JP2013047687A - 関節式プローブヘッド - Google Patents
関節式プローブヘッド Download PDFInfo
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- JP2013047687A JP2013047687A JP2012228309A JP2012228309A JP2013047687A JP 2013047687 A JP2013047687 A JP 2013047687A JP 2012228309 A JP2012228309 A JP 2012228309A JP 2012228309 A JP2012228309 A JP 2012228309A JP 2013047687 A JP2013047687 A JP 2013047687A
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- 239000000523 sample Substances 0.000 title claims abstract description 70
- 238000005259 measurement Methods 0.000 claims abstract description 21
- 238000012937 correction Methods 0.000 abstract description 6
- 238000013507 mapping Methods 0.000 abstract description 4
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- 241001422033 Thestylus Species 0.000 description 34
- 238000000034 method Methods 0.000 description 19
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37043—Touch probe, store position of touch point on surface
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37442—Cad and cap for cmm
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Automation & Control Theory (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
【解決手段】CMMは、その直線駆動に関する回転誤差(例えばピッチ,ロールおよびヨー)のための誤差マップが作成される。走査ヘッドもまた、回転誤差のための誤差マップが作成される。測定データは、CMMおよび走査ヘッドの組み合わされた回転誤差に関して実時間に同期して誤差補正される。この同期補正ためCMMおよび走査ヘッドの誤差マッピングデータを使用する。
【選択図】図1
Description
このフローブヘッドには、前記少なくとも1つの軸線を中心とする前記表面検出器の角度位置を測定するために少なくとも1つの回転測定器具が設けられ、
この少なくとも1つの回転測定器具がマップ化された誤差である。
Claims (4)
- 表面検出器を取り付けることができ、少なくとも1つの軸線を中心として前記表面検出器の回転運動をもたらす関節式プローブヘッドであって、
このフローブヘッドには、前記少なくとも1つの軸線を中心とする前記表面検出器の角度位置を測定するために少なくとも1つの回転測定器具が設けられ、
この少なくとも1つの回転測定器具がマップ化された誤差であることを特徴とする関節式プローブヘッド。 - 前記少なくとも1つの回転測定器具がこの関節式プローブヘッドの他の誤差から切り離してマップ化された誤差であることを特徴とする請求項1に記載の関節式プローブヘッド。
- 前記少なくとも1つの回転測定器具は、測定した前記表面検出器の角度位置を前記測定誤差に関連付けた参照テーブルか、誤差関数か、またはフーリエ級数を有することを特徴とする請求項1または請求項2に記載の関節式プローブヘッド。
- 前記少なくとも1つの回転測定器具は、測定された前記表面検出器の角度位置を訂正された前記表面検出器の角度位置に関連付けた参照テーブルか、誤差関数か、またはフーリエ級数を有することを特徴とする請求項1または請求項2に記載の関節式プローブヘッド。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0508395.1 | 2005-04-26 | ||
GBGB0508395.1A GB0508395D0 (en) | 2005-04-26 | 2005-04-26 | Method for scanning the surface of a workpiece |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008508275A Division JP5653581B2 (ja) | 2005-04-26 | 2006-04-10 | 測定システム |
Publications (2)
Publication Number | Publication Date |
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JP2013047687A true JP2013047687A (ja) | 2013-03-07 |
JP5851969B2 JP5851969B2 (ja) | 2016-02-03 |
Family
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Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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JP2008508275A Active JP5653581B2 (ja) | 2005-04-26 | 2006-04-10 | 測定システム |
JP2012228309A Active JP5851969B2 (ja) | 2005-04-26 | 2012-10-15 | 関節式プローブヘッド |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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JP2008508275A Active JP5653581B2 (ja) | 2005-04-26 | 2006-04-10 | 測定システム |
Country Status (6)
Country | Link |
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US (2) | US8006398B2 (ja) |
EP (2) | EP1877727B1 (ja) |
JP (2) | JP5653581B2 (ja) |
CN (2) | CN101166951B (ja) |
GB (1) | GB0508395D0 (ja) |
WO (1) | WO2006114567A1 (ja) |
Cited By (1)
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JP2017102094A (ja) * | 2015-12-05 | 2017-06-08 | 株式会社東京精密 | 接触式変位センサ用コントローラ及びそれを用いた変位ゲージ |
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- 2006-04-10 EP EP11008885.3A patent/EP2431707B1/en active Active
- 2006-04-10 US US11/919,066 patent/US8006398B2/en active Active
- 2006-04-10 WO PCT/GB2006/001298 patent/WO2006114567A1/en not_active Application Discontinuation
- 2006-04-10 CN CN2006800141728A patent/CN101166951B/zh active Active
- 2006-04-10 CN CN201110209903.7A patent/CN102305613B/zh active Active
- 2006-04-10 JP JP2008508275A patent/JP5653581B2/ja active Active
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US20110283553A1 (en) | 2011-11-24 |
EP2431707B1 (en) | 2018-09-19 |
GB0508395D0 (en) | 2005-06-01 |
JP5851969B2 (ja) | 2016-02-03 |
JP2008539405A (ja) | 2008-11-13 |
CN102305613B (zh) | 2015-11-25 |
EP2431707A2 (en) | 2012-03-21 |
CN101166951A (zh) | 2008-04-23 |
EP1877727B1 (en) | 2013-07-10 |
EP1877727A1 (en) | 2008-01-16 |
CN102305613A (zh) | 2012-01-04 |
US8978261B2 (en) | 2015-03-17 |
US20090025463A1 (en) | 2009-01-29 |
EP2431707A3 (en) | 2013-02-20 |
US8006398B2 (en) | 2011-08-30 |
WO2006114567A1 (en) | 2006-11-02 |
JP5653581B2 (ja) | 2015-01-14 |
CN101166951B (zh) | 2011-09-07 |
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