JP2012109536A5 - - Google Patents

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Publication number
JP2012109536A5
JP2012109536A5 JP2011205215A JP2011205215A JP2012109536A5 JP 2012109536 A5 JP2012109536 A5 JP 2012109536A5 JP 2011205215 A JP2011205215 A JP 2011205215A JP 2011205215 A JP2011205215 A JP 2011205215A JP 2012109536 A5 JP2012109536 A5 JP 2012109536A5
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JP
Japan
Prior art keywords
substrate
substrate holder
link
pair
arms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011205215A
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English (en)
Japanese (ja)
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JP2012109536A (ja
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Publication date
Application filed filed Critical
Priority to JP2011205215A priority Critical patent/JP2012109536A/ja
Priority claimed from JP2011205215A external-priority patent/JP2012109536A/ja
Priority to US13/276,667 priority patent/US20120107072A1/en
Publication of JP2012109536A publication Critical patent/JP2012109536A/ja
Priority to US14/284,985 priority patent/US20140250678A1/en
Publication of JP2012109536A5 publication Critical patent/JP2012109536A5/ja
Pending legal-status Critical Current

Links

JP2011205215A 2010-10-28 2011-09-20 基板搬送装置、電子デバイスの製造システムおよび電子デバイスの製造方法 Pending JP2012109536A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011205215A JP2012109536A (ja) 2010-10-28 2011-09-20 基板搬送装置、電子デバイスの製造システムおよび電子デバイスの製造方法
US13/276,667 US20120107072A1 (en) 2010-10-28 2011-10-19 Substrate transport apparatus, electronic device manufacturing system, and electronic device manufacturing method
US14/284,985 US20140250678A1 (en) 2010-10-28 2014-05-22 Substrate transport apparatus, electronic device manufacturing system, and electronic device manufacturing method

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010242619 2010-10-28
JP2010242619 2010-10-28
JP2011205215A JP2012109536A (ja) 2010-10-28 2011-09-20 基板搬送装置、電子デバイスの製造システムおよび電子デバイスの製造方法

Publications (2)

Publication Number Publication Date
JP2012109536A JP2012109536A (ja) 2012-06-07
JP2012109536A5 true JP2012109536A5 (enExample) 2014-10-02

Family

ID=45996959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011205215A Pending JP2012109536A (ja) 2010-10-28 2011-09-20 基板搬送装置、電子デバイスの製造システムおよび電子デバイスの製造方法

Country Status (2)

Country Link
US (2) US20120107072A1 (enExample)
JP (1) JP2012109536A (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9082801B2 (en) 2012-09-05 2015-07-14 Industrial Technology Research Institute Rotatable locating apparatus with dome carrier and operating method thereof
US9373534B2 (en) 2012-09-05 2016-06-21 Industrial Technology Research Institute Rotary positioning apparatus with dome carrier, automatic pick-and-place system, and operating method thereof
JP6349947B2 (ja) * 2013-11-19 2018-07-04 株式会社ジェイテクト 搬送装置
CN106607887A (zh) * 2015-10-22 2017-05-03 佛山市禾才科技服务有限公司 一种多臂机器人
US10453725B2 (en) * 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
NL2020044B1 (en) * 2017-12-08 2019-06-19 Vdl Enabling Tech Group B V A planar multi-joint robot arm system
FR3086570B1 (fr) * 2018-10-01 2021-01-15 Univ Le Havre Normandie Systeme robotise, comprenant un bras articule
JP7202902B2 (ja) * 2019-01-21 2023-01-12 東京エレクトロン株式会社 搬送装置
JP7370233B2 (ja) * 2019-11-29 2023-10-27 東京エレクトロン株式会社 基板搬送装置及び基板処理システム
CN110980116B (zh) * 2019-12-31 2021-06-01 安徽倍发来纺织科技有限公司 一种袜子出厂自动化处理装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3404553C2 (de) * 1984-02-09 1986-04-17 Carl Hurth Maschinen- und Zahnradfabrik GmbH & Co, 8000 München Handhabungseinrichtung, insbesondere zum Be- und Entladen von Werkzeugmaschinen
US5647724A (en) * 1995-10-27 1997-07-15 Brooks Automation Inc. Substrate transport apparatus with dual substrate holders
US6299404B1 (en) * 1995-10-27 2001-10-09 Brooks Automation Inc. Substrate transport apparatus with double substrate holders
JP2948216B1 (ja) * 1998-02-26 1999-09-13 有限会社ビーケーエスラボ 複数軸動力伝達装置およびウエハ搬送用アームリンク
JP2001185596A (ja) * 1999-12-22 2001-07-06 Jel:Kk 搬送アーム
TW471084B (en) * 1999-12-22 2002-01-01 Jel Kk Transfer arm
JP2003231076A (ja) * 2002-02-08 2003-08-19 Jel:Kk 搬送アーム
JP4319504B2 (ja) * 2003-10-06 2009-08-26 東京エレクトロン株式会社 基板搬送装置および基板処理システム

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