JP2013192013A - Vibration element, vibration device and electronic apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration element capable of exhibiting excellent vibration characteristics, and further to provide a vibration device that is provided with the vibration element and is excellent in reliability and an electronic apparatus.SOLUTION: A vibration element 2 has a base portion 4 and three vibration arms 5, 6 and 7 that extend from the base portion 4 in a y-axis direction and are provided side by side in an x-axis direction. The vibration arms 5 and 6 are subjected to bending vibration (oblique vibration) in a direction having components in both directions of a z-axis direction and the x-axis direction. The vibration arm 7 is subjected to a bending vibration in the z-axis direction and cancels out vibration in the z-axis direction generated by vibration of the vibration arms 5 and 6.

Description

  The present invention relates to a vibration element, a vibration device, and an electronic apparatus.

As a vibration device such as a crystal oscillator, one including a tuning fork type vibration element including a plurality of vibration arms is known (for example, refer to Patent Document 1).
For example, a vibrating device described in Patent Document 1 includes a vibrating element having a base portion having a thickness in the Z-axis direction and two vibrating arms provided side by side in the X-axis direction and extending in the Y-axis direction from the base portion. Each vibrating arm has electrodes. In such a vibration device, two driving arms are vibrated in the X-axis direction in-plane by applying a voltage to the electrodes formed on the driving arms.
Here, the vibration element can be formed by processing a plate-like substrate made of, for example, quartz into a desired shape. Specifically, a vibrating element can be obtained by forming a mask corresponding to the planar shape of the vibrating element on both surfaces of the quartz substrate and etching the quartz substrate through these masks.

  However, there is a limit to the mask formation accuracy, and the other mask may be formed to be shifted in the surface direction of the quartz substrate with respect to one mask due to various causes. In such a case, the shape (cross-sectional shape) of each drive arm does not match the desired shape, and further, since the left and right symmetry is lost, when the drive arm is bent and vibrated in the X-axis direction, it is not in the X-axis direction. Bending vibration occurs in the direction of, specifically the Z-axis direction. As a result, the vibration balance of the drive arm is lost, and it becomes difficult to effectively cancel the vibration, resulting in a problem of increased vibration leakage.

JP 2011-216924 A

  An object of the present invention is to provide a vibration element capable of suppressing vibration leakage by exerting a vibration balance of a vibrating arm and exhibiting excellent vibration characteristics, and having excellent reliability with the vibration element. It is to provide a vibration device and an electronic apparatus.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.
[Application Example 1]
The vibration element of the present invention has three axes orthogonal to each other as a first axis, a second axis, and a third axis,
At least three or more vibrating arms provided on a first surface including the first axis and the second axis;
A base for connecting one end of the vibrating arm,
The vibrating arm includes at least two first vibrating arms having a vibration component in the first plane and a vibration component in the direction of the third axis, and vibration in the direction of the third axis of the first vibrating arm. It is characterized by comprising at least one second vibrating arm that cancels out components.
Thereby, the vibration element which is excellent in vibration balance and can exhibit excellent vibration characteristics can be provided.

[Application Example 2]
In the resonator element according to the aspect of the invention, it is preferable that a vibration component in the first surface of the first vibrating arm is canceled out by the first vibrating arms.
Thereby, the structure of a vibration element can be simplified.
[Application Example 3]
In the resonator element according to the aspect of the invention, it is preferable that the first vibrating arms bend and vibrate symmetrically.
Thereby, the vibrating arm can be vibrated in a more balanced manner.

[Application Example 4]
In the resonator element according to the aspect of the invention, each of the vibrating arms is disposed along the first axis, and extends from the base along the second axis.
Each of the first vibrating arms is preferably disposed at both ends.
Thereby, the vibrating arm can be vibrated in a more balanced manner.

[Application Example 5]
In the resonator element according to the aspect of the invention, it is preferable that a cross-sectional shape of the first vibrating arm includes a portion that is asymmetric with respect to a center line in the width direction of the first vibrating arm.
Thereby, the first vibrating arm can be vibrated obliquely more reliably.
[Application Example 6]
In the resonator element according to the aspect of the invention, it is preferable that the cross-sectional shape of the first vibrating arm includes a portion that is asymmetric with respect to the center line in the width direction and the center line in the thickness direction of the first vibrating arm.
As a result, the first vibrating arm can be vibrated obliquely with a simple configuration.

[Application Example 7]
In the resonator element according to the aspect of the invention, it is preferable that a cross-sectional shape of the vibrating arm is a parallelogram.
As a result, the first vibrating arm can be vibrated obliquely with a simple configuration.
[Application Example 8]
In the resonator element according to the aspect of the invention, at least two second vibrating arms may be provided,
It is preferable that the second vibrating arms bend and vibrate symmetrically with each other.
Thereby, vibration characteristics are further improved.

[Application Example 9]
The vibration device of the present invention includes the vibration element of the present invention,
And a package containing the vibration element.
Thereby, it is possible to provide a vibration device such as an oscillator having excellent reliability.
[Application Example 10]
An electronic apparatus according to the present invention includes the vibration element according to the present invention.
Accordingly, it is possible to provide electronic devices such as a mobile phone, a personal computer, and a digital camera that are excellent in reliability.

