JP2013170118A5 - - Google Patents

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Publication number
JP2013170118A5
JP2013170118A5 JP2012037161A JP2012037161A JP2013170118A5 JP 2013170118 A5 JP2013170118 A5 JP 2013170118A5 JP 2012037161 A JP2012037161 A JP 2012037161A JP 2012037161 A JP2012037161 A JP 2012037161A JP 2013170118 A5 JP2013170118 A5 JP 2013170118A5
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JP
Japan
Prior art keywords
frequency
polycrystalline silicon
silicon rod
frequency current
current
Prior art date
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Application number
JP2012037161A
Other languages
English (en)
Japanese (ja)
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JP2013170118A (ja
JP5792658B2 (ja
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Publication date
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Priority claimed from JP2012037161A external-priority patent/JP5792658B2/ja
Priority to JP2012037161A priority Critical patent/JP5792658B2/ja
Priority to US14/379,429 priority patent/US20150037516A1/en
Priority to PCT/JP2013/000893 priority patent/WO2013125208A1/ja
Priority to MYPI2014702227A priority patent/MY171531A/en
Priority to EP13751609.2A priority patent/EP2818449B1/en
Priority to KR1020147019668A priority patent/KR20140128300A/ko
Priority to CN201380006277.9A priority patent/CN104066678B/zh
Priority to CN201710117230.XA priority patent/CN106947955A/zh
Publication of JP2013170118A publication Critical patent/JP2013170118A/ja
Publication of JP2013170118A5 publication Critical patent/JP2013170118A5/ja
Publication of JP5792658B2 publication Critical patent/JP5792658B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012037161A 2012-02-23 2012-02-23 多結晶シリコン棒の製造方法 Active JP5792658B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2012037161A JP5792658B2 (ja) 2012-02-23 2012-02-23 多結晶シリコン棒の製造方法
CN201380006277.9A CN104066678B (zh) 2012-02-23 2013-02-19 多晶硅棒的制造方法
PCT/JP2013/000893 WO2013125208A1 (ja) 2012-02-23 2013-02-19 多結晶シリコン棒の製造方法
MYPI2014702227A MY171531A (en) 2012-02-23 2013-02-19 Polycrystalline silicon rod manufacturing method
EP13751609.2A EP2818449B1 (en) 2012-02-23 2013-02-19 Polycrystalline silicon rod manufacturing method
KR1020147019668A KR20140128300A (ko) 2012-02-23 2013-02-19 다결정 실리콘 봉의 제조 방법
US14/379,429 US20150037516A1 (en) 2012-02-23 2013-02-19 Polycrystalline silicon rod manufacturing method
CN201710117230.XA CN106947955A (zh) 2012-02-23 2013-02-19 多晶硅棒的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012037161A JP5792658B2 (ja) 2012-02-23 2012-02-23 多結晶シリコン棒の製造方法

Publications (3)

Publication Number Publication Date
JP2013170118A JP2013170118A (ja) 2013-09-02
JP2013170118A5 true JP2013170118A5 (OSRAM) 2014-01-23
JP5792658B2 JP5792658B2 (ja) 2015-10-14

Family

ID=49005404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012037161A Active JP5792658B2 (ja) 2012-02-23 2012-02-23 多結晶シリコン棒の製造方法

Country Status (7)

Country Link
US (1) US20150037516A1 (OSRAM)
EP (1) EP2818449B1 (OSRAM)
JP (1) JP5792658B2 (OSRAM)
KR (1) KR20140128300A (OSRAM)
CN (2) CN106947955A (OSRAM)
MY (1) MY171531A (OSRAM)
WO (1) WO2013125208A1 (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6418778B2 (ja) 2014-05-07 2018-11-07 信越化学工業株式会社 多結晶シリコン棒、多結晶シリコン棒の製造方法、および、単結晶シリコン
JP6314097B2 (ja) * 2015-02-19 2018-04-18 信越化学工業株式会社 多結晶シリコン棒
JP7191780B2 (ja) * 2019-06-17 2022-12-19 信越化学工業株式会社 多結晶シリコンロッドの製造方法
CN114150372A (zh) * 2022-02-10 2022-03-08 杭州中欣晶圆半导体股份有限公司 一种横向磁场变频电流控制系统及单晶生长缺陷控制方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2831816A1 (de) 1978-07-19 1980-01-31 Siemens Ag Verfahren zum abscheiden von silicium in feinkristalliner form
JPS6374909A (ja) * 1986-09-19 1988-04-05 Shin Etsu Handotai Co Ltd 大直径多結晶シリコン棒の製造方法
DE19882883B4 (de) 1997-12-15 2009-02-26 Advanced Silicon Materials LLC, (n.d.Ges.d.Staates Delaware), Moses Lake System für die chemische Abscheidung aus der Gasphase zum Herstellen polykristalliner Siliziumstangen
RU2499768C2 (ru) * 2008-03-10 2013-11-27 Аег Пауэр Солюшнс Б.В. Устройство и способ равномерного электропитания кремниевого стержня

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