JP2012142594A5 - - Google Patents

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Publication number
JP2012142594A5
JP2012142594A5 JP2012057317A JP2012057317A JP2012142594A5 JP 2012142594 A5 JP2012142594 A5 JP 2012142594A5 JP 2012057317 A JP2012057317 A JP 2012057317A JP 2012057317 A JP2012057317 A JP 2012057317A JP 2012142594 A5 JP2012142594 A5 JP 2012142594A5
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
layer
buffer layer
substrate
silicon layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012057317A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012142594A (ja
Filing date
Publication date
Priority claimed from US08/656,460 external-priority patent/US5733641A/en
Application filed filed Critical
Publication of JP2012142594A publication Critical patent/JP2012142594A/ja
Publication of JP2012142594A5 publication Critical patent/JP2012142594A5/ja
Pending legal-status Critical Current

Links

JP2012057317A 1996-05-31 2012-03-14 半導体素子のための緩衝化基板 Pending JP2012142594A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/656,460 1996-05-31
US08/656,460 US5733641A (en) 1996-05-31 1996-05-31 Buffered substrate for semiconductor devices

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2008272411A Division JP2009049428A (ja) 1996-05-31 2008-10-22 半導体素子のための緩衝化基板

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014130488A Division JP2014199945A (ja) 1996-05-31 2014-06-25 半導体素子のための緩衝化基板

Publications (2)

Publication Number Publication Date
JP2012142594A JP2012142594A (ja) 2012-07-26
JP2012142594A5 true JP2012142594A5 (enExample) 2013-07-11

Family

ID=24633132

Family Applications (4)

Application Number Title Priority Date Filing Date
JP9148652A Pending JPH1064822A (ja) 1996-05-31 1997-05-22 半導体素子のための緩衝化基板
JP2008272411A Pending JP2009049428A (ja) 1996-05-31 2008-10-22 半導体素子のための緩衝化基板
JP2012057317A Pending JP2012142594A (ja) 1996-05-31 2012-03-14 半導体素子のための緩衝化基板
JP2014130488A Pending JP2014199945A (ja) 1996-05-31 2014-06-25 半導体素子のための緩衝化基板

Family Applications Before (2)

Application Number Title Priority Date Filing Date
JP9148652A Pending JPH1064822A (ja) 1996-05-31 1997-05-22 半導体素子のための緩衝化基板
JP2008272411A Pending JP2009049428A (ja) 1996-05-31 2008-10-22 半導体素子のための緩衝化基板

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2014130488A Pending JP2014199945A (ja) 1996-05-31 2014-06-25 半導体素子のための緩衝化基板

Country Status (3)

Country Link
US (1) US5733641A (enExample)
EP (1) EP0810638A3 (enExample)
JP (4) JPH1064822A (enExample)