It is sectional drawing which shows the vibration device which concerns on 1st Embodiment of this invention. It is a top view which shows the vibration element with which the vibration device shown in FIG. 1 was equipped. It is the sectional view on the AA line in FIG. FIG. 3 is a cross-sectional view for explaining the operation of the vibration element shown in FIG. 2. FIG. 6 is a cross-sectional view illustrating a modification of the vibration element illustrated in FIG. 2. It is sectional drawing for demonstrating the manufacturing method of a vibration element. It is sectional drawing of the vibration element with which the vibration device which concerns on 2nd Embodiment of this invention is provided. FIG. 8 is a cross-sectional view illustrating a modification of the vibration element illustrated in FIG. 7. It is a top view of a vibration element with which a vibration device concerning a 3rd embodiment of the present invention is provided. It is the BB sectional view taken on the line in FIG. It is a top view of a vibration element with which a vibration device concerning a 4th embodiment of the present invention is provided. It is CC sectional view taken on the line in FIG. It is CC sectional view taken on the line in FIG. It is a top view of a vibration element with which a vibration device concerning a 5th embodiment of the present invention is provided. It is a top view of a vibration element with which a vibration device concerning a 6th embodiment of the present invention is provided. It is a top view of a vibration element with which a vibration device concerning a 7th embodiment of the present invention is provided. It is sectional drawing of the vibration element with which the vibration device which concerns on 8th Embodiment of this invention is provided. It is sectional drawing of the vibration element (adjustment arm) with which the vibration device which concerns on 9th Embodiment of this invention is provided. It is sectional drawing of the vibration element (adjustment arm) with which the vibration device which concerns on 10th Embodiment of this invention is provided. It is an electronic device (notebook type personal computer) provided with the vibration element of this invention. It is an electronic device (cellular phone) provided with the vibration element of the present invention. It is an electronic device (digital still camera) provided with the vibration element of the present invention. FIG. 6 is a cross-sectional view illustrating a modification of the vibrating arm of the vibrating element illustrated in FIG. 2.

Hereinafter, a resonator element, a resonator device, and an electronic apparatus of the present invention will be described in detail based on embodiments shown in the accompanying drawings.
<First Embodiment>
1 is a cross-sectional view showing a vibrating device according to the first embodiment of the present invention, FIG. 2 is a top view showing a vibrating element provided in the vibrating device shown in FIG. 1, and FIG. 3 is A in FIG. FIG. 4 is a cross-sectional view for explaining the operation of the vibration element shown in FIG. 2, FIG. 5 is a cross-sectional view showing a modification of the vibration element shown in FIG. 2, and FIG. It is sectional drawing for demonstrating this manufacturing method. In each figure, for convenience of explanation, an X axis (first direction), a Y axis (second direction), and a Z axis (third direction) are illustrated as three axes orthogonal to each other. In the following, the direction parallel to the X axis is “X axis direction (first direction)”, the direction parallel to the Y axis is “Y axis direction (second direction)”, and the direction parallel to the Z axis is “Z Also referred to as “axial direction (third direction)”. In the following, a plane defined by the X axis and the Y axis is also referred to as an “XY” plane, and a plane defined by the Y axis and the Z axis is also referred to as a “YZ plane”. The defined plane is also referred to as “XZ plane”. In the following description, for convenience of explanation, the upper side in FIG. 1 is referred to as “upper” and the lower side is referred to as “lower”.
A vibration device 1 illustrated in FIG. 1 includes a vibration element 2 and a package 9 that houses the vibration element 2. Hereinafter, each part which comprises the vibration device 1 is demonstrated in detail sequentially.

1. First, the vibration element 2 will be described.
As shown in FIG. 2, the vibration element 2 is a three-leg tuning fork type vibration element. The vibration element 2 of the present embodiment is used as a vibrator for generating an electric signal that vibrates at a predetermined frequency (resonance frequency).
Such a vibrating element 2 includes a base 4 and a piezoelectric substrate 3 constituted by three vibrating arms 5, 6, 7 extending from the base 4, and a plurality of electrodes formed on the piezoelectric substrate 3. And have.

  The piezoelectric substrate 3 is made of a piezoelectric material. Examples of such a piezoelectric material include crystal, lithium tantalate, lithium niobate, lithium borate, and barium titanate. In particular, quartz is preferable as the piezoelectric material constituting the piezoelectric substrate 3. When the piezoelectric substrate 3 is made of quartz (Z cut plate or the like), the vibration characteristics (particularly frequency temperature characteristics) of the piezoelectric substrate 3 can be made excellent. Further, the piezoelectric substrate 3 can be formed with high dimensional accuracy by etching. Note that the piezoelectric substrate 3 does not necessarily have piezoelectricity. For example, the vibrating arms 5, 6, and 7 may be vibrated using a piezoelectric film using a silicon substrate.

1-1. Base The base 4 has a plate shape that extends in the XY plane and has a thickness in the Z-axis direction. The base 4 is formed to have a thickness equal to that of the vibrating arms 5, 6, and 7. Three bases 4 are connected to three vibrating arms 5, 6, and 7.
Among these vibrating arms 5, 6, 7, the vibrating arms (first vibrating arms) 5, 6 function as driving arms for driving the vibrating element 2, and the vibrating arm (second vibrating arm) 7 is a vibrating arm. It functions as an adjustment arm for canceling vibrations in the Z direction of the arms 5 and 6. Hereinafter, for convenience of explanation, the vibrating arm 5 and the driving arm 6 are also referred to as “driving arm 5” and “driving arm 6”, respectively, and the vibrating arm 7 is also referred to as “adjustment arm 7”.

  The drive arms 5 and 6 are connected to both ends of the base 4 in the X-axis direction, and the adjustment arm 7 is connected to the center of the base 4 in the X-axis direction. These three vibrating arms 5 to 7 are provided so as to extend in the Y-axis direction from the base 4 so as to be parallel to each other. Further, the three vibrating arms 5 to 7 are spaced apart and arranged at equal intervals in the X-axis direction. Each of the three vibrating arms 5 to 7 has a longitudinal shape, and its end is a fixed end and the tip is a free end.

1-2. Driving arm The driving arm (first vibrating arm) 5 extends in the Y-axis direction. Such a drive arm 5 has a substantially parallelogram-shaped cross section. Specifically, the drive arm 5 is configured by an upper surface (first surface) 511 configured by an XY plane and is shifted to one side (adjustment arm 7 side) in the X-axis direction with respect to the upper surface 511 while configured by an XY plane. A lower surface (second surface) 512, and a pair of side surfaces 513 and 514 connecting the upper surface 511 and the lower surface 512. The lower surface 512 is composed of a plane inclined about the Y axis with respect to both the XY plane and the YZ plane. doing.

