JP2016176893A - Angular velocity detection element, angular velocity detection device, electronic apparatus and mobile body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an angular velocity detection element capable of reducing unnecessary vibrations and reducing decrease in detection accuracy, an angular velocity detection device, an electronic apparatus and a mobile body.SOLUTION: A gyro element 1 includes a support part 29 and first and second vibration systems 20A, 20B supported by the support part 29. The first vibration system 20A includes a base part 21 and two vibration arms 22, 23 connected to the base part 21; the second vibration system 20B includes a base part 24 and two vibration arms 25, 26 connected to the base part 24. The base parts 21, 24 are spaced apart from each other in an X axis direction. In a drive vibration mode, the vibration arms 22, 23 vibrate in a flexural manner with the same phases along the X axis, while the vibration arms 25, 26 vibrate in a flexural manner with the same phase along the X axis and with opposite phases to those of the vibration arms 22, 23.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an angular velocity detection element, an angular velocity detection device, an electronic apparatus, and a moving body.

  Conventionally, as a gyro element for detecting an angular velocity, a gyro element as disclosed in Patent Document 1 is known. The gyro element described in Patent Document 1 includes a base, a pair of vibrating arms extending from the base to one side of the Y axis, and a pair of detection arms extending from the base to the other side of the Y axis. Have. In this gyro element, when an angular velocity around the Y axis is applied in a state where the pair of vibrating arms is driven in the driving vibration mode of the X axis reverse phase mode, the detection vibration mode of the Z axis reverse phase mode is applied to the pair of detection arms. The angular velocity around the Y axis can be detected based on the signal generated by the vibration. However, the gyro element of Patent Document 1 has a problem that unnecessary vibration modes (particularly, the X-axis bi-bending vibration mode) are easily coupled, thereby reducing the angular velocity detection accuracy.

JP2013-205329A

  An object of the present invention is to provide an angular velocity detection element, an angular velocity detection device, an electronic apparatus, and a moving body that can reduce unnecessary vibrations and reduce a decrease in detection accuracy.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

[Application Example 1]
The angular velocity detection element of this application example includes a vibration substrate including a support portion, and a first vibration system and a second vibration system that are supported by the support portion and are spaced apart from each other in the first direction.
The first vibration system includes a first base supported by the support portion, and two first vibrating arms connected to the first base,
The second vibration system includes a second base portion supported by the support portion, and two second vibration arms connected to the second base portion,
The first base and the second base are spaced apart in the first direction,
In the drive vibration mode, the two first vibrating arms are flexibly vibrated in the same direction in the first direction, and the two second vibrating arms are in phase in the first direction and the two first vibrating arms are It is characterized by bending vibration in the opposite phase.
Accordingly, the resonance frequency of the unnecessary vibration mode (particularly, the bi-bending vibration mode in the first direction) can be separated from the resonance frequency of the detection vibration mode. Therefore, coupling of unnecessary vibration to the detection vibration mode is reduced, and the angular velocity detection element having excellent detection accuracy is obtained.

[Application Example 2]
In the angular velocity detection element of this application example, in the driving vibration mode,
The two first vibrating arms bend and vibrate in the same phase in the first direction, and bend and vibrate in the opposite phase in the thickness direction of the support portion,
It is preferable that the two second vibrating arms bend and vibrate in the same phase in the first direction, and bend and vibrate in the opposite phase in the thickness direction of the support portion.
As a result, vibration in the Z-axis direction is canceled, and vibration leakage can be reduced.

[Application Example 3]
In the angular velocity detection element of this application example, the resonance frequency of the drive vibration mode is f1,
The resonance frequency of the detection vibration mode excited by the addition of the angular velocity around the detection axis when driven in the drive vibration mode is f2,
When the resonance frequency of the bi-bending vibration mode in the first direction is f3,
It is preferable to satisfy the relationship of f3 <f1 <f2.
Thereby, the resonance frequency of the bi-bending vibration mode can be separated from the resonance frequency of the detection vibration mode.

[Application Example 4]
In the angular velocity detection element of this application example, it is preferable that the relationship of (f3-f1) / f1> 2% is satisfied.
Thereby, the resonance frequency of the bi-bending vibration mode can be further separated from the resonance frequency of the detection vibration mode.

[Application Example 5]
In the angular velocity detection element of this application example, it is preferable that the relationship of (f3-f1) / f1> 3% is satisfied.
Thereby, the resonance frequency of the bi-bending vibration mode can be further separated from the resonance frequency of the detection vibration mode.

[Application Example 6]
In the angular velocity detection element of this application example, the vibration substrate is made of a non-piezoelectric material,
Preferably, each of the first vibrating arm and the second vibrating arm is provided with a driving unit that excites the driving vibration mode and a detection unit that detects an angular velocity around a detection axis.
This simplifies the configuration of the angular velocity detection element.

[Application Example 7]
In the angular velocity detecting element of this application example, the vibration substrate is made of a piezoelectric material,
Each of the first vibrating arm and the second vibrating arm is provided with a drive unit that excites the drive vibration mode,
Each of the first base and the second base is preferably provided with a detection unit that detects an angular velocity around a detection axis.
This simplifies the configuration of the angular velocity detection element.

[Application Example 8]
The angular velocity detection device of the application example includes the angular velocity detection element of the application example,
And a package that accommodates the angular velocity detection element.
Thereby, a highly reliable angular velocity detection device is obtained.

[Application Example 9]
An electronic apparatus according to this application example includes the angular velocity detection element according to the application example described above.
Thereby, a highly reliable angular velocity detection device is obtained.

[Application Example 10]
The moving body of this application example includes the angular velocity detection element of the above application example.
Thereby, a mobile body with high reliability is obtained.