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US6501973B1 (en) 2000-06-30 2002-12-31 Motorola, Inc. Apparatus and method for measuring selected physical condition of an animate subject
US6410941B1 (en) 2000-06-30 2002-06-25 Motorola, Inc. Reconfigurable systems using hybrid integrated circuits with optical ports
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US6583034B2 (en) 2000-11-22 2003-06-24 Motorola, Inc. Semiconductor structure including a compliant substrate having a graded monocrystalline layer and methods for fabricating the structure and semiconductor devices including the structure
US6563118B2 (en) 2000-12-08 2003-05-13 Motorola, Inc. Pyroelectric device on a monocrystalline semiconductor substrate and process for fabricating same
US20020096683A1 (en) 2001-01-19 2002-07-25 Motorola, Inc. Structure and method for fabricating GaN devices utilizing the formation of a compliant substrate
US6673646B2 (en) 2001-02-28 2004-01-06 Motorola, Inc. Growth of compound semiconductor structures on patterned oxide films and process for fabricating same
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US7758926B2 (en) * 2001-05-30 2010-07-20 Lg Display Co., Ltd. Amorphous silicon deposition for sequential lateral solidification
KR100506004B1 (ko) * 2001-05-30 2005-08-04 엘지.필립스 엘시디 주식회사 순차측면 결정화를 위한 비정질 실리콘층의 증착방법
US6709989B2 (en) 2001-06-21 2004-03-23 Motorola, Inc. Method for fabricating a semiconductor structure including a metal oxide interface with silicon
US6992321B2 (en) 2001-07-13 2006-01-31 Motorola, Inc. Structure and method for fabricating semiconductor structures and devices utilizing piezoelectric materials
US6646293B2 (en) 2001-07-18 2003-11-11 Motorola, Inc. Structure for fabricating high electron mobility transistors utilizing the formation of complaint substrates
US6693298B2 (en) 2001-07-20 2004-02-17 Motorola, Inc. Structure and method for fabricating epitaxial semiconductor on insulator (SOI) structures and devices utilizing the formation of a compliant substrate for materials used to form same
US7019332B2 (en) 2001-07-20 2006-03-28 Freescale Semiconductor, Inc. Fabrication of a wavelength locker within a semiconductor structure
US6472694B1 (en) 2001-07-23 2002-10-29 Motorola, Inc. Microprocessor structure having a compound semiconductor layer
US6855992B2 (en) 2001-07-24 2005-02-15 Motorola Inc. Structure and method for fabricating configurable transistor devices utilizing the formation of a compliant substrate for materials used to form the same
US6585424B2 (en) 2001-07-25 2003-07-01 Motorola, Inc. Structure and method for fabricating an electro-rheological lens
US6594414B2 (en) 2001-07-25 2003-07-15 Motorola, Inc. Structure and method of fabrication for an optical switch
US6667196B2 (en) 2001-07-25 2003-12-23 Motorola, Inc. Method for real-time monitoring and controlling perovskite oxide film growth and semiconductor structure formed using the method
US6639249B2 (en) 2001-08-06 2003-10-28 Motorola, Inc. Structure and method for fabrication for a solid-state lighting device
US6462360B1 (en) 2001-08-06 2002-10-08 Motorola, Inc. Integrated gallium arsenide communications systems
US6589856B2 (en) 2001-08-06 2003-07-08 Motorola, Inc. Method and apparatus for controlling anti-phase domains in semiconductor structures and devices
US20030034491A1 (en) 2001-08-14 2003-02-20 Motorola, Inc. Structure and method for fabricating semiconductor structures and devices for detecting an object
US6673667B2 (en) 2001-08-15 2004-01-06 Motorola, Inc. Method for manufacturing a substantially integral monolithic apparatus including a plurality of semiconductor materials
US20030036217A1 (en) * 2001-08-16 2003-02-20 Motorola, Inc. Microcavity semiconductor laser coupled to a waveguide
US20030071327A1 (en) * 2001-10-17 2003-04-17 Motorola, Inc. Method and apparatus utilizing monocrystalline insulator
US6916717B2 (en) 2002-05-03 2005-07-12 Motorola, Inc. Method for growing a monocrystalline oxide layer and for fabricating a semiconductor device on a monocrystalline substrate
FR2844920B1 (fr) * 2002-09-24 2005-08-26 Corning Inc Transistor a couche mince de silicium et son procede de fabrication
TW574448B (en) * 2002-09-24 2004-02-01 Au Optronics Corp Method for fabricating a polysilicon layer
EP1403918A1 (en) * 2002-09-25 2004-03-31 Corning Incorporated A semiconductor device, its preparation
US20040070312A1 (en) * 2002-10-10 2004-04-15 Motorola, Inc. Integrated circuit and process for fabricating the same
US7169619B2 (en) 2002-11-19 2007-01-30 Freescale Semiconductor, Inc. Method for fabricating semiconductor structures on vicinal substrates using a low temperature, low pressure, alkaline earth metal-rich process
US6885065B2 (en) 2002-11-20 2005-04-26 Freescale Semiconductor, Inc. Ferromagnetic semiconductor structure and method for forming the same
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US7020374B2 (en) 2003-02-03 2006-03-28 Freescale Semiconductor, Inc. Optical waveguide structure and method for fabricating the same
US6965128B2 (en) * 2003-02-03 2005-11-15 Freescale Semiconductor, Inc. Structure and method for fabricating semiconductor microresonator devices
FR2870989B1 (fr) * 2004-05-27 2006-08-04 Commissariat Energie Atomique Substrat pour application electronique, comprenant un support flexible et son procede de fabrication
JP2011238812A (ja) * 2010-05-12 2011-11-24 Japan Steel Works Ltd:The 結晶化半導体薄膜の製造方法および結晶化半導体薄膜

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US5733641A (en) * 1996-05-31 1998-03-31 Xerox Corporation Buffered substrate for semiconductor devices

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