JP2012529407A - 流体処理システム及び方法 - Google Patents
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Abstract
【解決手段】流体を含む供給材料をプロセス機器に送出するシステム及び方法を開示する。ライナとオーバーパックの間に真空を適用することにより、ライナ系圧力分配槽を充填する。1つの供給材料に対して、較正済み流量範囲が異なる複数の供給材料流量制御器が、選択的に並列に動作することができる。複数のライナ系圧力分配容器から供給材料を供給する状態で、拡大のための供給材料の調合及び検査を実行することができる。重量測定システムを使用して、複数成分の溶液又は混合物の少なくとも1つの成分の濃度を求めることができる。
【選択図】 図3
Description
[0001] 本出願は、参照により本明細書に組み込むものとする2009年6月10日出願の米国仮特許出願第61/185,817号の優先権を主張する。
Claims (41)
- ライナと容器の間の間隙空間を画定するオーバーパック容器内に配置された折り畳み式の前記ライナを使用するステップを含む方法であって、
前記ライナを拡張させて、供給材料源から供給材料を前記ライナの内容積に引き込むために、前記間隙空間に準大気圧を適用するステップを含む、
方法。 - 前記オーバーパック容器が、前記ライナの前記内容積と流体連通する供給材料ポートと、前記間隙空間と流体連通し、前記間隙空間を減圧及び/又は加圧するように配置構成された少なくとも1つのポートと、を有する、
請求項1に記載の方法。 - 製品の製造に前記供給材料を使用するために構成されたプロセスツールに、前記供給材料を供給するステップをさらに含む、
請求項1に記載の方法。 - 化学的機械的平坦化ツールに、前記供給材料を供給するステップをさらに含む、
請求項1に記載の方法。 - 前記ライナが、ポリマーフィルムを備える、
請求項1から4のいずれか1項に記載の方法。 - 前記ライナが、多層積層フィルムを備える、
請求項1から4のいずれか1項に記載の方法。 - 前記ライナを収縮させ、それにより前記内容積から前記供給材料ポートを通して供給材料を分配するために前記間隙空間を加圧するステップをさらに含む、
請求項2に記載の方法。 - 並列に配置構成され、第1の供給材料源と流体連通している複数の第1の供給材料流量制御器と、
前記第1の流量制御器の複数の流量制御器が同時に動作している場合に、前記複数の第1の供給材料流量制御器からの前記第1の供給材料の流れを選択的に組み合わせるように動作状態で配置構成された少なくとも1つの流れ統合要素と、を備える、
供給材料搬送システム。 - 前記複数の第1の流量制御器のうち少なくとも2つの流量制御器が、異なる範囲の較正済み流量を有する、
請求項8に記載のシステム。 - 前記複数の流量制御器のうち少なくとも2つの流量制御器の最大較正済み流量が相互に少なくとも約2倍異なる、
請求項9に記載の供給材料搬送システム。 - 第2の供給材料源と流体連通している第2の供給材料流量制御器をさらに備え、
前記少なくとも1つの流れ統合要素が、前記第2の供給材料流量制御器からの前記第2の供給材料の流れを前記第1の供給材料の流れと組み合わせるように動作状態で配置構成される、
請求項8から10のいずれか1項に記載の供給材料搬送システム。 - 第3の供給材料源と流体連通している第3の供給材料流量制御器をさらに備え、
前記少なくとも1つの流れ統合要素が、前記第3の供給材料流量制御器からの前記第3の供給材料の流れを、前記第1の供給材料及び前記第2の供給材料のうち少なくとも1つの流れと組み合わせるように動作状態で配置構成される、
請求項11に記載の供給材料搬送システム。 - 並列に配置構成され、第2の供給材料源と流体連通している複数の第2の供給材料流量制御器をさらに備え、
前記少なくとも1つの流れ統合要素が、前記第2の供給材料流量制御器からの前記第2の供給材料の流れを前記第1の供給材料の流れと組み合わせるように動作状態で配置構成される、
請求項8から10のいずれか1項に記載の供給材料搬送システム。 - 前記複数の第2の流量制御器のうち少なくとも2つの流量制御器が、異なる範囲の較正済み流量を有する、
請求項13に記載の供給材料搬送システム。 - 前記少なくとも1つの流れ統合要素が静的又は動的混合要素を備える、
請求項8から10のいずれか1項に記載の供給材料搬送システム。 - 前記少なくとも1つの流れ統合要素が複数の流れ統合要素を備える、
請求項8から10のいずれか1項に記載の供給材料搬送システム。 - 前記複数の第1の供給材料流量制御器のうち1つの第1の供給材料流量制御器が、前記複数の第1の供給材料流量制御器を通過可能な第1の供給材料の総流量のうち少なくとも約80%を通過させるように動作する、
