KR20130076732A - 광 전도 안테나, 테라헤르츠파 발생 장치, 카메라, 이미징 장치 및 계측 장치 - Google Patents
광 전도 안테나, 테라헤르츠파 발생 장치, 카메라, 이미징 장치 및 계측 장치 Download PDFInfo
- Publication number
- KR20130076732A KR20130076732A KR1020120152330A KR20120152330A KR20130076732A KR 20130076732 A KR20130076732 A KR 20130076732A KR 1020120152330 A KR1020120152330 A KR 1020120152330A KR 20120152330 A KR20120152330 A KR 20120152330A KR 20130076732 A KR20130076732 A KR 20130076732A
- Authority
- KR
- South Korea
- Prior art keywords
- terahertz wave
- semiconductor layer
- terahertz
- type semiconductor
- antenna
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000003384 imaging method Methods 0.000 title description 23
- 239000004065 semiconductor Substances 0.000 claims abstract description 262
- 239000000463 material Substances 0.000 claims abstract description 48
- 239000010410 layer Substances 0.000 claims description 311
- 230000003287 optical effect Effects 0.000 claims description 67
- 238000001514 detection method Methods 0.000 claims description 54
- 239000000758 substrate Substances 0.000 claims description 42
- 238000000034 method Methods 0.000 claims description 27
- 239000011247 coating layer Substances 0.000 claims description 23
- 239000012535 impurity Substances 0.000 claims description 20
- 150000001875 compounds Chemical class 0.000 claims description 7
- 238000003475 lamination Methods 0.000 claims description 7
- 239000000470 constituent Substances 0.000 claims description 3
- 230000001965 increasing effect Effects 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 230000006835 compression Effects 0.000 description 38
- 238000007906 compression Methods 0.000 description 38
- 238000005259 measurement Methods 0.000 description 17
- 238000005253 cladding Methods 0.000 description 14
- 238000010586 diagram Methods 0.000 description 14
- 239000000126 substance Substances 0.000 description 14
- 230000000694 effects Effects 0.000 description 9
- 238000005530 etching Methods 0.000 description 7
- 238000010276 construction Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 5
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- OMOVVBIIQSXZSZ-UHFFFAOYSA-N [6-(4-acetyloxy-5,9a-dimethyl-2,7-dioxo-4,5a,6,9-tetrahydro-3h-pyrano[3,4-b]oxepin-5-yl)-5-formyloxy-3-(furan-3-yl)-3a-methyl-7-methylidene-1a,2,3,4,5,6-hexahydroindeno[1,7a-b]oxiren-4-yl] 2-hydroxy-3-methylpentanoate Chemical compound CC12C(OC(=O)C(O)C(C)CC)C(OC=O)C(C3(C)C(CC(=O)OC4(C)COC(=O)CC43)OC(C)=O)C(=C)C32OC3CC1C=1C=COC=1 OMOVVBIIQSXZSZ-UHFFFAOYSA-N 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- -1 For example Substances 0.000 description 3
- 238000000701 chemical imaging Methods 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 229910000673 Indium arsenide Inorganic materials 0.000 description 2
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000002117 illicit drug Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
- H01Q1/38—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q23/00—Antennas with active circuits or circuit elements integrated within them or attached to them
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S1/00—Masers, i.e. devices using stimulated emission of electromagnetic radiation in the microwave range
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/10—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
- H10F30/223—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PIN barrier
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F55/00—Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto
- H10F55/20—Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto wherein the electric light source controls the radiation-sensitive semiconductor devices, e.g. optocouplers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011290068A JP5998479B2 (ja) | 2011-12-28 | 2011-12-28 | 光伝導アンテナ、テラヘルツ波発生装置、カメラ、イメージング装置および計測装置 |
| JPJP-P-2011-290068 | 2011-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20130076732A true KR20130076732A (ko) | 2013-07-08 |
