GB2130009B - Polycrystalline silicon layers for semiconductor devices - Google Patents
Polycrystalline silicon layers for semiconductor devicesInfo
- Publication number
- GB2130009B GB2130009B GB08329381A GB8329381A GB2130009B GB 2130009 B GB2130009 B GB 2130009B GB 08329381 A GB08329381 A GB 08329381A GB 8329381 A GB8329381 A GB 8329381A GB 2130009 B GB2130009 B GB 2130009B
- Authority
- GB
- United Kingdom
- Prior art keywords
- semiconductor devices
- polycrystalline silicon
- silicon layers
- layers
- polycrystalline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/32055—Deposition of semiconductive layers, e.g. poly - or amorphous silicon layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Recrystallisation Techniques (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
- Chemical Vapour Deposition (AREA)
- Photovoltaic Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US44137182A | 1982-11-12 | 1982-11-12 |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8329381D0 GB8329381D0 (en) | 1983-12-07 |
GB2130009A GB2130009A (en) | 1984-05-23 |
GB2130009B true GB2130009B (en) | 1986-04-03 |
Family
ID=23752618
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08329381A Expired GB2130009B (en) | 1982-11-12 | 1983-11-03 | Polycrystalline silicon layers for semiconductor devices |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPH0652715B2 (en) |
DE (1) | DE3340584A1 (en) |
FR (1) | FR2536210B1 (en) |
GB (1) | GB2130009B (en) |
IT (1) | IT1171797B (en) |
SE (1) | SE500463C2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7949237B2 (en) | 2000-12-21 | 2011-05-24 | Mattson Technology, Inc. | Heating configuration for use in thermal processing chambers |
US8669496B2 (en) | 2000-12-21 | 2014-03-11 | Mattson Technology, Inc. | System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4504521A (en) * | 1984-03-22 | 1985-03-12 | Rca Corporation | LPCVD Deposition of tantalum silicide |
GB8504725D0 (en) * | 1985-02-23 | 1985-03-27 | Standard Telephones Cables Ltd | Integrated circuits |
US4789883A (en) * | 1985-12-17 | 1988-12-06 | Advanced Micro Devices, Inc. | Integrated circuit structure having gate electrode and underlying oxide and method of making same |
EP0253014B1 (en) * | 1986-07-18 | 1990-04-11 | Nippondenso Co., Ltd. | Method of manufacturing a monvolatile semiconductor memory apparatus with writing and erasing capability |
GB2204066A (en) * | 1987-04-06 | 1988-11-02 | Philips Electronic Associated | A method for manufacturing a semiconductor device having a layered structure |
JP2690917B2 (en) * | 1987-12-07 | 1997-12-17 | 株式会社日立製作所 | Thin film forming method and semiconductor device manufacturing method |
FR2627012B1 (en) * | 1988-02-10 | 1990-06-01 | France Etat | METHOD FOR DEPOSITING A POLYCRYSTALLINE LAYER WITH LARGE GRAIN, LAYER OBTAINED AND TRANSISTOR PROVIDED WITH SUCH A LAYER |
EP0429885B1 (en) * | 1989-12-01 | 1997-06-04 | Texas Instruments Incorporated | Method of in-situ doping of deposited silicon |
US5366917A (en) * | 1990-03-20 | 1994-11-22 | Nec Corporation | Method for fabricating polycrystalline silicon having micro roughness on the surface |
JP2508948B2 (en) * | 1991-06-21 | 1996-06-19 | 日本電気株式会社 | Method for manufacturing semiconductor device |
GB2290908B (en) * | 1991-09-07 | 1996-05-01 | Samsung Electronics Co Ltd | Semiconductor memory device |
KR960026821A (en) * | 1994-12-20 | 1996-07-22 | 김주용 | Capacitor Manufacturing Method |
DE19681430B4 (en) * | 1995-06-06 | 2006-10-26 | Asahi Kasei Microsystems Co., Ltd. | Method for producing a semiconductor component |
US5733641A (en) * | 1996-05-31 | 1998-03-31 | Xerox Corporation | Buffered substrate for semiconductor devices |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS558815B2 (en) * | 1973-06-29 | 1980-03-06 | ||
DE2536174C3 (en) * | 1975-08-13 | 1983-11-03 | Siemens AG, 1000 Berlin und 8000 München | Process for producing polycrystalline silicon layers for semiconductor components |
JPS5249782A (en) * | 1975-10-20 | 1977-04-21 | Fujitsu Ltd | Process for production of semiconductor device |
US4179528A (en) * | 1977-05-18 | 1979-12-18 | Eastman Kodak Company | Method of making silicon device with uniformly thick polysilicon |
FR2394173A1 (en) * | 1977-06-06 | 1979-01-05 | Thomson Csf | METHOD OF MANUFACTURING ELECTRONIC DEVICES WHICH INCLUDE A THIN LAYER OF AMORPHIC SILICON AND AN ELECTRONIC DEVICE OBTAINED BY SUCH A PROCESS |
JPS5423386A (en) * | 1977-07-22 | 1979-02-21 | Hitachi Ltd | Manufacture of semiconductor device |
JPS5617083A (en) * | 1979-07-20 | 1981-02-18 | Hitachi Ltd | Semiconductor device and its manufacture |
US4358326A (en) * | 1980-11-03 | 1982-11-09 | International Business Machines Corporation | Epitaxially extended polycrystalline structures utilizing a predeposit of amorphous silicon with subsequent annealing |
US4441249A (en) * | 1982-05-26 | 1984-04-10 | Bell Telephone Laboratories, Incorporated | Semiconductor integrated circuit capacitor |
-
1983
- 1983-11-03 GB GB08329381A patent/GB2130009B/en not_active Expired
- 1983-11-04 SE SE8306070A patent/SE500463C2/en not_active IP Right Cessation
- 1983-11-10 DE DE19833340584 patent/DE3340584A1/en active Granted
- 1983-11-10 FR FR8317929A patent/FR2536210B1/en not_active Expired
- 1983-11-11 JP JP58213176A patent/JPH0652715B2/en not_active Expired - Fee Related
- 1983-11-11 IT IT23690/83A patent/IT1171797B/en active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7949237B2 (en) | 2000-12-21 | 2011-05-24 | Mattson Technology, Inc. | Heating configuration for use in thermal processing chambers |
US8669496B2 (en) | 2000-12-21 | 2014-03-11 | Mattson Technology, Inc. | System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy |
Also Published As
Publication number | Publication date |
---|---|
IT8323690A0 (en) | 1983-11-11 |
SE500463C2 (en) | 1994-06-27 |
FR2536210A1 (en) | 1984-05-18 |
GB8329381D0 (en) | 1983-12-07 |
DE3340584C2 (en) | 1993-02-11 |
IT1171797B (en) | 1987-06-10 |
FR2536210B1 (en) | 1986-03-28 |
JPH0652715B2 (en) | 1994-07-06 |
GB2130009A (en) | 1984-05-23 |
JPS59100561A (en) | 1984-06-09 |
SE8306070D0 (en) | 1983-11-04 |
DE3340584A1 (en) | 1984-05-17 |
SE8306070L (en) | 1984-05-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PE20 | Patent expired after termination of 20 years |
Effective date: 20031102 |