JP2012528481A - 光検出器 - Google Patents
光検出器 Download PDFInfo
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- 239000002184 metal Substances 0.000 claims abstract description 83
- 229910052751 metal Inorganic materials 0.000 claims abstract description 83
- 230000004888 barrier function Effects 0.000 claims abstract description 68
- 238000001228 spectrum Methods 0.000 claims abstract description 22
- 239000004065 semiconductor Substances 0.000 claims description 46
- 239000000758 substrate Substances 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 33
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 15
- 239000013078 crystal Substances 0.000 claims description 7
- 239000007769 metal material Substances 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 230000007704 transition Effects 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 abstract 1
- 230000008569 process Effects 0.000 description 16
- 150000001875 compounds Chemical class 0.000 description 12
- 239000000463 material Substances 0.000 description 11
- 239000012535 impurity Substances 0.000 description 10
- 239000000969 carrier Substances 0.000 description 8
- 238000001514 detection method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 230000005684 electric field Effects 0.000 description 7
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 6
- 229910052594 sapphire Inorganic materials 0.000 description 6
- 239000010980 sapphire Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000001451 molecular beam epitaxy Methods 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005681 electric displacement field Effects 0.000 description 1
- 230000005274 electronic transitions Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
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Abstract
【解決手段】量子井戸検出器の実装を提示する。一実施形態では、量子構造は、第1の障壁層、第1の障壁層上に配置される井戸層、および井戸層上に配置される第2の障壁層を備える。金属層は、この量子構造に隣接して配置される。表面プラズモン共鳴による結合を利用して光検出器の効率を高める本発明の実施形態が説明されている。いくつかの実施形態は、電磁スペクトルのUVまたは青色部分に適している。
【選択図】図1
Description
[式1]
Eg=3.723−1.241xeV
式1によれば、x=0.7の場合、CdxZn1-xSのバンドギャップエネルギーEgは、2.853eVであり、これは435nmの波長(例えば、青色スペクトル)に対応する。井戸層134内に見られるCdxZn1-xSのXは、青色スペクトル検出のためには、約0.5から1までの範囲とすることができる。一実施形態では、障壁層132、136は、井戸層134がCdZnSを含む場合、ZnS、MgZnS、およびCdMgZnSのうちの1つを含むものとしてもよい。
[式2]
Claims (23)
- 第1の障壁層、
前記第1の障壁層上に配置された井戸層、および
前記井戸層上に配置された第2の障壁層を備える量子構造と、
前記量子構造に隣接して配置される金属層と
を備えるデバイス。 - 前記量子構造は、II−VI族半導体を含む請求項1に記載のデバイス。
- 前記II−VI族半導体は、六方晶構造である請求項2に記載のデバイス。
- 前記井戸層は、xを約0.5から約1までの範囲とするCdxZn1-xSを含む請求項1に記載のデバイス。
- 前記第1の障壁層および前記第2の障壁層が、本質的にZnS、MgZnS、MgCdZnS、ZnO、MgZnO、およびMgCdZnOからなる群から選択された半導体を含む請求項1に記載のデバイス。
- 前記量子構造は、約100nm未満の幅を有し、前記金属層は、約100nm未満の幅を有する請求項1に記載のデバイス。
- 前記金属層は、本質的にAg、Al、Au、Ni、およびTiからなる群から選択された金属材料を含む請求項1に記載のデバイス。
- 前記第1の障壁層の下に配置された第1のドープ層と、
前記第2の障壁層上に配置された第2のドープ層とをさらに備え、
前記金属層は、前記第1のドープ層上に、かつ前記第2のドープ層に隣接して配置される請求項1に記載のデバイス。 - 前記第1のドープ層の下に配置された基材をさらに備える請求項8に記載のデバイス。
- 前記基材は、GaAsを含む請求項9に記載のデバイス。
- 前記金属層は、前記量子構造の両側部に沿って隣接する請求項1に記載のデバイス。
- 前記井戸層は、サブバンド上に電子を有し、該サブバンド間の1つまたは複数の遷移が青色スペクトルを持つ光子に対応する請求項1に記載のデバイス。
- 前記金属層は、前記量子構造上に配置され、前記金属層は、前記量子構造の幅より小さい幅を有する請求項1に記載のデバイス。
- 前記第1の障壁層の下に配置された第1のドープ層と、
前記第2の障壁層上に配置された第2のドープ層とをさらに備え、
前記金属層は、前記第2のドープ層上に配置されている請求項13に記載のデバイス。 - 2つまたはそれ以上の金属層が前記量子構造上に配置されてグレーティング構造を形成し、前記2つまたはそれ以上の金属層の幅の合計は、前記量子構造の前記幅より小さい請求項13に記載のデバイス。
- 第1の障壁層を形成すること、
前記第1の障壁層上に井戸層を形成すること、及び
前記井戸層上に第2の障壁層を形成すること
によって量子構造を形成すること、
前記量子構造が所定の幅を有するようになるまで前記量子構造の一部を取り除くこと、および
前記量子構造に隣接する位置に金属層を形成することを含む方法。 - 第1のドープ層を形成すること、および
第2のドープ層を前記第2の障壁層上に形成することをさらに含む請求項16に記載の方法であって、
第1の障壁層を形成することは、第1の障壁層を前記第1のドープ層上に形成することを含み、
前記量子構造の一部を取り除くことは、前記第2のドープ層が前記量子構造と同じ幅を有するように前記第2のドープ層に対応する前記量子構造の一部を取り除くことをさらに含み、
金属層を形成することは、金属層を前記第1のドープ層上に、前記量子構造及び前記第2のドープ層に隣接するように形成することをさらに含む方法。 - 基材を用意することをさらに含み、
前記第1のドープ層を形成することは、前記第1のドープ層を前記基材上に形成することを含む請求項17に記載の方法。 - 前記金属層を形成することは、前記量子構造の両側部に沿って隣接する金属層を形成すること含む請求項16に記載の方法。
- 前記井戸層は、サブバンド上に電子を有し、該サブバンド間の1つまたは複数の遷移は青色スペクトルを持つ光子に対応する請求項16に記載の方法。
- 第1の障壁層を形成すること、
前記第1の障壁層上に井戸層を形成すること、及び
前記井戸層上に第2の障壁層を形成すること
によって量子構造を形成すること、および
前記量子構造上に金属層を形成することを含み、
前記金属層は、前記量子構造の幅より小さい幅を有する方法。 - 第1のドープ層を形成すること、および
第2のドープ層を前記第2の障壁層上に形成することをさらに含む請求項21に記載の方法であって、
第1の障壁層を形成することは、第1の障壁層を前記第1のドープ層上に形成することを含み、
前記金属層を形成することは、金属層を前記第2のドープ層上に形成することをさらに含む請求項21に記載の方法。 - 前記金属層を形成することは、2つまたはそれ以上の金属層をグレーティングの形態で前記量子構造上に形成することをさらに含み、
前記2つまたはそれ以上の金属層の幅の合計は、前記量子構造の前記幅より小さい請求項21に記載の方法。
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US12/472,168 US8373153B2 (en) | 2009-05-26 | 2009-05-26 | Photodetectors |
PCT/KR2010/003322 WO2010137865A1 (en) | 2009-05-26 | 2010-05-26 | Photodetectors |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012529768A (ja) * | 2009-07-06 | 2012-11-22 | ユニバーシティ オブ ソウル インダストリー コーポレーション ファウンデーション | 長波長放射を検出することができる光検出器 |
US8681411B2 (en) | 2009-08-21 | 2014-03-25 | University Of Seoul Industry Cooperation Foundation | Polariton mode optical switch with composite structure |
US8748862B2 (en) | 2009-07-06 | 2014-06-10 | University Of Seoul Industry Cooperation Foundation | Compound semiconductors |
US8802481B2 (en) | 2009-07-06 | 2014-08-12 | University Of Seoul Industry Cooperation Foundation | Photodetector capable of detecting the visible light spectrum |
US8809834B2 (en) | 2009-07-06 | 2014-08-19 | University Of Seoul Industry Cooperation Foundation | Photodetector capable of detecting long wavelength radiation |
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US8373153B2 (en) | 2013-02-12 |
KR101355983B1 (ko) | 2014-01-29 |
KR20120024827A (ko) | 2012-03-14 |
JP5984885B2 (ja) | 2016-09-06 |
US20100301308A1 (en) | 2010-12-02 |
JP2015019088A (ja) | 2015-01-29 |
DE112010002092T5 (de) | 2017-09-28 |
WO2010137865A1 (en) | 2010-12-02 |
DE112010002092A5 (de) | 2012-04-26 |
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