樹脂封止型半導体装置の製造方法
JP2004031650A (ja) * 2002-06-26 2004-01-29 Sony Corp リードレスパッケージおよび半導体装置
JP2005116687A (ja) * 2003-10-06 2005-04-28 Renesas Technology Corp リードフレーム、半導体装置及び半導体装置の製造方法
JP2007243220A (ja) * 2007-05-14 2007-09-20 Renesas Technology Corp 樹脂封止型半導体パッケージ
JP2009164594A (ja) * 2007-12-11 2009-07-23 Dainippon Printing Co Ltd 半導体装置用基板、樹脂封止型半導体装置、半導体装置用基板の製造方法および樹脂封止型半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112022002753T5 (de) 2021-05-24 2024-03-07 Aoi Electronics Co., Ltd. Halbleiterbauelement und verfahren zur herstellung desselben

Also Published As

Publication number Publication date
WO2011130252A3 (en) 2012-01-26
WO2011130252A2 (en) 2011-10-20
US20110248392A1 (en) 2011-10-13
CN102844860A (zh) 2012-12-26

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