JP2013089826A5 - - Google Patents

Description

Film peeling device

  The present invention relates to film peeling for peeling off a protective film attached to one or both sides of a plate-like member such as a substrate in the production process of the plate-like member such as a printed wiring board, a liquid crystal panel, or a semiconductor wafer. Relates to the device.

  In the production of printed circuit boards, after forming a photosensitive photoresist layer on the surface of a conductive layer made of copper foil or the like laminated on one or both sides of an insulating substrate body, a protective film is formed on the surface of the photoresist layer. Is attached to protect the photoresist layer before exposure.

  The protective film is unnecessary when the exposed photoresist layer is developed to form a mask pattern for etching, so that the wiring pattern image is exposed to the photoresist layer for a predetermined time so that it is peeled off. It has become.

  A film peeling device is used for peeling the protective film from the substrate. As the film peeling device, for example, the edge portion of the protective film attached to one or both sides of the substrate as shown in FIG. Equipped with an end peeling mechanism that peels more, and the entire protective film is peeled off from the substrate sequentially by this peeling mechanism consisting of an air knife etc. with the edge of the protective film peeled off by this end peeling mechanism as a cut. Is known (for example, Patent Document 1).

  This end peeling mechanism includes a roller unit 203 having a pair of support members 202 and 202 in which two types of press contact rollers 201 having different rotation axes are supported side by side in the substrate width direction, and the two support members 202 and 202 are mutually connected. Two pressure-contact rollers with different rotation axis angles are moved by moving the roller unit 203 in the substrate width direction by moving the roller unit 203 in the substrate width direction by pressing the pressure-contact rollers 201 from the upper and lower surfaces of the edge of the substrate. A shearing force is applied to the edge of the protective film 201 so that the edge of the protective film is peeled off from the substrate surface.

  The width direction moving mechanism for moving the roller unit 203 in the substrate width direction has a structure in which the roller unit 203 guided by the support rails 204 and 204 directed in the substrate width direction is moved by the cylinder mechanism 205. For 205, an air cylinder having a shaft that can be freely inserted into and removed from the cylinder main body is used. The air cylinder main body is fixed to the frame of the apparatus main body in the substrate width direction, and the shaft is fixed to the roller unit 203. By doing so, the roller unit 203 moves in the substrate width direction along the support rails 204 and 204 in conjunction with the movement of the shaft.

  Further, the stroke amount of the cylinder mechanism 205 is a position where the roller unit 203 does not hinder the transfer of the substrate when the edge peeling mechanism 200 finishes peeling the protective film edge and is transferred to the peeling mechanism 206. Therefore, the start position and the end position of the movement in the width direction of the roller unit 203 are set to be located outside the substrate width.

Japanese Utility Model Publication No. 06-87960

However, in the conventional technique as described above, the movement of the roller unit in the substrate width direction depends on the stroke amount of the cylinder mechanism, and the start position and the end position of the movement of the roller unit in the width direction are located outside the substrate width. When the roller unit is moved in the substrate width direction by the cylinder mechanism during the peeling operation, the pressure roller rides on the substrate or falls off the substrate from the side edge of the substrate, and impacts the substrate and the apparatus during the ride or removal. Occurs.

  Such an impact may cause damage to the substrate and failure of the apparatus, and when the roller pressed against the substrate surface is moved in the substrate width direction, the photoresist layer or conductive layer There is a possibility that fine fragments and the like that are generated are scattered, and the fine fragments and the like may cause contamination of the substrate and failure of the apparatus.

  In addition, there is a risk that the pressure roller will not ride on the substrate but bend the substrate by contacting the edge of the substrate, and such deformation of the substrate may cause the device to stop or break down. It was.

  Therefore, in view of such a conventional problem, the present invention suppresses an impact when the edge portion of the protective film attached to the plate-like member such as the substrate is peeled off, breaks the plate-like member such as the substrate, and the like. The object of the present invention is to provide a film peeling apparatus that can prevent a failure of the apparatus and can be easily switched for each lot.

  The feature of the invention described in claim 1 for solving the conventional problems as described above and achieving the intended purpose is a pair of movable relative to each other between a position close to each other and a position away from each other in the vertical direction. The support members are arranged in the plate-shaped member width direction, and the standard pressure-contact rollers with the rotation shaft directed in the plate-shaped member transfer direction and the inclined pressure-contact rollers whose rotation shaft is inclined in the plate-shaped member width direction are supported side by side. A roller unit, and a width direction moving means for moving the roller unit in the width direction of the plate-like member, and the both pressure contact with the edge surface of the plate-like member having a protective film stuck on one or both sides. Film peeling provided with an edge peeling mechanism in which the edge of the protective film is peeled off from the surface of the plate-like member by moving the roller unit in the plate-like member width direction with the roller being pressed. In the apparatus, the width direction moving means includes a support rail member that supports the roller unit so as to be movable in the plate member width direction, and an operation unit that moves the roller unit to an arbitrary position along the support rail member. And a control unit for controlling the operation unit.