By adopting such a shape, the drive arm 5 has an asymmetric cross-sectional shape in the Y-axis direction with respect to the center line L1 in the X-axis direction and the center line L2 in the Z-axis direction. Therefore, as will be described later, when the drive arm 5 is electrically vibrated in the X-axis direction (in-plane direction), vibration in the Z-axis direction (out-of-plane direction) is newly excited by this vibration. The arm 5 is flexibly vibrated (hereinafter also simply referred to as “oblique vibration”) in a direction having both components in the X-axis direction and the Z-axis direction, in other words, in a direction inclined with respect to both the X-axis and Z-axis. be able to.
The drive arm 5 preferably has a part of the lower surface 512 overlapping the upper surface 511 in the Z-axis direction.

  In such a drive arm 5, a pair of first drive electrodes 84 and a pair of second drive electrodes 85 are formed. Specifically, one of the first drive electrodes 84 is formed on the upper surface 511 and the other is formed on the lower surface 512. One of the second drive electrodes 85 is formed on the side surface 513, and the other is formed on the side surface 514. By applying an alternating voltage between the first drive electrode 84 and the second drive electrode, the drive arm 5 can be vibrated obliquely.

  The configuration of the first and second drive electrodes 84 and 85 is not particularly limited, and gold (Au), gold alloy, platinum (Pt), aluminum (Al), aluminum alloy, silver (Ag), silver Alloy, chromium (Cr), chromium alloy, copper (Cu), molybdenum (Mo), niobium (Nb), tungsten (W), iron (Fe), titanium (Ti), cobalt (Co), zinc (Zn), It can be formed of a metal material such as zirconium (Zr) or a conductive material such as indium tin oxide (ITO).

  Among these, as the constituent material of the first and second drive electrodes 84 and 85, it is preferable to use gold (gold, gold alloy) or platinum as a main material, and gold (mainly gold) as a main material. Is more preferable. Au is suitable as an electrode material because it has excellent conductivity (low electrical resistance) and excellent resistance to oxidation. Further, Au can be easily patterned by etching as compared with Pt.

  For example, when the first and second drive electrodes 84 and 85 are made of gold and the piezoelectric substrate 3 is made of quartz, their adhesion is low. Therefore, in such a case, it is preferable to provide a base layer made of Ti, Cr or the like between the first and second drive electrodes 84 and 85 and the piezoelectric substrate 3. Thereby, the adhesion between the underlayer and the drive arm 5 and the adhesion between the underlayer and the first and second drive electrodes 84 and 85 can be made excellent. As a result, it is possible to prevent the first and second drive electrodes 84 and 85 from being detached from the drive arm 5 and to improve the reliability of the vibration element 2.

1-3. Drive Arm The drive arm 6 has the same configuration (shape) as the drive arm 5 except that it is formed symmetrically with the drive arm 5 with respect to the YZ plane. Therefore, the description of the configuration of the drive arm 6 is omitted.
Such a drive arm 6 is formed with a pair of first drive electrodes 84 and a pair of second drive electrodes 85. Specifically, one of the first drive electrodes 84 is formed on the side surface 613, and the other is formed on the side surface 614. One of the second drive electrodes 85 is formed on the upper surface 611, and the other is formed on the lower surface 612.

1-4. Adjustment arm The adjustment arm 7 has a constant thickness (length in the Z-axis direction) and width (length in the X-axis direction) throughout the entire lengthwise direction. Such an adjustment arm 7 vibrates in accordance with the vibration of the drive arms 6 and 7.
Such a vibration element 2 is driven as follows.

  When an alternating voltage is applied between the first drive electrode 84 and the second drive electrode 85 from the power supply 900, the drive arms 5 and 6 have cross-sectional shapes that are asymmetric with respect to the center lines L1 and L2 that intersect the bisection point P, respectively. Therefore, it vibrates in a direction inclined with respect to the Y axis and Z axis (that is, vibrates obliquely). The adjusting arm 7 bends and vibrates in the Z-axis direction and in the direction opposite to the Z-axis direction of the driving arms 5 and 6 simultaneously with the bending vibration of the driving arms 5 and 6.

  In such vibrations, the driving arms 5 and 6 vibrate symmetrically with respect to the YZ plane, and therefore, vibrations in the X-axis direction component of the bending vibrations of the driving arm 5 and bending vibrations of the vibrating arm 6. The vibration in the X-axis direction component is balanced and canceled (cancelled). Therefore, vibration in the X-axis direction is not transmitted to the adjustment arm 7, and the adjustment arm 7 hardly vibrates in the X-axis direction. Further, since the drive arms 5 and 6 and the adjustment arm 7 bend and vibrate in the opposite direction to the Z-axis direction, the vibration of the Z-axis direction component of the bending vibration of the drive arms 5 and 6 and the Z-axis of the adjustment arm 7 The direction vibration is balanced and canceled (cancelled). Therefore, according to the vibration element 2, vibration leakage can be effectively prevented.

  In particular, in the present embodiment, since the two drive arms 5 and 6 that vibrate obliquely are located at both ends of the base portion 4, both the out-of-plane direction and the in-plane direction are balanced (can be driven with good balance). Therefore, the drive arms 5 and 6 and the adjustment arm 7 can be vibrated more stably. Therefore, vibration leakage can be prevented more effectively. In addition, since the vibration element 2 has the adjustment arm 7, the vibration (translational mobility) in the Z-axis direction of the drive arms 5 and 6 is automatically canceled, so that the rotational moment is also canceled and reduced. Become.

