JP2012042966A - 低ストリエーション極紫外光光学素子 - Google Patents
低ストリエーション極紫外光光学素子 Download PDFInfo
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- JP2012042966A JP2012042966A JP2011205771A JP2011205771A JP2012042966A JP 2012042966 A JP2012042966 A JP 2012042966A JP 2011205771 A JP2011205771 A JP 2011205771A JP 2011205771 A JP2011205771 A JP 2011205771A JP 2012042966 A JP2012042966 A JP 2012042966A
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- glass
- titania
- striation
- extreme ultraviolet
- ppb
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- 230000003287 optical effect Effects 0.000 title abstract description 27
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 76
- 239000011521 glass Substances 0.000 claims abstract description 47
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 42
- 238000001459 lithography Methods 0.000 claims description 12
- 238000001900 extreme ultraviolet lithography Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 14
- 238000000034 method Methods 0.000 description 25
- 239000000377 silicon dioxide Substances 0.000 description 15
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 11
- 239000004071 soot Substances 0.000 description 11
- 229910052719 titanium Inorganic materials 0.000 description 11
- 239000010936 titanium Substances 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 230000007062 hydrolysis Effects 0.000 description 7
- 238000006460 hydrolysis reaction Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 239000002243 precursor Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 2
- 229910052845 zircon Inorganic materials 0.000 description 2
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- HMMGMWAXVFQUOA-UHFFFAOYSA-N octamethylcyclotetrasiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O[Si](C)(C)O1 HMMGMWAXVFQUOA-UHFFFAOYSA-N 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- -1 siloxanes Chemical class 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
- G03F1/24—Reflection masks; Preparation thereof
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1446—Means for after-treatment or catching of worked reactant gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1484—Means for supporting, rotating or translating the article being formed
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/0085—Compositions for glass with special properties for UV-transmitting glass
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/52—Reflectors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
- G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/40—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
- C03B2201/42—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn doped with titanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/60—Relationship between burner and deposit, e.g. position
- C03B2207/62—Distance
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/60—Relationship between burner and deposit, e.g. position
- C03B2207/66—Relative motion
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/30—Doped silica-based glasses containing metals
- C03C2201/40—Doped silica-based glasses containing metals containing transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
