JP2013140854A5 - - Google Patents
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- Publication number
- JP2013140854A5 JP2013140854A5 JP2011290068A JP2011290068A JP2013140854A5 JP 2013140854 A5 JP2013140854 A5 JP 2013140854A5 JP 2011290068 A JP2011290068 A JP 2011290068A JP 2011290068 A JP2011290068 A JP 2011290068A JP 2013140854 A5 JP2013140854 A5 JP 2013140854A5
- Authority
- JP
- Japan
- Prior art keywords
- conductive layer
- semiconductor material
- semiconductor
- layer
- terahertz wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims description 79
- 239000000463 material Substances 0.000 claims description 33
- 238000001514 detection method Methods 0.000 claims description 8
- 239000011247 coating layer Substances 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 3
- 239000000470 constituent Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 53
- 239000012535 impurity Substances 0.000 claims 10
- 239000000758 substrate Substances 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 1
- 239000000126 substance Substances 0.000 description 7
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- OMOVVBIIQSXZSZ-UHFFFAOYSA-N [6-(4-acetyloxy-5,9a-dimethyl-2,7-dioxo-4,5a,6,9-tetrahydro-3h-pyrano[3,4-b]oxepin-5-yl)-5-formyloxy-3-(furan-3-yl)-3a-methyl-7-methylidene-1a,2,3,4,5,6-hexahydroindeno[1,7a-b]oxiren-4-yl] 2-hydroxy-3-methylpentanoate Chemical compound CC12C(OC(=O)C(O)C(C)CC)C(OC=O)C(C3(C)C(CC(=O)OC4(C)COC(=O)CC43)OC(C)=O)C(=C)C32OC3CC1C=1C=COC=1 OMOVVBIIQSXZSZ-UHFFFAOYSA-N 0.000 description 2
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 235000018936 Vitellaria paradoxa Nutrition 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000002117 illicit drug Substances 0.000 description 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011290068A JP5998479B2 (ja) | 2011-12-28 | 2011-12-28 | 光伝導アンテナ、テラヘルツ波発生装置、カメラ、イメージング装置および計測装置 |
| US13/717,857 US8872107B2 (en) | 2011-12-28 | 2012-12-18 | Photoconductive antenna, terahertz wave generating device, camera, imaging device, and measuring device |
| EP12199071.7A EP2610923A3 (en) | 2011-12-28 | 2012-12-21 | Photoconductive antenna, terahertz wave generating device, camera, imaging device, and measuring device |
| KR1020120152330A KR20130076732A (ko) | 2011-12-28 | 2012-12-24 | 광 전도 안테나, 테라헤르츠파 발생 장치, 카메라, 이미징 장치 및 계측 장치 |
| TW101149905A TW201328087A (zh) | 2011-12-28 | 2012-12-25 | 光傳導天線、兆赫波產生裝置、相機、成像裝置及測量裝置 |
| CN2012105753357A CN103187679A (zh) | 2011-12-28 | 2012-12-26 | 光导天线、太赫兹波产生装置、拍摄装置、成像装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011290068A JP5998479B2 (ja) | 2011-12-28 | 2011-12-28 | 光伝導アンテナ、テラヘルツ波発生装置、カメラ、イメージング装置および計測装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013140854A JP2013140854A (ja) | 2013-07-18 |
| JP2013140854A5 true JP2013140854A5 (enExample) | 2015-02-19 |
| JP5998479B2 JP5998479B2 (ja) | 2016-09-28 |
Family
ID=47678515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011290068A Expired - Fee Related JP5998479B2 (ja) | 2011-12-28 | 2011-12-28 | 光伝導アンテナ、テラヘルツ波発生装置、カメラ、イメージング装置および計測装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8872107B2 (enExample) |