Family
ID=47678515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020120152330A Withdrawn KR20130076732A (ko) | 2011-12-28 | 2012-12-24 | 광 전도 안테나, 테라헤르츠파 발생 장치, 카메라, 이미징 장치 및 계측 장치 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8872107B2 (enExample) |
| EP (1) | EP2610923A3 (enExample) |
| JP (1) | JP5998479B2 (enExample) |
| KR (1) | KR20130076732A (enExample) |
| CN (1) | CN103187679A (enExample) |
| TW (1) | TW201328087A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210033698A (ko) * | 2019-09-19 | 2021-03-29 | 한국전력공사 | 대구경 어레이형 테라헤르츠 광전도 안테나 |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI481825B (zh) * | 2013-11-21 | 2015-04-21 | Finetek Co Ltd | Level detection device with integrated lens antenna |
| JP2015148541A (ja) * | 2014-02-07 | 2015-08-20 | セイコーエプソン株式会社 | 光伝導アンテナ、カメラ、イメージング装置、および計測装置 |
| JP6485624B2 (ja) * | 2014-10-28 | 2019-03-20 | セイコーエプソン株式会社 | 計測装置 |
| NL2015262B9 (en) * | 2015-08-04 | 2017-04-10 | Univ Delft Tech | Photoconductive antenna array. |
| JP2017084991A (ja) * | 2015-10-29 | 2017-05-18 | セイコーエプソン株式会社 | テラヘルツ波発生装置、イメージング装置、カメラ、および計測装置 |
| WO2017126204A1 (ja) * | 2016-01-20 | 2017-07-27 | ソニー株式会社 | 受光素子、受光素子の製造方法、撮像素子および電子機器 |
| CN114503360B (zh) * | 2019-10-10 | 2023-11-03 | 罗姆股份有限公司 | 太赫兹装置 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5371399A (en) * | 1991-06-14 | 1994-12-06 | International Business Machines Corporation | Compound semiconductor having metallic inclusions and devices fabricated therefrom |
| US5894125A (en) * | 1997-08-18 | 1999-04-13 | Lucent Technologies Inc. | Near field terahertz imaging |
| GB2396695B (en) * | 2001-01-16 | 2005-05-04 | Teraview Ltd | Apparatus and method for investigating a sample |
| JP3913253B2 (ja) * | 2004-07-30 | 2007-05-09 | キヤノン株式会社 | 光半導体装置およびその製造方法 |
| CN1993869A (zh) * | 2004-07-30 | 2007-07-04 | 佳能株式会社 | 光学半导体器件 |
| JP2006313803A (ja) | 2005-05-09 | 2006-11-16 | Matsushita Electric Ind Co Ltd | テラヘルツ電磁波発生装置 |
| JP2007300022A (ja) | 2006-05-02 | 2007-11-15 | Material Design Factory:Kk | テラヘルツ波増幅装置、テラヘルツ波変調装置ならびにこれを用いた通信装置およびセンシング装置 |
| JP5127360B2 (ja) * | 2007-08-20 | 2013-01-23 | キヤノン株式会社 | 発振素子、及び検査装置 |
| US9117133B2 (en) * | 2008-06-18 | 2015-08-25 | Spectral Image, Inc. | Systems and methods for hyperspectral imaging |
| JP5419411B2 (ja) * | 2008-10-08 | 2014-02-19 | キヤノン株式会社 | テラヘルツ波発生素子 |
| KR101385108B1 (ko) * | 2009-12-17 | 2014-04-29 | 한국전자통신연구원 | 포토믹서 모듈 및 그것의 테라헤르츠파 발생 방법 |
| JP5582822B2 (ja) * | 2010-02-26 | 2014-09-03 | キヤノン株式会社 | 電磁波発生装置 |
| JP5709562B2 (ja) * | 2010-03-04 | 2015-04-30 | キヤノン株式会社 | テラヘルツ波発生素子、およびテラヘルツ時間領域分光装置 |
| JP2011202972A (ja) * | 2010-03-24 | 2011-10-13 | Fujitsu Ltd | イメージング装置 |
| JP5418916B2 (ja) * | 2010-06-04 | 2014-02-19 | 日本電気株式会社 | 反射型イメージング装置 |
-
2011
- 2011-12-28 JP JP2011290068A patent/JP5998479B2/ja not_active Expired - Fee Related
-
2012
- 2012-12-18 US US13/717,857 patent/US8872107B2/en not_active Expired - Fee Related
- 2012-12-21 EP EP12199071.7A patent/EP2610923A3/en not_active Withdrawn
- 2012-12-24 KR KR1020120152330A patent/KR20130076732A/ko not_active Withdrawn
- 2012-12-25 TW TW101149905A patent/TW201328087A/zh unknown
- 2012-12-26 CN CN2012105753357A patent/CN103187679A/zh active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210033698A (ko) * | 2019-09-19 | 2021-03-29 | 한국전력공사 | 대구경 어레이형 테라헤르츠 광전도 안테나 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2610923A3 (en) | 2017-08-16 |
| TW201328087A (zh) | 2013-07-01 |
| JP2013140854A (ja) | 2013-07-18 |
| US8872107B2 (en) | 2014-10-28 |
| US20130168550A1 (en) | 2013-07-04 |
| CN103187679A (zh) | 2013-07-03 |
| EP2610923A2 (en) | 2013-07-03 |
| JP5998479B2 (ja) | 2016-09-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20121224 |
|
| PG1501 | Laying open of application | ||
| PC1203 | Withdrawal of no request for examination | ||
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |