JP2014522371A5 - - Google Patents

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Publication number
JP2014522371A5
JP2014522371A5 JP2014514457A JP2014514457A JP2014522371A5 JP 2014522371 A5 JP2014522371 A5 JP 2014522371A5 JP 2014514457 A JP2014514457 A JP 2014514457A JP 2014514457 A JP2014514457 A JP 2014514457A JP 2014522371 A5 JP2014522371 A5 JP 2014522371A5
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JP
Japan
Prior art keywords
heating element
crucible
crystal growth
growth apparatus
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014514457A
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English (en)
Japanese (ja)
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JP2014522371A (ja
JP6013467B2 (ja
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Publication date
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Priority claimed from PCT/US2012/035970 external-priority patent/WO2012170124A2/en
Publication of JP2014522371A publication Critical patent/JP2014522371A/ja
Publication of JP2014522371A5 publication Critical patent/JP2014522371A5/ja
Application granted granted Critical
Publication of JP6013467B2 publication Critical patent/JP6013467B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014514457A 2011-06-06 2012-05-01 結晶成長装置用の加熱部品 Expired - Fee Related JP6013467B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161493804P 2011-06-06 2011-06-06
US61/493,804 2011-06-06
PCT/US2012/035970 WO2012170124A2 (en) 2011-06-06 2012-05-01 Heater assembly for crystal growth apparatus

Publications (3)

Publication Number Publication Date
JP2014522371A JP2014522371A (ja) 2014-09-04
JP2014522371A5 true JP2014522371A5 (OSRAM) 2015-05-21
JP6013467B2 JP6013467B2 (ja) 2016-10-25

Family

ID=47292263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014514457A Expired - Fee Related JP6013467B2 (ja) 2011-06-06 2012-05-01 結晶成長装置用の加熱部品

Country Status (6)

Country Link
US (1) US9303331B2 (OSRAM)
JP (1) JP6013467B2 (OSRAM)
KR (1) KR101909439B1 (OSRAM)
CN (1) CN103703170B (OSRAM)
TW (1) TWI593839B (OSRAM)
WO (1) WO2012170124A2 (OSRAM)

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CN101070608B (zh) * 2006-12-29 2010-06-23 嘉兴学院 旋转多坩埚下降法晶体生长系统
KR101263082B1 (ko) * 2010-11-15 2013-05-09 주식회사 엘지실트론 사파이어 잉곳 성장장치
CN103374758B (zh) * 2012-04-25 2016-03-02 志圣科技（广州）有限公司 晶体生长加热系统
KR20160000956U (ko) * 2013-07-15 2016-03-23 그라프텍 인터내셔널 홀딩스 인코포레이티드 실리콘 결정 생산 장치
US20160174302A1 (en) * 2013-07-15 2016-06-16 Momentive Performance Materials Inc. Coated graphite heater configuration
CN103741212A (zh) * 2013-12-19 2014-04-23 镇江环太硅科技有限公司 长晶炉及长晶炉热场的控制方法
US10658222B2 (en) 2015-01-16 2020-05-19 Lam Research Corporation Moveable edge coupling ring for edge process control during semiconductor wafer processing
CN104880069B (zh) * 2015-05-27 2016-10-26 海南大学 一种防热散失烧结炉
CN104962864B (zh) * 2015-07-23 2017-11-10 京东方科技集团股份有限公司 坩埚装置和蒸镀设备
KR101639627B1 (ko) * 2015-09-07 2016-07-14 에스엠엔티 주식회사 도가니 지지체를 이용한 사파이어 단결정 성장장치 및 이를 이용한 사파이어 단결정 성장방법
US10237921B2 (en) 2016-03-18 2019-03-19 Momentive Performance Materials Inc. Cylindrical heater
KR102182298B1 (ko) 2017-11-21 2020-11-25 램 리써치 코포레이션 하단 링 및 중간 에지 링
US10724796B2 (en) 2018-05-24 2020-07-28 Silfex, Inc Furnace for casting near-net shape (NNS) silicon
US11127572B2 (en) 2018-08-07 2021-09-21 Silfex, Inc. L-shaped plasma confinement ring for plasma chambers
KR20230106754A (ko) 2018-08-13 2023-07-13 램 리써치 코포레이션 에지 링 포지셔닝 및 센터링 피처들을 포함하는 플라즈마 시스 튜닝을 위한 교체가능한 에지 링 어셈블리 및/또는 접을 수 있는 에지 링 어셈블리
WO2021194470A1 (en) 2020-03-23 2021-09-30 Lam Research Corporation Mid-ring erosion compensation in substrate processing systems
CN112279260B (zh) * 2020-10-30 2024-08-16 江苏先导微电子科技有限公司 一种高纯硼晶体和高纯硼粉的制备装置

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FR2599482B1 (fr) * 1986-06-03 1988-07-29 Commissariat Energie Atomique Four de fusion a induction haute frequence
JPH02116696A (ja) * 1988-10-19 1990-05-01 Gos N I I Proekt Inst Redkometallicheskoj Prom 石英るつぼを強化するためのシェル
JP2987799B2 (ja) * 1996-03-01 1999-12-06 住友金属工業株式会社 単結晶引上げ装置
JP2956575B2 (ja) * 1996-03-01 1999-10-04 住友金属工業株式会社 単結晶育成用抵抗発熱体
JPH10167876A (ja) * 1996-11-29 1998-06-23 Super Silicon Kenkyusho:Kk Ｃｚ結晶製造装置
US6652649B1 (en) * 1999-06-29 2003-11-25 Act Optics & Engineering, Inc. Supplemental heating unit for crystal growth furnace
JP3775776B2 (ja) * 1999-09-20 2006-05-17 ユニオンマテリアル株式会社 単結晶の製造方法
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JP5167960B2 (ja) * 2008-06-04 2013-03-21 株式会社Ｓｕｍｃｏ シリコン単結晶の育成装置
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