JP6492536B2 - Sensor element, physical quantity sensor, electronic device and mobile object - Google Patents

Description

  The present invention relates to a sensor element, a physical quantity sensor, an electronic device, and a moving object.

  The physical quantity sensor is used for, for example, vehicle body control in a vehicle, detection of a position of a car navigation system, vibration control correction (so-called camera shake correction) of a digital camera, a video camera, etc., and detects physical quantities such as angular velocity and acceleration. A sensor is known (see, for example, Patent Document 1).

  For example, as described in Patent Documents 1 and 2, a vibration gyro sensor (angular velocity sensor) includes a vibration gyro element having a base, a drive vibration arm and a detection vibration arm extending from the base. In such a vibration gyro sensor, when an angular velocity in a predetermined direction is received in a state where the drive vibration arm is flexibly vibrated, a Coriolis force acts on the drive vibration arm, and accordingly, the detection vibration arm is flexibly vibrated. The angular velocity can be detected by detecting such bending vibration of the vibrating arm.

  In such a vibration gyro sensor, a vibrating body including a base, a drive vibration arm, and a detection vibration arm is supported by a plurality of beams. And in the vibration gyro sensor which concerns on patent document 1, in order to reduce the vibration leakage which a vibration leaks outside through the beam, the protruding part is provided in the beam. Further, in the vibration gyro sensor according to Patent Document 2, an unnecessary vibration mode is suppressed in order to suppress a temperature drift in which the resonance frequency and characteristics of the vibration gyro element fluctuate due to a temperature change.

  However, conventionally, there has been a problem that unnecessary vibration generated in the sensor element cannot be sufficiently reduced.

JP2013-205330A JP 2014-62753 A

  The objective of this invention is providing the sensor element which can reduce unnecessary vibration effectively, and providing a physical quantity sensor, an electronic device, and a moving body provided with this sensor element.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following application examples.

[Application Example 1]
The sensor element of the present invention includes a base, and a vibrating body including a driving vibrating arm extending from the base along the first direction;
A support portion supporting the vibrating body;
With
The frequency of the drive vibration mode in which the drive vibration arm vibrates along the second direction orthogonal to the first direction is fd, and the vibration body vibrates along the first direction with deformation of the support portion. When the frequency of the first direction vibration mode is fy,
It satisfies the relationship of 0.7 ≦ fd / fy.
According to such a sensor element, unnecessary vibration can be effectively reduced.

[Application Example 2]
In the sensor element of the present invention, it is preferable that the relationship of 0.85 ≦ fd / fy is satisfied.
Thereby, unnecessary vibration can be reduced more effectively.

[Application Example 3]
The sensor element of the present invention preferably satisfies the relationship fd / fy ≦ 100.
As a result, it is possible to reduce the size of the support portion and hence the sensor element.

[Application Example 4]
In the sensor element of the present invention, it is preferable to satisfy the relationship of fd / fy ≦ 10.

  Thereby, size reduction of a support part and by extension, size reduction of a sensor element can be achieved more effectively.

[Application Example 5]
In the sensor element of the present invention, it is preferable that the support portion has a long shape.

  Thereby, the frequency fy of the first direction vibration mode can be reduced, and as a result, fd / fy can be increased.

[Application Example 6]
In the sensor element according to the aspect of the invention, it is preferable that the support portion includes a plurality of portions extending along the first direction and a plurality of portions extending along the second direction.

  Thereby, the installation space of a support part can be made small and the frequency fy of a 1st direction vibration mode can be reduced.

[Application Example 7]
The physical quantity sensor of the present invention includes the sensor element of the present invention.

  Thereby, a physical quantity sensor provided with the sensor element which can reduce unnecessary vibration effectively can be provided.

[Application Example 8]
The electronic device of the present invention includes the sensor element of the present invention.

  Thereby, an electronic device provided with the sensor element which can reduce unnecessary vibration effectively can be provided.

[Application Example 9]
The moving body of the present invention includes the sensor element of the present invention.

  Thereby, a movable body provided with the sensor element which can reduce unnecessary vibration effectively can be provided.

It is a top view which shows the sensor element which concerns on 1st Embodiment of this invention. (A) is the A1-A1 sectional view taken on the line in FIG. 1, (b) is the A2-A2 sectional view taken on the line in FIG. It is a figure for demonstrating the y direction (1st direction) translation mode of a vibrating body. It is a graph which shows the relationship between ratio fd / fy of the frequency fd of a drive vibration mode, and the frequency fy of a y direction translation mode, and an amplitude magnification. It is a top view which shows the sensor element which concerns on 2nd Embodiment of this invention. It is a top view which shows the sensor element which concerns on 3rd Embodiment of this invention. It is a top view which shows the sensor element which concerns on 4th Embodiment of this invention. 7A is a sectional view taken along line B1-B1 in FIG. 7, FIG. 7B is a sectional view taken along line B2-B2 in FIG. 7, and FIG. 7C is a sectional view taken along line B3-B3 in FIG. It is a perspective view which shows an example of the physical quantity sensor of this invention. It is sectional drawing of the physical quantity sensor shown in FIG. 1 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic apparatus of the present invention is applied. It is a perspective view which shows the structure of the mobile telephone (PHS is also included) to which the electronic device of this invention is applied. It is a perspective view which shows the structure of the digital still camera to which the electronic device of this invention is applied. It is a perspective view which shows the structure of the motor vehicle to which the mobile body of this invention is applied.

  Hereinafter, a sensor element, a physical quantity sensor, an electronic device, and a moving body of the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.

1. Sensor Element <First Embodiment>
1 is a plan view showing a sensor element according to the first embodiment of the present invention, FIG. 2A is a cross-sectional view taken along line A1-A1 in FIG. 1, and FIG. 2B is A2 in FIG. It is -A2 sectional view taken on the line.

  In the following, for convenience of explanation, in each drawing, the x axis, the y axis, and the z axis are shown as three axes orthogonal to each other. The side is “−”. A direction parallel to the x-axis is referred to as an “x-axis direction”, a direction parallel to the y-axis is referred to as a “y-axis direction”, and a direction parallel to the z-axis is referred to as a “z-axis direction”. The + z-axis direction side is also referred to as “upper”, and the −z-axis direction side is also referred to as “lower”. Moreover, in FIG. 1, illustration of each electrode and groove | channel is abbreviate | omitted for convenience of explanation.

