JP7370233B2 - 基板搬送装置及び基板処理システム - Google Patents
基板搬送装置及び基板処理システム Download PDFInfo
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- JP7370233B2 JP7370233B2 JP2019217076A JP2019217076A JP7370233B2 JP 7370233 B2 JP7370233 B2 JP 7370233B2 JP 2019217076 A JP2019217076 A JP 2019217076A JP 2019217076 A JP2019217076 A JP 2019217076A JP 7370233 B2 JP7370233 B2 JP 7370233B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0025—Means for supplying energy to the end effector
- B25J19/0045—Contactless power transmission, e.g. by magnetic induction
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67167—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers surrounding a central transfer chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/14—Structural association with mechanical loads, e.g. with hand-held machine tools or fans
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
Description
一実施形態に係る基板処理システム100の全体構成の一例について、図1を用いて説明する。図1は、一実施形態に係る基板処理システム100の一例の構成を示す平面図である。なお、図1では、ウェハWにドットのハッチングを付して図示している。
次に、基板搬送装置125について、図2を用いて更に説明する。図2は、一実施形態に係る搬送ユニット20の一例を示す平面視図である。なお、図2(a)は、搬送ユニット20の姿勢の一例を示す。図2(b)は、搬送ユニット20の姿勢の他の一例を示す。
他の実施形態に係る基板処理システム100Bの全体構成の一例について、図5を用いて説明する。図5は、他の実施形態に係る基板処理システム100Bの一例の構成を示す平面図である。なお、図5では、ウェハWにドットのハッチングを付して図示している。
搬送ユニット20Bについて図6を用いて更に説明する。図6は、他の実施形態に係る搬送ユニット20Bの一例を示す側面視図である。搬送ユニット20Bは、2つのベース31,32と、リンク機構(リンク71~73)と、エンドエフェクタ50と、を有する。なお、搬送ユニット20Bは、複数台設けられていてもよい。
100,100B 基板処理システム
110 処理室
111 載置台
120 真空搬送室
125 基板搬送装置
130 ロードロック室
150 制御部
10 平面モータ
15 コイル
20,20A,20B 搬送ユニット
31,32 ベース
35 永久磁石
41~42,44~47,71~73 リンク
50 エンドエフェクタ(基板支持部材)
61,62 ストッパ(係止部材)
Claims (10)
- 搬送室に設けられ、配列されたコイルを有する平面モータと、
前記平面モータ上を移動する搬送ユニットと、
前記コイルの通電を制御する制御部と、を備え、
前記搬送ユニットは、
配列された磁石を有し、前記平面モータを移動する2つのベースと、
基板を支持する基板支持部材と、
2つの前記ベースと前記基板支持部材とを連結するリンク機構と、を備え、
前記リンク機構は、
2つの前記ベースの間隔を変更することで、前記基板支持部材の延伸量を変更する、
基板搬送装置。 - 前記リンク機構は、第1及び第2のリンクを有し、
前記第1のリンクは、一端が一の前記ベースと回転自在に接続され、他端が前記基板支持部材と回転自在に接続され、
前記第2のリンクは、一端が他の前記ベースと回転自在に接続され、他端が前記基板支持部材と回転自在に接続される、
請求項1に記載の基板搬送装置。 - 前記リンク機構は、第1乃至第4のリンクを有し、
前記第1のリンクは、一端が一の前記ベースと回転自在に接続され、他端が前記第4のリンクの一端と回転自在に接続され、
前記第2のリンクは、一端が他の前記ベースと回転自在に接続され、他端が前記第3のリンクの一端と回転自在に接続され、
前記第3のリンクは、一端が前記第2のリンクの他端と回転自在に接続され、他端が前記基板支持部材と回転自在に接続され、
前記第4のリンクは、一端が前記第1のリンクの他端と回転自在に接続され、他端が前記基板支持部材と回転自在に接続され、
前記第1のリンクの途中と前記第2のリンクの途中で、回転自在に接続される、
請求項1に記載の基板搬送装置。 - 前記リンクの回転角度を制限する係止部材を更に有する、
請求項2または請求項3に記載の基板搬送装置。 - 搬送室に設けられ、配列されたコイルを有する平面モータと、
前記平面モータ上を移動する搬送ユニットと、
前記コイルの通電を制御する制御部と、を備え、
前記搬送ユニットは、
配列された磁石を有し、前記平面モータを移動する2つのベースと、
基板を支持する基板支持部材と、
2つの前記ベースと前記基板支持部材とを連結するリンク機構と、を備え、
前記リンク機構は、
2つの前記ベースの間隔を変更することで、前記基板支持部材の高さを変更する、
基板搬送装置。 - 搬送室に設けられ、配列されたコイルを有する平面モータと、
前記平面モータ上を移動する搬送ユニットと、
前記コイルの通電を制御する制御部と、を備え、
前記搬送ユニットは、
配列された磁石を有し、前記平面モータを移動する2つのベースと、
基板を支持する基板支持部材と、
2つの前記ベースと前記基板支持部材とを連結するリンク機構と、を備え、
前記リンク機構は、
2つの前記ベースの間隔を変更することで、前記基板支持部材の傾きを変更する、
基板搬送装置。 - 前記リンク機構は、第1乃至第3のリンクを有し、
前記第1のリンクは、一端が一の前記ベースと回転自在に接続され、他端が前記第3のリンクの一端と回転自在に接続され、
前記第2のリンクは、一端が他の前記ベースと回転自在に接続され、他端が前記第3のリンクの他端と回転自在に接続され、