請求項8から10のいずれか1項に記載の供給材料搬送システム。 - 前記複数の第1の供給材料流量制御器の各第1の供給材料流量制御器が、対応する出力信号を生成するように配置構成された一体の質量又は流量感知要素を備え、
各第1の供給材料流量制御器が、その対応する出力信号に応答して第1の供給材料の流量を制御するように構成される、
請求項8から10のいずれか1項に記載の供給材料搬送システム。 - 前記複数の第1の供給材料流量制御器の各第1の供給材料流量制御器が、質量流量制御器を備える、
請求項8から10のいずれか1項に記載の供給材料搬送システム。 - 前記第1の供給材料源及び前記第2の供給材料源のうち少なくとも1つが、オーバーパック容器内に配置された折り畳み式ライナを有する圧力分配装置を備える、
請求項11に記載の供給材料搬送システム。 - 第1の供給材料源から、複数の並列の第1の供給材料流量制御器を通して第1の供給材料を流すステップと、
総流量の偏差又は誤差を減少させるために、前記複数の第1の流量制御器のうち少なくとも幾つかの流量制御器を選択的に動作させるステップと、
前記第1の流量制御器のうち複数の流量制御器が同時に動作している場合に、前記複数の第1の供給材料流量制御器からの前記第1の供給材料の流れを組み合わせるステップと、を含む、
方法。 - 前記複数の第1の流量制御器のうち少なくとも2つの流量制御器が、異なる範囲の較正済み流量を有する、
請求項21に記載の方法。 - 前記第1の流量制御器のうち複数の流量制御器が同時に動作する、
請求項21に記載の方法。 - 第2の供給材料源から第2の供給材料流量制御器を通して第2の供給材料を流すステップと、
前記第2の供給材料流量制御器からの前記第2の供給材料の流れを前記第1の供給材料の流れと組み合わせるステップと、をさらに含む、
請求項21から23のいずれか1項に記載の方法。 - 第3の供給材料源から、第3の供給材料流量制御器を通して第3の供給材料を流すステップと、
前記第3の供給材料流量制御器からの前記第3の供給材料の流れを、前記第1の供給材料及び/又は前記第2の供給材料の流れと組み合わせるステップと、をさらに含む、
請求項24に記載の方法。 - 第2の供給材料源から、複数の並列の第2の供給材料流量制御器を通して第2の供給材料を流すステップであって、前記複数の第2の流量制御器のうち少なくとも2つの流量制御器が異なる範囲の較正済み流量を有するステップと、
前記複数の第2の供給材料流量制御器からの前記第2の供給材料のうち少なくとも1つの流れを前記第1の供給材料の流れと組み合わせるステップと、をさらに含む、
請求項21から23のいずれか1項に記載の方法。 - 前記複数の第1の流量制御器のうち1つの流量制御器に、第1の供給材料の総流量の少なくとも約80%を通過させるステップをさらに含み、
第1の供給材料の前記総流量が前記複数の第1の流量制御器を通過可能である、
請求項21から23のいずれか1項に記載の方法。 - 前記複数の第1の供給材料流量制御器の各第1の供給材料流量制御器が、対応する出力信号を生成するように配置構成された一体の質量又は流量感知要素を備え、
各第1の供給材料流量制御器が、その対応する出力信号に応答して第1の供給材料の流量を制御するように構成される、
請求項21から23のいずれか1項に記載の方法。 - 前記複数の第1の供給材料流量制御器の各第1の供給材料流量制御器が質量流量制御器を備える、
請求項21から23のいずれか1項に記載の方法。 - 前記第1の供給材料と第2の供給材料を組み合わせた流れを混合要素に通して流すステップをさらに含む、
請求項21から23のいずれか1項に記載の方法。 - 前記第1の供給材料と第2の供給材料を組み合わせた流れを、前記第1の供給材料と第2の供給材料を組み合わせた流れを製品の製造に使用するために構成されたプロセスツールに供給するステップをさらに含む、
請求項23に記載の方法。 - 前記第1の供給材料と第2の供給材料を組み合わせた流れを化学的機械的平坦化ツールに供給するステップをさらに含む、
請求項21から23のいずれか1項に記載の方法。 - 複数の供給材料を封じ込める複数の供給材料圧力分配容器であって、各圧力分配容器が、オーバーパック容器内に配置されて自身とオーバーパック容器の間に間隙空間を画定する折り畳み式ライナを有し、各圧力分配容器がその前記折り畳み式ライナ内に異なる供給材料を封じ込める複数の供給材料圧力分配容器と、
前記複数の圧力分配容器の各圧力分配容器の前記間隙空間の加圧を制御するように配置構成された少なくとも1つの加圧制御要素と、
前記複数の供給材料圧力分配容器によって分配される供給材料を組み合わせるように配置構成された少なくとも1つの統合要素と、を備え、