  A sensor element 1 shown in FIG. 1 is an angular velocity detection element (gyro element). This sensor element 1 has a piezoelectric substrate 2 and electrodes (see FIG. 2) formed on the piezoelectric substrate 2.

-Piezoelectric substrate-
Examples of the constituent material of the piezoelectric substrate 2 include piezoelectric materials such as quartz, lithium tantalate, and lithium niobate. Among these, it is preferable to use quartz as a constituent material of the piezoelectric substrate 2. By using quartz, the sensor element 1 having excellent frequency temperature characteristics as compared with other materials can be obtained. Hereinafter, a case where the piezoelectric substrate 2 is made of quartz will be described.

The piezoelectric substrate 2 has a plate shape that extends in the XY plane defined by the Y axis (mechanical axis) and the X axis (electric axis), which are crystal axes of the quartz substrate, and has a thickness in the Z axis (optical axis) direction. I am doing. That is, the piezoelectric substrate 2 is composed of a Z-cut quartz plate. Note that the Z-axis does not necessarily coincide with the thickness direction of the piezoelectric substrate 2, and may be slightly inclined with respect to the thickness direction from the viewpoint of reducing the change due to the temperature of the frequency near room temperature. Specifically, the Z-cut quartz plate is such that a surface obtained by rotating a surface orthogonal to the Z-axis within a range of 0 degrees to 10 degrees around at least one of the X-axis and the Y-axis is the main surface. Includes crystal plate with cut angle.
The thickness of the piezoelectric substrate 2 is not particularly limited, and is about 40.0 to 300.0 μm.

  Such a piezoelectric substrate 2 includes a base 21, a drive vibration arm (first drive vibration arm) 221, a drive vibration arm (second drive vibration arm) 222, a detection vibration arm (first detection vibration arm) 231, and a detection. The vibration arm (second detection vibration arm) 232, the adjustment vibration arm 241 and the adjustment vibration arm 242, a support portion (frame body) 25, and four connection portions 261, 262, 263, and 264, It is integrally formed.

  The drive vibrating arm 221 and the drive vibrating arm 222 each extend from the base portion 21 in the −y axis direction. Further, the drive vibration arm 221 and the drive vibration arm 222 are arranged side by side along the x-axis direction.

  The drive vibrating arm 221 includes an arm portion 2211 extending from the base portion 21, a wide portion 2212 that is provided on the distal end side of the arm portion 2211 and wider than the arm portion 2211, and an extending direction of the arm portion 2211 And a pair of grooves 2213 provided along the line. Similarly, the drive vibrating arm 222 includes an arm portion 2221 extending from the base portion 21, a wide portion 2222 provided on the distal end side of the arm portion 2221 and wider than the arm portion 2221, and an extension of the arm portion 2221. And a pair of grooves 2223 provided along the outgoing direction.

  In such driving vibration arms 221, 222, by providing the wide portions 2212, 2222 (hammer head), the detection sensitivity of the angular velocity can be improved and the length of the driving vibration arms 221, 222 can be shortened. Further, by providing the grooves 2213 and 2223, the thermoelastic loss and the CI value can be reduced, and the drive vibrating arms 221 and 222 can be driven and vibrated efficiently. The wide portions 2212 and 2222 and the grooves 2213 and 2223 may be provided as necessary and may be omitted.

  The detection vibration arm 231 and the detection vibration arm 232 respectively extend from the base portion 21 in the + y axis direction. The detection vibrating arm 231 and the detection vibrating arm 232 are arranged side by side along the x-axis direction.

  The detection vibrating arm 231 includes an arm portion 2311 extending from the base portion 21, a wide portion 2312 that is provided on the distal end side of the arm portion 2311 and wider than the arm portion 2311, and an extending direction of the arm portion 2311. And a pair of grooves 2313 provided along the line. Similarly, the detection vibrating arm 232 includes an arm portion 2321 extending from the base portion 21, a wide portion 2322 provided on the distal end side of the arm portion 2321 and wider than the arm portion 2321, and an extension of the arm portion 2321. And a pair of grooves 2323 provided along the outgoing direction.

  In such detection vibration arms 231 and 232, by providing the wide portions 2312 and 2322, the resonance frequency (natural frequency) of the detection vibration arms 231 and 232 can be lowered, or the length of the detection vibration arms 231 and 232 can be reduced. It can be shortened. Further, by providing the grooves 2313 and 2323, the detection vibration can be detected efficiently. The wide portions 2312 and 2322 and the grooves 2313 and 2323 may be provided as necessary and may be omitted.

  The adjustment vibration arm 241 and the adjustment vibration arm 242 respectively extend from the base portion 21 in the + y axis direction. Further, the adjustment vibration arm 241 and the adjustment vibration arm 242 are arranged side by side along the x-axis direction with the detection vibration arms 231 and 232 interposed therebetween.

  The adjustment vibrating arm 241 includes an arm part 2411 extending from the base part 21, and a wide part 2412 provided on the distal end side of the arm part 2411 and wider than the arm part 2411. Similarly, the adjustment vibrating arm 242 includes an arm portion 2421 extending from the base portion 21, and a wide portion 2422 provided on the distal end side of the arm portion 2421 and wider than the arm portion 2421.

  In such adjustment vibration arms 241 and 242, the wide portions 2412 and 2422 are provided to reduce the resonance frequency (natural frequency) of the adjustment vibration arms 241 and 242 or to reduce the length of the adjustment vibration arms 241 and 242. It can be shortened. Note that the wide portions 2312 and 2322 may be provided as necessary and may be omitted. Similarly to the detection vibrating arms 231 and 232, grooves may be provided on the main surfaces of the adjustment vibrating arms 241 and 242.

  The support portion 25 has a function of supporting the base portion 21 via the connecting portions 261, 262, 263, and 264. The support portion 25 is disposed on the −y axis direction side with respect to the base portion 21 and has a long shape 251 extending along the x axis direction, and from both ends of the portion 251 along the + y axis direction. Two portions 252 and 253 extending.

  The connecting portion 261 has a long shape, one end is connected to the + y-axis direction end of the portion 252, and the other end is connected to the −x-axis-side end of the base 21. 21 and the support part 25 are connected. Similarly, the connecting portion 262 has an elongated shape, one end is connected to the end of the portion 253 on the + y axis direction side, and the other end is connected to the end of the base portion 21 on the + x axis direction side. The base portion 21 and the support portion 25 are connected.

