JP2012527746A - 半導体デバイス及びその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 85
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 41
- 239000010410 layer Substances 0.000 claims abstract description 148
- 238000000034 method Methods 0.000 claims abstract description 56
- 239000011229 interlayer Substances 0.000 claims abstract description 49
- 239000004020 conductor Substances 0.000 claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 239000000463 material Substances 0.000 claims abstract description 23
- 238000000151 deposition Methods 0.000 claims abstract description 16
- 229910052719 titanium Inorganic materials 0.000 claims description 14
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 10
- 229910010037 TiAlN Inorganic materials 0.000 claims description 8
- 229910052715 tantalum Inorganic materials 0.000 claims description 7
- 229910004491 TaAlN Inorganic materials 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 description 16
- 229910052751 metal Inorganic materials 0.000 description 16
- 238000005530 etching Methods 0.000 description 11
- 229910021332 silicide Inorganic materials 0.000 description 11
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 11
- 229910052718 tin Inorganic materials 0.000 description 9
- 229910004166 TaN Inorganic materials 0.000 description 6
- 238000001459 lithography Methods 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 238000005498 polishing Methods 0.000 description 3
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910017150 AlTi Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000005380 borophosphosilicate glass Substances 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- -1 borosilicate glass Chemical class 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
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- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66545—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28079—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being a single metal, e.g. Ta, W, Mo, Al
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- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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- H01L21/28088—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being a composite, e.g. TiN
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Abstract
Description
Claims (12)
- 半導体デバイスの製造方法であって、
半導体基板を提供する工程と、
前記半導体基板に、該半導体基板に形成されたゲート絶縁層及び該ゲート絶縁層に形成された犠牲ゲートを含むゲート領域と、ソース/ドレイン領域とを含むトランジスタ構造を形成する工程と、
第1の層間絶縁層を堆積し、前記犠牲ゲートを露出させるように該第1の層間絶縁層に対して平坦化を行う工程と、
前記犠牲ゲートを除去し、リプレースメントゲートホールを形成する工程と、
前記第1の層間絶縁層における、前記ソース/ドレイン領域に対応する位置に、第1のコンタクトホールを形成する工程と、
前記第1のコンタクトホール及び前記リプレースメントゲートホールに第1の導電材料を充填して、前記ソース/ドレイン領域に接触する第1のコンタクト部及びリプレースメントゲートを形成する工程とを、
含むことを特徴とする半導体デバイスの製造方法。 - 前記第1のコンタクト部と前記リプレースメントゲートが形成された後に、
第2の層間絶縁層を堆積する工程と、
前記第2の層間絶縁層における、前記第1のコンタクト部と前記リプレースメントゲートとに対応する位置に、第2のコンタクトホールを形成する工程と、
前記第2のコンタクトホールに第2の導電材料を充填して、第2のコンタクト部を形成する工程とを更に含み、
