CN102458778B - 用于机器人的磁性旋转硬停止件 - Google Patents

用于机器人的磁性旋转硬停止件 Download PDF

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Publication number
CN102458778B
CN102458778B CN201080025333.XA CN201080025333A CN102458778B CN 102458778 B CN102458778 B CN 102458778B CN 201080025333 A CN201080025333 A CN 201080025333A CN 102458778 B CN102458778 B CN 102458778B
Authority
CN
China
Prior art keywords
rotatable
rotation
magnetic
stop component
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201080025333.XA
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English (en)
Chinese (zh)
Other versions
CN102458778A (zh
Inventor
里奇·布兰克
吉姆·罗伯茨
韦恩·唐
迈克尔·伯格森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Novellus Systems Inc
Original Assignee
Novellus Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Novellus Systems Inc filed Critical Novellus Systems Inc
Publication of CN102458778A publication Critical patent/CN102458778A/zh
Application granted granted Critical
Publication of CN102458778B publication Critical patent/CN102458778B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1005—Program-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
    • B25J9/101—Program-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means using limit-switches, -stops
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0608—Gripping heads and other end effectors with vacuum or magnetic holding means with magnetic holding means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN201080025333.XA 2009-04-29 2010-04-16 用于机器人的磁性旋转硬停止件 Expired - Fee Related CN102458778B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/432,620 US8757345B2 (en) 2009-04-29 2009-04-29 Magnetic rotational hardstop for robot
US12/432,620 2009-04-29
PCT/US2010/031489 WO2010126726A2 (en) 2009-04-29 2010-04-16 Magnetic rotational hardstop for robot

Publications (2)

Publication Number Publication Date
CN102458778A CN102458778A (zh) 2012-05-16
CN102458778B true CN102458778B (zh) 2016-02-03

Family

ID=43030463

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080025333.XA Expired - Fee Related CN102458778B (zh) 2009-04-29 2010-04-16 用于机器人的磁性旋转硬停止件

Country Status (6)

Country Link
US (1) US8757345B2 (https=)
JP (1) JP2012525272A (https=)
KR (1) KR20130026363A (https=)
CN (1) CN102458778B (https=)
TW (1) TWI577513B (https=)
WO (1) WO2010126726A2 (https=)

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CN103085082B (zh) * 2011-11-04 2015-10-14 鸿富锦精密工业（深圳）有限公司 机器人臂部件
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WO2014070672A1 (en) * 2012-10-29 2014-05-08 The Arizona Board Of Regents For And On Behalf Of Arizona State University A coupling system
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CN105252547B (zh) * 2015-10-21 2018-03-09 国机智能科技有限公司 一种工业机器人大行程关节限位装置
JP6678034B2 (ja) * 2016-01-12 2020-04-08 本田技研工業株式会社 動作制御システム及び動作制御方法
CN108472817A (zh) * 2016-01-30 2018-08-31 生活机器人学股份有限公司 机械臂机构
JP6663774B2 (ja) * 2016-03-30 2020-03-13 東京エレクトロン株式会社 基板搬送方法及び基板処理システム
US9925663B2 (en) 2016-07-07 2018-03-27 Universal City Studios Llc Movable hardstop for a robotic component
US10464427B2 (en) 2016-08-29 2019-11-05 Universal City Studios Llc Systems and methods for braking or propelling a roaming vehicle
CN106272565A (zh) * 2016-09-27 2017-01-04 昆山穿山甲机器人有限公司 机器人防护装置
CN107584496B (zh) * 2017-09-04 2020-12-01 重庆市臻憬科技开发有限公司 用于智能餐厅的磁力吸盘
US10796940B2 (en) 2018-11-05 2020-10-06 Lam Research Corporation Enhanced automatic wafer centering system and techniques for same
CN111836703B (zh) * 2018-12-28 2023-09-26 深圳配天智能技术研究院有限公司 一种限位装置、机械臂及机器人
WO2020205586A1 (en) 2019-03-29 2020-10-08 Lam Research Corporation Wafer placement correction in indexed multi-station processing chambers
CN111788046B (zh) * 2019-04-12 2023-06-06 深圳配天智能技术研究院有限公司 限位装置、机械臂及机器人
WO2020206685A1 (zh) * 2019-04-12 2020-10-15 深圳配天智能技术研究院有限公司 限位装置、机械臂及机器人
EP3764375B1 (en) * 2019-07-09 2023-11-29 Etel S.A. Magnetic stopper for a rotary motion system
CN114466728B (zh) 2019-07-26 2025-05-27 朗姆研究公司 用于自动化晶片搬运机械手教导与健康检查的整合适应性定位系统及例程
WO2022061482A1 (en) * 2020-09-22 2022-03-31 Shanghai Flexiv Robotics Technology Co., Ltd. Brake apparatus, robot joint and robot including the same
JP7635541B2 (ja) * 2020-12-17 2025-02-26 セイコーエプソン株式会社 ロボットアームおよびロボット
EP4274532B1 (en) 2021-01-06 2025-02-12 American Sterilizer Company Medical device support system including rotational control mechanism
CN113815000A (zh) * 2021-09-22 2021-12-21 上海东富龙医疗装备有限公司 一种冻存盒自动夹取装置
JP2023173068A (ja) * 2022-05-25 2023-12-07 ナブテスコ株式会社 回転導入機
CN116066533B (zh) * 2023-02-14 2026-04-03 瑞声光电科技(常州)有限公司 限位机构

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US4828094A (en) * 1985-07-29 1989-05-09 Fanuc Ltd Motion range limiting apparatus for industrial robots
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CN1171998A (zh) * 1996-07-30 1998-02-04 三星电子株式会社 机器人旋转关节制动器
US5775169A (en) * 1995-07-10 1998-07-07 Smart Machines Robotic arm having a splash guard
US20070020080A1 (en) * 2004-07-09 2007-01-25 Paul Wirth Transfer devices and methods for handling microfeature workpieces within an environment of a processing machine

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US3467973A (en) * 1967-09-28 1969-09-23 Chris A Minnick Magnetic spring or shock absorber device
US4828094A (en) * 1985-07-29 1989-05-09 Fanuc Ltd Motion range limiting apparatus for industrial robots
US5449211A (en) * 1990-12-31 1995-09-12 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Grapple fixture for use with electromagnetic attachment mechanism
US5775169A (en) * 1995-07-10 1998-07-07 Smart Machines Robotic arm having a splash guard
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US20070020080A1 (en) * 2004-07-09 2007-01-25 Paul Wirth Transfer devices and methods for handling microfeature workpieces within an environment of a processing machine

Also Published As

Publication number Publication date
WO2010126726A3 (en) 2011-03-17
US8757345B2 (en) 2014-06-24
TWI577513B (zh) 2017-04-11
TW201105471A (en) 2011-02-16
KR20130026363A (ko) 2013-03-13
JP2012525272A (ja) 2012-10-22
US20100278623A1 (en) 2010-11-04
CN102458778A (zh) 2012-05-16
WO2010126726A2 (en) 2010-11-04

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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160203