  The connecting portion 263 has a long shape, one end is connected to the center of the portion 251, and the other end is connected to the end on the −x axis direction side of the base 21, and is supported by the base 21. The part 25 is connected. Similarly, the connecting portion 264 has an elongated shape, one end is connected to the central portion of the portion 251, and the other end is connected to the end of the base portion 21 on the + x-axis direction side, and supports the base portion 21. The part 25 is connected.

  Such connecting portions 261, 262, 263, 264 each have a bent or curved portion in the middle. Specifically, the connecting portions 261, 262, 263, and 264 include portions 2612, 2622, 2631, and 2641 that extend along the x-axis direction and portions 2611 and 2621 that extend along the y-axis direction, respectively. , 2632 and 2642 are connected to each other. By providing such a bent or curved portion, the flexibility of the connecting portions 261, 262, 263, and 264 in various directions can be enhanced. For this reason, the shock resistance of the sensor element 1 is increased, or the frequency of unnecessary vibration of the base portion 21 accompanied by bending deformation of the connecting portions 261, 262, 263, 264 is increased away from the frequency of driving vibration or detection vibration to enhance detection characteristics. Can be. In addition, the sensor element 1 can be reduced in size.

-Electrode-
As shown in FIG. 2, the electrodes provided on the surface of the piezoelectric substrate 2 described above include a drive signal electrode 311, a drive ground electrode 312, a first detection signal electrode 321, a second detection signal electrode 322, Detection ground electrode 323.

  As shown in FIG. 2A, the drive signal electrodes 311 are formed on the upper and lower surfaces of the arm portion 2211 of the drive vibrating arm 221 and on both side surfaces of the arm portion 2221 of the drive vibrating arm 222, respectively. The drive signal electrode 311 is an electrode for exciting the drive vibration of the drive vibration arms 221 and 222.

  The drive ground electrode 312 is formed on both side surfaces of the arm portion 2211 of the drive vibration arm 221 and on the upper and lower surfaces of the arm portion 2221 of the drive vibration arm 222, respectively. The drive ground electrode 312 has a potential that serves as a ground with respect to the drive signal electrode 311.

  The drive signal electrode 311 is electrically connected to a drive signal terminal (not shown) disposed in the portion 251 through a drive signal wiring (not shown) formed in the connecting portion 264. Similarly, the drive ground electrode 312 is electrically connected to a drive ground terminal (not shown) disposed in the portion 251 through a drive ground wiring (not shown) formed in the connecting portion 263. .

  In the drive signal electrode 311 and the drive ground electrode 312 arranged as described above, by inputting a drive signal to the drive signal terminal, an electric field is generated between the drive signal electrode 311 and the drive ground electrode 312 to drive vibration. The arms 221 and 222 can be driven to vibrate.

  As shown in FIG. 2B, the first detection signal electrode 321 includes an upper left portion, a lower right portion, a left lower portion and a right upper portion of the arm portion 2311 of the detection vibrating arm 231, and a detection vibrating arm. 232 is formed on the upper right side portion, the lower left side portion, the left side upper side portion and the right side lower side portion of the arm portion 2321, and the left side surface, the upper right side portion and the lower right side portion of the arm portion 2421 of the adjustment vibration arm 242. ing. Similarly, the second detection signal electrode 322 includes an upper right portion, a lower left portion, an upper left portion, and a lower right portion of the arm portion 2311 of the detection vibrating arm 231 and an upper surface of the arm portion 2321 of the detection vibrating arm 232. A left side portion, a lower side right side portion, a left side lower side portion and a right side upper side portion, and a right side surface, an upper side left side portion and a lower side left side portion of the arm portion 2411 of the adjustment vibrating arm 241 are formed. These first detection signal electrodes 321 and 322 are electrodes for detecting charges generated by the detection vibration when the detection vibrations of the detection vibrating arms 231 and 232 are excited.

  The detection ground electrode 323 is formed on the left side surface, the upper surface right side portion, and the lower surface right side portion of the arm portion 2411 of the adjustment vibration arm 241, and the right side surface, the upper surface left portion, and the lower surface left side portion of the arm portion 2421 of the adjustment vibration arm 242. Has been. The detection ground electrode 323 has a potential serving as a ground with respect to the first detection signal electrode 321 and the second detection signal electrode 322.

  The first detection signal electrode 321 is electrically connected to a first detection signal terminal (not shown) formed on the portion 253 via a detection signal wiring (not shown) formed on the connecting portion 262. Yes. Similarly, the second detection signal electrode 322 is electrically connected to a second detection signal terminal (not shown) formed in the portion 252 via a detection signal wiring (not shown) formed in the connecting portion 261. It is connected.

  The detection ground electrode 323 is electrically connected to detection ground terminals (not shown) formed on the portions 252 and 253 via detection ground wirings (not shown) formed on the connecting portions 263 and 264, respectively. It is connected.

  In the first detection signal electrode 321, the second detection signal electrode 322, and the detection ground electrode 323 arranged as described above, the detection vibration of the detection vibration arms 231 and 232 and the adjustment vibration of the adjustment vibration arms 241 and 242, Electric charges are generated between the first detection signal electrode 321 and the detection ground electrode 323 and between the second detection signal electrode 322 and the detection ground electrode 323, and the electric charges are generated by the first detection signal terminal and the second detection signal terminal. It can be taken out as a detection signal from each of the above.

The configuration of the electrode as described above is not particularly limited as long as it has conductivity. For example, Ni (nickel), Au (metal) layer such as Cr (chromium), W (tungsten), etc. (Gold), Ag (silver), Cu (copper), etc. can be comprised by the metal film which laminated | stacked each film.
The configuration of the sensor element 1 has been described above.

  In the sensor element 1 configured as described above, an electric field is generated between the drive signal electrode 311 and the drive ground electrode 312 by inputting a drive signal to the drive signal terminal in a state where no angular velocity is applied to the sensor element 1. When it occurs, the drive vibration arms 221 and 222 perform bending vibration (drive vibration) so as to be opposite to each other in the x-axis direction as indicated by an arrow A in FIG.

  Further, along with this drive vibration, the adjustment vibration arms 241 and 242 also perform bending vibration (adjustment vibration) so as to be opposite to each other in the x-axis direction.