前記第1のリンクと前記第3のリンクがなす角と、前記第2のリンクと前記第3のリンクがなす角とが等しい、
請求項5に記載の基板搬送装置。 - 前記リンク機構は、第1乃至第3のリンクを有し、
前記第1のリンクは、一端が一の前記ベースと回転自在に接続され、他端が前記第3のリンクの一端と回転自在に接続され、
前記第2のリンクは、一端が他の前記ベースと回転自在に接続され、他端が前記第3のリンクの他端と回転自在に接続され、
前記リンクの少なくともいずれかの角度が固定される、
請求項6に記載の基板搬送装置。 - 複数の室と、
前記室を連結する搬送室と、
前記搬送室に設けられる、請求項1乃至請求項8のいずれか1項に記載の基板搬送装置と、
を備える、基板処理システム。 - 前記搬送室は、真空雰囲気の真空搬送室である、
請求項9に記載の基板処理システム。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
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JP2019217076A JP7370233B2 (ja) | 2019-11-29 | 2019-11-29 | 基板搬送装置及び基板処理システム |
TW109139845A TW202131435A (zh) | 2019-11-29 | 2020-11-16 | 基板搬送裝置及基板處理系統 |
PCT/JP2020/043454 WO2021106796A1 (ja) | 2019-11-29 | 2020-11-20 | 基板搬送装置及び基板処理システム |
US17/779,873 US11764092B2 (en) | 2019-11-29 | 2020-11-20 | Substrate transfer apparatus and substrate processing system |
KR1020227020711A KR20220103151A (ko) | 2019-11-29 | 2020-11-20 | 기판 반송 장치 및 기판 처리 시스템 |
CN202080080931.0A CN114730727A (zh) | 2019-11-29 | 2020-11-20 | 基板输送装置和基板处理系统 |
US18/230,929 US20230377927A1 (en) | 2019-11-29 | 2023-08-07 | Substrate transfer apparatus and substrate processing system |
JP2023178977A JP2023184575A (ja) | 2019-11-29 | 2023-10-17 | 基板搬送装置及び基板処理システム |
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JP7370233B2 (ja) * | 2019-11-29 | 2023-10-27 | 東京エレクトロン株式会社 | 基板搬送装置及び基板処理システム |
JP2022107906A (ja) * | 2021-01-12 | 2022-07-25 | 東京エレクトロン株式会社 | 基板搬送装置、基板搬送方法、および基板処理システム |
JP2022133867A (ja) * | 2021-03-02 | 2022-09-14 | 東京エレクトロン株式会社 | 基板搬送装置及び基板処理システム |
DE102021116528A1 (de) | 2021-06-25 | 2022-12-29 | Syntegon Technology Gmbh | Planarantriebsvorrichtung und Verfahren zum Betrieb einer Planarantriebsvorrichtung |
CN113707585A (zh) * | 2021-08-23 | 2021-11-26 | 上海引万光电科技有限公司 | 一种磁悬浮式衬底传送腔及传送方法 |
KR20230052107A (ko) | 2021-10-12 | 2023-04-19 | 세메스 주식회사 | 기판 이송 장치 및 방법 |
JP2023081016A (ja) | 2021-11-30 | 2023-06-09 | 東京エレクトロン株式会社 | 基板搬送装置及び基板搬送方法 |
JP2023139392A (ja) | 2022-03-22 | 2023-10-04 | 東京エレクトロン株式会社 | 基板処理システム |
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US11565402B2 (en) * | 2020-03-09 | 2023-01-31 | Applied Materials, Inc. | Substrate transfer devices, systems and methods of use thereof |
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2019
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JP2005101319A (ja) | 2003-09-25 | 2005-04-14 | Dainippon Screen Mfg Co Ltd | 基板搬送装置、基板回転装置および基板処理装置 |
JP2014087257A (ja) | 2012-10-25 | 2014-05-12 | Nikon Corp | 移動体装置、露光装置、及びデバイス製造方法 |
JP2018504784A (ja) | 2015-01-23 | 2018-02-15 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 半導体処理設備 |
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US20220415688A1 (en) | 2022-12-29 |
KR20220103151A (ko) | 2022-07-21 |
US11764092B2 (en) | 2023-09-19 |
WO2021106796A1 (ja) | 2021-06-03 |
CN114730727A (zh) | 2022-07-08 |
TW202131435A (zh) | 2021-08-16 |
JP2021086986A (ja) | 2021-06-03 |
JP2023184575A (ja) | 2023-12-28 |
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