JP2013214434A - 積層構造体の製造方法、積層構造体および電子機器 - Google Patents
積層構造体の製造方法、積層構造体および電子機器 Download PDFInfo
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- JP2013214434A JP2013214434A JP2012084583A JP2012084583A JP2013214434A JP 2013214434 A JP2013214434 A JP 2013214434A JP 2012084583 A JP2012084583 A JP 2012084583A JP 2012084583 A JP2012084583 A JP 2012084583A JP 2013214434 A JP2013214434 A JP 2013214434A
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- substrate
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- laminated structure
- graphene film
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/24—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/02—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/10—Removing layers, or parts of layers, mechanically or chemically
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/005—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising one layer of ceramic material, e.g. porcelain, ceramic tile
- B32B9/007—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising one layer of ceramic material, e.g. porcelain, ceramic tile comprising carbon, e.g. graphite, composite carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B9/045—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/185—Joining of semiconductor bodies for junction formation
- H01L21/187—Joining of semiconductor bodies for junction formation by direct bonding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/881—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being a two-dimensional material
- H10D62/882—Graphene
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/24—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
- B32B2037/243—Coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2250/00—Layers arrangement
- B32B2250/02—2 layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
- B32B2457/208—Touch screens
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/02—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
- B32B37/025—Transfer laminating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Laminated Bodies (AREA)
- Manufacturing Of Electric Cables (AREA)
- Carbon And Carbon Compounds (AREA)
- Position Input By Displaying (AREA)
- Liquid Crystal (AREA)
- Electroluminescent Light Sources (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012084583A JP2013214434A (ja) | 2012-04-03 | 2012-04-03 | 積層構造体の製造方法、積層構造体および電子機器 |
| KR1020147016812A KR102074004B1 (ko) | 2012-04-03 | 2013-03-27 | 적층 구조체 제조 방법, 적층 구조체, 및 전자 장치 |
| EP13722590.0A EP2834071A1 (en) | 2012-04-03 | 2013-03-27 | Laminated structure manufacturing method, laminated structure, and electronic apparatus |
| PCT/JP2013/002101 WO2013150746A1 (en) | 2012-04-03 | 2013-03-27 | Laminated structure manufacturing method, laminated structure, and electronic apparatus |
| KR1020207002283A KR102202997B1 (ko) | 2012-04-03 | 2013-03-27 | 적층 구조체 제조 방법, 적층 구조체, 및 전자 장치 |
| CN201380017197.3A CN104203577A (zh) | 2012-04-03 | 2013-03-27 | 层压结构制造方法、层压结构和电子设备 |
| US14/387,760 US10022947B2 (en) | 2012-04-03 | 2013-03-27 | Laminated structure manufacturing method, laminated structure, and electronic apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012084583A JP2013214434A (ja) | 2012-04-03 | 2012-04-03 | 積層構造体の製造方法、積層構造体および電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013214434A true JP2013214434A (ja) | 2013-10-17 |
| JP2013214434A5 JP2013214434A5 (enExample) | 2015-03-19 |
Family