  In the vibration element 2, the piezoelectric substrate 3 is manufactured so that the drive arms 5 and 6 are vibrated obliquely. Specifically, as shown in FIG. 6A, first, a substrate 3A for forming the piezoelectric substrate 3 is prepared. Next, as shown in FIG. 6B, masks M1 and M2 corresponding to the shape of the piezoelectric substrate 3 in plan view are formed on the upper surface and the lower surface of the substrate 3A. Next, as shown in FIG. 6C, the substrate 3A is etched through the masks M1 and M2, and then the masks M1 and M2 are removed, whereby the piezoelectric substrate 3 can be formed.

  Here, conventionally, when the misalignment of the masks M1 and M2 (a phenomenon in which one of the masks M1 and M2 shifts in the X axis direction with respect to the other) occurs, the vibrating arm that vibrates only in the X axis direction has a Z axis. Unnecessary vibration in the direction is included, which causes a significant deterioration in vibration characteristics. However, in the vibration element 2, the drive arms 5 and 6 include vibrations in the X-axis direction and vibration in the Z-axis direction, and the adjustment arm 7 cancels out the vibration components in the Z-axis direction of the drive arms 5 and 6. Since it is designed to vibrate in the Z-axis direction, even if the masks M1 and M2 are misaligned as described above, the adjusting arm 7 causes the drive arms 5 and 6 to move in the X-axis direction and the Y-axis direction. The vibration (translational motion) is canceled to some extent, and the rotational moment is also canceled to some extent. Therefore, the deterioration of the vibration characteristics due to the mask displacement can be reduced as compared with the conventional case. Therefore, a decrease in the detection capability of the vibration element 2 can be suppressed, and the manufacturing yield of the vibration element 2 can be improved.

  In the present embodiment, the adjustment arm 7 is not provided with a drive electrode, and the adjustment arm 7 is vibrated by the vibration of the drive arms 5 and 6. However, the adjustment arm 7 is provided with a drive electrode, The adjustment arm 7 may be vibrated in the Z-axis direction by applying a voltage to the drive electrode. As shown in FIG. 5, the electrode arrangement on the adjustment arm 7 in such a case is such that the first drive electrode 84 and the second drive electrode 85 are spaced apart from each other in the Z-axis direction on both sides. In addition, the first drive electrode 84 and the second drive electrode 85 are arranged to face each other in the X-axis direction.

2. Package Next, the package 9 for housing and fixing the vibration element 2 will be described.
As shown in FIG. 1, the package 9 includes a plate-like base substrate 91, a frame-like frame member 92, and a plate-like lid member 93. The base substrate 91, the frame member 92, and the lid member 93 are stacked in this order from the lower side to the upper side. The base substrate 91 and the frame member 92 are formed of a ceramic material or the like, which will be described later, and are joined by being integrally fired. The frame member 92 and the lid member 93 are joined by an adhesive or a brazing material. The package 9 houses the vibration element 2 in the internal space S defined by the base substrate 91, the frame member 92, and the lid member 93. In addition to the vibration element 2, an electronic component (oscillation circuit) that drives the vibration element 2 and the like can be housed in the package 9.

The constituent material of the base substrate 91 is preferably an insulating (non-conductive) material, for example, various ceramic materials such as various glass, oxide ceramics, nitride ceramics, carbide ceramics, polyimide, etc. Various resin materials such as can be used.
In addition, as the constituent material of the frame member 92 and the lid member 93, for example, the same constituent material as that of the base substrate 91, various metal materials such as Al and Cu, various glass materials, and the like can be used.

The vibration element 2 described above is fixed to the upper surface of the base substrate 91 via a fixing material 96. The fixing material 96 is made of, for example, an adhesive such as epoxy, polyimide, or silicone. For such a fixing material 96, an uncured (unsolidified) adhesive is applied onto the base substrate 91, and after placing the vibration element 2 on the adhesive, the adhesive is cured or solidified. Is formed. Thereby, the vibration element 2 is reliably fixed to the base substrate 91.
In addition, you may perform this fixation using electrically conductive adhesives, such as an epoxy type, a polyimide type, and a silicone type containing electroconductive particle.

Second Embodiment
Next, a second embodiment of the vibration device of the present invention will be described.
FIG. 7 is a cross-sectional view of a vibration element included in the vibration device according to the second embodiment of the invention, and FIG. 8 is a cross-sectional view showing a modification of the vibration element shown in FIG.
Hereinafter, the second embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.
The second embodiment is substantially the same as the first embodiment except that the configuration of the vibration element, specifically, the method for vibrating the drive arm is different. In FIG. 7, the same reference numerals are given to the same components as those in the above-described embodiment. 7 is a cross-sectional view corresponding to the cross-sectional view taken along the line AA of FIG.

  As shown in FIG. 7, in the vibration element 2 of the present embodiment, the piezoelectric element 23 is formed on the upper surface of the drive arm 5, and the piezoelectric element 24 is formed on the upper surface of the drive arm 6. These piezoelectric elements 23 and 24 have a function of expanding and contracting by energization to cause the drive arms 5 and 6 to vibrate obliquely. As described above, when the driving arms 5 and 6 are vibrated using the piezoelectric elements 23 and 24, the piezoelectric substrate 3 can be formed of, for example, a silicon substrate.

  The piezoelectric element 23 is configured by laminating a first electrode layer 231, a piezoelectric layer (piezoelectric thin film) 232, and a second electrode layer 233 in this order on the driving arm 5. Similarly, the piezoelectric element 24 is configured by laminating a first electrode layer 241, a piezoelectric layer (piezoelectric thin film) 242, and a second electrode layer 243 on the driving arm 6 in this order. Since the piezoelectric elements 23 and 24 have the same configuration, the piezoelectric element 23 will be described below as a representative.

