JP2011181764A - 圧電体素子及びその製造方法 - Google Patents

圧電体素子及びその製造方法 Download PDF

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JP2011181764A
JP2011181764A JP2010045669A JP2010045669A JP2011181764A JP 2011181764 A JP2011181764 A JP 2011181764A JP 2010045669 A JP2010045669 A JP 2010045669A JP 2010045669 A JP2010045669 A JP 2010045669A JP 2011181764 A JP2011181764 A JP 2011181764A
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piezoelectric
piezoelectric layer
piezoelectric element
film
element according
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JP2011181764A5 (enExample
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秀樹 ▲桑▼島
Hideki Kuwashima
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TDK Corp
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TDK Corp
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JP2010045669A 2010-03-02 2010-03-02 圧電体素子及びその製造方法 Pending JP2011181764A (ja)

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102815938A (zh) * 2012-08-27 2012-12-12 天津大学 一种钛酸钡基无铅电致伸缩陶瓷及其制备方法
JP2013149922A (ja) * 2012-01-23 2013-08-01 Hitachi Cable Ltd 圧電体素子及び圧電体デバイス
EP2819195A2 (en) 2013-06-28 2014-12-31 Seiko Epson Corporation Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generator
EP2819194A1 (en) 2013-06-28 2014-12-31 Seiko Epson Corporation Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generator
EP2819196A1 (en) 2013-06-28 2014-12-31 Seiko Epson Corporation Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generator
CN105742479A (zh) * 2016-03-03 2016-07-06 天津理工大学 具有压电增强效应的基于bzt-bct的双层铁电薄膜
CN107990973A (zh) * 2016-10-20 2018-05-04 Vega格里沙贝两合公司 具有集成的温度测量的振动传感器
CN109037431A (zh) * 2017-06-09 2018-12-18 精工爱普生株式会社 压电元件以及压电元件应用器件
US10427981B2 (en) 2014-12-26 2019-10-01 Seiko Epson Corporation Piezoelectric material, method of manufacturing the same, piezoelectric element, and piezoelectric element application device
CN111747738A (zh) * 2020-06-19 2020-10-09 西安交通大学 梯度陶瓷压电材料的制备方法及压电材料、压电传感器
JP2023023808A (ja) * 2021-08-06 2023-02-16 Tdk株式会社 圧電薄膜、圧電薄膜素子及び圧電トランスデューサ

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001196652A (ja) * 1999-11-01 2001-07-19 Kansai Research Institute 圧電体素子およびその製造方法ならびにそれを用いたインクジェット式プリンタヘッド
JP2003188429A (ja) * 2001-12-18 2003-07-04 Matsushita Electric Ind Co Ltd 圧電素子、インク吐出素子およびインクジエツト式記録装置
JP2003277143A (ja) * 2002-03-25 2003-10-02 Noritake Co Ltd 圧電セラミックス
JP2007157910A (ja) * 2005-12-02 2007-06-21 Denso Corp 圧電セラミックス、積層圧電セラミック素子及びその製造方法
JP2008004781A (ja) * 2006-06-23 2008-01-10 Fujifilm Corp 圧電膜、圧電素子、インクジェット式記録ヘッド、及びインクジェット式記録装置
JP2008060599A (ja) * 2007-10-22 2008-03-13 Matsushita Electric Ind Co Ltd 強誘電体素子およびそれを用いたアクチュエータ、インクジェットヘッド、インクジェット記録装置、ならびに強誘電体素子の製造方法
JP2009215111A (ja) * 2008-03-11 2009-09-24 National Institute For Materials Science 非鉛系圧電材料
JP2011181720A (ja) * 2010-03-02 2011-09-15 Seiko Epson Corp 圧電素子、液滴吐出ヘッド、および液滴吐出装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001196652A (ja) * 1999-11-01 2001-07-19 Kansai Research Institute 圧電体素子およびその製造方法ならびにそれを用いたインクジェット式プリンタヘッド
JP2003188429A (ja) * 2001-12-18 2003-07-04 Matsushita Electric Ind Co Ltd 圧電素子、インク吐出素子およびインクジエツト式記録装置
JP2003277143A (ja) * 2002-03-25 2003-10-02 Noritake Co Ltd 圧電セラミックス
JP2007157910A (ja) * 2005-12-02 2007-06-21 Denso Corp 圧電セラミックス、積層圧電セラミック素子及びその製造方法
JP2008004781A (ja) * 2006-06-23 2008-01-10 Fujifilm Corp 圧電膜、圧電素子、インクジェット式記録ヘッド、及びインクジェット式記録装置
JP2008060599A (ja) * 2007-10-22 2008-03-13 Matsushita Electric Ind Co Ltd 強誘電体素子およびそれを用いたアクチュエータ、インクジェットヘッド、インクジェット記録装置、ならびに強誘電体素子の製造方法
JP2009215111A (ja) * 2008-03-11 2009-09-24 National Institute For Materials Science 非鉛系圧電材料
JP2011181720A (ja) * 2010-03-02 2011-09-15 Seiko Epson Corp 圧電素子、液滴吐出ヘッド、および液滴吐出装置

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013149922A (ja) * 2012-01-23 2013-08-01 Hitachi Cable Ltd 圧電体素子及び圧電体デバイス
US9293688B2 (en) 2012-01-23 2016-03-22 Sciocs Company Limited Piezoelectric element and piezoelectric device
CN102815938A (zh) * 2012-08-27 2012-12-12 天津大学 一种钛酸钡基无铅电致伸缩陶瓷及其制备方法
EP2819196A1 (en) 2013-06-28 2014-12-31 Seiko Epson Corporation Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generator
KR20150002442A (ko) 2013-06-28 2015-01-07 세이코 엡슨 가부시키가이샤 압전 재료, 압전 소자, 액체 분사 헤드, 액체 분사 장치, 초음파 센서, 압전 모터 및 발전 장치
US9190601B2 (en) 2013-06-28 2015-11-17 Seiko Epson Corporation Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generator
US9276193B2 (en) 2013-06-28 2016-03-01 Seiko Epson Corporation Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generator
EP2819195A2 (en) 2013-06-28 2014-12-31 Seiko Epson Corporation Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generator
US9324933B2 (en) 2013-06-28 2016-04-26 Seiko Epson Corporation Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generator
EP2819194A1 (en) 2013-06-28 2014-12-31 Seiko Epson Corporation Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generator
US10427981B2 (en) 2014-12-26 2019-10-01 Seiko Epson Corporation Piezoelectric material, method of manufacturing the same, piezoelectric element, and piezoelectric element application device
CN105742479A (zh) * 2016-03-03 2016-07-06 天津理工大学 具有压电增强效应的基于bzt-bct的双层铁电薄膜
CN107990973A (zh) * 2016-10-20 2018-05-04 Vega格里沙贝两合公司 具有集成的温度测量的振动传感器
CN109037431A (zh) * 2017-06-09 2018-12-18 精工爱普生株式会社 压电元件以及压电元件应用器件
JP2018207064A (ja) * 2017-06-09 2018-12-27 セイコーエプソン株式会社 圧電素子、及び圧電素子応用デバイス
CN111747738A (zh) * 2020-06-19 2020-10-09 西安交通大学 梯度陶瓷压电材料的制备方法及压电材料、压电传感器
JP2023023808A (ja) * 2021-08-06 2023-02-16 Tdk株式会社 圧電薄膜、圧電薄膜素子及び圧電トランスデューサ
JP7679255B2 (ja) 2021-08-06 2025-05-19 Tdk株式会社 圧電薄膜、圧電薄膜素子及び圧電トランスデューサ

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