It is a top view which shows 1st Embodiment of the gyro element (angular velocity detection element) of this invention. It is the sectional view on the AA line in FIG. It is a figure which shows the drive vibration mode of the gyro element shown in FIG. (A) is a schematic diagram which shows drive vibration mode, (b) is a schematic diagram which shows detection vibration mode. (A) is a figure which shows the detection signal at the time of drive vibration mode, (b) is a figure which shows the detection signal at the time of detection vibration mode. It is a schematic diagram which shows the X-axis bibending vibration mode which is an unnecessary vibration mode. It is a graph which shows the relationship between L2 / L1 and (f3-f1) / f1. It is sectional drawing which shows the modification of the cross-sectional shape of a vibrating arm. It is a top view which shows 2nd Embodiment of the gyro element (angular velocity detection element) of this invention. (A) is the BB sectional view taken on the line in FIG. 9, (b) is CC sectional view taken on the line in FIG. (A) is a schematic diagram which shows drive vibration mode, (b) is a schematic diagram which shows detection vibration mode. It is a figure which shows suitable embodiment of the angular velocity detection device of this invention, (a) is a top view, (b) is the DD sectional view taken on the line in (a). It is sectional drawing which shows suitable embodiment of a gyro sensor. 1 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic apparatus of the present invention is applied. It is a perspective view which shows the structure of the mobile telephone (a smart phone, PHS etc. are included) to which the electronic device of this invention is applied. It is a perspective view which shows the structure of the digital still camera to which the electronic device of this invention is applied. It is a perspective view which shows the structure of the motor vehicle to which the mobile body of this invention is applied.

  Hereinafter, an angular velocity detecting element, an angular velocity detecting device, an electronic apparatus, and a moving body of the present invention will be described in detail based on embodiments shown in the accompanying drawings.

1. Angular Velocity Detection Element <First Embodiment>
FIG. 1 is a plan view showing a first embodiment of a gyro element (angular velocity detecting element) of the present invention. 2 is a cross-sectional view taken along line AA in FIG. FIG. 3 is a diagram showing a driving vibration mode of the gyro element shown in FIG. 4A is a schematic diagram showing a driving vibration mode, and FIG. 4B is a schematic diagram showing a detection vibration mode. 5A is a diagram illustrating a detection signal in the driving vibration mode, and FIG. 5B is a diagram illustrating a detection signal in the detection vibration mode. FIG. 6 is a schematic diagram showing an X-axis bi-bending vibration mode which is an unnecessary vibration mode. FIG. 7 is a graph showing the relationship between L2 / L1 and (f3-f1) / f1. FIG. 8 is a cross-sectional view showing a modification of the cross-sectional shape of the vibrating arm. Hereinafter, the three axes orthogonal to each other are referred to as an X axis, a Y axis, and a Z axis. For convenience of explanation, the + Z axis side is also referred to as “upper side”, and the −Z axis side is also referred to as “lower side”.

  A gyro element (angular velocity detection element) 1 shown in FIG. 1 is a gyro element that can detect an angular velocity ωy about the Y axis. Such a gyro element 1 includes a vibration substrate 2, driving piezoelectric elements (piezoelectric elements) 31, 32, 33, 34, 35, 36, 37, 38 as a drive unit disposed on the vibration substrate 2, vibration Detecting piezoelectric elements (piezoelectric elements) 61, 62, 63, 64 as detection units disposed on the substrate 2, various terminals 51, 52, 53, 54 disposed on the vibration substrate 2, and disposed on the vibration substrate 2 A mass adjusting film 41.

  Hereinafter, the configuration of the gyro element 1 will be described in detail. In the following, the vibration mode in a state where the angular velocity ωy is not applied is also referred to as “drive vibration mode”, and the angular velocity ωy applied when driving in the drive vibration mode. The new vibration mode excited by is also referred to as “detection vibration mode”.

The constituent material of the vibration substrate 2 is not particularly limited as long as it can exhibit desired vibration characteristics, and various piezoelectric materials and various non-piezoelectric materials can be used. Examples of the piezoelectric material constituting the vibration substrate 2 include quartz, lithium niobate (LiNbO ₃ ), lithium tantalate (LiTaO ₃ ), lead zirconate titanate (PZT), and lithium tetraborate (Li ₂ B _4). Various pressure materials such as O ₇ ) and langasite (La ₃ Ga ₅ SiO ₁₄ ) can be used.

  On the other hand, examples of the non-piezoelectric material constituting the vibration substrate 2 include silicon and quartz. In particular, silicon is preferable as the non-piezoelectric material constituting the vibration substrate 2. When the vibration substrate 2 is made of silicon, the vibration substrate 2 having excellent vibration characteristics can be realized at a relatively low cost. Further, the vibration substrate 2 can be formed with high dimensional accuracy by etching using a known fine processing technique. Therefore, hereinafter, for convenience of explanation, a case where the vibration substrate 2 is made of silicon will be described.

  Such a vibration substrate 2 has a first vibration system 20A and a second vibration system 20B that are spaced apart in the X-axis direction, and a support portion 29 that supports them. The first vibration system 20A includes a base portion 21 connected to the + Y-axis side end portion of the support portion 29, and vibrating arms 22 and 23 extending from the + Y-axis side end portion of the base portion 21 to the + Y-axis side. ,have. On the other hand, the second vibration system 20B includes a base 24 connected to the + Y-axis end of the support 29, and vibrating arms 25 and 26 extending from the + Y-axis end of the base 24 to the + Y-axis. ,have. As described above, since the first vibration system 20A and the second vibration system 20B are spaced apart from each other, a gap S is formed between the base portion 21 and the base portion 24. Further, the first vibration system 20A and the second vibration system 20B are formed symmetrically so that vibrations can be balanced.

  In other words, in other words, the shape of the vibration substrate 2 can be referred to as the base 210 by combining the base portions 21 and 24 and the support portion 29. In this case, the vibration substrate 2 includes a base portion 210 and four vibrating arms 22, 23, 25, 26 extending from the end portion of the base portion 210 on the + Y axis side to the + Y axis side. It can be said that 210 has a notch 211 formed from between the vibrating arms 23 and 25 toward the −Y axis.

  The support portion 29 supports the first vibration system 20A and the second vibration system 20B (base portions 21 and 24). In addition, the support portion 29 has a flat plate shape that extends in the XY plane and has a thickness in the Z-axis direction. And in this support part 29, the gyro element 1 is fixed to a target object (for example, base 81 of the package 8 mentioned later). A drive signal terminal 51, a drive ground terminal 52, a detection signal terminal 53, and a detection ground terminal 54 are provided side by side in the X-axis direction on the lower surface of the support portion 29.

  The base 21 supports the vibrating arms 22 and 23. Further, the base 21 has a flat plate shape having a spread in the XY plane and having a thickness in the Z-axis direction. Similarly, the base 24 supports the vibrating arms 25 and 26. Further, the base 24 has a flat plate shape having a spread in the XY plane and having a thickness in the Z-axis direction. These bases 21 and 24 are spaced apart in the X-axis direction, and a gap S is formed therebetween.

