JP2012525272A5 - - Google Patents
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- Publication number
- JP2012525272A5 JP2012525272A5 JP2012508526A JP2012508526A JP2012525272A5 JP 2012525272 A5 JP2012525272 A5 JP 2012525272A5 JP 2012508526 A JP2012508526 A JP 2012508526A JP 2012508526 A JP2012508526 A JP 2012508526A JP 2012525272 A5 JP2012525272 A5 JP 2012525272A5
- Authority
- JP
- Japan
- Prior art keywords
- magnet assembly
- rotatable
- magnetic pole
- stop
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/432,620 US8757345B2 (en) | 2009-04-29 | 2009-04-29 | Magnetic rotational hardstop for robot |
| US12/432,620 | 2009-04-29 | ||
| PCT/US2010/031489 WO2010126726A2 (en) | 2009-04-29 | 2010-04-16 | Magnetic rotational hardstop for robot |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012525272A JP2012525272A (ja) | 2012-10-22 |
| JP2012525272A5 true JP2012525272A5 (https=) | 2013-06-13 |
Family
ID=43030463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012508526A Abandoned JP2012525272A (ja) | 2009-04-29 | 2010-04-16 | ロボット用の磁石回転ハードストップ |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8757345B2 (https=) |
| JP (1) | JP2012525272A (https=) |
| KR (1) | KR20130026363A (https=) |
| CN (1) | CN102458778B (https=) |
| TW (1) | TWI577513B (https=) |
| WO (1) | WO2010126726A2 (https=) |
Families Citing this family (32)
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|---|---|---|---|---|
| US8336419B2 (en) * | 2004-04-08 | 2012-12-25 | Fabworx Solutions, Inc. | Hub assembly for robotic arm having pin spacers |
| US8060252B2 (en) | 2007-11-30 | 2011-11-15 | Novellus Systems, Inc. | High throughput method of in transit wafer position correction in system using multiple robots |
| US9002514B2 (en) | 2007-11-30 | 2015-04-07 | Novellus Systems, Inc. | Wafer position correction with a dual, side-by-side wafer transfer robot |
| CN101774179B (zh) * | 2009-01-10 | 2012-09-19 | 鸿富锦精密工业(深圳)有限公司 | 机器人连接轴 |
| JP5818346B2 (ja) * | 2011-04-27 | 2015-11-18 | 日本電産サンキョー株式会社 | 回転体の回転範囲規制機構および産業用ロボット |
| CN103085082B (zh) * | 2011-11-04 | 2015-10-14 | 鸿富锦精密工业(深圳)有限公司 | 机器人臂部件 |
| DE102012208430A1 (de) * | 2012-05-21 | 2013-11-21 | Kuka Roboter Gmbh | Industrieroboter mit einem ringförmigen Schleppanschlag |
| EP2708332B1 (de) | 2012-09-17 | 2016-11-16 | Eppendorf Ag | Gelenkvorrichtung, Mikromanipulatoranordnung mit dieser Gelenkvorrichtung und Verfahren zur Benutzung |
| JP5990359B2 (ja) * | 2012-10-04 | 2016-09-14 | 平田機工株式会社 | 搬入出ロボット |
| WO2014070672A1 (en) * | 2012-10-29 | 2014-05-08 | The Arizona Board Of Regents For And On Behalf Of Arizona State University | A coupling system |
| EP3198695B1 (en) | 2014-09-26 | 2026-01-21 | ABB Schweiz AG | A routing unit, a rotary joint and a robot |
| CN105252547B (zh) * | 2015-10-21 | 2018-03-09 | 国机智能科技有限公司 | 一种工业机器人大行程关节限位装置 |
| JP6678034B2 (ja) * | 2016-01-12 | 2020-04-08 | 本田技研工業株式会社 | 動作制御システム及び動作制御方法 |
| CN108472817A (zh) * | 2016-01-30 | 2018-08-31 | 生活机器人学股份有限公司 | 机械臂机构 |
| JP6663774B2 (ja) * | 2016-03-30 | 2020-03-13 | 東京エレクトロン株式会社 | 基板搬送方法及び基板処理システム |
| US9925663B2 (en) | 2016-07-07 | 2018-03-27 | Universal City Studios Llc | Movable hardstop for a robotic component |
| US10464427B2 (en) | 2016-08-29 | 2019-11-05 | Universal City Studios Llc | Systems and methods for braking or propelling a roaming vehicle |
| CN106272565A (zh) * | 2016-09-27 | 2017-01-04 | 昆山穿山甲机器人有限公司 | 机器人防护装置 |
| CN107584496B (zh) * | 2017-09-04 | 2020-12-01 | 重庆市臻憬科技开发有限公司 | 用于智能餐厅的磁力吸盘 |
| US10796940B2 (en) | 2018-11-05 | 2020-10-06 | Lam Research Corporation | Enhanced automatic wafer centering system and techniques for same |
| CN111836703B (zh) * | 2018-12-28 | 2023-09-26 | 深圳配天智能技术研究院有限公司 | 一种限位装置、机械臂及机器人 |
| WO2020205586A1 (en) | 2019-03-29 | 2020-10-08 | Lam Research Corporation | Wafer placement correction in indexed multi-station processing chambers |
| CN111788046B (zh) * | 2019-04-12 | 2023-06-06 | 深圳配天智能技术研究院有限公司 | 限位装置、机械臂及机器人 |
| WO2020206685A1 (zh) * | 2019-04-12 | 2020-10-15 | 深圳配天智能技术研究院有限公司 | 限位装置、机械臂及机器人 |
| EP3764375B1 (en) * | 2019-07-09 | 2023-11-29 | Etel S.A. | Magnetic stopper for a rotary motion system |
| CN114466728B (zh) | 2019-07-26 | 2025-05-27 | 朗姆研究公司 | 用于自动化晶片搬运机械手教导与健康检查的整合适应性定位系统及例程 |
| WO2022061482A1 (en) * | 2020-09-22 | 2022-03-31 | Shanghai Flexiv Robotics Technology Co., Ltd. | Brake apparatus, robot joint and robot including the same |
| JP7635541B2 (ja) * | 2020-12-17 | 2025-02-26 | セイコーエプソン株式会社 | ロボットアームおよびロボット |
| EP4274532B1 (en) | 2021-01-06 | 2025-02-12 | American Sterilizer Company | Medical device support system including rotational control mechanism |
| CN113815000A (zh) * | 2021-09-22 | 2021-12-21 | 上海东富龙医疗装备有限公司 | 一种冻存盒自动夹取装置 |
| JP2023173068A (ja) * | 2022-05-25 | 2023-12-07 | ナブテスコ株式会社 | 回転導入機 |
| CN116066533B (zh) * | 2023-02-14 | 2026-04-03 | 瑞声光电科技(常州)有限公司 | 限位机构 |
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| US3467973A (en) * | 1967-09-28 | 1969-09-23 | Chris A Minnick | Magnetic spring or shock absorber device |
| JPS6198240A (ja) * | 1984-10-18 | 1986-05-16 | 横河メディカルシステム株式会社 | メカニカルストツパ装置 |
| JPS6228194A (ja) * | 1985-07-29 | 1987-02-06 | フアナツク株式会社 | 工業用ロボツトの動作範囲規制装置 |
| US4767257A (en) | 1985-12-23 | 1988-08-30 | Mitsubishi Denki Kabushiki Kaisha | Industrial robot |
| JPS63123688A (ja) * | 1986-11-13 | 1988-05-27 | フアナツク株式会社 | 産業用ロボツトの旋回軸防水装置 |
| US5145227A (en) | 1990-12-31 | 1992-09-08 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Electromagnetic attachment mechanism |
| US5724264A (en) * | 1993-07-16 | 1998-03-03 | Immersion Human Interface Corp. | Method and apparatus for tracking the position and orientation of a stylus and for digitizing a 3-D object |
| US5473961A (en) * | 1993-10-29 | 1995-12-12 | Pepco Water Conservation Products | Control apparatus |
| US5765444A (en) * | 1995-07-10 | 1998-06-16 | Kensington Laboratories, Inc. | Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities |
| US5676472A (en) | 1995-07-10 | 1997-10-14 | Smart Machines | Rotary labyrinth seal |
| US6697748B1 (en) * | 1995-08-07 | 2004-02-24 | Immersion Corporation | Digitizing system and rotary table for determining 3-D geometry of an object |
| US5839322A (en) | 1996-01-26 | 1998-11-24 | Genmark Automation | Robotic arm rotation controller |
| KR200145221Y1 (ko) * | 1996-07-30 | 1999-06-15 | 윤종용 | 로봇 회전관절 스토퍼 |
| TW356030U (en) * | 1997-07-17 | 1999-04-11 | Xiu-Jin Liao | Improved structure for child^s game machine with rotation and elevation function |
| US6487738B1 (en) * | 2000-03-20 | 2002-12-03 | Offspring, Llc | Constant restoring force support surface |
| KR100885082B1 (ko) * | 2000-09-01 | 2009-02-25 | 어사이스트 테크놀로지스, 인코포레이티드 | 버퍼링 성능을 가진 에지 그립 얼라이너 |
| US6601468B2 (en) * | 2000-10-24 | 2003-08-05 | Innovative Robotic Solutions | Drive system for multiple axis robot arm |
| JP2004014660A (ja) * | 2002-06-05 | 2004-01-15 | Honda Motor Co Ltd | アクチュエータ |
| US20060043750A1 (en) * | 2004-07-09 | 2006-03-02 | Paul Wirth | End-effectors for handling microfeature workpieces |
| US6854579B2 (en) * | 2003-03-13 | 2005-02-15 | Royal-G Enterprise Co., Ltd. | Rotation angle-adjustable rotating device |
| US20070020080A1 (en) * | 2004-07-09 | 2007-01-25 | Paul Wirth | Transfer devices and methods for handling microfeature workpieces within an environment of a processing machine |
| US7643196B2 (en) * | 2005-12-16 | 2010-01-05 | The Charles Stark Draper Laboratory, Inc. | Systems, methods and devices for actuating a moveable miniature platform |
| JP4940428B2 (ja) * | 2006-08-02 | 2012-05-30 | 国立大学法人九州工業大学 | 磁性体を用いた非接触磁気浮上方法及びこれを用いた非接触磁気浮上装置 |
| CN201007333Y (zh) * | 2007-02-02 | 2008-01-16 | 常熟理工学院 | 复合型磁浮阻尼减振器 |
| CN201080984Y (zh) * | 2007-03-30 | 2008-07-02 | 上海市闸北区中小学科技指导站 | 一种磁力减震器 |
| CN201068947Y (zh) * | 2007-07-07 | 2008-06-04 | 郑长旺 | 磁铁减振器 |
| CN201078424Y (zh) * | 2007-07-21 | 2008-06-25 | 秦永刚 | 一种磁减振器 |
| US20090174289A1 (en) * | 2007-12-28 | 2009-07-09 | Adaptivenergy Llc | Magnetic impulse energy harvesting device and method |
| TWM356030U (en) * | 2008-03-04 | 2009-05-01 | Hong-Wei Zhang | Improved structure of magnetic shock absorber |
| CN201206607Y (zh) * | 2008-03-27 | 2009-03-11 | 河南大学 | 一种可调式磁力弹簧 |
| CN201246432Y (zh) * | 2008-08-06 | 2009-05-27 | 李国兴 | 磁弹性避震器 |
| DE102009043404A1 (de) * | 2009-09-29 | 2011-09-22 | Kuka Roboter Gmbh | Industrieroboter mit einem Schleppanschlag |
| DE102012208430A1 (de) * | 2012-05-21 | 2013-11-21 | Kuka Roboter Gmbh | Industrieroboter mit einem ringförmigen Schleppanschlag |
-
2009
- 2009-04-29 US US12/432,620 patent/US8757345B2/en active Active
-
2010
- 2010-04-16 KR KR1020117028014A patent/KR20130026363A/ko not_active Ceased
- 2010-04-16 CN CN201080025333.XA patent/CN102458778B/zh not_active Expired - Fee Related
- 2010-04-16 JP JP2012508526A patent/JP2012525272A/ja not_active Abandoned
- 2010-04-16 WO PCT/US2010/031489 patent/WO2010126726A2/en not_active Ceased
- 2010-04-28 TW TW099113557A patent/TWI577513B/zh active
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