JP2013131575A5 - - Google Patents
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- Publication number
- JP2013131575A5 JP2013131575A5 JP2011278883A JP2011278883A JP2013131575A5 JP 2013131575 A5 JP2013131575 A5 JP 2013131575A5 JP 2011278883 A JP2011278883 A JP 2011278883A JP 2011278883 A JP2011278883 A JP 2011278883A JP 2013131575 A5 JP2013131575 A5 JP 2013131575A5
- Authority
- JP
- Japan
- Prior art keywords
- conductive layer
- layer
- semiconductor material
- semiconductor
- terahertz wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 30
- 238000001514 detection method Methods 0.000 claims description 8
- 238000003384 imaging method Methods 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 47
- 239000012535 impurity Substances 0.000 claims 10
- 239000003989 dielectric material Substances 0.000 claims 6
- 238000010030 laminating Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 description 7
- OMOVVBIIQSXZSZ-UHFFFAOYSA-N [6-(4-acetyloxy-5,9a-dimethyl-2,7-dioxo-4,5a,6,9-tetrahydro-3h-pyrano[3,4-b]oxepin-5-yl)-5-formyloxy-3-(furan-3-yl)-3a-methyl-7-methylidene-1a,2,3,4,5,6-hexahydroindeno[1,7a-b]oxiren-4-yl] 2-hydroxy-3-methylpentanoate Chemical compound CC12C(OC(=O)C(O)C(C)CC)C(OC=O)C(C3(C)C(CC(=O)OC4(C)COC(=O)CC43)OC(C)=O)C(=C)C32OC3CC1C=1C=COC=1 OMOVVBIIQSXZSZ-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000002117 illicit drug Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011278883A JP5910064B2 (ja) | 2011-12-20 | 2011-12-20 | 光伝導アンテナ、テラヘルツ波発生装置、カメラ、イメージング装置および計測装置 |
| CN2012105484098A CN103178431A (zh) | 2011-12-20 | 2012-12-17 | 光导天线、太赫兹波发生装置、照相机、成像装置以及测量装置 |
| US13/717,835 US9306112B2 (en) | 2011-12-20 | 2012-12-18 | Photoconductive antenna, terahertz wave generating device, camera, imaging device, and measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011278883A JP5910064B2 (ja) | 2011-12-20 | 2011-12-20 | 光伝導アンテナ、テラヘルツ波発生装置、カメラ、イメージング装置および計測装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013131575A JP2013131575A (ja) | 2013-07-04 |
| JP2013131575A5 true JP2013131575A5 (enExample) | 2015-02-05 |
| JP5910064B2 JP5910064B2 (ja) | 2016-04-27 |
Family
ID=48609171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011278883A Active JP5910064B2 (ja) | 2011-12-20 | 2011-12-20 | 光伝導アンテナ、テラヘルツ波発生装置、カメラ、イメージング装置および計測装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9306112B2 (enExample) |
| JP (1) | JP5910064B2 (enExample) |
| CN (1) | CN103178431A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5799538B2 (ja) * | 2011-03-18 | 2015-10-28 | セイコーエプソン株式会社 | テラヘルツ波発生装置、カメラ、イメージング装置、計測装置および光源装置 |
| JP5987346B2 (ja) * | 2012-02-23 | 2016-09-07 | セイコーエプソン株式会社 | アンテナ、テラヘルツ波発生装置、カメラ、イメージング装置、および計測装置 |
| DK3683848T3 (da) | 2013-08-29 | 2022-09-05 | Hamamatsu Photonics Kk | Detektion af terahertz-stråling |
| JP2015148541A (ja) * | 2014-02-07 | 2015-08-20 | セイコーエプソン株式会社 | 光伝導アンテナ、カメラ、イメージング装置、および計測装置 |
| JP7208032B2 (ja) * | 2019-01-28 | 2023-01-18 | キヤノン株式会社 | 半導体装置 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5264287A (en) * | 1975-11-25 | 1977-05-27 | Hitachi Ltd | Group iii-v compound semiconductor element |
| JPS5519854A (en) * | 1978-07-29 | 1980-02-12 | Fujitsu Ltd | Formation of protective film |
| EP0007805B1 (en) | 1978-07-29 | 1983-02-16 | Fujitsu Limited | A method of coating side walls of semiconductor devices |
| JPH0715979B2 (ja) * | 1987-08-27 | 1995-02-22 | 三菱電機株式会社 | 超格子撮像素子 |
| JP4278405B2 (ja) * | 2003-02-28 | 2009-06-17 | シャープ株式会社 | 酸化物半導体発光素子およびその製造方法 |
| JP2006302919A (ja) * | 2005-04-15 | 2006-11-02 | Sony Corp | 面発光型半導体レーザおよびその製造方法 |
| JP2006313803A (ja) | 2005-05-09 | 2006-11-16 | Matsushita Electric Ind Co Ltd | テラヘルツ電磁波発生装置 |
| US8274058B1 (en) * | 2006-01-25 | 2012-09-25 | Sandia Corporation | Integrated heterodyne terahertz transceiver |
| JP2007300022A (ja) * | 2006-05-02 | 2007-11-15 | Material Design Factory:Kk | テラヘルツ波増幅装置、テラヘルツ波変調装置ならびにこれを用いた通信装置およびセンシング装置 |
| CN101127432A (zh) * | 2006-08-16 | 2008-02-20 | 中国科学院半导体研究所 | 太赫兹量子级联半导体激光器材料及其生长方法 |
| JP5441469B2 (ja) * | 2009-03-27 | 2014-03-12 | キヤノン株式会社 | 共振器 |
| KR101048717B1 (ko) | 2010-01-19 | 2011-07-14 | 삼성전기주식회사 | 인쇄회로기판 스트립 및 전자소자 내장형 인쇄회로기판 제조방법 |
| JP5582822B2 (ja) * | 2010-02-26 | 2014-09-03 | キヤノン株式会社 | 電磁波発生装置 |
-
2011
- 2011-12-20 JP JP2011278883A patent/JP5910064B2/ja active Active
-
2012
- 2012-12-17 CN CN2012105484098A patent/CN103178431A/zh active Pending
- 2012-12-18 US US13/717,835 patent/US9306112B2/en not_active Expired - Fee Related
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