  The vibrating arms 22 and 23 are provided side by side in the X-axis direction, and extend from the base portion 21 to the + Y-axis side. Moreover, as shown in FIG. 2, the cross-sectional shape of the vibrating arms 22 and 23 is a substantially parallelogram. Further, the parallelograms which are the cross-sectional shapes of the vibrating arms 22 and 23 are inclined to the opposite sides and are symmetric with respect to the YZ plane.

  Similarly, the vibrating arms 25 and 26 are provided side by side in the X-axis direction and extend from the base 24 toward the + Y-axis side. Moreover, as shown in FIG. 2, the cross-sectional shape of the vibrating arms 25 and 26 is a substantially parallelogram. Further, the parallelograms, which are the cross-sectional shapes of the vibrating arms 25 and 26, are inclined to the opposite sides and are symmetric with respect to the YZ plane. Further, the parallelogram that is the cross-sectional shape of the vibrating arm 25 is inclined in the same direction as the parallelogram that is the cross-sectional shape of the vibrating arm 23, and the parallelogram that is the cross-sectional shape of the vibrating arm 26 is the vibrating arm. It is inclined in the same direction as the parallelogram having the cross-sectional shape of 22.

  In addition, mass adjustment films 41 are provided at the distal ends of the vibrating arms 22, 23, 25, and 26, respectively. For example, the frequency of the vibrating arms 22, 23, 25, and 26 can be changed by removing a part of the mass adjustment film 41 as necessary, or by providing further mass on the mass adjustment film 41 to change the mass. And the amplitude in the Z-axis direction can be adjusted. Such a mass adjustment film | membrane 41 is comprised with the metal film.

  A pair of driving piezoelectric elements 31 and 32 and a detecting piezoelectric element 61 are provided on the upper surface of the vibrating arm 22. The driving piezoelectric elements 31 and 32 are spaced apart from each other in the width direction of the vibrating arm 22 and are disposed at both ends of the upper surface. The detecting piezoelectric element 61 is between the driving piezoelectric elements 31 and 32 and is located on the upper surface. It is arrange | positioned in the width direction center part. The drive piezoelectric elements 31 and 32 and the detection piezoelectric element 61 extend along the Y-axis direction and extend to the base 21. The vibrating arm 22 can be flexibly vibrated in the X-axis direction by extending and contracting the driving piezoelectric elements 31 and 32 in the Y-axis direction in opposite phases. On the other hand, the detecting piezoelectric element 61 expands and contracts according to the vibration of the vibrating arm 22 in the Z-axis direction (out-of-plane vibration), and generates a charge corresponding to the expansion and contraction.

  A pair of driving piezoelectric elements 33 and 34 and a detecting piezoelectric element 62 are provided on the upper surface of the vibrating arm 23. The driving piezoelectric elements 33 and 34 are spaced apart in the width direction of the vibrating arm 23 and are disposed at both ends of the upper surface, and the detection piezoelectric element 62 is between the driving piezoelectric elements 33 and 34 and is located on the upper surface. It is arrange | positioned in the width direction center part. The driving piezoelectric elements 33 and 34 and the detecting piezoelectric element 62 extend along the Y-axis direction and extend to the base 21. The vibrating arm 23 can be flexibly vibrated in the X-axis direction by expanding and contracting the driving piezoelectric elements 33 and 34 in the Y-axis direction in opposite phases. On the other hand, the detecting piezoelectric element 62 expands and contracts according to the vibration of the vibrating arm 23 in the Z-axis direction (out-of-plane vibration), and generates a charge corresponding to the expansion and contraction.

  In addition, a pair of driving piezoelectric elements 35 and 36 and a detection piezoelectric element 63 are provided on the upper surface of the vibrating arm 25. The driving piezoelectric elements 35 and 36 are disposed at both ends of the upper surface so as to be separated from each other in the width direction of the vibrating arm 25, and the detection piezoelectric element 63 is between the driving piezoelectric elements 35 and 36 and is located on the upper surface. It is arrange | positioned in the width direction center part. Further, the driving piezoelectric elements 35 and 36 and the detecting piezoelectric element 63 each extend along the Y-axis direction and extend to the base 24. The vibrating arm 25 can be flexibly vibrated in the X-axis direction by expanding and contracting the driving piezoelectric elements 35 and 36 in the Y-axis direction in opposite phases. On the other hand, the detecting piezoelectric element 63 expands and contracts according to the vibration of the vibrating arm 25 in the Z-axis direction (out-of-plane vibration), and generates a charge corresponding to the expansion and contraction.

  A pair of driving piezoelectric elements 37 and 38 and a detecting piezoelectric element 64 are provided on the upper surface of the vibrating arm 26. The driving piezoelectric elements 37 and 38 are disposed at both ends of the upper surface so as to be separated from each other in the width direction of the vibrating arm 26, and the detection piezoelectric element 64 is between the driving piezoelectric elements 37 and 38 and is located on the upper surface. It is arrange | positioned in the width direction center part. The driving piezoelectric elements 37 and 38 and the detecting piezoelectric element 64 extend along the Y-axis direction and extend to the base 24. The vibrating arm 26 can be flexibly vibrated in the X-axis direction by extending and contracting the driving piezoelectric elements 37 and 38 in the Y-axis direction in opposite phases. On the other hand, the detecting piezoelectric element 64 expands and contracts according to the vibration of the vibrating arm 26 in the Z-axis direction (out-of-plane vibration), and generates a charge corresponding to the expansion and contraction.

  The detection piezoelectric elements 61, 62, 63, and 64 have the same configuration. As shown in FIG. 2, the detection piezoelectric elements 61, 62, 63, and 64 are detection grounds that are disposed opposite to the detection signal electrodes 611, 621, 631, and 641 and the detection signal electrodes 611, 621, 631, and 641. Piezoelectric layers 613, 623, 633, 643 disposed between the electrodes 612, 622, 632, 642, the detection signal electrodes 611, 621, 631, 641, and the detection ground electrodes 612, 622, 632, 642, have.