  When an angular velocity ω around the central axis a1 along the y-axis direction is applied to the sensor element 1 in a state where this driving vibration is performed, Coriolis force acts on the driving vibration arms 221 and 222, and driving is performed by this Coriolis force. The vibrating arms 221 and 222 bend and vibrate so as to be opposite to each other in the z-axis direction. Accordingly, the detection vibrating arms 231 and 232 vibrate (detection vibration) so as to be opposite to each other in the z-axis direction as indicated by B in FIG. Due to this detection vibration, the charges generated in the detection vibration arms 231 and 232 are taken out as detection signals from the first detection signal terminal and the second detection signal terminal, and the angular velocity is obtained based on this detection signal.

  At this time, similarly to the drive vibration arms 221 and 222, the adjustment vibration arms 241 and 242 also bend and vibrate so as to be opposite to each other in the z-axis direction, but no charge is output due to this bending vibration. That is, regardless of the presence or absence of the action of the Coriolis force, the charges output from the adjustment vibration arms 241 and 242 are basically only due to the adjustment vibration described above and are constant. Thereby, the leak output resulting from the manufacturing variation of the piezoelectric substrate 2, etc. can be adjusted.

(Vibration mode)
Hereinafter, the vibration mode of the sensor element 1 will be described in detail.

  FIG. 3 is a diagram for explaining a translational mode in the y direction (first direction) of the vibrating body. FIG. 4 is a graph showing the relationship between the ratio fd / fy between the frequency fd in the driving vibration mode and the frequency fy in the y-direction translation mode and the amplitude magnification.

  As described above, the sensor element 1 has the base portion 21 supported by the connecting portions 261, 262, 263, and 264. In such a sensor element 1, the mass composed of the base portion 21, the drive vibration arms 221 and 222, the detection vibration arms 231 and 232, and the adjustment vibration arms 241 and 242, and the spring composed of the connection portions 261, 262, 263, and 264. It can be said that it constitutes a vibration system. Here, the mass composed of the base portion 21, the drive vibration arms 221, 222, the detection vibration arms 231, 232, and the adjustment vibration arms 241, 242 constitutes a “vibration body”, and the connection portions 261, 262, 263, 264 are vibration bodies. The "support part" which supports

  For example, as shown in FIG. 3, such a vibration system includes a y-direction (first direction) vibration mode in which the base portion 21 vibrates along the y-axis direction with deformation of the connecting portions 261, 262, 263 X, and 264 X. Have The sensor element 1X shown in FIG. 3 has a simplified configuration compared to FIG. 1 for convenience of explanation. The sensor element 1X is the same as the sensor element 1 shown in FIG. 1 except that the adjustment vibrating arms 241 and 242 are omitted and the connecting portions 263X and 264X are provided instead of the connecting portions 263 and 264. is there.

  In such a sensor element 1, the frequency (resonance frequency) of the drive vibration mode in which the drive vibration arms 221 and 222 as described above vibrate is set to fd, and the base 21 (vibrating body) is connected to the connecting portions 261, 262, 263, When the frequency (resonance frequency) of the y-direction (first direction) vibration mode that vibrates along the y-axis direction with deformation of H.264 is fy, fd / fy and the amplitude magnification of the vibration body in the y-direction vibration mode The relationship is as shown in FIG.

  From the results shown in FIG. 4, the sensor element 1 satisfies the relationship 0.7 ≦ fd / fy. Thereby, the vibration in the y-direction vibration mode, which is an unnecessary vibration, can be effectively reduced (with an amplification factor of 1 or less).

  From the results shown in FIG. 4, it is preferable to satisfy the relationship of 0.85 ≦ fd / fy. Thereby, unnecessary vibration can be reduced more effectively (amplification magnification of 0.5 times or less). On the other hand, if fd / fy is too small, the unnecessary vibration becomes larger than the amplification factor of 1 and the signal due to the unnecessary vibration is superimposed on the detection signal, and as a result, the detection sensitivity is significantly lowered.

  Here, the frequency fy of the y-direction translation mode can be reduced by lowering the spring constants of the connecting portions 261, 262, 263, and 264. Thereby, fd / fy can be increased.

  In the present embodiment, the connecting portions 261, 262, 263, and 264 have a long shape as described above. As a result, the spring constants of the connecting portions 261, 262, 263, and 264 can be lowered to reduce the frequency fy of the y-direction vibration mode, and as a result, fd / fy can be increased.

  The connecting portions 261, 262, 263, and 264 include portions 2612, 2622, 2631, and 2641 extending along the x-axis direction, and portions 2611, 2621, 2632, extending along the y-axis direction, respectively. 2642. Thereby, the spring constant of the connection parts 261, 262, 263, and 264 can be lowered while reducing the installation space of the connection parts 261, 262, 263, and 264.

  Moreover, it is preferable to satisfy the relationship of fd / fy ≦ 100, and it is more preferable to satisfy the relationship of fd / fy ≦ 10. Thereby, size reduction of the connection parts 261, 262, 263, and 264, and hence size reduction of the sensor element 1 can be achieved. On the other hand, if fd / fy is too large, unnecessary vibration can be reduced, but the connecting portions 261, 262, 263, and 264 must be designed to have a very flexible configuration. The length of each of H.264 is extremely long, leading to an increase in the size of the sensor element 1, and the width of each of the connecting portions 261, 262, 263, 264 is extremely narrow to ensure the necessary mechanical strength. It becomes difficult.

Second Embodiment
FIG. 5 is a plan view showing a sensor element according to the second embodiment of the present invention.

  Hereinafter, the present embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.

  A sensor element 1A shown in FIG. 5 includes a piezoelectric substrate 2A having a support portion 25A and connecting portions 261A and 262A. The piezoelectric substrate 2A is the same as the piezoelectric substrate 2 of the first embodiment described above except that it has a support portion 25A and connection portions 261A and 262A instead of the support portion 25 and the connection portions 261 and 262.

  The support portion 25A is disposed on the −y-axis direction side with respect to the base portion 21 and has a long portion 251 extending along the x-axis direction, and extends along the + y-axis direction from both ends of the portion 251. Two portions 252A and 253A.

  The connecting portion 261A has a long shape, one end is connected to the + y-axis direction end of the portion 252A, and the other end is connected to the −x-axis-side end of the base 21. 21 and the support portion 25A are connected. Similarly, the connecting portion 262A has a long shape, one end is connected to the end of the portion 253A on the + y axis direction side, and the other end is connected to the end of the base portion 21 on the + x axis direction side. The base portion 21 and the support portion 25A are connected.

  In particular, the connecting portion 261A includes a plurality of portions 2614, 2616, and 2618 extending along the x-axis direction and a plurality of portions 2613, 2615, and 2617 extending along the y-axis direction. Are alternately connected. Similarly, the connecting portion 262A includes a plurality of portions 2624, 2626, and 2628 extending along the x-axis direction and a plurality of portions 2623, 2625, and 2627 extending along the y-axis direction. These are configured by being alternately connected. Thereby, the installation space of connecting part 261A, 262A can be reduced, and the frequency fy of the y-direction vibration mode can be reduced.

<Third Embodiment>
FIG. 6 is a plan view showing a sensor element according to the third embodiment of the present invention.

  Hereinafter, the present embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.

  A sensor element 1B shown in FIG. 6 includes a piezoelectric substrate 2B having connecting portions 263B and 264B. The piezoelectric substrate 2B is the same as the piezoelectric substrate 2A of the second embodiment described above except that the connection portions 263B and 264B are provided instead of the connection portions 263 and 264.

  The connecting portion 263B has a long shape, one end portion is connected to the center portion of the portion 251 and the other end portion is connected to the end portion of the base portion 21 on the −x-axis direction side, and the base portion 21 and the supporting portion 25A. Are linked. Similarly, the connecting portion 264B has an elongated shape, one end is connected to the central portion of the portion 251, and the other end is connected to the end of the base portion 21 on the + x-axis direction side to support the base portion 21. The part 25A is connected.

  In particular, the connecting portion 263B includes a plurality of portions 2633, 2635, and 2637 that extend along the x-axis direction, and a plurality of portions 2634, 2636, and 2638 that extend along the y-axis direction. Are alternately connected. Similarly, the connecting portion 264B has a plurality of portions 2643, 2645, 2647 extending along the x-axis direction and a plurality of portions 2644, 2646, 2648 extending along the y-axis direction. These are configured by being alternately connected. Thereby, the installation space of connection part 263B, 264B can be made small, and the frequency fy of y direction vibration mode can be reduced.

<Fourth embodiment>
7 is a plan view showing a sensor element according to a fourth embodiment of the present invention, FIG. 8A is a cross-sectional view taken along line B1-B1 in FIG. 7, and FIG. 8B is B2 in FIG. -B2 sectional view, FIG.8 (c) is B3-B3 sectional view taken on the line in FIG.

  Hereinafter, the present embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.

  A sensor element 1C shown in FIG. 7 includes a piezoelectric substrate 4 and electrodes (see FIG. 8) formed on the surface of the piezoelectric substrate 4.

-Piezoelectric substrate-
The piezoelectric substrate 4 is composed of a Z-cut quartz plate. The piezoelectric substrate 4 includes a base 41, driving vibration arms 421 to 424 and detection vibration arms 431 and 432 extending from the base 41, fixing parts 441 and 442, a fixing part 441, and a base 41. Support beams 451 and 452 (support portions), and support beams 453 and 454 (support portions) connecting the fixed portion 442 and the base portion 41 to each other. The piezoelectric substrate 4 is formed symmetrically as shown in FIG.

  The base 41 includes a main body portion 411 located at the center, a connecting arm 412 extending from the main body portion 411 in the −x-axis direction, and a connecting arm 413 extending from the main body portion 411 in the + x-axis direction. Have. In addition, you may provide the bottomed groove | channel extended in the length direction (x-axis direction) in each of the upper surface and lower surface of the connection arms 412,413.

  The drive vibrating arm 421 extends in the + y-axis direction from the distal end portion of the connecting arm 412 of the base portion 41. The drive vibrating arm 422 extends in the −y-axis direction from the distal end portion of the connecting arm 412. Similarly, the drive vibration arm 423 extends in the + y-axis direction from the distal end portion of the connection arm 413. The drive vibrating arm 424 extends in the −y axis direction from the distal end portion of the connecting arm 413.

  Each of the drive vibrating arms 421 to 424 includes an arm part 4211 to 4241 extending from the base part 41 and a wide part that is provided on the distal end side of the arm part 4211 to 4241 and is wider than the arm part 4211 to 4241. 4212 to 4242 and grooves 4213 to 4243 provided along the extending direction of the arm portions 4211 to 4241.

  The detection vibrating arm 431 extends in the + y-axis direction from the main body 411 of the base 41. Further, the detection vibrating arm 432 extends in the −y axis direction from the main body 411.

  The detection vibrating arms 431 and 432 are arm portions 4311 and 4321 extending from the base portion 41 and wide portions provided on the distal ends of the arm portions 4311 and 4321 and having a width wider than the arm portions 4311 and 4321, respectively. 4312 and 4322, and grooves 4313 and 4323 provided along the extending direction of the arm portions 4311 and 4321.

  The fixed portion 441 is located on the + y axis direction side with respect to the base portion 41 and extends in the x axis direction. On the other hand, the fixed portion 442 is located on the −y axis direction side with respect to the base portion 41 and extends in the x axis direction.

  The support beam 451 passes between the drive vibration arm 421 and the detection vibration arm 431 and connects the main body portion 411 and the fixed portion 441 of the base 41. Further, the support beam 452 passes between the drive vibration arm 423 and the detection vibration arm 431 and connects the main body portion 411 and the fixing portion 441 of the base portion 41. Similarly, the support beam 453 passes between the drive vibration arm 422 and the detection vibration arm 432 and connects the main body portion 411 and the fixed portion 442 of the base portion 41. Further, the support beam 454 passes between the driving vibration arm 424 and the detection vibration arm 432 and connects the main body portion 411 and the fixing portion 442 of the base portion 41.

  Each of the support beams 451 to 454 has a long shape, and has a plurality of bent or curved portions in the middle thereof.

-Electrode-
As shown in FIG. 8, the electrodes provided on the surface of the piezoelectric substrate 4 have a drive signal electrode 511, a drive ground electrode 512, a detection signal electrode 521, and a detection ground electrode 522. Yes. Further, as shown in FIG. 7, the electrode has a drive signal terminal 513, a drive ground terminal 514, a detection signal terminal 523, and a detection ground terminal 524.

  As shown in FIGS. 8A and 8B, the drive signal electrodes 511 are formed on the upper and lower surfaces of the arm portion 4211 of the drive vibration arm 421 and on both side surfaces of the arm portion 4231 of the drive vibration arm 423, respectively. ing. Although not shown, the drive signal electrodes 511 are formed on the upper and lower surfaces of the arm portion 4221 of the drive vibration arm 422 and on both side surfaces of the arm portion 4241 of the drive vibration arm 424, respectively. The drive signal electrode 511 is an electrode for exciting the drive vibration of the drive vibration arms 421 to 424.

  The drive ground electrode 512 is formed on both side surfaces of the arm portion 4211 of the drive vibration arm 421 and on the upper and lower surfaces of the arm portion 4231 of the drive vibration arm 423, respectively. Although not shown, the drive ground electrode 512 is formed on both side surfaces of the arm portion 4221 of the drive vibration arm 422 and on the upper and lower surfaces of the arm portion 4241 of the drive vibration arm 424, respectively. The drive ground electrode 512 has a potential that serves as a ground with respect to the drive signal electrode 511.

  As shown in FIG. 7, the drive signal terminal 513 is disposed at the left end of the fixed portion 442, and is electrically connected to the drive signal electrode 511 via a drive signal wiring (not shown) formed on the support beam 453. Connected. Similarly, the drive ground terminal 514 is disposed at the left end of the fixed portion 441 and is electrically connected to the drive ground electrode 512 via a drive ground wiring (not shown) formed on the support beam 451. Has been.

  In the drive signal electrode 511, the drive ground electrode 512, the drive signal terminal 513, and the drive ground terminal 514 arranged as described above, the drive signal electrode 511 and the drive ground electrode 512 are input by inputting the drive signal to the drive signal terminal 513. An electric field is generated between the driving vibration arms 421 to 424 and the driving vibration arms 421 to 424 can be driven to vibrate.

  As shown in FIG. 8C, the detection signal electrodes 521 are respectively formed on the upper left portion, the lower right portion, the left lower portion, and the right upper portion of the arm portion 4311 of the detection vibrating arm 431. Although not shown, the detection signal electrodes 521 are also formed on the upper left portion, the lower right portion, the lower left portion and the upper right portion of the arm portion 4321 of the detection vibrating arm 432, respectively. The detection signal electrode 521 is an electrode for detecting charges generated by the detection vibration when the detection vibration of the detection vibration arms 431 and 432 is excited.

  The detection ground electrodes 522 are respectively formed on the upper surface right side portion, the lower surface left side portion, the left side upper surface portion, and the right side lower surface portion of the arm portion 4311 of the detection vibrating arm 431. Although not shown, the detection ground electrodes 522 are also formed on the upper right side portion, the lower left side portion, the left side upper side portion, and the right side lower side portion of the arm portion 4321 of the detection vibrating arm 432, respectively. The detection ground electrode 522 has a potential that serves as a ground with respect to the detection signal electrode 521.

  As shown in FIG. 7, the detection signal terminal 523 is formed at the right end of each of the fixing portions 441 and 442, and via detection signal wiring (not shown) formed on the support beams 452 and 454, The detection signal electrode 521 is electrically connected.

  The detection ground terminal 524 is formed at the center in the longitudinal direction of each of the fixed portions 441 and 442, and is electrically connected to the detection ground electrode 522 via detection ground wiring (not shown) formed on the support beams 451 to 454. Connected.

In the detection signal electrode 521, the detection ground electrode 522, the detection signal terminal 523, and the detection ground terminal 524 arranged as described above, the detection signal electrode 521 and the detection ground electrode 522 are detected by the detection vibration of the detection vibration arms 431 and 432. Electric charges are generated between them, and such electric charges can be taken out from the respective detection signal terminals 523 as detection signals.
The configuration of the sensor element 1C has been described above.

  In the sensor element 1 </ b> C configured as described above, an electric field is generated between the drive signal electrode 511 and the drive ground electrode 512 by inputting a drive signal to the drive signal terminal 513 in a state where no angular velocity is applied to the sensor element 1 </ b> C. When this occurs, each of the drive vibration arms 421 to 424 performs bending vibration (drive vibration) in the direction indicated by the arrow C in FIG. At this time, since the drive vibration arms 421 and 422 and the drive vibration arms 423 and 424 are bilaterally oscillating in FIG. 7, the base 41 and the detection vibration arms 431 and 432 hardly vibrate.

  When the angular velocity ω around the central axis a2 (center of gravity) along the z-axis is applied to the sensor element 1C in the state where this driving vibration is performed, the detection vibration (vibration in the detection mode) is excited. Specifically, the Coriolis force in the direction indicated by the arrow D in FIG. 7 acts on the drive vibrating arms 421 to 424 and the connecting arms 412 and 413 of the base 41 to excite new vibrations. Accordingly, detection vibrations in the direction indicated by arrow E in FIG. 7 are excited in the detection vibration arms 431 and 432 so as to cancel the vibrations of the connecting arms 412 and 413. The electric charges generated in the detection vibrating arms 431 and 432 by this detection vibration are taken out from the detection signal electrode 521 as a detection signal, and the angular velocity is obtained based on the detection signal.

  As described above, the sensor element 1C has the base 41 supported by the support beams 451, 452, 453, and 454. In such a sensor element 1C, it can be said that the mass composed of the base 41, the drive vibration arms 421 to 424 and the detection vibration arms 431 and 432, and the spring composed of the support beams 451 to 454 constitute a vibration system. Here, the mass composed of the base 41, the drive vibrating arms 421 to 424 and the detection vibrating arms 431 and 432 constitutes a “vibrating body”, and the support beams 451 to 454 constitute a “supporting portion” supporting the vibrating body. doing.

  In such a sensor element 1C, the frequency (resonance frequency) of the drive vibration mode in which the drive vibration arms 421 to 424 as described above drive and vibrate is defined as fd, and the base 41 (vibrating body) deforms the support beams 451 to 454. Accordingly, when the frequency (resonance frequency) of the y-direction (first direction) vibration mode that vibrates along the y-axis direction is fy, the relationship of 0.7 ≦ fd / fy is satisfied. Thereby, the vibration in the y-direction vibration mode, which is an unnecessary vibration, can be effectively reduced (with an amplification factor of 1 or less).

2. Physical Quantity Sensor Next, the physical quantity sensor of the present invention will be described.

  FIG. 9 is a perspective view showing an example of the physical quantity sensor of the present invention, and FIG. 10 is a cross-sectional view of the physical quantity sensor shown in FIG. In FIG. 9, the lid 62 is not shown for convenience of explanation.

  As shown in FIG. 9 and FIG. 10, the physical quantity sensor 10 includes three sensor elements 7X, 7Y, and 7Z, a package 6 that accommodates these sensor elements 7X, 7Y, and 7Z, and an IC chip 8. Yes.

  The package 6 includes a box-shaped base 61 having a recess 611 and a plate-shaped lid 62 joined by closing the opening of the recess 611. The sensor elements 7X, 7Y, and 7Z are housed in the housing space S formed by closing the recess 611 with the lid 62. The storage space S may be in a reduced pressure (vacuum) state, or may be filled with an inert gas such as nitrogen, helium, or argon.

  The recess 611 has a first recess 611a that opens to the upper surface of the base 61, and a second recess 611b that opens to the center of the bottom surface of the first recess 611a.

  Although it does not specifically limit as a constituent material of the base 61, Various ceramics, such as aluminum oxide, and various glass materials can be used. Further, the constituent material of the lid 62 is not particularly limited, but a member having a linear expansion coefficient approximate to that of the constituent material of the base 61 is preferable. For example, when the constituent material of the base 61 is ceramic as described above, an alloy such as Kovar is preferable. In addition, the joining method of the base 61 and the lid 62 is not specifically limited, For example, it can join via an adhesive material or a brazing material. In the present embodiment, the lid 62 is joined to the base 61 via a joining member 63 such as a seam ring, low-melting glass, or adhesive.

  A plurality of connection terminals 641 are formed on the bottom surface of the recess 611a. The connection terminal 641 is electrically connected to a terminal 642 provided on the bottom surface of the base 61 via wiring layers 643 and 644 provided on the base 61. The connection terminal 641 and the like are not particularly limited as long as they have conductivity. For example, Ni (nickel), Au (gold), a metallization layer (underlayer) such as Cr (chrome), W (tungsten), etc. It is comprised by the metal film which laminated | stacked each film, such as Ag (silver) and Cu (copper).

  The IC chip 8 is fixed to the bottom surface of the recess 611b with an adhesive or the like. The IC chip 8 has a plurality of terminals 81, and each terminal 81 is electrically connected to each connection terminal 641 by the conductive wire 101. The IC chip 8 includes a drive circuit for driving and vibrating the sensor elements 7X, 7Y, and 7Z, and a detection circuit that detects detection vibration generated in the sensor elements 7X, 7Y, and 7Z when an angular velocity is applied.

  Further, a stress relaxation layer 9 made of a resin such as polyimide is provided on the upper surface of the IC chip 8, and the sensor elements 7X, 7Y, and 7Z are electrically connected on the stress relaxation layer 9. A terminal (not shown) is provided to be exposed.

  The sensor elements 7X, 7Y, and 7Z are fixed on the stress relaxation layer 9 via a conductive adhesive. Thereby, each terminal which sensor element 7X, 7Y, and 7Z has is electrically connected to each terminal on stress relaxation layer 9 via a conductive adhesive. The conductive adhesive is not particularly limited as long as it has conductivity and adhesiveness. For example, conductive adhesive such as silicone particles, epoxy-based, acrylic-based, polyimide-based, and bismaleimide-based conductive materials such as silver particles can be used. What disperse | distributed the property filler can be used.

Here, each of the sensor elements 7X and 7Y is the sensor element 1B of the third embodiment described above. The sensor element 7X is arranged so as to detect the angular velocity ω _X around the X axis, and the sensor element 7Y is arranged so as to detect the angular velocity ω _Y around the Y axis. The sensor element 7Z is the sensor element 1C of the second embodiment described above, and is arranged so as to detect the angular velocity ω _Z around the Z axis.

  In this embodiment, the IC chip 8 is provided inside the package 6, but the IC chip 8 may be provided outside the package 6. In this case, the sensor elements 7X, 7Y, and 7Z may be directly fixed to the package 6.

3. Electronic Device Next, the electronic device of the present invention will be described in detail with reference to FIGS.

  FIG. 11 is a perspective view showing a configuration of a mobile (or notebook) personal computer to which the electronic apparatus of the present invention is applied.

  In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 1108. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably. Such a personal computer 1100 incorporates a sensor element 1 that functions as angular velocity detection means (gyro sensor).

  FIG. 12 is a perspective view showing a configuration of a mobile phone (including PHS) to which the electronic apparatus of the present invention is applied.

  In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and a display unit 1208 is disposed between the operation buttons 1202 and the earpiece 1204. Such a cellular phone 1200 incorporates a sensor element 1 that functions as angular velocity detection means (gyro sensor).

  FIG. 13 is a perspective view showing the configuration of a digital still camera to which the electronic apparatus of the present invention is applied. In this figure, connection with an external device is also simply shown. Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

  A display unit is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to perform display based on an imaging signal from the CCD. The display unit 1310 displays a subject as an electronic image. Function as.

  A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.

  When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308.

  In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.

  Such a digital still camera 1300 incorporates a sensor element 1 that functions as angular velocity detection means (gyro sensor).

  In addition to the personal computer (mobile personal computer) in FIG. 11, the mobile phone in FIG. 12, and the digital still camera in FIG. 13, the electronic apparatus of the present invention includes, for example, an ink jet type ejection device (for example, an ink jet printer), Laptop personal computer, TV, video camera, video tape recorder, car navigation device, pager, electronic notebook (including communication functions), electronic dictionary, calculator, electronic game device, word processor, workstation, video phone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (for example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices, instruments (for example, Vehicles, aircraft, and ship instruments) It can be applied to a flight simulator or the like.

4). Next, the moving body of the present invention will be described in detail with reference to FIG.

FIG. 14 is a perspective view showing a configuration of an automobile to which the moving body of the present invention is applied.
The automobile 1500 has a built-in sensor element 1 that functions as an angular velocity detection means (gyro sensor), and the attitude of the vehicle body 1501 can be detected by the sensor element 1. The detection signal of the sensor element 1 is supplied to the vehicle body posture control device 1502, and the vehicle body posture control device 1502 detects the posture of the vehicle body 1501 based on the signal, and controls the stiffness of the suspension according to the detection result. The brakes of the individual wheels 1503 can be controlled. In addition, such posture control can be used by a biped robot or a radio control helicopter. As described above, the sensor element 1 is incorporated in realizing the posture control of various moving bodies.

  As mentioned above, although the sensor element, physical quantity sensor, electronic device, and moving body of the present invention have been described based on the illustrated embodiments, the present invention is not limited to these.