- C03C2201/42—Doped silica-based glasses containing metals containing transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn containing titanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2203/00—Production processes
- C03C2203/40—Gas-phase processes
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Nanotechnology (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Glass Compositions (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Glass Melting And Manufacturing (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
【解決手段】研磨され、整形された表面を有し、0.2メガパスカル(MPa)より小さい山対谷ストリエーションレベルを有する、チタニア含有シリカガラスを含み、当該ガラスが、5重量%と10重量%の間のチタニアを含有する。前記ガラスは、20℃と35℃の間で+30ppb/℃から−30ppb/℃の範囲の熱膨張係数(CTE)を有する。
【選択図】なし
Description
11 チタニア含有シリカスート
12 カップ
14 高純度ケイ素含有供給原料
16 炉
18 チタニア−シリカガラス体
20 不活性バブラーガス
22 不活性キャリアガス
24 分配器
26 高純度チタン含有供給原料
28 マニホールド
36 バーナー
37 バーナー炎
Claims (8)
- 極紫外光リソグラフィ用素子において、
研磨され、整形された表面を有し、0.2メガパスカル(MPa)より小さい山対谷ストリエーションレベルを有する、チタニア含有シリカガラスを含み、
当該ガラスが、5重量%と10重量%の間のチタニアを含有することを特徴とするリソグラフィ用素子。 - 前記ガラスが、20℃と35℃の間で+30ppb/℃から−30ppb/℃の範囲の熱膨張係数(CTE)を有することを特徴とする請求項1記載のリソグラフィ用素子。
- 前記ガラスが6重量%と8重量%の間のチタニアを含有し、約20℃と35℃の間で+20ppb/℃から−20ppb/℃の範囲の一様なCTEを有することを特徴とする請求項2に記載のリソグラフィ用素子。
- 5重量%と10重量%の間のチタニアを含有し、0.2メガパスカル(MPa)より小さい山対谷ストリエーションレベルを有するシリカガラスを含むことを特徴とする極紫外光素子を製造するためのガラスブール。
- 前記ガラスブールが、0.04メガパスカル(MPa)より小さいRMSストリエーションレベルを有することを特徴とする請求項4記載のガラスブール。
- 前記チタニアの含有量が、6重量%と8重量%の間にあることを特徴とする請求項4記載のガラスブール。
- 前記ガラスが、20℃と35℃の間で+30ppb/℃から−30ppb/℃の範囲の熱膨張係数(CTE)を有することを特徴とする請求項4記載のガラスブール。
- 20℃と35℃の間で+20ppb/℃から−20ppb/℃の範囲の一様なCTEを有することを特徴とする請求項4に記載のガラスブール。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US36205202P | 2002-03-05 | 2002-03-05 | |
US60/362,052 | 2002-03-05 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007334048A Division JP4887271B2 (ja) | 2002-03-05 | 2007-12-26 | 低ストリエーション極紫外光光学素子 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2012042966A true JP2012042966A (ja) | 2012-03-01 |
Family
ID=27805120
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003575191A Pending JP2005519349A (ja) | 2002-03-05 | 2003-03-04 | 低ストリエーション極紫外光光学素子 |
JP2007334048A Expired - Lifetime JP4887271B2 (ja) | 2002-03-05 | 2007-12-26 | 低ストリエーション極紫外光光学素子 |
JP2011205771A Pending JP2012042966A (ja) | 2002-03-05 | 2011-09-21 | 低ストリエーション極紫外光光学素子 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003575191A Pending JP2005519349A (ja) | 2002-03-05 | 2003-03-04 | 低ストリエーション極紫外光光学素子 |
JP2007334048A Expired - Lifetime JP4887271B2 (ja) | 2002-03-05 | 2007-12-26 | 低ストリエーション極紫外光光学素子 |
Country Status (8)
Country | Link |
---|---|
US (3) | US7053017B2 (ja) |
EP (2) | EP2211232B1 (ja) |
JP (3) | JP2005519349A (ja) |
KR (1) | KR101190914B1 (ja) |
AU (1) | AU2003220982A1 (ja) |
DE (1) | DE60332429D1 (ja) |
TW (1) | TWI247196B (ja) |
WO (1) | WO2003077038A2 (ja) |
Families Citing this family (44)
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US7053017B2 (en) * | 2002-03-05 | 2006-05-30 | Corning Incorporated | Reduced striae extreme ultraviolet elements |
JP4792706B2 (ja) * | 2003-04-03 | 2011-10-12 | 旭硝子株式会社 | TiO2を含有するシリカガラスおよびその製造方法 |
JP5367204B2 (ja) * | 2003-04-03 | 2013-12-11 | 旭硝子株式会社 | TiO2を含有するシリカガラスおよびEUVリソグラフィ用光学部材 |
EP1471038A3 (de) * | 2003-04-26 | 2005-11-23 | Schott Ag | Verfahren zur Herstellung von Glaskörpern aus dotiertem Quarzglas |
US7155936B2 (en) * | 2003-08-08 | 2007-01-02 | Corning Incorporated | Doped silica glass articles and methods of forming doped silica glass boules and articles |