  Examples of the constituent material of the first and second electrode layers 231 and 233 include gold (Au), gold alloy, platinum (Pt), aluminum (Al), aluminum alloy, silver (Ag), silver alloy, and chromium (Cr ), Chromium alloy, copper (Cu), molybdenum (Mo), niobium (Nb), tungsten (W), iron (Fe), titanium (Ti), cobalt (Co), zinc (Zn), zirconium (Zr), etc. A conductive material such as indium tin oxide (ITO) can be used.

Examples of the constituent material of the piezoelectric layer 232 include zinc oxide (ZnO), aluminum nitride (AlN), lithium tantalate (LiTaO ₃ ), lithium niobate (LiNbO ₃ ), potassium niobate (KNbO ₃ ), and tetraboron. Examples thereof include lithium oxide (Li ₂ B ₄ O ₇ ), barium titanate (BaTiO ₃ ), PZT (lead zirconate titanate), and AIN and ZnO can be used.

  In such a configuration, when a voltage is applied between the first electrode layers 231 and 241 and the second electrode layers 233 and 243 by the power supply 900, the piezoelectric elements 23 and 24 expand or contract in the Y-axis direction. The drive arms 5 and 6 bend and vibrate in the Z-axis direction at a certain frequency (resonance frequency). At this time, the drive arms 5 and 6 are excited by a new bending vibration in the X-axis direction due to the shape by the vibration in the Z-axis direction, whereby the drive arms 5 and 6 are bent in the X-axis direction. Although the vibration and the bending vibration in the Z-axis direction are combined to cause the oblique vibration, the drive arms 5 and 6 are inclined with respect to the Z-axis and the X-axis because the cross-sectional shapes of the drive arms 5 and 6 are asymmetric with respect to the XY plane and the YZ plane. Vibrates in the direction (ie, obliquely vibrates). Further, the drive arms 5 and 6 bend and vibrate symmetrically with respect to the ZY plane.

One adjusting arm 7 bends and vibrates in the Z-axis direction and in the direction opposite to the Z-axis direction vibration of the driving arms 5 and 6 simultaneously with the bending vibration of the driving arms 5 and 6. Thereby, similarly to the first embodiment described above, vibration leakage can be effectively prevented.
In the present embodiment, the piezoelectric elements 23 and 24 are provided on the upper surfaces 511 and 611 of the drive arms 5 and 6, but the arrangement of the piezoelectric elements 23 and 24 is not particularly limited. For example, as shown in FIG. 8, the piezoelectric element 23 may be formed on the side surface 513 of the driving arm 5 on the adjustment arm 7 side, and the piezoelectric element 24 may be formed on the side surface 613 of the vibrating arm 6 on the adjustment arm 7 side. Good. With such a configuration, the drive arms 5 and 6 can be vibrated obliquely by applying a voltage in the same manner as described above.

Here, the drive arms 5 and 6 can vibrate both in-plane (X-axis direction) and out-of-plane (Z-axis direction). At this time, since the impedance becomes lower as the driving direction and the vibration direction are closer, the driving direction can be selected. That is, FIG. 7 shows a lower impedance when vibrating in a direction closer to the Z axis, and FIG. 8 shows a lower impedance when vibrating in a direction closer to the X axis direction.
In the present embodiment, the adjustment arm 7 is not provided with a piezoelectric element, and the adjustment arm 7 vibrates in response to the vibrations of the drive arms 5 and 6. The adjusting arm 7 may be vibrated in the Z-axis direction by expanding and contracting the body element.

<Third Embodiment>
Next, a third embodiment of the vibration device of the invention will be described.
FIG. 9 is a plan view of a resonator element included in the resonator device according to the third embodiment of the invention, and FIG. 10 is a cross-sectional view taken along line BB in FIG. In FIGS. 9 and 10, illustration of electrodes and the like is omitted for convenience of explanation.

Hereinafter, the third embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.
The third embodiment is substantially the same as the first embodiment except that the configuration of the vibration element (number of vibrating arms) is different. In FIG. 9 and FIG. 10, the same reference numerals are given to the same configurations as those of the above-described embodiment.

As shown in FIG. 9, the vibration element 2 of the present embodiment has two adjustment arms 7 and 8 between the drive arms 5 and 6. The drive arm 5 is provided with a piezoelectric element 23, and the drive arm 6 is provided with a piezoelectric element 24.
As shown in FIG. 10, the vibrating arms 5 and 6 each vibrate obliquely. Since these vibrating arms 5 and 6 bend and vibrate symmetrically with respect to the YZ plane, the vibration of the X-axis direction component of the driving arm 5 and the vibration of the X-axis direction component of the driving arm 6 are canceled out. On the other hand, the adjusting arms 7 and 8 bend and vibrate in the Z axis direction and opposite to the vibration direction of the driving arms 5 and 6. As a result, the vibrations in the Z-axis direction component of the drive arms 5 and 6 and the vibrations in the Z-axis direction of the adjustment arms 7 and 8 are canceled out.

As described above, according to the vibration element 2 of the present embodiment, the leakage vibration generated by the four vibrating arms 5, 6, 7, and 8 can be canceled, and the vibration leakage can be prevented. As a result, excellent vibration characteristics can be exhibited. In addition, for example, the signal strength obtained is higher than that of the configuration in which the vibrating arm as in the first embodiment is three.
Also according to the third embodiment, the same effects as those of the first embodiment described above can be exhibited.

<Fourth embodiment>
Next, a fourth embodiment of the vibration device of the invention will be described.
FIG. 11 is a plan view of a vibration element included in the vibration device according to the fourth embodiment of the invention, and FIGS. 12 and 13 are cross-sectional views taken along the line CC in FIG. In addition, in FIG.11, FIG12 and FIG.13, illustration of an electrode etc. is abbreviate | omitted for convenience of explanation.

Hereinafter, the fourth embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.
The fourth embodiment is substantially the same as the third embodiment except that the configuration of the vibration element (vibration direction of the adjusting arm) is different. In FIG. 11, FIG. 12, and FIG. 13, the same reference numerals are given to the same configurations as those of the above-described embodiment.

