JP2011508619A5 - - Google Patents
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- Publication number
- JP2011508619A5 JP2011508619A5 JP2010538958A JP2010538958A JP2011508619A5 JP 2011508619 A5 JP2011508619 A5 JP 2011508619A5 JP 2010538958 A JP2010538958 A JP 2010538958A JP 2010538958 A JP2010538958 A JP 2010538958A JP 2011508619 A5 JP2011508619 A5 JP 2011508619A5
- Authority
- JP
- Japan
- Prior art keywords
- microneedle
- bridge
- hat
- suspension structure
- structure according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000725 suspension Substances 0.000 claims 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- 235000012239 silicon dioxide Nutrition 0.000 claims 2
- 239000000377 silicon dioxide Substances 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP07123416A EP2072076A1 (en) | 2007-12-17 | 2007-12-17 | Out-of-plane microneedle manufacturing process |
| EP07123416.5 | 2007-12-17 | ||
| PCT/IB2008/054280 WO2009077892A1 (en) | 2007-12-17 | 2008-10-17 | Out-of-plane microneedle manufacturing process |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011508619A JP2011508619A (ja) | 2011-03-17 |
| JP2011508619A5 true JP2011508619A5 (enExample) | 2011-10-13 |
| JP5351173B2 JP5351173B2 (ja) | 2013-11-27 |
Family
ID=39340106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010538958A Expired - Fee Related JP5351173B2 (ja) | 2007-12-17 | 2008-10-17 | 面外極微針の製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (3) | US8999177B2 (enExample) |
| EP (2) | EP2072076A1 (enExample) |
| JP (1) | JP5351173B2 (enExample) |
| WO (1) | WO2009077892A1 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2072076A1 (en) * | 2007-12-17 | 2009-06-24 | Debiotech S.A. | Out-of-plane microneedle manufacturing process |
| BR112014006869A2 (pt) | 2011-09-21 | 2017-04-04 | Bayer Medical Care Inc | dispositivo de bomba de múltiplos fluidos contínuos, sistema de acionamento e atuação e método |
| TWI697593B (zh) * | 2014-10-31 | 2020-07-01 | 美商維克儀器公司 | 用於執行濕蝕刻製程的系統及方法 |
| JP6749918B2 (ja) | 2015-01-09 | 2020-09-02 | バイエル・ヘルスケア・エルエルシーＢａｙｅｒ ＨｅａｌｔｈＣａｒｅ ＬＬＣ | 複数回使用使い捨てセットを有する多流体送達システムおよびその特徴 |
| GB201709668D0 (en) * | 2017-06-16 | 2017-08-02 | Spts Technologies Ltd | Microneedles |
| JP6519632B2 (ja) * | 2017-11-06 | 2019-05-29 | 大日本印刷株式会社 | マイクロニードルデバイス |
| CN111228643A (zh) * | 2020-02-12 | 2020-06-05 | 成都工业学院 | 一种空心微针阵列装置及其制作方法 |
| CN111228642A (zh) * | 2020-02-12 | 2020-06-05 | 成都工业学院 | 一种中空微针阵列装置及制作方法 |
| JP7438529B2 (ja) * | 2020-03-05 | 2024-02-27 | サムコ株式会社 | 上部にテーパ形状を持つ、深堀構造を有するシリコン基板の製造方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3333560B2 (ja) * | 1992-10-23 | 2002-10-15 | リコーエレメックス株式会社 | シリコン基板のエッチング方法 |
| SE0102736D0 (sv) * | 2001-08-14 | 2001-08-14 | Patrick Griss | Side opened out-of-plane microneedles for microfluidic transdermal interfacing and fabrication process of side opened out-of-plane microneedles |
| JP4414774B2 (ja) | 2004-01-16 | 2010-02-10 | 大日本印刷株式会社 | シリコン針の製造方法 |
| EP1669100A1 (en) * | 2004-12-13 | 2006-06-14 | Debiotech S.A. | Micro-needle |
| DE102006031506A1 (de) * | 2006-07-07 | 2008-01-17 | Robert Bosch Gmbh | Verfahren zur Herstellung von Mikronadeln in einem Si-Halbleitersubstrat |
| TW200829215A (en) * | 2007-01-03 | 2008-07-16 | Univ Nat Chiao Tung | Micro probe array and manufacturing method of the trans-print mold thereof |
| EP2072076A1 (en) * | 2007-12-17 | 2009-06-24 | Debiotech S.A. | Out-of-plane microneedle manufacturing process |
-
2007
- 2007-12-17 EP EP07123416A patent/EP2072076A1/en not_active Withdrawn
-
2008
- 2008-10-17 EP EP08862067.9A patent/EP2224993B1/en not_active Not-in-force
- 2008-10-17 WO PCT/IB2008/054280 patent/WO2009077892A1/en not_active Ceased
- 2008-10-17 US US12/808,334 patent/US8999177B2/en not_active Expired - Fee Related
- 2008-10-17 JP JP2010538958A patent/JP5351173B2/ja not_active Expired - Fee Related
-
2012
- 2012-06-22 US US13/507,368 patent/US9266718B2/en not_active Expired - Fee Related
-
2016
- 2016-01-06 US US14/988,769 patent/US9561356B2/en not_active Expired - Fee Related
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