JP2012525272A - ロボット用の磁石回転ハードストップ - Google Patents

ロボット用の磁石回転ハードストップ Download PDF

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Publication number
JP2012525272A
JP2012525272A JP2012508526A JP2012508526A JP2012525272A JP 2012525272 A JP2012525272 A JP 2012525272A JP 2012508526 A JP2012508526 A JP 2012508526A JP 2012508526 A JP2012508526 A JP 2012508526A JP 2012525272 A JP2012525272 A JP 2012525272A
Authority
JP
Japan
Prior art keywords
rotatable
magnet assembly
stationary
rotating
stop member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2012508526A
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English (en)
Japanese (ja)
Other versions
JP2012525272A5 (https=
Inventor
ブランク、リッチ
ロバーツ、ジム
タン、ウェイン
バーグソン、マイケル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Novellus Systems Inc
Original Assignee
Novellus Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Novellus Systems Inc filed Critical Novellus Systems Inc
Publication of JP2012525272A publication Critical patent/JP2012525272A/ja
Publication of JP2012525272A5 publication Critical patent/JP2012525272A5/ja
Abandoned legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1005—Program-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
    • B25J9/101—Program-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means using limit-switches, -stops
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0608—Gripping heads and other end effectors with vacuum or magnetic holding means with magnetic holding means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2012508526A 2009-04-29 2010-04-16 ロボット用の磁石回転ハードストップ Abandoned JP2012525272A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/432,620 US8757345B2 (en) 2009-04-29 2009-04-29 Magnetic rotational hardstop for robot
US12/432,620 2009-04-29
PCT/US2010/031489 WO2010126726A2 (en) 2009-04-29 2010-04-16 Magnetic rotational hardstop for robot

Publications (2)

Publication Number Publication Date
JP2012525272A true JP2012525272A (ja) 2012-10-22
JP2012525272A5 JP2012525272A5 (https=) 2013-06-13

Family

ID=43030463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012508526A Abandoned JP2012525272A (ja) 2009-04-29 2010-04-16 ロボット用の磁石回転ハードストップ

Country Status (6)

Country Link
US (1) US8757345B2 (https=)
JP (1) JP2012525272A (https=)
KR (1) KR20130026363A (https=)
CN (1) CN102458778B (https=)
TW (1) TWI577513B (https=)
WO (1) WO2010126726A2 (https=)

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CN103085082B (zh) * 2011-11-04 2015-10-14 鸿富锦精密工业（深圳）有限公司 机器人臂部件
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JP5990359B2 (ja) * 2012-10-04 2016-09-14 平田機工株式会社 搬入出ロボット
WO2014070672A1 (en) * 2012-10-29 2014-05-08 The Arizona Board Of Regents For And On Behalf Of Arizona State University A coupling system
EP3198695B1 (en) 2014-09-26 2026-01-21 ABB Schweiz AG A routing unit, a rotary joint and a robot
CN105252547B (zh) * 2015-10-21 2018-03-09 国机智能科技有限公司 一种工业机器人大行程关节限位装置
JP6678034B2 (ja) * 2016-01-12 2020-04-08 本田技研工業株式会社 動作制御システム及び動作制御方法
CN108472817A (zh) * 2016-01-30 2018-08-31 生活机器人学股份有限公司 机械臂机构
JP6663774B2 (ja) * 2016-03-30 2020-03-13 東京エレクトロン株式会社 基板搬送方法及び基板処理システム
US9925663B2 (en) 2016-07-07 2018-03-27 Universal City Studios Llc Movable hardstop for a robotic component
US10464427B2 (en) 2016-08-29 2019-11-05 Universal City Studios Llc Systems and methods for braking or propelling a roaming vehicle
CN106272565A (zh) * 2016-09-27 2017-01-04 昆山穿山甲机器人有限公司 机器人防护装置
CN107584496B (zh) * 2017-09-04 2020-12-01 重庆市臻憬科技开发有限公司 用于智能餐厅的磁力吸盘
US10796940B2 (en) 2018-11-05 2020-10-06 Lam Research Corporation Enhanced automatic wafer centering system and techniques for same
CN111836703B (zh) * 2018-12-28 2023-09-26 深圳配天智能技术研究院有限公司 一种限位装置、机械臂及机器人
WO2020205586A1 (en) 2019-03-29 2020-10-08 Lam Research Corporation Wafer placement correction in indexed multi-station processing chambers
CN111788046B (zh) * 2019-04-12 2023-06-06 深圳配天智能技术研究院有限公司 限位装置、机械臂及机器人
WO2020206685A1 (zh) * 2019-04-12 2020-10-15 深圳配天智能技术研究院有限公司 限位装置、机械臂及机器人
EP3764375B1 (en) * 2019-07-09 2023-11-29 Etel S.A. Magnetic stopper for a rotary motion system
CN114466728B (zh) 2019-07-26 2025-05-27 朗姆研究公司 用于自动化晶片搬运机械手教导与健康检查的整合适应性定位系统及例程
WO2022061482A1 (en) * 2020-09-22 2022-03-31 Shanghai Flexiv Robotics Technology Co., Ltd. Brake apparatus, robot joint and robot including the same
JP7635541B2 (ja) * 2020-12-17 2025-02-26 セイコーエプソン株式会社 ロボットアームおよびロボット
EP4274532B1 (en) 2021-01-06 2025-02-12 American Sterilizer Company Medical device support system including rotational control mechanism
CN113815000A (zh) * 2021-09-22 2021-12-21 上海东富龙医疗装备有限公司 一种冻存盒自动夹取装置
JP2023173068A (ja) * 2022-05-25 2023-12-07 ナブテスコ株式会社 回転導入機
CN116066533B (zh) * 2023-02-14 2026-04-03 瑞声光电科技(常州)有限公司 限位机构

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Also Published As

Publication number Publication date
CN102458778B (zh) 2016-02-03
WO2010126726A3 (en) 2011-03-17
US8757345B2 (en) 2014-06-24
TWI577513B (zh) 2017-04-11
TW201105471A (en) 2011-02-16
KR20130026363A (ko) 2013-03-13
US20100278623A1 (en) 2010-11-04
CN102458778A (zh) 2012-05-16
WO2010126726A2 (en) 2010-11-04

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