  Moreover, in this invention, the structure of each part can be substituted by the thing of the arbitrary structures which exhibit the same function, and arbitrary structures can also be added.

  In the above-described embodiment, the sensor element of the present invention has been described by taking the H type and the double T type as examples. However, the sensor element is not limited to this as long as it has a driving vibration arm having a groove. Various forms such as a tuning fork, a tripod tuning fork, an orthogonal type, and a prismatic type may be used.

  In addition, the number of drive vibration arms, detection vibration arms, and adjustment vibration arms may be one or three or more, respectively. Further, the drive vibration arm may also serve as the detection vibration arm.

  Further, the number, position, shape, size, and the like of the drive electrodes are not limited to the above-described embodiment as long as the drive vibration arm can be vibrated by energization.

  In addition, the number, position, shape, size, etc. of the detection electrodes are limited to the above-described embodiment as long as the vibration of the driving vibration arm due to the addition of the physical quantity can be electrically detected. is not.

1 sensor element 1A sensor element 1B sensor element 1C sensor element 1X sensor element 2 piezoelectric substrate 2A piezoelectric substrate 2B piezoelectric substrate 4 piezoelectric substrate 6 package 7X ... Sensor element 7Y ... Sensor element 7Z ... Sensor element 8 ... IC chip 9 ... Stress relaxation layer 10 ... Physical quantity sensor 21 ... Base 25 ... Support part 25A ... Support part 41 ... Base 61 ... Base 62 ... Lid 63 ... Joining member 81 ... Terminal 101 ... Conductive wire 221 ... Drive vibration arm 222 ... Drive vibration arm 231 ... Detection vibration arm 232 ... Detection vibration arm 241 ... Adjustment vibration Arm 242 ... Adjusting vibration arm 251 ... Part 252 ... Part 252A ... Part 253 ... Part 253A ... Part 261 ... Connection part 261A ... Connection part 262 ... Connection part 62A ... Connection part 263 ... Connection part 263B ... Connection part 263X ... Connection part 264 ... Connection part 264B ... Connection part 264X ... Connection part 311 ... Drive signal electrode 312 ... Drive ground electrode 321 ... Detection signal electrode 322 ... Detection signal electrode 323 ... Detection ground electrode 411 ... Main body 412 ... Connection arm 413 ... Connection arm 421 ... Drive vibration arm 422 ... Drive vibration arm 423 ... Drive vibration arm 424 ... Drive vibration arm 431 Detection vibration arm 432 Detection vibration arm 441 Fixing part 442 Fixing part 451 Support beam 452 Support beam 453 Support beam 454 Support beam 511 Drive Signal electrode 512 ... Drive ground electrode 513 ... Drive signal terminal 514 ... Drive ground terminal 521 ... Detection signal electrode 522 ... Detection ground electrode 523 ... Detection signal terminal 524 ... Detection contact Terminal 611 ... Recess 611a ... Recess 611b ... Recess 641 ... Connection terminal 642 ... Terminal 643 ... Wiring layer 644 ... Wiring layer 1100 ... Personal computer 1102 ... Keyboard 1104 ... Main body 1106 ... Display Unit 1108 ... Display unit 1200 ... Mobile phone 1202 ... Operation buttons 1204 ... Earpiece 1206 ... Mouthpiece 1208 ... Display part 1300 ... Digital still camera 1302 ... Case 1304 ... Light receiving unit 1306 ... Shutter button 1308 ... Memory 1310 ... Display unit 1312 ... Video signal output terminal 1314 ... Input / output terminal 1430 ... Television monitor 1440 ... Personal computer 1500 ... Car 1501 ... Car body 1502 ... Car body posture control device 1503 Wheel 2 211 ... arm part 2212 ... wide part 2213 ... groove 2221 ... arm part 2222 ... wide part 2223 ... groove 2311 ... arm part 2312 ... wide part 2313 ... groove 2321 ... arm part 2322 ... Wide part 2323 ... groove 2411 ... arm part 2412 ... wide part 2421 ... arm part 2422 ... wide part 2611 ... part 2612 ... part 2613 ... part 2614 ... part 2615 ... part 2616 ... part 2617 ... part 2618 ... part 2621 ... part 2622 ... part 2623 ... part 2624 ... part 2625 ... part 2626 ... part 2627 ... part 2628 ... part 2631 ... part 2632 ... part 2633 ... ... part 2634 ... part 2635 ... part 2636 ... part 2637 ... part 2638 ... part 2641 ... part 2642 Part 2643 ... Part 2644 ... Part 2645 ... Part 2646 ... Part 2647 ... Part 2648 ... Part 4211 ... Arm part 4212 ... Wide part 4213 ... Groove 4221 ... Arm part 4222 ... Wide part 4223 ... groove 4231 ... arm part 4232 ... wide part 4233 ... groove 4241 ... arm part 4242 ... wide part 4243 ... groove 4311 ... arm part 4312 ... wide part 4313 ... groove 4321 ... arm Part 4322 ... Wide part 4323 ... Slot a1 ... Center axis a2 ... Center axis S ... Accommodating space ω ... Angular speed ω _X ... Angular speed ω _Y ... Angular speed ω _Z ... Angular speed

Claims (9)

Base, before Symbol base from one end along a first direction extending therefrom to have driving vibration arms, and detecting extends along the other end opposite to said first direction vibration and the one end of the base portion A vibrating body including an arm ;
A support portion supporting the vibrating body;
With
The frequency of the drive vibration mode in which the drive vibration arm vibrates along the second direction orthogonal to the first direction is fd, and the vibration body vibrates along the first direction with deformation of the support portion. When the frequency of the first direction vibration mode is fy,
Meets the relationship of 0.7 ≦ fd / fy,
The sensor element according to claim 1, wherein the direction of the detection vibration of the detection vibration arm is a third direction orthogonal to the first direction and the second direction .   The sensor element according to claim 1, satisfying a relationship of 0.85 ≦ fd / fy.   The sensor element according to claim 1 or 2 satisfying a relation of fd / fy ≦ 100.   The sensor element according to claim 3, satisfying a relationship of fd / fy ≦ 10.   The sensor element according to claim 1, wherein the support portion has a long shape.   The sensor element according to claim 5, wherein the support portion includes a plurality of portions extending along the first direction and a plurality of portions extending along the second direction.   A physical quantity sensor comprising the sensor element according to claim 1.   An electronic apparatus comprising the sensor element according to claim 1.   A moving body comprising the sensor element according to claim 1.

Images