JP2013192013A - 振動素子、振動デバイスおよび電子機器 - Google Patents
振動素子、振動デバイスおよび電子機器 Download PDFInfo
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- JP2013192013A JP2013192013A JP2012056459A JP2012056459A JP2013192013A JP 2013192013 A JP2013192013 A JP 2013192013A JP 2012056459 A JP2012056459 A JP 2012056459A JP 2012056459 A JP2012056459 A JP 2012056459A JP 2013192013 A JP2013192013 A JP 2013192013A
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- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 2
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- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 description 1
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Images
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- Gyroscopes (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012056459A JP2013192013A (ja) | 2012-03-13 | 2012-03-13 | 振動素子、振動デバイスおよび電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012056459A JP2013192013A (ja) | 2012-03-13 | 2012-03-13 | 振動素子、振動デバイスおよび電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013192013A true JP2013192013A (ja) | 2013-09-26 |
| JP2013192013A5 JP2013192013A5 (enrdf_load_stackoverflow) | 2015-04-30 |
Family
ID=49391869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012056459A Withdrawn JP2013192013A (ja) | 2012-03-13 | 2012-03-13 | 振動素子、振動デバイスおよび電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2013192013A (enrdf_load_stackoverflow) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015035734A (ja) * | 2013-08-09 | 2015-02-19 | セイコーエプソン株式会社 | 振動素子、振動デバイス、電子機器、および移動体 |
| JP2016176892A (ja) * | 2015-03-23 | 2016-10-06 | セイコーエプソン株式会社 | 角速度検出素子、角速度検出デバイス、電子機器および移動体 |
| JP2016176891A (ja) * | 2015-03-23 | 2016-10-06 | セイコーエプソン株式会社 | 角速度検出素子、角速度検出デバイス、電子機器および移動体 |
| US9534895B2 (en) | 2014-09-24 | 2017-01-03 | Seiko Epson Corporation | Vibrating element, angular velocity sensor, electronic apparatus, and moving object |
| JP6450059B1 (ja) * | 2017-07-24 | 2019-01-09 | 京セラ株式会社 | センサ素子および角速度センサ |
| WO2019021860A1 (ja) * | 2017-07-24 | 2019-01-31 | 京セラ株式会社 | センサ素子および角速度センサ |
| WO2019035238A1 (ja) * | 2017-08-16 | 2019-02-21 | 株式会社村田製作所 | 共振子及び共振装置 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56158520A (en) * | 1980-05-12 | 1981-12-07 | Seiko Instr & Electronics Ltd | Oscillator |
| JP2002118441A (ja) * | 2000-10-10 | 2002-04-19 | Citizen Watch Co Ltd | 捩り振動子 |
| JP2006269738A (ja) * | 2005-03-24 | 2006-10-05 | Nippon Dempa Kogyo Co Ltd | 水晶振動子の金属パターン形成方法、外形加工方法及び露光装置 |
| JP2010263317A (ja) * | 2009-04-30 | 2010-11-18 | Epson Toyocom Corp | 屈曲振動片 |
| JP2011160250A (ja) * | 2010-02-02 | 2011-08-18 | Seiko Epson Corp | 振動体および振動デバイス |
-
2012
- 2012-03-13 JP JP2012056459A patent/JP2013192013A/ja not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56158520A (en) * | 1980-05-12 | 1981-12-07 | Seiko Instr & Electronics Ltd | Oscillator |
| JP2002118441A (ja) * | 2000-10-10 | 2002-04-19 | Citizen Watch Co Ltd | 捩り振動子 |
| JP2006269738A (ja) * | 2005-03-24 | 2006-10-05 | Nippon Dempa Kogyo Co Ltd | 水晶振動子の金属パターン形成方法、外形加工方法及び露光装置 |
| JP2010263317A (ja) * | 2009-04-30 | 2010-11-18 | Epson Toyocom Corp | 屈曲振動片 |
| JP2011160250A (ja) * | 2010-02-02 | 2011-08-18 | Seiko Epson Corp | 振動体および振動デバイス |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015035734A (ja) * | 2013-08-09 | 2015-02-19 | セイコーエプソン株式会社 | 振動素子、振動デバイス、電子機器、および移動体 |
| US9995582B2 (en) | 2013-08-09 | 2018-06-12 | Seiko Epson Corporation | Vibrating element, vibrating device, electronic apparatus, and moving object |
| US9534895B2 (en) | 2014-09-24 | 2017-01-03 | Seiko Epson Corporation | Vibrating element, angular velocity sensor, electronic apparatus, and moving object |
| JP2016176892A (ja) * | 2015-03-23 | 2016-10-06 | セイコーエプソン株式会社 | 角速度検出素子、角速度検出デバイス、電子機器および移動体 |
| JP2016176891A (ja) * | 2015-03-23 | 2016-10-06 | セイコーエプソン株式会社 | 角速度検出素子、角速度検出デバイス、電子機器および移動体 |
| JP6450059B1 (ja) * | 2017-07-24 | 2019-01-09 | 京セラ株式会社 | センサ素子および角速度センサ |
| WO2019021860A1 (ja) * | 2017-07-24 | 2019-01-31 | 京セラ株式会社 | センサ素子および角速度センサ |
| WO2019035238A1 (ja) * | 2017-08-16 | 2019-02-21 | 株式会社村田製作所 | 共振子及び共振装置 |
| JPWO2019035238A1 (ja) * | 2017-08-16 | 2020-04-16 | 株式会社村田製作所 | 共振子及び共振装置 |
| US11368141B2 (en) | 2017-08-16 | 2022-06-21 | Murata Manufacturing Co., Ltd. | Resonator and resonant device |
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