As shown in FIG. 11, in the vibration element 2 of this embodiment, the adjustment arms 7 and 8 are caused to vibrate obliquely in the same manner as the drive arms 5 and 6. For this reason, the adjusting arms 7 and 8 constitute an asymmetric part having a substantially parallelogram-shaped cross-sectional shape, similar to the vibrating arms 5 and 6. The drive arm 6 and the adjustment arm 7 have the same shape (cross-sectional shape), and the drive arm 5 and the adjustment arm 8 have the same shape. In addition, the drive arm 6 and the adjustment arm 8, and the drive arm 5 and the adjustment arm 7 are symmetrical with respect to the YZ plane.
Such a vibration element 2 may vibrate as shown in FIG. 12 or vibrate as shown in FIG. 13 depending on the vibration modes of the drive arms 5 and 6.

In FIG. 12, the adjustment arms 7 and 8 bend and vibrate in the direction opposite to the vibration direction of the drive arms 5 and 6. When the vibrating arms 5 and 6 are bent and vibrated outwardly obliquely upward, the adjusting arms 7 and 8 are respectively bent and vibrated outwardly obliquely downward, and when the driving arms 5 and 6 are respectively bent and vibrated downwardly obliquely inside, the adjusting arm 7 , 8 bend and vibrate obliquely upward inward.
In FIG. 13, the adjustment arms 7 and 8 bend and vibrate in the direction opposite to the vibration direction of the drive arms 5 and 6. When the vibrating arms 5 and 6 bend and vibrate outwardly obliquely downward, the adjusting arms 7 and 8 bend and vibrate outwardly obliquely upward, respectively, and when the driving arms 5 and 6 bend and vibrate respectively inwardly obliquely upward, Each of 8 is flexibly vibrated inward and downward. Although not shown, when the vibrating arms 5 and 6 are bent and vibrated outwardly and obliquely downward, the adjusting arms 7 and 8 are respectively bent and vibrated obliquely upward and the driving arms 5 and 6 are respectively inclined obliquely upward and inward. When bending vibration is performed, the adjustment arms 7 and 8 may be configured to bend and vibrate outwardly and obliquely downward.

Thereby, the vibration of the drive arms 5 and 6 and the vibration of the adjustment arms 7 and 8 are canceled out, and vibration leakage can be prevented. In such a configuration, all the vibrating arms 5, 6, 7, 8 are vibrated obliquely, so that, for example, the vibrating arms 5, 8 are flexibly vibrated in the Z-axis direction, compared with the third embodiment described above. Excellent balance.
According to the fourth embodiment, the same effect as that of the first embodiment described above can be exhibited.

<Fifth Embodiment>
Next, a fifth embodiment of the vibration device of the invention will be described.
FIG. 14 is a plan view of a vibration element included in the vibration device according to the fifth embodiment of the invention. In FIG. 14, for convenience of explanation, illustration of electrodes and piezoelectric elements is omitted.
Hereinafter, the fifth embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.

The fifth embodiment is substantially the same as the third embodiment except that the configuration of the vibration element (arrangement of the vibrating arms) is different. In FIG. 14, the same reference numerals are given to the same components as those in the above-described embodiment.
As shown in FIG. 14, in the vibration element 2 of the present embodiment, the adjustment arms 7 and 8 are located at both ends, and the drive arms 5 and 6 are provided between the adjustment arms 7 and 8.
According to the fifth embodiment, the same effect as that of the first embodiment described above can be exhibited.

<Sixth Embodiment>
Next, a sixth embodiment of the vibration device of the invention will be described.
FIG. 15 is a plan view of a vibration element included in the vibration device according to the sixth embodiment of the invention. In FIG. 15, for convenience of explanation, illustration of electrodes and piezoelectric elements is omitted.
Hereinafter, the sixth embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

The sixth embodiment is substantially the same as the third embodiment except that the configuration of the vibration element (the extending direction of the first vibrating arm) is different. In FIG. 15, the same reference numerals are given to the same components as those in the above-described embodiment.
As shown in FIG. 15, in the vibration element 2 of the present embodiment, the drive arms 5 and 6 extend in directions intersecting the Y-axis direction and the X-axis direction, and are provided symmetrically with respect to the YZ plane.
Also according to the sixth embodiment, the same effects as those of the first embodiment described above can be exhibited.

<Seventh embodiment>
Next, a seventh embodiment of the vibration device of the invention will be described.
FIG. 16 is a plan view of a vibration element included in the vibration device according to the seventh embodiment of the invention.
Hereinafter, the seventh embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

The seventh embodiment is substantially the same as the first embodiment except that the configuration of the vibration element (configuration of the base) is different. In FIG. 16, the same reference numerals are given to the same components as those in the above-described embodiment. In FIG. 16, the piezoelectric element is not shown for convenience of explanation.
In the vibration element 2 of the present embodiment, the base portion 4 includes a main body 48 and a pair of fixed arms 491 and 492 extending in the X-axis direction from both sides of the main body 48. The driving arm 5 is connected to the distal end portion of the fixed arm 491, and the driving arm 6 is connected to the distal end portion of the fixed arm 492.
Also according to the seventh embodiment, the same effect as that of the first embodiment described above can be exhibited.

<Eighth Embodiment>
Next, an eighth embodiment of the vibration device of the invention will be described.
FIG. 17 is a cross-sectional view of a vibration element included in the vibration device according to the eighth embodiment of the invention. In FIG. 17, illustration of electrodes and the like is omitted for convenience of explanation.
The eighth embodiment is substantially the same as the first embodiment except that the vibration directions of the respective vibrating arms are different. In FIG. 17, the same reference numerals are given to the same configurations as those in the above-described embodiment.
As shown in FIG. 17, in the vibration element 2 of the present embodiment, the drive arms 5 and 6 vibrate asymmetrically with respect to the YZ plane toward the same side in the Z-axis direction. Therefore, the vibration of the X-axis direction component of the bending vibration of the drive arm 5 and the vibration of the X-axis direction component of the bending vibration of the vibrating arm 6 are not canceled (cancelled).

