JP2012146854A - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
- Publication number
- JP2012146854A JP2012146854A JP2011004781A JP2011004781A JP2012146854A JP 2012146854 A JP2012146854 A JP 2012146854A JP 2011004781 A JP2011004781 A JP 2011004781A JP 2011004781 A JP2011004781 A JP 2011004781A JP 2012146854 A JP2012146854 A JP 2012146854A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- baffle plate
- processing
- mounting table
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 290
- 238000012545 processing Methods 0.000 title claims abstract description 201
- 238000005192 partition Methods 0.000 claims abstract description 3
- 238000004891 communication Methods 0.000 claims description 71
- 230000002093 peripheral effect Effects 0.000 claims description 13
- 230000002265 prevention Effects 0.000 claims description 4
- 239000000376 reactant Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 86
- 238000010438 heat treatment Methods 0.000 description 48
- 238000000034 method Methods 0.000 description 24
- 230000008569 process Effects 0.000 description 21
- 238000012546 transfer Methods 0.000 description 15
- 238000012993 chemical processing Methods 0.000 description 11
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 239000007795 chemical reaction product Substances 0.000 description 9
- 230000007246 mechanism Effects 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- 238000010926 purge Methods 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000007850 degeneration Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- -1 ammonium fluorosilicate Chemical compound 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
【解決手段】基板を処理する減圧可能な処理チャンバを有する基板処理装置であって、基板を載置する基板載置台と、前記処理チャンバの内部を処理空間と排気空間に仕切るように前記基板載置台の周囲に設けられるバッフル板と、前記処理チャンバの内部を排気する排気口と、を備え、前記基板載置台と前記バッフル板との間には隙間が設けられ、前記バッフル板には前記処理空間と前記排気空間を連通させる複数の連通孔が形成されている、基板処理装置が提供される。
【選択図】図4
Description
3…処理チャンバ
4…基板載置台
5…排気口
6…ガス供給機構
7…温調流路
8…温度制御ユニット
10…加熱装置
12…加熱台
13…ヒータ
14…パージガス供給機構
15…排気口
20…搬送調圧装置
21…アーム
30…搬送装置
31…アーム
50a、50b、50c…ゲートバルブ
60…バッフル板
60a…足部
62…隙間
65…連通孔
M1…処理空間
M2…排気空間
S…基板処理システム
Claims (9)
- 基板を処理する減圧可能な処理チャンバを有する基板処理装置であって、
基板を載置する基板載置台と、
前記処理チャンバの内部を処理空間と排気空間に仕切るように前記基板載置台の周囲に設けられるバッフル板と、
前記処理チャンバの内部を排気する排気口と、を備え、
前記基板載置台と前記バッフル板との間には隙間が設けられ、
前記バッフル板には前記処理空間と前記排気空間を連通させる複数の連通孔が形成されている、基板処理装置。 - 前記バッフル板に形成される複数の連通孔のうち、前記排気口の近傍に位置する連通孔の密度は、他の部分に位置する連通孔の密度に比べ疎である、請求項1に記載の基板処理装置。
- 前記排気口は前記処理チャンバの底部に配置され、
前記バッフル板に形成される複数の連通孔のうち、前記排気口の真上に位置する連通孔の密度は、他の部分に位置する連通孔の密度に比べ疎である、請求項2に記載の基板処理装置。 - 前記基板載置台と前記バッフル板は異なる温度に温調される、請求項1〜3のいずれかに記載の基板処理装置。
- 前記基板載置台は基板処理温度に温調され、前記バッフル板は前記基板処理温度より高温である反応物付着防止温度に温調される、請求項4に記載の基板処理装置。
- 前記バッフル板は、前記処理チャンバの内壁に沿って底部方向に延伸する足部を有する、請求項1〜5のいずれかに記載の基板処理装置。