  According to a second aspect of the present invention, in addition to the configuration of the first aspect, the operation unit includes a track member directed in a plate-like member width direction, a driver whose operation is controlled by the control unit, A slider that moves to an arbitrary position on the track member in conjunction with the operation of the driving body, and the roller unit is fixed to the slider.

  According to a third aspect of the present invention, in addition to the configuration of the first or second aspect, the control unit includes input means for inputting data for controlling the operation unit, and a plurality of inputs inputted by the input means. Storage means for storing the control data.

  According to a fourth aspect of the present invention, in addition to the configuration of the first, second, or third aspect, the control unit inputs external data from another device used in the process of manufacturing the plate member. An input means is provided, and the operation unit is controlled based on the external input data.

  According to a fifth aspect of the present invention, in addition to the configuration of the first to third or fourth aspects, the support member has a discharge port directed toward the plate member between the standard pressure contact roller and the inclined pressure contact roller. The air nozzle is provided.

  As described above, the film peeling apparatus according to the present invention has a pair of support members that can move relative to each other between a position close to each other and a position apart from each other in the vertical direction. A roller unit formed by supporting a standard pressure contact roller directed in the sheet member transfer direction and an inclined pressure contact roller in which a rotation shaft is inclined in the plate member width direction and supporting the roller unit in the plate member width direction. The roller unit is moved in the width direction of the plate member in a state where the both pressure rollers are brought into pressure contact with the surface of the edge of the plate member having a protective film stuck on one or both sides. By providing an end peeling mechanism that peels the edge of the protective film from the surface of the plate-like member by moving the protective film, the two types of rollers having different rotation axis directions can be used. Mamoru reacted with shearing force to the edge portion of the film, whereby it is possible to separate the edge portion of the protection from the surface of the plate-like member such as a substrate film.

  Moreover, in this invention, the said width direction moving means moves the said roller unit to arbitrary positions along this support rail member which supports the said roller unit so that a movement in a plate-shaped member width direction is possible. By providing an operation unit and a control unit for controlling the operation unit, it is possible to precisely control the movement of the roller unit based on a command from the control unit, so that the platen member such as the substrate of the pressure roller can be ridden or dropped off. The pressure roller can be moved on the surface of the edge of the plate-like member such as a substrate in a stable state, avoiding impact when the pressure roller moves in the plate-like member width direction, and fine fragments Etc. can be suppressed.

  In the present invention, the operation unit includes a track member directed in the width direction of the plate-shaped member, a drive body whose operation is controlled by the control unit, and an operation on the track member in conjunction with the operation of the drive body. It is possible to suitably control the movement of the roller unit by providing a slider that moves to an arbitrary position and fixing the roller unit to the slider.

  In the present invention, the control unit comprises input means for inputting data for controlling the operation unit, and storage means for storing a plurality of control data input by the input means. The movement of the roller unit in the width direction can be precisely controlled based on the input data. Further, it is possible to deal with a plurality of lots having different plate member widths without adjusting the width direction moving mechanism.

  Furthermore, in the present invention, the control unit includes external input means for inputting data from another device used in the process of manufacturing the plate-like member, and controls the operation unit based on the external input data. By doing, it can be made to operate | move in cooperation with the other apparatus used for the manufacturing process of plate-shaped members, such as a printed wiring board.

  Furthermore, in the present invention, the support member is provided with an air nozzle having a discharge port directed toward the plate-like member between the standard pressure contact roller and the inclined pressure contact roller, so that the protective film edge portion is preferably provided. Can be peeled off.

It is a side view which shows schematically an example of the film peeling apparatus which concerns on this invention. It is a partial expanded side view which shows the outline of the edge part peeling mechanism in FIG. It is a front view which shows the width direction moving mechanism part of an edge part peeling mechanism same as the above. It is a partial enlarged front view which shows the attachment state of the press-contact roller and support member in FIG. It is a partial enlarged plan view which shows the attachment state of a press-contact roller same as the above. It is a side view which shows the outline of an example of the conventional film peeling apparatus.

  Next, an embodiment of the film peeling apparatus according to the present invention will be described based on the embodiment shown in FIGS. In the figure, symbol A is a substrate which is a plate-like member, and symbol 1 is a film peeling apparatus.

  Further, here, the plate-like member transfer direction refers to a direction in which the substrate A, which is a plate-like member, is transferred based on the work process from the right side to the left side in FIG. The direction which intersects the shape member transfer direction in the horizontal direction shall be said.

  In the substrate A, a photosensitive photoresist layer is formed on the surface of a conductive layer made of copper foil or the like laminated on one or both sides of an insulating substrate body, and a protective film B is pasted on the surface of the photoresist layer. It is worn.

  The film peeling apparatus 1 includes a plate-like member transfer mechanism 2 for transferring the substrate A, an end peeling mechanism 3 on the upstream side in the plate-like member transfer direction, and a main peeling mechanism 4 on the downstream side. The shaped member transfer mechanism 2, the end peeling mechanism 3 and the main peeling mechanism 4 are sequence-controlled based on a command from a control unit (not shown) and operate in synchronization.

  The plate-like member transfer mechanism 2 is provided with a plurality of guide rollers 5, 5... Whose rotation axes are oriented in the plate-like member width direction and arranged at intervals in the plate-like member transfer direction. Are rotated by driving means such as a motor (not shown).

  The plate-like member transfer mechanism 2 includes a support frame 8 that is supported by the apparatus frame 6 via an air cylinder 7 so as to be movable up and down, and a pinch roller 9 that is rotatably supported by the support frame 8. The cylinder 7 is operated to bring the pinch roller 9 into pressure contact with the upper surface of the substrate A, and the substrate A is sandwiched between the guide roller 5 and the pinch roller 9 so that the power from the guide roller 5 is transmitted to the substrate A. It is transported in the direction in which the shaped member is transported.

  In this film peeling apparatus 1, the front end of the substrate A in the transfer direction is sent to the end peeling mechanism 3 by the plate-like member transfer mechanism 2, and the protection adhered to one side or both sides of the substrate A by this end peeling mechanism 3. After peeling off the edge part of the film B, the substrate A is transferred to the main peeling mechanism 4 by the plate-like member transfer mechanism 2, and the peeling of the protective film B made of an air knife or the like is used as an edge. By the mechanism 4, the whole protective film B is peeled one by one.

  As shown in FIG. 2, the end peeling mechanism 3 has a plate-like member fixing means 10 for fixing the substrate A at a predetermined position, and a film edge peeling that peels the edge of the protective film B from the substrate A. Means 11, the end of the substrate A fed by the plate-like member transfer mechanism 2 is fixed at a predetermined position by the plate-like member fixing means 10, and in this state, the protective film edge is peeled off by the film end peeling means 11 is made to peel.

  The plate-like member fixing means 10 is separated from a position where the pair of holding members 12 and 12 are arranged in parallel with each other in the vertical direction with the longitudinal direction facing the plate-like member width direction, and both the holding members 12 and 12 are close to each other. The vertical movement units 13 and 13 that move between positions are provided, and the substrate A is fixed at a predetermined position by sandwiching the end portion of the substrate A between the sandwiching members 12 and 12.

  Each clamping member 12 is movably supported by the frame 6 of the apparatus via support rail members whose longitudinal ends are directed in the vertical direction (not shown).

  On the other hand, as the vertical movement unit 13, an air cylinder or the like having a shaft 13a that can be freely moved in and out of the cylinder main body is used. By operating, both the clamping members 12, 12 connected to the shaft tip are moved between a position close to each other and a position away from each other.

  The plate-like member fixing means 10 includes positioning means (not shown), and is positioned at a predetermined position by the positioning means, that is, a position where the end edge portion of the substrate A is inserted between the press contact rollers arranged below and above. The substrate A is stopped, and the upstream side portion of the front end edge of the substrate A is sandwiched between the sandwiching members 12 and 12 at that position to fix the substrate A.

  The film end peeling means 11 includes a roller unit 17 having press rollers 15 and 16 and a width direction moving means 18 for moving the roller unit 17 in the plate member width direction.

  As shown in FIGS. 2 to 5, the roller unit 17 includes a flat base member 19 and a pair of support members 20 that are supported on the front side surface of the base member 19 in the plate-like member transfer direction so as to be relatively movable in the vertical direction. , 21, and two types of pressure rollers 15, 16 having different rotation axis angles are rotatably supported on the front side surfaces of the upper and lower support members 20, 21 in the plate-like member transfer direction.

  The base member 19 is formed in a rectangular shape that is long in the vertical direction, and a pair of round bar-shaped slide guide members 22, 22 facing up and down on the front side in the plate-shaped member transport direction are spaced apart in the plate-shaped member width direction. It is fixed in parallel arrangement.

  The upper and lower support members 20 and 21 are guided by the slide guide members 22 and 22 so as to be movable in the vertical direction. The lower support member 21 is supported by the base member 19 via the receiving portion 23, and the base member 19. The tip of the shaft 24a of the air cylinder 24 fixed to the upper part is connected to the upper surface portion of the upper support member 20, and by operating the air cylinder 24, the position between the positions where the support members 20, 21 are close to each other and the positions where they are separated from each other. With relative movement.

  The receiving portion 23 includes a receiving portion main body 23a fixed to the base member 19 and a height adjusting bolt 23b screwed to the receiving portion main body 23a in the vertical direction. The upper end is brought into contact with the lower surface of the lower support member 21, and the height adjustment bolt 23b is rotated to move in the vertical direction with respect to the receiving portion main body 23a. The position can be adjusted.

  As shown in FIG. 5, the upper and lower support members 20, 21 are formed with a rectangular parallelepiped block material, and a standard pressure contact roller 15 with the rotation shaft 15 a facing the plate-like member transfer direction on the front side surface portion in the plate-like member transfer direction. And the inclined pressing roller 16 in which the rotating shaft 16a inclines the front side in the plate-like member transfer direction in the horizontal direction is rotatably supported.

  The two pressure rollers 15 and 16 are arranged in series in the width direction of the plate-like member so that the inclined pressure roller 16 is positioned between the pair of standard pressure rollers 15 and 15, and the two support members 20 and 21 are moved in a direction close to each other. By doing so, the substrate A is sandwiched between the pressure rollers 15, 16, 15, 16 disposed on the upper and lower sides with the substrate A interposed therebetween, and both the pressure rollers 15, 16 are in pressure contact with the surface of the substrate A (the surface of the protective film B). It has come to be.

  Then, the roller unit 17 is moved in the plate member width direction in a state in which both the pressure rollers 15 and 16 are in pressure contact with the surface of the substrate A (the surface of the protective film B). Different forces act so that the protective film B is distorted.

  In addition, an air nozzle 25 having a discharge port directed toward the front side in the plate-shaped member transfer direction is provided between the pressure rollers 15 and 16, and is not shown in a portion peeled off from the substrate A generated by the pressure rollers 15 and 16. The compressed air supplied from the air supply means is blown.

  On the other hand, a slide bearing 26 is fixed to the back side surface portion of the base member 19 in the plate member transport direction, and the entire roller unit 17 constitutes the width direction moving means 18 via the slide bearing 26. The plate member is supported so as to be movable in the width direction.

  The width direction moving means 18 moves the roller unit 17 to an arbitrary position at an arbitrary speed along a pair of support rail members 27 and 27 whose longitudinal direction is directed to the plate-shaped member width direction. And the operation unit 28 is controlled by a control unit.

  Both ends of the support rail members 27 and 27 are fixed to support columns 29 and 29 installed on both side portions of the end peeling mechanism 3 via fixing members 30, and are arranged in parallel with each other between the support columns 29 and 29 in the vertical direction. It is erected.

  The operation unit 28 includes a track member 31 directed in the width direction of the plate member, a slider 32 that moves along the track member 31, and a drive body 33 that is controlled by the control unit. The roller unit 17 is attached to the slider 32. The base member 19 to be configured is fixed.

  In this operation unit 28, a slider raceway member 31 is provided with a ball screw (not shown) directed in the length direction thereof, and this ball screw is rotated by a driving body 33 to be integrated with a nut portion constituting the ball screw. The slider 32 is moved in a direction along the track member 31.

  For example, a motor that can control rotation (angle) and rotation speed, such as a servo motor or a pulse motor (stepping motor), is used as the driving body 33, and the rotation of the driving body 33 is performed based on a command from the control unit. By controlling the (angle) and the rotation speed, the slider 32 can be moved to an arbitrary position in conjunction with the rotation operation of the driving body 33, and the slider 32 can be moved to an arbitrary moving distance, speed, and movement ( It can be moved by the number of reciprocations.

  The roller unit 17 has a position shifted to one side indicated by a solid line in FIG. 3, that is, a position avoided outside the width of the substrate A as an origin position. At the origin position, the roller unit 17 peels off the end of the substrate A. Transfer from the mechanism 3 to the peeling mechanism 4 is not hindered.

