JP2012521704A5 - - Google Patents

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Publication number
JP2012521704A5
JP2012521704A5 JP2012501381A JP2012501381A JP2012521704A5 JP 2012521704 A5 JP2012521704 A5 JP 2012521704A5 JP 2012501381 A JP2012501381 A JP 2012501381A JP 2012501381 A JP2012501381 A JP 2012501381A JP 2012521704 A5 JP2012521704 A5 JP 2012521704A5
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JP
Japan
Prior art keywords
substrate
cmut array
cavity
cmut
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2012501381A
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English (en)
Japanese (ja)
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JP5744002B2 (ja
JP2012521704A (ja
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Publication date
Priority claimed from GB0905255A external-priority patent/GB0905255D0/en
Priority claimed from GB0905256A external-priority patent/GB0905256D0/en
Priority claimed from GB0909296A external-priority patent/GB0909296D0/en
Application filed filed Critical
Priority claimed from PCT/GB2010/000583 external-priority patent/WO2010109205A2/en
Publication of JP2012521704A publication Critical patent/JP2012521704A/ja
Publication of JP2012521704A5 publication Critical patent/JP2012521704A5/ja
Application granted granted Critical
Publication of JP5744002B2 publication Critical patent/JP5744002B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012501381A 2009-03-26 2010-03-26 Ｃｍｕｔアレイ Expired - Fee Related JP5744002B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
GB0905256.4 2009-03-26
GB0905255A GB0905255D0 (en) 2009-03-26 2009-03-26 Cmut array
GB0905256A GB0905256D0 (en) 2009-03-26 2009-03-26 Ultrasound transducer backing layer
GB0905255.6 2009-03-26
GB0909296.6 2009-05-28
GB0909296A GB0909296D0 (en) 2009-05-28 2009-05-28 Ultrasound transsducer damping layer
PCT/GB2010/000583 WO2010109205A2 (en) 2009-03-26 2010-03-26 Cmut array

Publications (3)

Publication Number Publication Date
JP2012521704A JP2012521704A (ja) 2012-09-13
JP2012521704A5 true JP2012521704A5 (https=) 2013-05-16
JP5744002B2 JP5744002B2 (ja) 2015-07-01

Family

ID=42308937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012501381A Expired - Fee Related JP5744002B2 (ja) 2009-03-26 2010-03-26 Ｃｍｕｔアレイ

Country Status (7)

Country Link
US (1) US20120074509A1 (https=)
EP (4) EP2662153A1 (https=)
JP (1) JP5744002B2 (https=)
CN (1) CN102427890A (https=)
DK (1) DK2411163T3 (https=)
ES (1) ES2416182T3 (https=)
WO (1) WO2010109205A2 (https=)

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KR20150065067A (ko) * 2013-12-04 2015-06-12 삼성전자주식회사 정전용량 미세가공 초음파 변환기 및 그 제조방법
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CA2946137C (en) 2014-04-18 2022-08-09 Butterfly Network, Inc. Ultrasonic imaging compression methods and apparatus
KR102237662B1 (ko) 2014-04-18 2021-04-09 버터플라이 네트워크, 인크. 상보적 금속 산화물 반도체(ｃｍｏｓ) 웨이퍼들 내의 초음파 트랜스듀서들 및 관련 장치 및 방법들
CN106461767B (zh) 2014-04-18 2019-05-28 蝴蝶网络有限公司 单衬底超声成像装置的架构、相关设备和方法
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