- 前記排気口は平面視において前記基板載置台の中心から偏心して配置される、請求項1〜6のいずれかに記載の基板処理装置。
- 前記処理チャンバには、水平方向において前記排気口と対向する位置に配置される、基板の搬入出を行うための搬入出口が設けられる、請求項7に記載の基板処理装置。
- 前記バッフル板に形成される複数の連通孔のうち、平面視において前記基板載置台を介して前記排気口と対向する側の中央部に位置する連通孔の密度は、平面視において前記基板載置台を介して前記排気口と対向する側の周辺部に位置する連通孔の密度に比べ疎である、請求項7に記載の基板処理装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011004781A JP5171969B2 (ja) | 2011-01-13 | 2011-01-13 | 基板処理装置 |
TW101100073A TWI483300B (zh) | 2011-01-13 | 2012-01-02 | Substrate processing device |
KR1020120003992A KR101321677B1 (ko) | 2011-01-13 | 2012-01-12 | 기판 처리 장치 |
US13/349,190 US8968475B2 (en) | 2011-01-13 | 2012-01-12 | Substrate processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011004781A JP5171969B2 (ja) | 2011-01-13 | 2011-01-13 | 基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012146854A true JP2012146854A (ja) | 2012-08-02 |
JP5171969B2 JP5171969B2 (ja) | 2013-03-27 |
Family
ID=46489850
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011004781A Active JP5171969B2 (ja) | 2011-01-13 | 2011-01-13 | 基板処理装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8968475B2 (ja) |
JP (1) | JP5171969B2 (ja) |
KR (1) | KR101321677B1 (ja) |
TW (1) | TWI483300B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016127260A (ja) * | 2014-12-26 | 2016-07-11 | 東京エレクトロン株式会社 | 基板処理装置 |
KR20200083617A (ko) | 2017-11-30 | 2020-07-08 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치 |
KR20200115163A (ko) | 2019-03-26 | 2020-10-07 | 도쿄엘렉트론가부시키가이샤 | 기판의 에칭 장치 및 에칭 방법 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20130086806A (ko) * | 2012-01-26 | 2013-08-05 | 삼성전자주식회사 | 박막 증착 장치 |
JP6423706B2 (ja) * | 2014-12-16 | 2018-11-14 | 東京エレクトロン株式会社 | プラズマ処理装置 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63141318A (ja) * | 1986-12-04 | 1988-06-13 | Oki Electric Ind Co Ltd | 試料処理用ガス排気装置 |
JPH0237717A (ja) * | 1988-07-27 | 1990-02-07 | Tokyo Electron Ltd | 処理装置 |
JPH1074738A (ja) * | 1997-07-11 | 1998-03-17 | Kokusai Electric Co Ltd | ウェーハ処理装置 |
JP2000030894A (ja) * | 1998-07-07 | 2000-01-28 | Kokusai Electric Co Ltd | プラズマ処理方法および装置 |
JP2001179078A (ja) * | 1999-12-24 | 2001-07-03 | Tokyo Electron Ltd | バッフル板とその製造装置及び製造方法とバッフル板を含むガス処理装置 |
JP2001267304A (ja) * | 2000-03-22 | 2001-09-28 | Hitachi Kokusai Electric Inc | 半導体製造装置 |
JP2007194361A (ja) * | 2006-01-18 | 2007-08-02 | Tokyo Electron Ltd | プラズマ処理装置およびプラズマ処理装置の制御方法 |
JP2007208042A (ja) * | 2006-02-02 | 2007-08-16 | Tokyo Electron Ltd | 減圧処理装置 |
WO2008109504A2 (en) * | 2007-03-06 | 2008-09-12 | Tokyo Electron Limited | Processing system and method for performing high throughput non-plasma processing |
WO2009018044A2 (en) * | 2007-07-27 | 2009-02-05 | Mattson Technology, Inc. | Advanced multi-workpiece processing chamber |
