JP2011510133A5 - - Google Patents

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Publication number
JP2011510133A5
JP2011510133A5 JP2010543104A JP2010543104A JP2011510133A5 JP 2011510133 A5 JP2011510133 A5 JP 2011510133A5 JP 2010543104 A JP2010543104 A JP 2010543104A JP 2010543104 A JP2010543104 A JP 2010543104A JP 2011510133 A5 JP2011510133 A5 JP 2011510133A5
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Japan
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value
group
silsesquioxane resin
antireflective coating
generator
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JP2010543104A
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Japanese (ja)
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JP2011510133A (ja
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Priority claimed from PCT/US2008/083849 external-priority patent/WO2009091440A1/en
Publication of JP2011510133A publication Critical patent/JP2011510133A/ja
Publication of JP2011510133A5 publication Critical patent/JP2011510133A5/ja
Pending legal-status Critical Current

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JP2010543104A 2008-01-15 2008-11-18 シルセスキオキサン樹脂 Pending JP2011510133A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US2109708P 2008-01-15 2008-01-15
PCT/US2008/083849 WO2009091440A1 (en) 2008-01-15 2008-11-18 Silsesquioxane resins

Publications (2)

Publication Number Publication Date
JP2011510133A JP2011510133A (ja) 2011-03-31
JP2011510133A5 true JP2011510133A5 (cg-RX-API-DMAC7.html) 2011-11-24

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JP2010543104A Pending JP2011510133A (ja) 2008-01-15 2008-11-18 シルセスキオキサン樹脂

Country Status (7)

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US (1) US9023433B2 (cg-RX-API-DMAC7.html)
EP (1) EP2238198A4 (cg-RX-API-DMAC7.html)
JP (1) JP2011510133A (cg-RX-API-DMAC7.html)
KR (1) KR20100114075A (cg-RX-API-DMAC7.html)
CN (1) CN101910253B (cg-RX-API-DMAC7.html)
TW (1) TWI437048B (cg-RX-API-DMAC7.html)
WO (1) WO2009091440A1 (cg-RX-API-DMAC7.html)

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