  The control unit includes input means such as a touch panel for inputting data for controlling the operation unit 28, and storage means for storing a plurality of control data input by the input means, and data directly input by the input means. The operation unit 28 can be controlled based on the control data, and can be controlled based on the control data selected according to the product (manufacturing lot) from a plurality of control data stored in the storage means.

  The control unit also includes an external input means for inputting data output from another device used in the process of manufacturing a plate-like member such as the printed wiring board A, for example, a board loading machine, and the external input thereof. The operation unit 28 can be controlled in synchronism with other devices based on the data.

  In the film peeling apparatus 1 configured as described above, when a plate-like member such as the substrate A having the protective film B attached on one side or both sides is inserted into the apparatus, the board A is moved to the plate by the plate-like member transfer mechanism 2. When the substrate A reaches a predetermined position, the substrate A is stopped by positioning means (not shown).

  Then, the air cylinder 13 of the plate-like member fixing means 10 is operated at that position, and the end portion of the substrate A is sandwiched and fixed between the both sandwiching members 12 and 12, and the protective film is removed by the film end peeling means 11 at that position. The edge part of B is peeled off from the substrate A.

  The peeling operation by the film edge peeling means 11 is performed by moving both support members 20 and 21 of the roller unit 17 in the proximity direction to press the two types of pressure rollers 15 and 16 having different rotation axis angles on the surface of the substrate A. In this state, by moving the roller unit 17 in the plate-like member width direction, forces of different directions are applied from the two types of pressure rollers 15 and 16 to distort the protective film B, and the air nozzle 25 is applied to the distorted portion. The edge part of the protective film B is made to peel from the board | substrate A by injecting compressed air more.

  At this time, since the operation unit 28 is controlled by the control unit, the work can be started from an arbitrary position.

  For example, the roller unit 17 is moved from the origin position to a substantially central portion in the width direction of the plate-like member of the substrate A, and the upper and lower support members 20 and 21 are moved in the directions close to each other at the position, thereby pressing the pressure rollers 15 and 16. May be brought into pressure contact with the surface of the substrate A, the peeling operation may be started from that position, and moved to both sides of the substrate A. By doing in this way, the press rollers 15 and 16 do not run on the substrate A from the side edge or fall off from the substrate A, and the impact or breakage of the substrate A caused thereby can be prevented.

  Further, the roller unit 17 is moved from the origin position to the end of the plate A side in the width direction of the one plate-like member based on the input data, and the upper and lower support members 20 and 21 are moved toward each other at that position. Then, both pressure rollers 15 and 16 may be brought into pressure contact with the surface of the substrate A and moved from the position to the other substrate A side end. Even in this case, since the operation unit 28 can be precisely controlled by the control unit, the pressure roller 15 or 16 does not run on or drop off the substrate A, and the pressure roller from end to end of the substrate A The roller unit 17 can be moved in a state in which the 15 and 16 are in pressure contact.

  Furthermore, the roller unit 17 can be reciprocated within a certain range in the width direction of the plate member on the edge of the substrate A, and only a part can be peeled off.

  The plate-like member is not limited to the above-mentioned substrate, and the apparatus of the present application is also applicable to a plate-like member such as a liquid crystal panel or a semiconductor wafer that has a protective film attached to one or both sides. Can do.

  In the above-described embodiment, the operation unit 28 includes a ball screw, and the ball screw is rotated by a driving body 33 such as a servo motor, whereby the slider 32 integrated with the nut portion constituting the ball screw is tracked. The movement unit 28 has been described as moving in the direction along the member 31. However, the operation unit 28 is not limited to such a configuration. For example, the operation unit 28 is interlocked with the rotation of the driving body 33 such as a servo motor. Even if a structure using an operating drive belt is used, and a motor is not used, the slider 32 is moved to an arbitrary position on the track member at an arbitrary speed based on a command from the control unit. Any structure can be used.

A substrate B protective film 1 film peeling device 2 plate-like member transfer mechanism 3 edge peeling mechanism 4 main peeling mechanism 5 guide roller 6 frame 7 air cylinder 8 support frame 9 pinch roller 10 plate-like member fixing means 11 film edge peeling means 12 Clamping member 13 Vertical movement unit (air cylinder)
14 Floating joint 15 Standard pressure contact roller 16 Inclination pressure contact roller 17 Roller unit 18 Width direction moving means 19 Base member 20 Upper support member 21 Lower support member 22 Slide guide member 23 Receiving portion 24 Air cylinder 25 Air nozzle 26 Slide bearing 27 Support rail member 28 Operation unit 29 Post 30 Fixing member 31 Track member 32 Slider 33 Driver