DE10359102A1 (de) | 2003-12-17 | 2005-07-21 | Carl Zeiss Smt Ag | Optische Komponente umfassend ein Material mit einer vorbestimmten Homogenität der thermischen Längsausdehnung |
JP4492123B2 (ja) * | 2004-01-05 | 2010-06-30 | 旭硝子株式会社 | シリカガラス |
JP4537087B2 (ja) * | 2004-02-12 | 2010-09-01 | キヤノン株式会社 | 露光装置、デバイスの製造方法 |
DE102004015766B4 (de) * | 2004-03-23 | 2016-05-12 | Asahi Glass Co., Ltd. | Verwendung eines SiO2-TiO2-Glases als strahlungsresistentes Substrat |
DE102004024808B4 (de) * | 2004-05-17 | 2006-11-09 | Heraeus Quarzglas Gmbh & Co. Kg | Quarzglasrohling für ein optisches Bauteil zur Übertragung extrem kurzwelliger ultravioletter Strahlung |
JP4487783B2 (ja) * | 2005-01-25 | 2010-06-23 | 旭硝子株式会社 | TiO2を含有するシリカガラスの製造方法およびTiO2を含有するシリカガラスを用いたEUVリソグラフィ用光学部材 |
JP4781003B2 (ja) * | 2005-04-28 | 2011-09-28 | 信越石英株式会社 | ナノインプリントスタンパー用シリカ・チタニアガラス |
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US20070263281A1 (en) * | 2005-12-21 | 2007-11-15 | Maxon John E | Reduced striae low expansion glass and elements, and a method for making same |
US20070137252A1 (en) * | 2005-12-21 | 2007-06-21 | Maxon John E | Reduced striae low expansion glass and elements, and a method for making same |
US20070137253A1 (en) * | 2005-12-21 | 2007-06-21 | Beall Lorrie F | Reduced striae low expansion glass and elements, and a method for making same |
US20100154474A1 (en) * | 2005-12-21 | 2010-06-24 | Lorrie Foley Beall | Reduced striae low expansion glass and elements, and a method for making same |
JP2009013048A (ja) | 2007-06-06 | 2009-01-22 | Shin Etsu Chem Co Ltd | ナノインプリントモールド用チタニアドープ石英ガラス |
JP5042714B2 (ja) * | 2007-06-06 | 2012-10-03 | 信越化学工業株式会社 | ナノインプリントモールド用チタニアドープ石英ガラス |
CN101959820A (zh) | 2008-02-26 | 2011-01-26 | 旭硝子株式会社 | 含TiO2的石英玻璃和使用高能量密度的EUV光刻用光学部件以及用于其制造的特别温度控制方法 |
EP2250133A1 (en) * | 2008-02-29 | 2010-11-17 | Asahi Glass Company, Limited | Tio2-containing silica glass and optical member for lithography using the same |
CN101978468B (zh) | 2008-03-18 | 2013-03-20 | 旭硝子株式会社 | Euv光刻用反射型掩模基板及其制造方法 |
JP2010135732A (ja) * | 2008-08-01 | 2010-06-17 | Asahi Glass Co Ltd | Euvマスクブランクス用基板 |
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WO2010134449A1 (ja) | 2009-05-18 | 2010-11-25 | 旭硝子株式会社 | TiO2-SiO2ガラス体の製造方法及び熱処理方法、TiO2-SiO2ガラス体、EUVL用光学基材 |
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US8713969B2 (en) * | 2009-08-31 | 2014-05-06 | Corning Incorporated | Tuning Tzc by the annealing of ultra low expansion glass |
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Also Published As
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EP2211232B1 (en) | 2015-09-02 |
KR101190914B1 (ko) | 2012-10-12 |
JP2005519349A (ja) | 2005-06-30 |
US20040027555A1 (en) | 2004-02-12 |
TW200417822A (en) | 2004-09-16 |
EP1481288B1 (en) | 2010-05-05 |
JP2008182220A (ja) | 2008-08-07 |
WO2003077038A2 (en) | 2003-09-18 |
TWI247196B (en) | 2006-01-11 |
JP4887271B2 (ja) | 2012-02-29 |
AU2003220982A8 (en) | 2003-09-22 |
US20050241338A1 (en) | 2005-11-03 |
US7053017B2 (en) | 2006-05-30 |
EP2211232A1 (en) | 2010-07-28 |
USRE40586E1 (en) | 2008-11-25 |
KR20040089703A (ko) | 2004-10-21 |
EP1481288A2 (en) | 2004-12-01 |
DE60332429D1 (de) | 2010-06-17 |
AU2003220982A1 (en) | 2003-09-22 |
WO2003077038A3 (en) | 2004-03-18 |
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