JP2010098296A (ja) * | 2008-09-17 | 2010-04-30 | Hitachi Kokusai Electric Inc | 基板処理装置及び基板処理方法 |
JP2012015285A (ja) * | 2010-06-30 | 2012-01-19 | Tokyo Electron Ltd | 基板載置台、基板処理装置および基板処理システム |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH054466U (ja) | 1991-06-25 | 1993-01-22 | 国際電気株式会社 | ウエーハ処理装置 |
US5441568A (en) * | 1994-07-15 | 1995-08-15 | Applied Materials, Inc. | Exhaust baffle for uniform gas flow pattern |
US6120605A (en) * | 1998-02-05 | 2000-09-19 | Asm Japan K.K. | Semiconductor processing system |
KR100265288B1 (ko) * | 1998-04-22 | 2000-10-02 | 윤종용 | 반도체소자 제조용 식각장치의 배플 |
US6206971B1 (en) * | 1999-03-29 | 2001-03-27 | Applied Materials, Inc. | Integrated temperature controlled exhaust and cold trap assembly |
US7166166B2 (en) * | 2002-09-30 | 2007-01-23 | Tokyo Electron Limited | Method and apparatus for an improved baffle plate in a plasma processing system |
JP4251887B2 (ja) * | 2003-02-26 | 2009-04-08 | 東京エレクトロン株式会社 | 真空処理装置 |
JP4694108B2 (ja) * | 2003-05-23 | 2011-06-08 | 東京エレクトロン株式会社 | 酸化膜形成方法、酸化膜形成装置および電子デバイス材料 |
US20060165904A1 (en) * | 2005-01-21 | 2006-07-27 | Asm Japan K.K. | Semiconductor-manufacturing apparatus provided with ultraviolet light-emitting mechanism and method of treating semiconductor substrate using ultraviolet light emission |
JP5347294B2 (ja) * | 2007-09-12 | 2013-11-20 | 東京エレクトロン株式会社 | 成膜装置、成膜方法及び記憶媒体 |
US20100081284A1 (en) * | 2008-09-29 | 2010-04-01 | Applied Materials, Inc. | Methods and apparatus for improving flow uniformity in a process chamber |
-
2011
- 2011-01-13 JP JP2011004781A patent/JP5171969B2/ja active Active
-
2012
- 2012-01-02 TW TW101100073A patent/TWI483300B/zh active
- 2012-01-12 KR KR1020120003992A patent/KR101321677B1/ko active IP Right Grant
- 2012-01-12 US US13/349,190 patent/US8968475B2/en active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63141318A (ja) * | 1986-12-04 | 1988-06-13 | Oki Electric Ind Co Ltd | 試料処理用ガス排気装置 |
JPH0237717A (ja) * | 1988-07-27 | 1990-02-07 | Tokyo Electron Ltd | 処理装置 |
JPH1074738A (ja) * | 1997-07-11 | 1998-03-17 | Kokusai Electric Co Ltd | ウェーハ処理装置 |
JP2000030894A (ja) * | 1998-07-07 | 2000-01-28 | Kokusai Electric Co Ltd | プラズマ処理方法および装置 |
JP2001179078A (ja) * | 1999-12-24 | 2001-07-03 | Tokyo Electron Ltd | バッフル板とその製造装置及び製造方法とバッフル板を含むガス処理装置 |
JP2001267304A (ja) * | 2000-03-22 | 2001-09-28 | Hitachi Kokusai Electric Inc | 半導体製造装置 |
JP2007194361A (ja) * | 2006-01-18 | 2007-08-02 | Tokyo Electron Ltd | プラズマ処理装置およびプラズマ処理装置の制御方法 |
JP2007208042A (ja) * | 2006-02-02 | 2007-08-16 | Tokyo Electron Ltd | 減圧処理装置 |
WO2008109504A2 (en) * | 2007-03-06 | 2008-09-12 | Tokyo Electron Limited | Processing system and method for performing high throughput non-plasma processing |
WO2009018044A2 (en) * | 2007-07-27 | 2009-02-05 | Mattson Technology, Inc. | Advanced multi-workpiece processing chamber |
JP2010098296A (ja) * | 2008-09-17 | 2010-04-30 | Hitachi Kokusai Electric Inc | 基板処理装置及び基板処理方法 |
JP2012015285A (ja) * | 2010-06-30 | 2012-01-19 | Tokyo Electron Ltd | 基板載置台、基板処理装置および基板処理システム |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016127260A (ja) * | 2014-12-26 | 2016-07-11 | 東京エレクトロン株式会社 | 基板処理装置 |
KR20200083617A (ko) | 2017-11-30 | 2020-07-08 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치 |
KR20200115163A (ko) | 2019-03-26 | 2020-10-07 | 도쿄엘렉트론가부시키가이샤 | 기판의 에칭 장치 및 에칭 방법 |
US11424128B2 (en) | 2019-03-26 | 2022-08-23 | Tokyo Electron Limited | Apparatus and method for etching substrate |
Also Published As
Publication number | Publication date |
---|---|
JP5171969B2 (ja) | 2013-03-27 |
KR101321677B1 (ko) | 2013-10-23 |
TW201246326A (en) | 2012-11-16 |
TWI483300B (zh) | 2015-05-01 |
US8968475B2 (en) | 2015-03-03 |
KR20120082369A (ko) | 2012-07-23 |
US20120180883A1 (en) | 2012-07-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR102333103B1 (ko) | 다공성 베플을 갖는 저 볼륨 샤워헤드 | |
KR20190035548A (ko) | 기판 처리 장치, 반응관, 반도체 장치의 제조 방법 및 기록 매체 | |
CN104250728B (zh) | 具有气封的化学沉积腔室 | |
KR100802667B1 (ko) | 상부 전극, 플라즈마 처리 장치 및 처리 방법, 및 제어 프로그램을 기록한 기록매체 | |
JP5171969B2 (ja) | 基板処理装置 | |
JP4990636B2 (ja) | 搬送トレーを用いた真空処理装置 | |
KR20220109490A (ko) | 에어 갭 (air-gapped) 플레넘들 및 오버헤드 격리 가스 분배기를 갖는 샤워헤드 | |
TWI631613B (zh) | Substrate processing method and substrate processing device | |
US20150113826A1 (en) | Substrate placing table and substrate processing apparatus | |
KR20160026572A (ko) | 기판 처리 장치 | |
KR20180014656A (ko) | 기판 처리 장치 및 기판 처리 방법 | |
JPWO2013183437A1 (ja) | ガス処理方法 | |
JP2008166321A (ja) | 基板処理装置および半導体装置の製造方法 | |
TW201535563A (zh) | 基板處理裝置、噴淋板及基板處理方法 | |
JP6054695B2 (ja) | 成膜装置 | |
JP2010177267A (ja) | 搬送トレー及びこの搬送トレーを用いた真空処理装置 | |
JP7048690B2 (ja) | 基板処理装置、半導体装置の製造方法及び基板保持具 | |
KR102210314B1 (ko) | 기판 처리 장치, 반도체 장치의 제조 방법 및 기록매체 | |
KR20220078467A (ko) | 기판 처리 방법 | |
KR20100127356A (ko) | 기판 처리 장치 | |
JP2020068373A (ja) | 基板処理装置 | |
JP2003017477A (ja) | 半導体製造装置のプロセスチャンバ構造および半導体製造装置 | |
JP2020193379A (ja) | ステージ構造体、基板処理装置及びステージ構造体の制御方法 | |
JP2022016129A (ja) | 載置台、基板を処理する装置、及び基板を温度調節する方法 | |
KR20240090589A (ko) | 플라스마 처리 시스템 및 플라스마 처리 장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120912 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120925 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121113 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20121211 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20121225 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5171969 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |