JP2011169971A - 光導波路、光集積回路及び光導波路の製造方法 - Google Patents

光導波路、光集積回路及び光導波路の製造方法 Download PDF

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Publication number
JP2011169971A
JP2011169971A JP2010031416A JP2010031416A JP2011169971A JP 2011169971 A JP2011169971 A JP 2011169971A JP 2010031416 A JP2010031416 A JP 2010031416A JP 2010031416 A JP2010031416 A JP 2010031416A JP 2011169971 A JP2011169971 A JP 2011169971A
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JP
Japan
Prior art keywords
optical waveguide
molding material
optical
layer
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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JP2010031416A
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English (en)
Japanese (ja)
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JP2011169971A5 (https=
Inventor
Satohiko Hoshino
聡彦 星野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
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Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2010031416A priority Critical patent/JP2011169971A/ja
Priority to PCT/JP2011/052345 priority patent/WO2011102239A1/ja
Publication of JP2011169971A publication Critical patent/JP2011169971A/ja
Publication of JP2011169971A5 publication Critical patent/JP2011169971A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
JP2010031416A 2010-02-16 2010-02-16 光導波路、光集積回路及び光導波路の製造方法 Pending JP2011169971A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010031416A JP2011169971A (ja) 2010-02-16 2010-02-16 光導波路、光集積回路及び光導波路の製造方法
PCT/JP2011/052345 WO2011102239A1 (ja) 2010-02-16 2011-02-04 光導波路、光集積回路及び光導波路の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010031416A JP2011169971A (ja) 2010-02-16 2010-02-16 光導波路、光集積回路及び光導波路の製造方法

Publications (2)

Publication Number Publication Date
JP2011169971A true JP2011169971A (ja) 2011-09-01
JP2011169971A5 JP2011169971A5 (https=) 2013-03-28

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ID=44482828

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JP2010031416A Pending JP2011169971A (ja) 2010-02-16 2010-02-16 光導波路、光集積回路及び光導波路の製造方法

Country Status (2)

Country Link
JP (1) JP2011169971A (https=)
WO (1) WO2011102239A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016002712A1 (ja) * 2014-07-04 2016-01-07 技術研究組合光電子融合基盤技術研究所 光デバイスの製造方法及び光デバイス

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07128531A (ja) * 1993-09-10 1995-05-19 Nippon Telegr & Teleph Corp <Ntt> 光集積回路およびその作製方法
JP2003222750A (ja) * 2002-01-31 2003-08-08 Toshiba Corp 光デバイスの製造方法
JP2006011274A (ja) * 2004-06-29 2006-01-12 Bridgestone Corp 光導波路の製造方法
JP2007010760A (ja) * 2005-06-28 2007-01-18 Sumitomo Electric Ind Ltd 樹脂体を形成する方法、光導波路のための構造を形成する方法、および光学部品を形成する方法
JP2007223169A (ja) * 2006-02-23 2007-09-06 Fujifilm Corp 樹脂成形品の製造方法、並びにインクジェットヘッドの製造方法及びそれにより得られるインクジェットヘッド
JP2008016444A (ja) * 2006-06-09 2008-01-24 Semiconductor Energy Lab Co Ltd 半導体装置の作製方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07128531A (ja) * 1993-09-10 1995-05-19 Nippon Telegr & Teleph Corp <Ntt> 光集積回路およびその作製方法
JP2003222750A (ja) * 2002-01-31 2003-08-08 Toshiba Corp 光デバイスの製造方法
JP2006011274A (ja) * 2004-06-29 2006-01-12 Bridgestone Corp 光導波路の製造方法
JP2007010760A (ja) * 2005-06-28 2007-01-18 Sumitomo Electric Ind Ltd 樹脂体を形成する方法、光導波路のための構造を形成する方法、および光学部品を形成する方法
JP2007223169A (ja) * 2006-02-23 2007-09-06 Fujifilm Corp 樹脂成形品の製造方法、並びにインクジェットヘッドの製造方法及びそれにより得られるインクジェットヘッド
JP2008016444A (ja) * 2006-06-09 2008-01-24 Semiconductor Energy Lab Co Ltd 半導体装置の作製方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016002712A1 (ja) * 2014-07-04 2016-01-07 技術研究組合光電子融合基盤技術研究所 光デバイスの製造方法及び光デバイス
JPWO2016002712A1 (ja) * 2014-07-04 2017-04-27 技術研究組合光電子融合基盤技術研究所 光デバイスの製造方法及び光デバイス

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Publication number Publication date
WO2011102239A1 (ja) 2011-08-25

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