  On the other hand, the adjusting arm 7 bends and vibrates in the direction opposite to the vibration of the driving arms 5 and 6 in the Z-axis direction simultaneously with the bending vibration of the driving arms 5 and 6, thereby canceling the vibration in the Z-axis direction. Here, as described above, since the vibration components in the X-axis direction of the drive arms 5 and 6 are not canceled, the adjustment arm 7 vibrates in the X-axis direction at this time. Thereby, the vibration component in the X-axis direction can be canceled.

In this way, the three vibrating arms 5, 6, and 7 vibrate so that the sum (combined vector) of these vibration components (vectors) becomes 0 (zero), thereby preventing vibration leakage of the vibration element 2. can do.
Such an eighth embodiment can also exhibit the same effects as those of the first embodiment described above.

<Ninth Embodiment>
Next, a ninth embodiment of the vibration device of the invention will be described.
FIG. 18 is a cross-sectional view of a vibration element (adjustment arm) included in the vibration device according to the ninth embodiment of the invention.
Hereinafter, the ninth embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.

The ninth embodiment is substantially the same as the first embodiment except that the vibration element is used as a gyro element. In FIG. 18, the same components as those in the first embodiment described above are denoted by the same reference numerals.
As shown in FIG. 18, the adjustment arm (detection arm) 7 of the vibration element 2 is formed with first to fourth detection electrodes 86a, 86b, 86c, 86d for detecting angular velocities. The first detection electrode 86 a is formed on the upper surface of the adjustment arm 7, the second detection electrode 86 b is formed on the lower surface of the adjustment arm 7, and the third detection electrode 86 c is one side surface of the adjustment arm 7. The fourth detection electrode 86 d is formed on the other side surface of the adjustment arm 7.

  The configuration of each of the detection electrodes 86a to 86d is not particularly limited, and gold (Au), gold alloy, platinum (Pt), aluminum (Al), aluminum alloy, silver (Ag), silver alloy, chromium (Cr). , Chromium alloy, copper (Cu), molybdenum (Mo), niobium (Nb), tungsten (W), iron (Fe), titanium (Ti), cobalt (Co), zinc (Zn), zirconium (Zr), etc. A conductive material such as a metal material or indium tin oxide (ITO) can be used.

  When an angular velocity ω around the Y axis is applied to the vibrating element 2 in a state where the vibrating arms 5, 6, 7 are flexibly vibrated in the same manner as in the first embodiment described above, the adjustment arm 7 is corriolis. A force acts, and a new vibration A in the X-axis direction is excited on the adjustment arm 7. Then, the angular velocity ω about the Y axis is obtained by detecting the distortion in the X axis direction of the adjusting arm 7 generated by the new vibration A by the first to fourth detection electrodes 86a to 86d.

Thus, when the vibration element 2 is used as a gyro element, the vibration in the X-axis direction and the vibration in the Z-axis direction can be separated, so that the angular velocity ω can be detected with high accuracy. Note that the vibration in the X-axis direction can be made almost 0 (zero) by tuning, and in this case, the accuracy becomes higher.
In the present embodiment, a weight (hammer head) may be formed at the tip of each vibrating arm 5, 6, 7.
Also in the ninth embodiment, the same effect as that of the first embodiment described above can be exhibited.

<Tenth Embodiment>
Next, a tenth embodiment of the vibration device of the invention will be described.
FIG. 19 is a cross-sectional view of a vibration element (adjustment arm) included in the vibration device according to the tenth embodiment of the invention.
Hereinafter, the tenth embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.

The tenth embodiment is substantially the same as the second embodiment except that the vibration element is used as a gyro element. In FIG. 19, the same components as those in the above-described embodiment are denoted by the same reference numerals.
As shown in FIG. 19, on the upper surface of the adjustment arm (detection arm) 7 of the vibration element 2, two piezoelectric elements 25 and 26 for detecting the angular velocity are formed side by side in the X-axis direction. The piezoelectric element 25 is configured by laminating a first electrode layer 251, a piezoelectric layer 252, and a second electrode layer 253 in this order. The piezoelectric element 26 is configured by laminating a first electrode layer 261, a piezoelectric layer 262, and a second electrode layer 263 in this order. The piezoelectric layers 252 and 262 are integrally formed. The piezoelectric layers 252 and 262 do not have to be formed integrally.

  When an angular velocity ω around the Y axis is applied to the vibrating element 2 in a state where the vibrating arms 5, 6, 7 are flexibly vibrated in the same manner as in the second embodiment described above, each vibrating arm 5, A new vibration (vibration in the direction of the arrow in FIG. 18) is excited at 6 and 7, respectively. Then, the angular velocity ω about the Y axis is obtained by detecting the distortion in the X axis direction of the adjusting arm 7 generated by the new vibration by the two piezoelectric elements 25 and 26.

In the present embodiment, when the adjusting arm 7 is driven, a driving piezoelectric element may be formed between the piezoelectric elements 25 and 26. Instead of the piezoelectric elements 25 and 26, a detection electrode as described in the ninth embodiment may be provided.
The tenth embodiment can also exhibit the same effects as those of the first embodiment described above.

The vibration device including the vibration element of the present invention (vibration device of the present invention) has been described above.
In the embodiment described above, the case where the vibration element is used as the vibrator has been described. However, the vibration element can be used as the angular velocity detection element. In this case, for example, in the case of the first embodiment described above, a detection electrode for angular velocity detection is formed on the adjustment arm (detection arm) 7. Then, the drive arms 5 and 6 and the adjustment arm 7 are bent and vibrated as described above. When an angular velocity around the Y axis is applied to the vibration element 2 in this state, Coriolis force acts on the adjustment arm 7. Then, a new vibration in the X-axis direction is excited on the adjustment arm 7. Then, the angular velocity ω about the Y axis is obtained by detecting the distortion in the X axis direction of the adjusting arm 7 generated by the new vibration by the detection electrode.

