JP2011155266A5 - - Google Patents
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- Publication number
- JP2011155266A5 JP2011155266A5 JP2011032065A JP2011032065A JP2011155266A5 JP 2011155266 A5 JP2011155266 A5 JP 2011155266A5 JP 2011032065 A JP2011032065 A JP 2011032065A JP 2011032065 A JP2011032065 A JP 2011032065A JP 2011155266 A5 JP2011155266 A5 JP 2011155266A5
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- well
- applying
- memory cells
- dielectric layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 16
- 230000004888 barrier function Effects 0.000 claims 3
- 230000005641 tunneling Effects 0.000 claims 3
- 238000002347 injection Methods 0.000 claims 2
- 239000007924 injection Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000002784 hot electron Substances 0.000 claims 1
- 239000007943 implant Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US64701205P | 2005-01-27 | 2005-01-27 | |
| US60/647012 | 2005-01-27 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006000964A Division JP5376414B2 (ja) | 2005-01-27 | 2006-01-05 | メモリアレイの操作方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011155266A JP2011155266A (ja) | 2011-08-11 |
| JP2011155266A5 true JP2011155266A5 (enExample) | 2012-05-31 |
| JP5712420B2 JP5712420B2 (ja) | 2015-05-07 |
Family
ID=36979295
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006000964A Active JP5376414B2 (ja) | 2005-01-27 | 2006-01-05 | メモリアレイの操作方法 |
| JP2011032065A Active JP5712420B2 (ja) | 2005-01-27 | 2011-02-17 | 不揮発性メモリセル、これを有するメモリアレイ、並びに、セル及びアレイの操作方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006000964A Active JP5376414B2 (ja) | 2005-01-27 | 2006-01-05 | メモリアレイの操作方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JP5376414B2 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7811890B2 (en) | 2006-10-11 | 2010-10-12 | Macronix International Co., Ltd. | Vertical channel transistor structure and manufacturing method thereof |
| US8772858B2 (en) * | 2006-10-11 | 2014-07-08 | Macronix International Co., Ltd. | Vertical channel memory and manufacturing method thereof and operating method using the same |
| US7851848B2 (en) * | 2006-11-01 | 2010-12-14 | Macronix International Co., Ltd. | Cylindrical channel charge trapping devices with effectively high coupling ratios |
| US7619919B2 (en) * | 2007-01-12 | 2009-11-17 | Marvell World Trade Ltd. | Multi-level memory |
| TWI374448B (en) * | 2007-08-13 | 2012-10-11 | Macronix Int Co Ltd | Charge trapping memory cell with high speed erase |
| US7816727B2 (en) * | 2007-08-27 | 2010-10-19 | Macronix International Co., Ltd. | High-κ capped blocking dielectric bandgap engineered SONOS and MONOS |
| EP2063459A1 (en) * | 2007-11-22 | 2009-05-27 | Interuniversitair Microelektronica Centrum vzw | Interpoly dielectric for a non-volatile memory device with a metal or p-type control gate |
| JP2009163782A (ja) | 2007-12-13 | 2009-07-23 | Toshiba Corp | 半導体記憶装置 |
| US7995392B2 (en) | 2007-12-13 | 2011-08-09 | Kabushiki Kaisha Toshiba | Semiconductor memory device capable of shortening erase time |
| US8068370B2 (en) * | 2008-04-18 | 2011-11-29 | Macronix International Co., Ltd. | Floating gate memory device with interpoly charge trapping structure |
| JP5443873B2 (ja) | 2008-07-28 | 2014-03-19 | 株式会社東芝 | 半導体装置及びその製造方法 |
| US8254175B2 (en) | 2008-12-16 | 2012-08-28 | Kabushiki Kaisha Toshiba | Semiconductor device and method of manufacturing the same |
| JP2011071334A (ja) * | 2009-09-25 | 2011-04-07 | Toshiba Corp | 不揮発性半導体記憶装置 |
| TWI473253B (zh) | 2010-04-07 | 2015-02-11 | Macronix Int Co Ltd | 具有連續電荷儲存介電堆疊的非揮發記憶陣列 |
| JP5865214B2 (ja) | 2012-09-06 | 2016-02-17 | 株式会社東芝 | 半導体装置及びその製造方法 |
| JP7038607B2 (ja) * | 2018-06-08 | 2022-03-18 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01152672A (ja) * | 1987-12-09 | 1989-06-15 | Sharp Corp | 不揮発性半導体記憶装置 |
| JPH0536991A (ja) * | 1991-07-31 | 1993-02-12 | Nippon Steel Corp | 半導体記憶装置 |
| JP3061924B2 (ja) * | 1992-03-02 | 2000-07-10 | 日本電気株式会社 | 不揮発性記憶装置の消去方法 |
| JPH06291332A (ja) * | 1993-04-06 | 1994-10-18 | Nippon Steel Corp | 半導体記憶装置及びその使用方法 |
| JPH0992738A (ja) * | 1995-09-28 | 1997-04-04 | Toshiba Corp | 半導体装置およびその製造方法 |
| US6002610A (en) * | 1998-04-30 | 1999-12-14 | Lucent Technologies Inc. | Non-volatile memory element for programmable logic applications and operational methods therefor |
| JP2000216271A (ja) * | 1999-01-22 | 2000-08-04 | Sony Corp | 不揮発性半導体記憶装置 |
| JP4040534B2 (ja) * | 2003-06-04 | 2008-01-30 | 株式会社東芝 | 半導体記憶装置 |
-
2006
- 2006-01-05 JP JP2006000964A patent/JP5376414B2/ja active Active
-
2011
- 2011-02-17 JP JP2011032065A patent/JP5712420B2/ja active Active
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