  The detection piezoelectric elements 61 and 62 are arranged with the detection signal electrodes 611 and 621 facing the vibrating arms 22 and 23, respectively. On the contrary, the detection piezoelectric elements 63 and 64 are arranged with the detection ground electrodes 632 and 642 facing the vibrating arms 25 and 26, respectively. The detection signal electrodes 611 to 641 are each connected to the detection signal terminal 53 via a wiring (not shown), and the detection ground electrodes 612 to 642 are connected to the detection ground terminal 54 via a wiring (not shown). Has been.

  According to the detection piezoelectric elements 61, 62, 63, and 64 having such a configuration, when the vibrating arms 22, 23, 25, and 26 vibrate in the Z-axis direction, the piezoelectric layers 613, 623, and 633 are accompanied with the vibration. 643 expands or contracts, and charges are generated between the detection signal electrodes 611, 621, 631, 641 and the detection ground electrodes 612, 622, 632, 642, and this charge can be taken out as a signal. As described above, by using the detection piezoelectric elements 61, 62, 63, and 64 as the detection unit, the configuration of the detection unit is simplified, and even when the vibration substrate 2 does not have piezoelectricity, vibration is generated. A signal corresponding to the vibration of the arms 22, 23, 25, and 26 in the Z-axis direction can be extracted.

  The drive piezoelectric elements 31, 32, 33, 34, 35, 36, 37, and 38 have the same configuration. As shown in FIG. 2, the driving piezoelectric elements 31, 32, 33, 34, 35, 36, 37, and 38 include driving signal electrodes 311, 321, 331, 341, 351, 361, 371, and 381 and a driving signal. The drive ground electrodes 312, 322, 332, 342, 352, 362, 372, 382 and the drive signal electrodes 311, 321, 331, which are opposed to the electrodes 311, 321, 331, 341, 351, 361, 371, 381, 341, 351, 361, 371, 381 and the piezoelectric layers 313, 323, 333, 343, 353, 363, 373 disposed between the drive ground electrodes 312, 322, 332, 342, 352, 362, 372, 382 383.

  Further, as shown in FIG. 2, the driving piezoelectric elements 31, 33, 36, 38 are arranged with the drive signal electrodes 311, 331, 361, 381 facing the vibrating arms 22, 23, 25, 26 side. On the contrary, the driving piezoelectric elements 32, 34, 35, 37 are arranged with the driving ground electrodes 322, 342, 352, 372 facing the vibrating arms 22, 23, 25, 26 side. Further, the drive signal electrodes 311 to 381 are connected to the drive signal terminal 51 via a wiring (not shown), and the drive ground electrodes 312 to 382 are connected to the drive ground terminal 52 via a wiring (not shown).

  Therefore, when an alternating voltage is applied to the driving piezoelectric elements 31 to 38 via the driving signal terminal 51 and the driving ground terminal 52, the vibrating arms 22 and 23 vibrate in the X-axis common mode, and the vibrating arms 25 and 26 become X It vibrates in the axial in-phase mode and in the X-axis opposite phase mode with the vibrating arms 22 and 23. Here, as described above, since the cross-sectional shape of the vibrating arms 22, 23, 25, and 26 is a parallelogram, the vibrating balance of the vibrating arms 22, 23, 25, and 26 in the X-axis direction is lost, and vibration is generated. The arms 22, 23, 25, and 26 vibrate in the Z-axis direction while vibrating in the X-axis direction. Specifically, the vibrating arms 22 and 25 vibrate in the Z-axis common mode, the vibrating arms 23 and 26 vibrate in the Z-axis common mode, and the vibrating arms 22 and 25 vibrate in the Z-axis reverse phase mode.

  As described above, the gyro element 1 vibrates in the drive vibration mode as shown in FIGS. 3 and 4A. In this way, in the drive vibration mode, the vibration arm paired with the vibration arms 22 and 23 and the vibration arm paired with the vibration arms 25 and 26 vibrate in the X-axis reverse phase mode, thereby vibrating in the X-axis direction. Can be canceled (offset or relaxed). Further, the vibration arms 22 and 23 vibrate in the Z-axis reverse phase mode, so that the vibration in the Z-axis direction can be canceled in the first vibration system 20A. Similarly, the vibration arms 25 and 26 are reversed in the Z-axis direction. By vibrating in the phase mode, the vibration in the Z-axis direction can be canceled in the second vibration system 20B. Therefore, vibration leakage of the gyro element 1 can be effectively reduced, and detection accuracy can be increased.

Further, in such a drive vibration mode, as shown in FIG. 5A, the charges Q ₆₁ and Q ₆₄ generated from the detection piezoelectric elements ₆₁ and ₆₄ and the charge Q ₆₂ generated from the detection piezoelectric elements 62 and 63, respectively. , Q ₆₃ are out of phase with each other, so that they are canceled and the detection signal SS taken out between the detection signal terminal 53 and the detection ground terminal 54 becomes almost zero.

When the angular velocity ωy about the Y axis is applied to the gyro element 1 in such a driving vibration mode, a Coriolis force is applied, and a detection vibration mode as shown in FIG. 4B is newly excited. The Specifically, the vibrating arms 22 and 23 vibrate in the Z-axis common mode, the vibrating arms 25 and 26 vibrate in the Z-axis common mode, and the vibrating arms 22 and 23 vibrate in the Z-axis reverse phase mode. When such a detection vibration mode is excited, as shown in FIG. 5B, charges Q ₆₁ , Q ₆₂ , Q ₆₃ , Q ₆₄ having the same phase are detected from the detection piezoelectric elements ₆₁ , ₆₂ , ₆₃ , _64. The detection signal SS generated and added to these charges Q ₆₁ , Q ₆₂ , Q ₆₃ , Q ₆₄ is taken out between the detection signal terminal 53 and the detection ground terminal 54. Then, the angular velocity ωy is obtained based on the magnitude of the extracted detection signal SS.

In such a configuration, since the detection signal SS in the driving vibration mode can be made substantially zero, the generation of noise can be reduced and the detection accuracy of the angular velocity ωy can be increased. Furthermore, the sum of the charges Q ₆₁ , Q ₆₂ , Q ₆₃ , Q ₆₄ generated from the four detection piezoelectric elements ₆₁ , ₆₂ , ₆₃ , ₆₄ is the detection signal SS, so that the intensity of the detection signal SS is increased. Therefore, the detection accuracy of the angular velocity ωy can be increased accordingly. Further, since vibrations in the X-axis direction and Z-axis direction of the vibrating arms 22, 23, 25, and 26 can be canceled in the drive vibration mode and the detection vibration mode, vibration leakage of the gyro element 1 can be reduced. And the detection accuracy of the angular velocity ωy is further improved.

