JP2013089826A5 - - Google Patents

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Publication number
JP2013089826A5
JP2013089826A5 JP2011230327A JP2011230327A JP2013089826A5 JP 2013089826 A5 JP2013089826 A5 JP 2013089826A5 JP 2011230327 A JP2011230327 A JP 2011230327A JP 2011230327 A JP2011230327 A JP 2011230327A JP 2013089826 A5 JP2013089826 A5 JP 2013089826A5
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JP
Japan
Prior art keywords
substrate
plate
width direction
roller
peeling
Prior art date
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Application number
JP2011230327A
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English (en)
Japanese (ja)
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JP2013089826A (ja
JP5645164B2 (ja
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Priority to JP2011230327A priority Critical patent/JP5645164B2/ja
Priority claimed from JP2011230327A external-priority patent/JP5645164B2/ja
Publication of JP2013089826A publication Critical patent/JP2013089826A/ja
Publication of JP2013089826A5 publication Critical patent/JP2013089826A5/ja
Application granted granted Critical
Publication of JP5645164B2 publication Critical patent/JP5645164B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011230327A 2011-10-20 2011-10-20 フィルム剥離装置 Active JP5645164B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011230327A JP5645164B2 (ja) 2011-10-20 2011-10-20 フィルム剥離装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011230327A JP5645164B2 (ja) 2011-10-20 2011-10-20 フィルム剥離装置

Publications (3)

Publication Number Publication Date
JP2013089826A JP2013089826A (ja) 2013-05-13
JP2013089826A5 true JP2013089826A5 (zh) 2013-08-29
JP5645164B2 JP5645164B2 (ja) 2014-12-24

Family

ID=48533433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011230327A Active JP5645164B2 (ja) 2011-10-20 2011-10-20 フィルム剥離装置

Country Status (1)

Country Link
JP (1) JP5645164B2 (zh)

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