| EP (1) | EP2610923A3 (enExample) |
| JP (1) | JP5998479B2 (enExample) |
| KR (1) | KR20130076732A (enExample) |
| CN (1) | CN103187679A (enExample) |
| TW (1) | TW201328087A (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI481825B (zh) * | 2013-11-21 | 2015-04-21 | Finetek Co Ltd | Level detection device with integrated lens antenna |
| JP2015148541A (ja) * | 2014-02-07 | 2015-08-20 | セイコーエプソン株式会社 | 光伝導アンテナ、カメラ、イメージング装置、および計測装置 |
| JP6485624B2 (ja) * | 2014-10-28 | 2019-03-20 | セイコーエプソン株式会社 | 計測装置 |
| NL2015262B9 (en) * | 2015-08-04 | 2017-04-10 | Univ Delft Tech | Photoconductive antenna array. |
| JP2017084991A (ja) * | 2015-10-29 | 2017-05-18 | セイコーエプソン株式会社 | テラヘルツ波発生装置、イメージング装置、カメラ、および計測装置 |
| US10622392B2 (en) | 2016-01-20 | 2020-04-14 | Sony Corporation | Light receiving device, method of manufacturing light receiving device, imaging device, and electronic apparatus |
| KR102666357B1 (ko) * | 2019-09-19 | 2024-05-17 | 한국전력공사 | 대구경 어레이형 테라헤르츠 광전도 안테나 |
| US20230387563A1 (en) * | 2019-10-10 | 2023-11-30 | Rohm Co., Ltd. | Terahertz device |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5371399A (en) * | 1991-06-14 | 1994-12-06 | International Business Machines Corporation | Compound semiconductor having metallic inclusions and devices fabricated therefrom |
| US5894125A (en) * | 1997-08-18 | 1999-04-13 | Lucent Technologies Inc. | Near field terahertz imaging |
| GB2396695B (en) * | 2001-01-16 | 2005-05-04 | Teraview Ltd | Apparatus and method for investigating a sample |
| CN1993869A (zh) * | 2004-07-30 | 2007-07-04 | 佳能株式会社 | 光学半导体器件 |
| JP3913253B2 (ja) * | 2004-07-30 | 2007-05-09 | キヤノン株式会社 | 光半導体装置およびその製造方法 |
| JP2006313803A (ja) | 2005-05-09 | 2006-11-16 | Matsushita Electric Ind Co Ltd | テラヘルツ電磁波発生装置 |
| JP2007300022A (ja) | 2006-05-02 | 2007-11-15 | Material Design Factory:Kk | テラヘルツ波増幅装置、テラヘルツ波変調装置ならびにこれを用いた通信装置およびセンシング装置 |
| JP5127360B2 (ja) * | 2007-08-20 | 2013-01-23 | キヤノン株式会社 | 発振素子、及び検査装置 |
| US9117133B2 (en) * | 2008-06-18 | 2015-08-25 | Spectral Image, Inc. | Systems and methods for hyperspectral imaging |
| JP5419411B2 (ja) * | 2008-10-08 | 2014-02-19 | キヤノン株式会社 | テラヘルツ波発生素子 |
| KR101385108B1 (ko) * | 2009-12-17 | 2014-04-29 | 한국전자통신연구원 | 포토믹서 모듈 및 그것의 테라헤르츠파 발생 방법 |
| JP5582822B2 (ja) * | 2010-02-26 | 2014-09-03 | キヤノン株式会社 | 電磁波発生装置 |
| JP5709562B2 (ja) * | 2010-03-04 | 2015-04-30 | キヤノン株式会社 | テラヘルツ波発生素子、およびテラヘルツ時間領域分光装置 |
| JP2011202972A (ja) * | 2010-03-24 | 2011-10-13 | Fujitsu Ltd | イメージング装置 |
| JP5418916B2 (ja) * | 2010-06-04 | 2014-02-19 | 日本電気株式会社 | 反射型イメージング装置 |
-
2011
- 2011-12-28 JP JP2011290068A patent/JP5998479B2/ja not_active Expired - Fee Related
-
2012
- 2012-12-18 US US13/717,857 patent/US8872107B2/en not_active Expired - Fee Related
- 2012-12-21 EP EP12199071.7A patent/EP2610923A3/en not_active Withdrawn
- 2012-12-24 KR KR1020120152330A patent/KR20130076732A/ko not_active Withdrawn
- 2012-12-25 TW TW101149905A patent/TW201328087A/zh unknown
- 2012-12-26 CN CN2012105753357A patent/CN103187679A/zh active Pending
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