  In addition, by adopting a configuration in which the vibrating arms 22 and 23 are vibrated in the Z-axis reverse phase mode, it is possible to reduce the influence of mask displacement when the vibrating substrate 2 is formed. That is, the outer shape of the vibration substrate 2 is formed by forming a mask corresponding to the shape of the vibration substrate 2 in plan view on the upper surface and the lower surface of the substrate serving as the base material of the vibration substrate 2, and performing wet etching through these masks. However, due to the accuracy of the apparatus, one mask is often formed so as to be shifted in the X-axis direction with respect to the other mask.

Here, when it is going to form the gyro element which vibrates the vibrating arms 22 and 23 only in the X-axis direction, when the mask displacement as described above occurs, the cross-sectional shape of the vibrating arms 22 and 23 is broken, and the Z-axis direction It becomes a gyro element that vibrates. For this reason, when the mask shift occurs, the vibration characteristics are significantly deteriorated. On the other hand, if an attempt is made to form a gyro element that vibrates the vibrating arms 22 and 23 in the Z-axis direction from the beginning, no mask displacement will occur, but a gyro element that vibrates also in the Z-axis direction will not occur. can get. For this reason, according to the present embodiment, the influence of mask displacement can be reduced. When the mask shift occurs, the amplitude of the vibrating arms 22 and 23 in the Z-axis direction may be shifted, and the vibration in the Z-axis direction may not be sufficiently canceled. In that case, for example, the amplitude may be reduced by removing a part of the mass adjustment unit 41 of the vibrating arms 22 and 23 having the larger amplitude, and the amplitudes of the vibrating arms 22 and 23 may be made uniform.
The configuration of the gyro element 1 has been described above.

  Here, the gyro element 1 has various unnecessary vibration modes in addition to the drive vibration mode and the detection vibration mode. If the resonance frequency of the unnecessary vibration mode is close to the resonance frequency of the detection vibration mode, There is a problem that the unnecessary vibration mode is coupled to the detection vibration mode, vibration leakage and noise are generated, and the detection accuracy of the angular velocity ωy is lowered.

  In particular, in the gyro element 1, the X-axis bi-bending vibration mode as shown in FIG. This X-axis bi-bending vibration mode is in-plane vibration in the X-axis direction, but the cross-sectional shape of the vibrating arms 22, 23, 25, and 26 is a parallelogram (that is, the above-described drive vibration mode and According to the same principle), it vibrates in the Z-axis direction. Since the vibration in the Z-axis direction is aligned with the vibration in the detection vibration mode, if the resonance frequency in the X-axis bi-bending vibration mode is close to the resonance frequency in the detection vibration mode, the vibration is coupled to the detection vibration mode and the X-axis bi-axial vibration mode. The bending vibration mode is easily excited.

  Therefore, in the gyro element 1, the resonance frequency of the detection vibration mode and the resonance frequency of the X-axis bi-bending vibration mode are sufficiently separated from each other, thereby reducing the coupling of the X-axis bi-bending vibration mode in the detection vibration mode ( Preferably prevent). Specifically, when the resonance frequency of the drive vibration mode is f1, the resonance frequency of the detection vibration mode is f2, and the resonance frequency of the X-axis bi-bending vibration mode is f3, the relationship f2 <f1 <f3 is satisfied. Thus, f2 and f3 are sufficiently separated from each other to reduce the excitation of the X-axis bi-bending vibration mode in the detection vibration mode.

  In addition, it does not specifically limit as resonance frequency f1, For example, it can be set as about 10 kHz-300 kHz. The relationship between the resonance frequencies f1 and f3 is not particularly limited. For example, it is preferable that the relationship (f3-f1) / f1> 2% is satisfied, and (f3-f1) / f1> 3% is satisfied. It is more preferable that the following relationship is satisfied. By satisfying such a relationship, f3 can be sufficiently separated from f1 (f2), and thus the above-described effect becomes more remarkable. Here, the relationship of (f3-f1) / f1> 2% means (f3-f1) / f1> 0.02. Similarly, the relationship (f3-f1) / f1> 3% means (f3-f1) / f1> 0.03.

  Further, the resonance frequency f2 in the detection vibration mode is not particularly limited, but for example, it is preferable that the relationship of (f1−f2) / f1 ≧ 1% is satisfied. Thereby, f1 to f3 can be sufficiently separated. However, if f2 is too far away from f1 (if the detuning frequency becomes too large), the detection accuracy may be reduced, and therefore the relationship of (f1-f2) / f1 ≦ 5% may be satisfied. preferable.

  In the gyro element 1, the first vibration system 20A and the second vibration system 20B are separated from each other as a means for reducing excitation in the X-axis bi-bending vibration mode in the detection vibration mode (the notch 211 is provided). Forming). Hereinafter, an effect of disposing the first vibration system 20A and the second vibration system 20B apart from each other (forming the notch 211) will be described.

  As described above, in the first vibration system 20A, in the drive vibration mode, the vibrating arms 22 and 23 vibrate in the X-axis common mode, so that vibration in the X-axis direction is transmitted to the base 21 and the first vibration system including the base 21 is included. The vibration system 20A as a whole vibrates in the X axis as a large vibrating arm 211A. Therefore, the length of the vibration region (the length in the Y-axis direction) in the drive vibration mode is L1 that is equal to the length of the first vibration system 20A (see FIG. 1). On the other hand, in the X-axis bi-bending vibration mode, the vibrating arms 22 and 23 vibrate in the X-axis reversed phase mode, so that the vibration in the X-axis direction is canceled and the base 21 does not vibrate. Therefore, as in the drive vibration mode, the first vibration system 20A cannot be regarded as a large vibrating arm as a whole, and the length of the vibration region in the X-axis bi-bending vibration mode (the length in the Y-axis direction) is L2 is equal to the length of the vibrating arms 22 and 23 (see FIG. 1). This also applies to the second vibration system 20B.

  In this way, by making the length L1 of the vibration region in the drive vibration mode different from the length L2 of the vibration region in the X-axis bi-bending vibration mode, the resonance frequency f1 of the drive vibration mode and the X-axis bi-flexion are different. The resonance frequency f2 of the vibration mode can be separated, and the excitation of the X-axis bi-bending vibration mode in the detection vibration mode can be reduced.

  The relationship between L1 and L2 is not particularly limited as long as the relationship L1> L2 is satisfied. However, it is preferable to satisfy the relationship L2 / L1> 1.13, and L2 / L1> 1.18. It is more preferable to satisfy this relationship. FIG. 7 shows a graph showing the relationship between L2 / L1 and (f3-f1) / f1, but as can be seen from this graph, if the relationship L2 / L1> 1.13 is satisfied, (f3 The relationship of -f1) / f1> 2% can be satisfied, and the relationship of (f3-f1) / f1> 3% can be satisfied if the relationship of L2 / L1> 1.18 is satisfied.

  The gyro element 1 according to the first embodiment has been described above. In this embodiment, in order to cause the vibrating arms 22 and 23 to vibrate in the Z-axis reversed phase mode in the drive vibration mode, the cross-sectional shape of the vibrating arms 22 and 23 is a parallelogram. The cross-sectional shape of 23 is not limited to this as long as the above vibration can be performed. For example, the cross-sectional shape as shown in FIGS. The same applies to the vibrating arms 25 and 26.

  Further, in the gyro element 1 of the present embodiment, the hammer head (wide weight portion) is not provided at the tip of the vibrating arms 22, 23, 25, 26, but the tip of the vibrating arms 22, 23, 25, 26 is provided. A hammer head may be provided. As a result, the mass effect at the tips of the vibrating arms 22, 23, 25, 26 is increased, and if the frequency of the driving vibration mode is the same, the vibrating arms 22, 23, The total length of 25 and 26 can be shortened. Moreover, if the full length of the vibrating arms 22, 23, 25, and 26 is the same, the drive frequency can be lowered.

  Further, in this embodiment, in order to sufficiently separate the resonance frequency f2 in the detection vibration mode and the resonance frequency f3 in the X-axis bi-bending vibration mode, the relationship f2 <f1 <f3 is satisfied. , F3 <f1 <f2 may be satisfied. Satisfying such a relationship also makes it possible to sufficiently separate f2 and f3, and the same effects as in the present embodiment can be exhibited.

Second Embodiment
FIG. 9 is a plan view showing a second embodiment of the gyro element (angular velocity detection element) of the present invention. 10A is a cross-sectional view taken along the line BB in FIG. 9, and FIG. 10B is a cross-sectional view taken along the line CC in FIG. 10. 11A is a schematic diagram showing the drive vibration mode, and FIG. 11B is a schematic diagram showing the detection vibration mode.

  Hereinafter, the second embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

  The second embodiment is the same as the first embodiment described above except that the material of the vibration substrate and the configurations of the drive unit and the detection unit are different. 9 to 11, the same reference numerals are given to the same components as those in the above-described embodiment.

In the gyro element 1 of this embodiment, the vibration substrate 2 is made of a piezoelectric material. Examples of the piezoelectric material constituting the vibration substrate 2 include quartz, lithium niobate (LiNbO ₃ ), lithium tantalate (LiTaO ₃ ), lead zirconate titanate (PZT), and lithium tetraborate (Li ₂ B _4). Various pressure materials such as O ₇ ) and langasite (La ₃ Ga ₅ SiO ₁₄ ) can be used. However, among these, it is preferable to use quartz as a constituent material of the vibration substrate 2. By using quartz, the gyro element 1 having excellent frequency temperature characteristics as compared with other materials can be obtained. Further, the vibration substrate 2 can be formed with high dimensional accuracy by wet etching. Therefore, hereinafter, for convenience of explanation, a case where the vibration substrate 2 is made of quartz will be described.

  As shown in FIG. 9, the vibration substrate 2 has a spread in the XY plane defined by the X axis (electrical axis) and the Y axis (mechanical axis) which are crystal axes of quartz, and is in the Z axis (optical axis) direction. The plate has a thickness. That is, the vibration substrate 2 is composed of a Z-cut quartz plate. In the present embodiment, the Z axis coincides with the thickness direction of the vibration substrate 2, but the present invention is not limited to this, and the Z axis is the thickness of the vibration substrate 2 from the viewpoint of reducing the frequency temperature change near room temperature. You may incline slightly (for example, about less than +/- 15 degree) with respect to the vertical direction.

  As shown in FIG. 10, a detection signal electrode 73 and a detection ground electrode 74 as a detection unit are arranged side by side in the X-axis direction on the upper surface and the lower surface of the base portion 21, respectively. On the upper surface, the detection ground electrode 74 is located on the −X axis side of the detection signal electrode 73, and on the lower surface, the detection ground electrode 74 is located on the + X axis side of the detection signal electrode 73. Similarly, a detection signal electrode 73 and a detection ground electrode 74 as a detection unit are also arranged on the upper surface and the lower surface of the base 24 side by side in the X-axis direction. On the upper surface, the detection ground electrode 74 is positioned on the + X axis side of the detection signal electrode 73, and on the lower surface, the detection ground electrode 74 is positioned on the −X axis side of the detection signal electrode 73.

  These detection signal electrodes 73 are each connected to the detection signal terminal 53 via a wiring (not shown), and the detection ground electrodes 74 are respectively connected to the detection ground terminal 54 via a wiring (not shown). Note that the detection signal electrode 73 and the detection ground electrode 74 may be provided on at least one of the upper surface and the lower surface of the base portions 21 and 24.

  The vibrating arms 22, 23, 25, 26 are provided with a drive signal electrode 71 and a drive ground electrode 72 as drive units. The drive signal electrode 71 is disposed on both main surfaces (upper surface and lower surface) of the vibrating arms 22 and 23 and both side surfaces of the vibrating arms 25 and 26, and the driving ground electrode 72 is disposed on both side surfaces of the vibrating arms 22 and 23 and the vibrating arm. 25 and 26 are arranged on both main surfaces (upper surface and lower surface). The drive signal electrode 71 is connected to the drive signal terminal 51 via a wiring (not shown), and the drive ground electrode 72 is connected to the drive ground terminal 52 via a wiring (not shown). Therefore, by applying an alternating voltage of a predetermined frequency between the drive signal electrode 71 and the drive ground electrode 72 via the drive signal terminal 51 and the drive ground terminal 52, it is the same as the drive vibration mode of the first embodiment described above. Can be vibrated.