Next, an electronic device including the resonator element according to the invention will be described in detail with reference to FIGS.
FIG. 20 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic device including the resonator element according to the invention is applied. In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 100. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably.
Such a personal computer 1100 incorporates the vibration device 1 that functions as a filter, a resonator, a reference clock, and the like.

FIG. 21 is a perspective view illustrating a configuration of a mobile phone (including PHS) to which an electronic device including the resonator element according to the invention is applied. In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and the display unit 100 is disposed between the operation buttons 1202 and the earpiece 1204.
Such a cellular phone 1200 incorporates the vibration device 1 that functions as a filter, a resonator, or the like.

FIG. 22 is a perspective view illustrating a configuration of a digital still camera to which an electronic device including the resonator element according to the invention is applied. In this figure, connection with an external device is also simply shown.
Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

A display unit is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to display based on an imaging signal from the CCD. The display unit is a finder that displays an object as an electronic image. Function.
A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.
When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308.

In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.
Such a digital still camera 1300 incorporates the vibration device 1 that functions as a filter, a resonator, and the like.

  In addition to the personal computer shown in FIG. 20 (mobile personal computer), the mobile phone shown in FIG. 21, and the digital still camera shown in FIG. Inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, televisions Telephone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (for example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices, instruments Class (eg, vehicle, aircraft) Gauges of a ship), can be applied to a flight simulator or the like.

As described above, the vibration element, the vibration device, and the electronic apparatus of the present invention have been described based on the illustrated embodiment. However, the present invention is not limited to this, and the configuration of each unit may be any arbitrary function having the same function. It can be replaced with that of the configuration. Further, the present invention may be a combination of any two or more configurations (features) of the above embodiments.
In the above-described embodiment, the cross-sectional shape of the vibrating arm that vibrates obliquely has been described as a substantially parallelogram. However, the cross-sectional shape is not limited to this as long as it is asymmetric with respect to the center lines L1 and L2. As a modification, for example, shapes as shown in FIGS.
Further, by connecting an oscillation circuit to the resonator element of the present invention, for example, a crystal oscillator (SPXO), a voltage controlled crystal oscillator (VCXO), a temperature compensated crystal oscillator (TCXO), a crystal oscillator with a thermostat (OCXO), etc. In addition to the piezoelectric oscillator, the present invention can be applied to a vibrating device such as a gyro sensor.

  M1, M2 ... Mask L1, L2 ... Center line 1 ... Vibrating device 2 ... Vibrating element 23, 24, 25, 26 ... Piezoelectric element 231, 241, 251, 261 ... First electrode layer 232, 242, 252, 262 ... Piezoelectric layer 233, 243, 253, 263 ... Second electrode layer 3 ... Piezoelectric substrate 3A ... Substrate 4 ... Base 48 ... Main body 491, 492 ... Fixed arm 5 ... Drive arm 511 ... Upper surface 512 ... Lower surface 513 ... Side surface 514 ... Side 6 ... Drive arm 611 ... Top 612 ... Bottom 613 ... Side 614 ... Side 7, 8 ... Adjustment arm 84 ... First drive electrode 85 ... Second drive electrode 86a ... First detection electrode 86b ... Second detection electrode 86c ... third detection electrode 86d ... fourth detection electrode 9 ... package 91 ... base substrate 92 ... frame member 93 ... lid member 96 ... fixing material 900 ... power supply 10 ... Display unit 1100 ... Personal computer 1102 ... Keyboard 1104 ... Main unit 1106 ... Display unit 1200 ... Mobile phone 1202 ... Operation buttons 1204 ... Earpiece 1206 ... Mouthpiece 1300 Digital still camera 1302 ... Case 1304 ... Light receiving unit 1306 ... Shutter button 1308 ... Memory 1312 ... Video signal output terminal 1314 ... Input / output terminal 1430 ... Television monitor 1440 ... Personal computer S ... Internal space

Claims (10)

Three axes orthogonal to each other are defined as a first axis, a second axis, and a third axis,
At least three or more vibrating arms provided on a first surface including the first axis and the second axis;
A base for connecting one end of the vibrating arm,
The vibrating arm includes at least two first vibrating arms having a vibration component in the first plane and a vibration component in the direction of the third axis, and vibration in the direction of the third axis of the first vibrating arm. A vibrating element comprising at least one second vibrating arm that cancels out components.   The vibration element according to claim 1, wherein vibration components in the first surface of the first vibrating arms are canceled out by the first vibrating arms.   The vibrating element according to claim 1, wherein the first vibrating arms are flexibly vibrated symmetrically with each other. Each of the vibrating arms is disposed along the first axis and extends from a base along the second axis;
The vibrating element according to claim 1, wherein each of the first vibrating arms is disposed at both ends.   5. The vibration element according to claim 1, wherein the cross-sectional shape of the first vibrating arm includes a portion that is asymmetric with respect to a center line in the width direction of the first vibrating arm.   5. The cross-sectional shape of the first vibrating arm includes a portion that is asymmetric with respect to the center line in the width direction and the center line in the thickness direction of the first vibrating arm. Vibration element.   The vibrating element according to claim 5, wherein a cross-sectional shape of the vibrating arm is a parallelogram. At least two second vibrating arms are provided,
The vibrating element according to claim 1, wherein the second vibrating arms vibrate and vibrate symmetrically with each other. The vibration element according to any one of claims 1 to 8,
A vibration device comprising: a package housing the vibration element.   An electronic apparatus comprising the vibration element according to claim 1.

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