各供給材料圧力分配容器が、前記ライナの内容積と流体連通する供給材料ポートを有し、少なくとも1つのポートが、前記間隙空間と流体連通し、前記間隙空間を減圧するように構成された減圧装置と流体連通する、
システム。 - 各圧力分配容器が、その前記ライナ内に実質的にゼロヘッドスペースの状態で供給材料を維持する、
請求項33に記載のシステム。 - 前記複数の圧力分配容器から分配されると、前記複数の供給材料の流れを計量するように配置構成された少なくとも1つの計量要素をさらに備える、
請求項33又は34のいずれか1項に記載のシステム。 - 前記少なくとも統合要素が、異なる供給材料の流れを混合するように構成された少なくとも1つの静的及び/又は動的混合要素を備える、
請求項33又は34のいずれか1項に記載のシステム。 - 前記複数の供給材料のうち少なくとも1つの供給材料又はその構成成分の存在及び/又は濃度を感知するように配置構成された化学分析器をさらに備える、
請求項33又は34のいずれか1項に記載のシステム。 - (i)複数の供給材料を封じ込める複数の供給材料圧力分配容器であって、各圧力分配容器がオーバーパック容器内に配置され、自身とオーバーパック容器の間に間隙空間を画定する折り畳み式ライナを備え、各圧力分配容器が、その前記折り畳み式ライナ内に異なる供給材料を封じ込める複数の供給材料圧力分配容器と、
(ii)前記複数の圧力分配容器の各圧力分配容器の前記間隙空間の加圧を制御するように配置構成された少なくとも1つの加圧制御要素と、
(iii)前記複数の供給材料圧力分配容器によって分配される供給材料を組み合わせるように配置構成された少なくとも1つの統合要素と、
を利用する供給材料調合方法であって、
前記複数の圧力分配容器から供給材料を分配するステップと、
前記複数の供給材料のうち少なくとも2つの供給材料で複数の異なる組合せを生成するステップと、
意図された用途にとって有効又は最適である1つ又は複数の供給材料の組合せを決定するために、前記複数の異なる組合せを検査するステップと、
を含む、
方法。 - 前記1つ又は複数の有効又は最適である供給材料の組合せを生成するために、前記複数の圧力分配容器から供給材料を分配するステップをさらに含む、
請求項38に記載の方法。 - 複数成分の溶液又は混合物の少なくとも1つの成分の濃度を求める方法であって、前記溶液又は混合物の個々の各成分の密度が分かっており、
(A)所与の高さの柱内にある前記溶液又は混合物によって加えられる頭部圧力を測定するか、固定容積の槽内に配置された前記溶液又は混合物の総質量を測定するステップと、
(B)前記測定ステップの結果から前記溶液又は混合物の少なくとも1つの成分の濃度を計算するステップと、を含む、
方法。 - 前記複数成分の溶液又は混合物が、第1の成分として過酸化水素を、第2の成分として水を含む、
請求項40に記載の方法。
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EP2441084A2 (en) | 2012-04-18 |
JP2015178391A (ja) | 2015-10-08 |
JP6151810B2 (ja) | 2017-06-21 |
EP2441084A4 (en) | 2014-05-28 |
US9586188B2 (en) | 2017-03-07 |
JP5863646B2 (ja) | 2016-02-16 |
KR101936536B1 (ko) | 2019-01-08 |
US20120138631A1 (en) | 2012-06-07 |
TW201104127A (en) | 2011-02-01 |
US9038855B2 (en) | 2015-05-26 |
JP5883977B2 (ja) | 2016-03-15 |
KR20170127064A (ko) | 2017-11-20 |
SG176676A1 (en) | 2012-01-30 |
TWI564501B (zh) | 2017-01-01 |
WO2010144439A3 (en) | 2011-03-03 |
US20150321897A1 (en) | 2015-11-12 |
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KR20120036953A (ko) | 2012-04-18 |
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CN102460640A (zh) | 2012-05-16 |
EP3133636A3 (en) | 2017-05-03 |
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