  Here, as shown in FIG. 11A, in the drive vibration mode, the vibrating arms 22 and 23 vibrate in the Z-axis reverse phase mode, so that the vibration in the Z-axis direction is cancelled. Therefore, vibration in the Z-axis direction of the base portion 21 in the driving vibration mode can be reduced. Similarly, in the drive vibration mode, the vibrating arms 25 and 26 vibrate in the Z-axis reverse phase mode, so that vibration in the Z-axis direction is cancelled. Therefore, vibration in the Z-axis direction of the base portion 24 in the drive vibration mode can be reduced. Therefore, noise in the driving vibration mode is reduced, and the gyro element 1 having high detection accuracy is obtained.

  On the other hand, as shown in FIG. 11B, in the detection vibration mode, the vibrating arms 22 and 23 vibrate in the Z-axis common mode, and accordingly, the base 21 also vibrates in the Z-axis direction. Similarly, in the detection vibration mode, the vibrating arms 25 and 26 vibrate in the Z-axis common mode, and accordingly, the base 24 vibrates in the Z-axis direction correspondingly. In addition, since the vibrating arms 22 and 23 and the vibrating arms 25 and 26 vibrate in the Z-axis reverse phase mode, charges having the same phase are generated from the detection unit arranged in the base 21 and the detection unit arranged in the base 24. The detection signal SS obtained by adding these charges is extracted from between the detection signal terminal 53 and the detection ground terminal 54. Then, the angular velocity ωy is obtained based on this detection signal.

  Also according to the second embodiment, the same effects as those of the first embodiment described above can be exhibited.

2. Angular Velocity Detection Device Next, an angular velocity detection device using the gyro element 1 will be described.

  12A and 12B are diagrams showing a preferred embodiment of the angular velocity detection device of the present invention, in which FIG. 12A is a plan view and FIG. 12B is a sectional view taken along line DD in FIG.

  As shown in FIG. 12, the angular velocity detection device 10 includes a gyro element 1 and a package 8 that houses the gyro element 1.

  The package 8 includes a box-shaped base 81 having a concave portion 811 and a plate-shaped lid 82 that blocks the opening of the concave portion 811 and is joined to the base 81. And the gyro element 1 is accommodated in the accommodation space formed when the recessed part 811 is closed by the lid 82. The housing space may be in a reduced pressure (vacuum) state or may be filled with an inert gas such as nitrogen, helium, or argon.

  The constituent material of the base 81 is not particularly limited, and various ceramics such as aluminum oxide and various glass materials can be used. Further, the constituent material of the lid 82 is not particularly limited, but may be a member whose linear expansion coefficient approximates that of the constituent material of the base 81. For example, in the case where the constituent material of the base 81 is ceramic as described above, it is preferable to use an alloy such as Kovar. In addition, the joining method of the base 81 and the lid 82 is not specifically limited, For example, it can join via an adhesive material or a brazing material.

  In addition, connection terminals 831, 832, 833, and 834 are formed on the bottom surface of the recess 811. Each of the connection terminals 831 to 834 is drawn out to the lower surface of the base 81 (the outer peripheral surface of the package 8) by a through electrode (via) (not shown) formed in the base 81.

  In the gyro element 1, the base 21 is fixed to the bottom surface of the recess 811 by conductive adhesives 861, 862, 863, and 864. Further, the drive signal terminal 51 and the connection terminal 831 are electrically connected via the conductive adhesive 861, and the drive ground terminal 52 and the connection terminal 832 are electrically connected via the conductive adhesive 862, The detection signal terminal 53 and the connection terminal 833 are electrically connected through the conductive adhesive 863, and the detection ground terminal 54 and the connection terminal 834 are electrically connected through the conductive adhesive 864. The conductive adhesives 861 to 864 are not particularly limited as long as they have electrical conductivity and adhesiveness. For example, silver particles are bonded to adhesives such as silicone, epoxy, acrylic, polyimide, and bismaleimide. What disperse | distributed conductive fillers, such as these, can be used.

3. Next, a gyro sensor provided with the gyro element 1 will be described.
FIG. 13 is a cross-sectional view showing a preferred embodiment of the gyro sensor.

  As shown in FIG. 13, the gyro sensor 100 includes an angular velocity detection device 10 and an IC chip 9. The IC chip 9 is fixed to the bottom surface of the recess 811 with a brazing material or the like. The IC chip 9 is electrically connected to the connection terminals 831 to 834 by conductive wires (however, only the connection terminal 831 is shown in FIG. 13). Such an IC chip 9 has a drive circuit for driving and vibrating the gyro element 1, a detection circuit for detecting a detection vibration generated in the gyro element 1 when an angular velocity is applied, and the like. In the present embodiment, the IC chip 9 is provided inside the package 8, but the IC chip 9 may be provided outside the package 8.

4). Electronic Device Next, an electronic device including the gyro element 1 will be described in detail with reference to FIGS.

  FIG. 14 is a perspective view showing the configuration of a mobile (or notebook) personal computer to which the electronic apparatus of the present invention is applied.

  In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 1108. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably. Such a personal computer 1100 incorporates a gyro element 1 that functions as an angular velocity detection means (gyro sensor).

  FIG. 15 is a perspective view illustrating a configuration of a mobile phone (including a smartphone, a PHS, and the like) to which the electronic device of the present invention is applied.

  In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and a display unit 1208 is disposed between the operation buttons 1202 and the earpiece 1204. Such a cellular phone 1200 incorporates a gyro element 1 that functions as an angular velocity detection means (gyro sensor).

  FIG. 16 is a perspective view showing the configuration of a digital still camera to which the electronic apparatus of the present invention is applied. In this figure, connection with an external device is also simply shown.

  The digital still camera 1300 generates an imaging signal (image signal) by photoelectrically converting an optical image of a subject using an imaging element such as a CCD (Charge Coupled Device). A display unit 1310 is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to perform display based on an imaging signal from the CCD. The display unit 1310 displays a subject as an electronic image. Functions as a viewfinder.

  A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.

  When the photographer confirms the subject image displayed on the display unit 1310 and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308.

  In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.