ID=48430897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012084583A Pending JP2013214434A (ja) | 2012-04-03 | 2012-04-03 | 積層構造体の製造方法、積層構造体および電子機器 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10022947B2 (enExample) |
| EP (1) | EP2834071A1 (enExample) |
| JP (1) | JP2013214434A (enExample) |
| KR (2) | KR102202997B1 (enExample) |
| CN (1) | CN104203577A (enExample) |
| WO (1) | WO2013150746A1 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017152643A (ja) * | 2016-02-26 | 2017-08-31 | 住友電気工業株式会社 | 電子装置およびその製造方法 |
| JP2018107138A (ja) * | 2018-02-14 | 2018-07-05 | 株式会社東芝 | 透明導電体の製造方法 |
| US10306752B2 (en) | 2014-03-05 | 2019-05-28 | Kabushiki Kaisha Toshiba | Transparent conductor and device |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101932778B1 (ko) | 2011-10-03 | 2018-12-27 | 히타치가세이가부시끼가이샤 | 도전 패턴의 형성 방법, 도전 패턴 기판 및 터치 패널 센서 |
| CN103935988B (zh) * | 2014-03-24 | 2017-01-11 | 无锡格菲电子薄膜科技有限公司 | 一种石墨烯薄膜的转移方法 |
| CN104538562B (zh) * | 2015-01-15 | 2017-04-26 | 京东方科技集团股份有限公司 | 一种oled器件及其封装方法和封装装置 |
| CN106201039B (zh) * | 2015-04-30 | 2023-05-23 | 安徽精卓光显技术有限责任公司 | 触摸屏及保护膜 |
| KR102581899B1 (ko) * | 2015-11-04 | 2023-09-21 | 삼성전자주식회사 | 투명 전극 및 이를 포함하는 소자 |
| FR3045826A1 (fr) * | 2015-12-17 | 2017-06-23 | Commissariat Energie Atomique | Supports amplificateurs de contraste utilisant un materiau bidimensionnel |
| WO2018133053A1 (en) * | 2017-01-21 | 2018-07-26 | Southern University Of Science And Technology | Graphene film and direct method for transfering graphene film onto flexible and transparent substrates |
| CN106827380B (zh) * | 2017-01-23 | 2019-03-15 | 业成科技(成都)有限公司 | 带有抗眩光薄膜的三维工件制作方法 |
| JP7154698B2 (ja) * | 2018-09-06 | 2022-10-18 | 株式会社ディスコ | ウェーハの加工方法 |
| JP7171134B2 (ja) * | 2018-10-17 | 2022-11-15 | 株式会社ディスコ | ウェーハの加工方法 |
| JP7503886B2 (ja) * | 2018-11-06 | 2024-06-21 | 株式会社ディスコ | ウェーハの加工方法 |
| US12289839B2 (en) | 2021-05-18 | 2025-04-29 | Mellanox Technologies, Ltd. | Process for localized repair of graphene-coated lamination stacks and printed circuit boards |
| US12004308B2 (en) * | 2021-05-18 | 2024-06-04 | Mellanox Technologies, Ltd. | Process for laminating graphene-coated printed circuit boards |
| US11963309B2 (en) | 2021-05-18 | 2024-04-16 | Mellanox Technologies, Ltd. | Process for laminating conductive-lubricant coated metals for printed circuit boards |
| US12221695B2 (en) | 2021-05-18 | 2025-02-11 | Mellanox Technologies, Ltd. | CVD system with flange assembly for facilitating uniform and laminar flow |
| US12163228B2 (en) | 2021-05-18 | 2024-12-10 | Mellanox Technologies, Ltd. | CVD system with substrate carrier and associated mechanisms for moving substrate therethrough |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0316147A (ja) * | 1989-03-09 | 1991-01-24 | Hitachi Chem Co Ltd | 回路の接続方法及びそれに用いる接着剤フィルム |
| JPH07168003A (ja) * | 1993-10-18 | 1995-07-04 | Asahi Glass Co Ltd | 反射防止層を有する光学物品 |
| JP2005514672A (ja) * | 2002-01-18 | 2005-05-19 | オーファオデー キネグラム アーゲー | 導光体を組み込んだ回折型セキュリティー素子 |
| JP2007197498A (ja) * | 2006-01-24 | 2007-08-09 | Sumitomo Metal Mining Co Ltd | 導電性接着剤 |
| JP2008288419A (ja) * | 2007-05-18 | 2008-11-27 | Konica Minolta Holdings Inc | 透明性導電膜形成用感光材料、それを用いた透明性導電膜、その製造方法及び電磁波遮蔽材料 |
| WO2011046415A2 (ko) * | 2009-10-16 | 2011-04-21 | 성균관대학교산학협력단 | 그래핀의 롤투롤 전사 방법, 그에 의한 그래핀 롤, 및 그래핀의 롤투롤 전사 장치 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP3153142B2 (ja) * | 1997-02-25 | 2001-04-03 | 日本電気株式会社 | 導電性偏光板 |
| WO2008128554A1 (en) * | 2007-04-20 | 2008-10-30 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Highly conductive, transparent carbon films as electrode materials |
| CN101669177B (zh) * | 2007-04-27 | 2016-06-01 | 株式会社可乐丽 | 透明导电膜及透明导电膜的制造方法 |
| CA2711642C (en) * | 2008-01-07 | 2016-11-01 | Wisys Technology Foundation, Inc. | Method and apparatus for identifying and characterizing material solvents and composite matrices and methods of using same |
| JP5303957B2 (ja) * | 2008-02-20 | 2013-10-02 | 株式会社デンソー | グラフェン基板及びその製造方法 |
| KR101462401B1 (ko) | 2008-06-12 | 2014-11-17 | 삼성전자주식회사 | 그라펜 시트로부터 탄소화 촉매를 제거하는 방법, 탄소화촉매가 제거된 그라펜 시트를 소자에 전사하는 방법, 이에따른 그라펜 시트 및 소자 |
| US8753468B2 (en) * | 2009-08-27 | 2014-06-17 | The United States Of America, As Represented By The Secretary Of The Navy | Method for the reduction of graphene film thickness and the removal and transfer of epitaxial graphene films from SiC substrates |
| TW201116606A (en) * | 2009-11-03 | 2011-05-16 | Nat Univ Tsing Hua | Method and an apparatus for transferring carbonaceous material layer |
| KR101095097B1 (ko) * | 2009-12-23 | 2011-12-20 | 삼성전기주식회사 | 투명 전극 필름 및 이의 제조 방법 |
| KR101656103B1 (ko) * | 2010-03-17 | 2016-09-08 | 동우 화인켐 주식회사 | 반사 방지 필름, 이를 포함하는 편광판 및 표시 장치 |
| KR101630291B1 (ko) | 2010-06-17 | 2016-06-14 | 한화테크윈 주식회사 | 그래핀의 전사 방법 |
| KR101793683B1 (ko) * | 2010-07-27 | 2017-11-03 | 한화테크윈 주식회사 | 그래핀 제조 방법 |
| JP5691524B2 (ja) * | 2011-01-05 | 2015-04-01 | ソニー株式会社 | グラフェン膜の転写方法および透明導電膜の製造方法 |
| CN102166866A (zh) * | 2011-01-05 | 2011-08-31 | 常州大学 | 应用石墨烯制备抗静电层压材料的方法 |
| KR101920713B1 (ko) * | 2011-12-23 | 2018-11-22 | 삼성전자주식회사 | 그래핀 소자 및 그 제조방법 |
-
2012
- 2012-04-03 JP JP2012084583A patent/JP2013214434A/ja active Pending
-
2013
- 2013-03-27 CN CN201380017197.3A patent/CN104203577A/zh active Pending
- 2013-03-27 US US14/387,760 patent/US10022947B2/en active Active
- 2013-03-27 EP EP13722590.0A patent/EP2834071A1/en not_active Withdrawn
- 2013-03-27 WO PCT/JP2013/002101 patent/WO2013150746A1/en not_active Ceased
- 2013-03-27 KR KR1020207002283A patent/KR102202997B1/ko active Active
- 2013-03-27 KR KR1020147016812A patent/KR102074004B1/ko active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0316147A (ja) * | 1989-03-09 | 1991-01-24 | Hitachi Chem Co Ltd | 回路の接続方法及びそれに用いる接着剤フィルム |
| JPH07168003A (ja) * | 1993-10-18 | 1995-07-04 | Asahi Glass Co Ltd | 反射防止層を有する光学物品 |
| JP2005514672A (ja) * | 2002-01-18 | 2005-05-19 | オーファオデー キネグラム アーゲー | 導光体を組み込んだ回折型セキュリティー素子 |
| JP2007197498A (ja) * | 2006-01-24 | 2007-08-09 | Sumitomo Metal Mining Co Ltd | 導電性接着剤 |
| JP2008288419A (ja) * | 2007-05-18 | 2008-11-27 | Konica Minolta Holdings Inc | 透明性導電膜形成用感光材料、それを用いた透明性導電膜、その製造方法及び電磁波遮蔽材料 |
| WO2011046415A2 (ko) * | 2009-10-16 | 2011-04-21 | 성균관대학교산학협력단 | 그래핀의 롤투롤 전사 방법, 그에 의한 그래핀 롤, 및 그래핀의 롤투롤 전사 장치 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10306752B2 (en) | 2014-03-05 | 2019-05-28 | Kabushiki Kaisha Toshiba | Transparent conductor and device |
| JP2017152643A (ja) * | 2016-02-26 | 2017-08-31 | 住友電気工業株式会社 | 電子装置およびその製造方法 |
| JP2018107138A (ja) * | 2018-02-14 | 2018-07-05 | 株式会社東芝 | 透明導電体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102074004B1 (ko) | 2020-02-05 |
| KR20150002574A (ko) | 2015-01-07 |
| KR20200015947A (ko) | 2020-02-13 |
| CN104203577A (zh) | 2014-12-10 |
| WO2013150746A1 (en) | 2013-10-10 |
| US20150064470A1 (en) | 2015-03-05 |
| EP2834071A1 (en) | 2015-02-11 |
| US10022947B2 (en) | 2018-07-17 |
| KR102202997B1 (ko) | 2021-01-13 |
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