前記第2のコンタクト部は、
前記第1のコンタクト部及び前記リプレースメントゲートにそれぞれ接触することを特徴とする請求項1に記載の半導体デバイスの製造方法。 - 前記リプレースメントゲートホールが形成された後に、且つ前記第1のコンタクトホールが形成される前に、
前記リプレースメントゲートホールに仕事関数調整層を形成する工程を更に含むことを特徴とする請求項1に記載の半導体デバイスの製造方法。 - 前記第1のコンタクトホールが形成された後に、且つ前記第1の導電材料が充填される前に、
ライナー層を前記第1のコンタクトホールに形成する工程を更に含むことを特徴とする請求項3に記載の半導体デバイスの製造方法。 - 前記第1のコンタクトホールが形成された後に、且つ前記第1の導電材料が充填される前に、
前記第1のコンタクトホール及び前記リプレースメントゲートホールにライナー層を形成する工程を更に含み、
前記リプレースメントゲートホール内に位置する前記ライナー層の部分は、
仕事関数調整材料として用いられていることを特徴とする請求項1に記載の半導体デバイスの製造方法。 - 前記第2のコンタクトホールが形成された後に、且つ前記第2の導電材料が充填される前に、
ライナー層を、前記第2のコンタクトホールに形成する工程を更に含むことを特徴とする請求項2に記載の半導体デバイスの製造方法。 - 前記第1の導電材料は、
Ti、Al或いは両者の合金であることを特徴とする請求項1〜6の何れか1項に記載の半導体デバイスの製造方法。 - 半導体基板と、
前記半導体基板に形成されたゲート絶縁層及び前記ゲート絶縁層に形成されたリプレースメントゲートを含むゲート領域と、ソース/ドレイン領域とを含む前記半導体基板に形成されるトランジスタ構造と、
前記半導体基板に形成された第1の層間絶縁層と、
前記第1の層間絶縁層におけるソース/ドレイン領域に対応する位置に形成され、前記ソース/ドレイン領域と接触している第1のコンタクト部と、
を含む半導体デバイスであって、
前記第1のコンタクト部は、前記リプレースメントゲートと同じ導電材料層で構成されていることを特徴とする半導体デバイス。 - 前記第1の層間絶縁層に形成された第2の層間絶縁層と、
前記第2の層間絶縁層における前記第1のコンタクト部及び前記リプレースメントゲートに対応する位置に形成された第2のコンタクト部とを更に含み、
前記第2のコンタクト部は、
前記第1のコンタクト部と前記リプレースメントゲートにそれぞれ接触することを特徴とする請求項8に記載の半導体デバイス。 - 前記リプレースメントゲートは、底部と側壁が仕事関数調整層で覆われ、
前記第1のコンタクト部は、底部と側壁がライナー層で覆われ、
前記仕事関数調整層と前記ライナー層は、
それぞれTiN、TiAlN、TaN、TaAlN、Ta、Tiの何れか一つ或いは複数種類の材料の組み合わせにより形成されたことを特徴とする請求項8に記載の半導体デバイス。 - 前記仕事関数調整層と前記ライナー層の材料は、
同じであることを特徴とする請求項10に記載の半導体デバイス。 - 前記第1のコンタクト部と前記リプレースメントゲートを形成した導電材料は、
Ti、Al或いは両者の合金であることを特徴とする請求項8〜11の何れか1項に記載の半導体デバイス。
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CN201010145088.8 | 2010-04-09 | ||
CN2010101450888A CN102214576A (zh) | 2010-04-09 | 2010-04-09 | 半导体器件及其制作方法 |
PCT/CN2010/001419 WO2011124001A1 (zh) | 2010-04-09 | 2010-09-16 | 半导体器件及其制作方法 |
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JP (1) | JP2012527746A (ja) |
CN (2) | CN102214576A (ja) |
GB (1) | GB2490982A (ja) |
WO (1) | WO2011124001A1 (ja) |
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CN103545208B (zh) * | 2012-07-11 | 2018-02-13 | 中国科学院微电子研究所 | 半导体器件制造方法 |
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2010
- 2010-04-09 CN CN2010101450888A patent/CN102214576A/zh active Pending
- 2010-09-16 JP JP2012511125A patent/JP2012527746A/ja active Pending
- 2010-09-16 US US12/991,012 patent/US8440558B2/en active Active
- 2010-09-16 CN CN2010900008297U patent/CN202930361U/zh not_active Expired - Lifetime
- 2010-09-16 GB GB1121915.1A patent/GB2490982A/en not_active Withdrawn
- 2010-09-16 WO PCT/CN2010/001419 patent/WO2011124001A1/zh active Application Filing
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Also Published As
Publication number | Publication date |
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US8440558B2 (en) | 2013-05-14 |
GB201121915D0 (en) | 2012-02-01 |
CN102214576A (zh) | 2011-10-12 |
US20110272767A1 (en) | 2011-11-10 |
GB2490982A (en) | 2012-11-21 |
WO2011124001A1 (zh) | 2011-10-13 |
CN202930361U (zh) | 2013-05-08 |
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