  Such a digital still camera 1300 incorporates a gyro element 1 that functions as an angular velocity detection means (gyro sensor).

  Since the electronic device as described above includes the gyro element 1, it can exhibit high reliability.

  In addition to the personal computer (mobile personal computer) in FIG. 13, the mobile phone in FIG. 14, and the digital still camera in FIG. For example, inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, TV phone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (eg, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices, Instruments (for example, , Gages for vehicles, aircraft, and ships), can be applied to a flight simulator or the like.

4). Next, the moving body including the gyro element 1 shown in FIG. 1 will be described in detail with reference to FIG.
FIG. 17 is a perspective view showing the configuration of an automobile to which the moving body of the present invention is applied.

  The automobile 1500 has a built-in gyro element 1 that functions as an angular velocity detection means (gyro sensor), and the gyro element 1 can detect the posture of the vehicle body 1501. The detection signal of the gyro element 1 is supplied to the vehicle body posture control device 1502, and the vehicle body posture control device 1502 detects the posture of the vehicle body 1501 based on the signal, and controls the stiffness of the suspension according to the detection result. The brakes of the individual wheels 1503 can be controlled. In addition, such posture control can be used by a biped robot or a radio control helicopter. As described above, the gyro element 1 is incorporated in realizing the posture control of various moving bodies.

  As described above, the angular velocity detection element, the angular velocity detection device, the electronic apparatus, and the moving body of the present invention have been described based on the illustrated embodiment, but the present invention is not limited to this, and the configuration of each part has the same function Can be replaced with any structure having In addition, any other component may be added to the present invention. Further, the present invention may be a combination of any two or more configurations (features) of the above embodiments.

DESCRIPTION OF SYMBOLS 1 ... Gyro element 10 ... Angular velocity detection device 100 ... Gyro sensor 2 ... Vibration board 20A ... 1st vibration system 20B ... 2nd vibration system 21 ... Base 210 ... Base 211 ... Notch 211A ... ... Vibrating arm 22 ... Vibrating arm 23 ... Vibrating arm 24 ... Base 25 ... Vibrating arm 26 ... Vibrating arm 29 ... Supporting part 31, 32, 33, 34, 35, 36, 37, 38 ... Drive Piezoelectric elements 311, 321, 331, 341, 351, 361, 371, 381... Drive signal electrode 312, 322, 332, 342, 352, 362, 372, 382... Drive ground electrode 313, 323, 333, 343 353, 363, 373, 383... Piezoelectric layer 41... Mass adjustment film 51... Drive signal terminal 52... Drive ground terminal 53. Grounding terminals 61, 62, 63, 64... Detection piezoelectric elements 611, 621, 631, 641... Detection signal electrodes 612, 622, 632, 642... Detection ground electrodes 613, 623, 633, 643. Layer 71 …… Drive signal electrode 72 …… Drive ground electrode 73 …… Detection signal electrode 74 …… Detection ground electrode 8 …… Package 81 …… Base 811 …… Concavity 82 …… Lids 831, 832, 833, 834 …… Connection terminals 861, 862, 863, 864 ... conductive adhesive 9 ... IC chip 1100 ... personal computer 1102 ... keyboard 1104 ... main body 1106 ... display unit 1108 ... display part 1200 ... mobile phone 1202 …… Operation buttons 1204 …… Entrance 1206 …… Transmission mouth 1208 …… Display unit 1300 …… Digital still camera 1302 …… Case 1304 …… Light receiving unit 1306 …… Shutter button 1308 …… Memory 1310 …… Display section 1312 …… Video signal output terminal 1314 …… Input / output terminal 1430 …… TV monitor 1440 …… Personal computer 1500 ...... car 1501 ...... body 1502 ...... vehicle body attitude control unit 1503 ...... wheel _{Q 61, Q 62, Q 63} , Q 64 ...... charge S ...... void SS ...... detection signal .omega.y ...... angular velocity

Claims (10)

A vibration substrate comprising: a support portion; and a first vibration system and a second vibration system supported by the support portion and spaced apart in the first direction,
The first vibration system includes a first base supported by the support portion, and two first vibrating arms connected to the first base,
The second vibration system includes a second base portion supported by the support portion, and two second vibration arms connected to the second base portion,
The first base and the second base are spaced apart in the first direction,
In the drive vibration mode, the two first vibrating arms are flexibly vibrated in the same direction in the first direction, and the two second vibrating arms are in phase in the first direction and the two first vibrating arms are An angular velocity detecting element characterized by bending vibration in a reverse phase. In the driving vibration mode,
The two first vibrating arms bend and vibrate in the same phase in the first direction, and bend and vibrate in the opposite phase in the thickness direction of the support portion,
2. The angular velocity detection element according to claim 1, wherein the two second vibrating arms flexurally vibrate in the same phase in the first direction and flexurally vibrate in the opposite phase in the thickness direction of the support portion. The resonance frequency of the drive vibration mode is f1,
The resonance frequency of the detection vibration mode excited by the addition of the angular velocity around the detection axis when driven in the drive vibration mode is f2,
When the resonance frequency of the bi-bending vibration mode in the first direction is f3,
The angular velocity detecting element according to claim 1, wherein a relationship of f3 <f1 <f2 is satisfied.   The angular velocity detection element according to any one of claims 1 to 3, wherein a relationship of (f3-f1) / f1> 2% is satisfied.   The angular velocity detecting element according to any one of claims 1 to 4, wherein a relationship of (f3-f1) / f1> 3% is satisfied. The vibration substrate is made of a non-piezoelectric material,
6. The first vibrating arm and the second vibrating arm are each provided with a drive unit for exciting the drive vibration mode and a detection unit for detecting an angular velocity around a detection axis. The angular velocity detection element of any one of Claims 1. The vibration substrate is made of a piezoelectric material,
Each of the first vibrating arm and the second vibrating arm is provided with a drive unit that excites the drive vibration mode,
The angular velocity detection element according to claim 1, wherein each of the first base and the second base is provided with a detection unit that detects an angular velocity around a detection axis. The angular velocity detection element according to any one of claims 1 to 7,
An angular velocity detection device comprising: a package that accommodates the angular velocity detection element.   An electronic apparatus comprising the angular velocity detection element according to claim 1.   A moving body comprising the angular velocity detecting element according to claim 1.

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