JP2011135042A - 熱硬化型接着フィルム、ダイシングフィルム付き接着フィルム、及び、該熱硬化型接着フィルム又は該ダイシングフィルム付き接着フィルムを用いた半導体装置の製造方法 - Google Patents
熱硬化型接着フィルム、ダイシングフィルム付き接着フィルム、及び、該熱硬化型接着フィルム又は該ダイシングフィルム付き接着フィルムを用いた半導体装置の製造方法 Download PDFInfo
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- JP2011135042A JP2011135042A JP2010224088A JP2010224088A JP2011135042A JP 2011135042 A JP2011135042 A JP 2011135042A JP 2010224088 A JP2010224088 A JP 2010224088A JP 2010224088 A JP2010224088 A JP 2010224088A JP 2011135042 A JP2011135042 A JP 2011135042A
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Abstract
【解決手段】半導体装置の製造の際に用いる熱硬化型接着フィルム3であって、熱硬化後における260℃での引張貯蔵弾性率が2×105〜5×107Paであり、充填材の含有量が熱硬化型接着フィルム全体に対して0.1重量%以下であり、厚みが1〜10μmである熱硬化型接着フィルム。
【選択図】図1
Description
本発明の一実施形態に係るダイシングフィルム付き接着フィルムについて、以下に説明する。図1は、本発明の一実施形態に係るダイシングフィルム付き接着フィルムを示す断面模式図である。図2は、本発明の他の実施形態に係る他のダイシングフィルム付き接着フィルムを示す断面模式図である。
(灰分率(重量%))=(灰化後の重量)/(灰化前の重量)×100
先ず、基材1は、従来公知の製膜方法により製膜することができる。当該製膜方法としては、例えばカレンダー製膜法、有機溶媒中でのキャスティング法、密閉系でのインフレーション押出法、Tダイ押出法、共押出し法、ドライラミネート法等が例示できる。
先ず、ダイシングフィルム付き接着フィルム3、3’の形成材料である接着剤組成物溶液を作製する。当該接着剤組成物溶液には、前述の通り、前記接着剤組成物や各種の添加剤等が配合されている。
本発明のダイシングフィルム付き接着フィルム10、12は、接着フィルム3、3’上に任意に設けられたセパレータを適宜に剥離して、次の様に使用される。以下では、図3を参照しながらダイシングフィルム付き接着フィルム10を用いた場合を例にして説明する。
このとき、ダイボンド温度は、80〜150℃であることが好ましく、85〜140℃であることがより好ましく、90〜130℃であることがさらに好ましい。80℃以上とすることにより、接着フィルム3の引張貯蔵弾性率が高くなりすぎるのを防止し、好適に接着可能とすることができる。また、150℃以下とすることにより、ダイボンド後の反りの発生を防止し、破損を発生し難くすることができる。
また、ダイボンド圧力は、0.05MPa〜5MPaであることが好ましく、0.06MPa〜4.5MPaであることがより好ましく、0.07MPa〜4MPaであることがさらに好ましい。0.05MPa以上とすることにより、接着にムラが発生することを防止することができる。また、5MPa以下とすることにより、圧力による半導体チップ5の破損を発生し難くすることができる。
また、前記ダイボンド圧力を印加するダイボンド時間は、0.1〜5秒であることが好ましく、0.15〜4.5秒であることがより好ましく、0.2〜4秒であることがさらに好ましい。0.1秒以上とすることにより、圧力を均一にかけることができ、接着にムラが発生することを防止することができる。また、5秒以下とすることにより、歩留りを向上させることができる。
被着体6としては、リードフレーム、TABフィルム、基板又は別途作製した半導体チップ等が挙げられる。被着体6は、例えば、容易に変形されるような変形型被着体であってもよく、変形することが困難である非変形型被着体(半導体ウェハ等)であってもよい。
下記(a)〜(c)をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。
(a)エポキシ樹脂(日本化薬(株)製、EPPN501HY) 283重量部
(b)フェノール樹脂(明和化成(株)製、MEH7851) 283重量部
(c)アクリル樹脂(ナガセケムテックス(株)製、テイサンレジンSG−70L、ガラス転移温度:−13℃) 100重量部
下記(a)〜(c)をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。
(a)エポキシ樹脂(日本化薬(株)製、EPPN501HY) 200重量部
(b)フェノール樹脂(明和化成(株)製、MEH7851) 200重量部
(c)アクリル樹脂(ナガセケムテックス(株)製、テイサンレジンSG−P3、ガラス転移温度:12℃) 100重量部
下記(a)〜(c)をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。
(a)エポキシ樹脂(日本化薬(株)製、EPPN501HY) 50重量部
(b)フェノール樹脂(明和化成(株)製、MEH7851) 50重量部
(c)アクリル樹脂(根上工業(株)製、パラクロンW−248、ガラス転移温度:7℃)
100重量部
下記(a)〜(d)をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。
(a)エポキシ樹脂(日本化薬(株)製、EPPN501HY) 21重量部
(b)フェノール樹脂(明和化成(株)製、MEH7851) 21重量部
(c)アクリル樹脂(根上工業(株)製、パラクロンW−248、ガラス転移温度:7℃)
100重量部
(d)架橋剤(日本ポリウレタン工業(株)製、コロネートL) 15重量部
下記(a)〜(d)をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。
(a)エポキシ樹脂(日本化薬(株)製、EPPN501HY) 12.5重量部
(b)フェノール樹脂(明和化成(株)製、MEH7851) 12.5重量部
(c)アクリル樹脂1(ナガセケムテックス(株)製、テイサンレジンSG−P3、ガラス転移温度:12℃) 50重量部
(d)アクリル樹脂2(ナガセケムテックス(株)製、テイサンレジンSG−70L、ガラス転移温度:−13℃) 50重量部
下記(a)〜(c)をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。
(a)エポキシ樹脂(日本化薬(株)製、EPPN501HY) 1重量部
(b)フェノール樹脂(明和化成(株)製、MEH7851) 1重量部
(c)アクリル樹脂(東亜合成(株)製、アロンタックS−2060、ガラス転移温度:−22℃) 100重量部
下記(a)〜(c)をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。
(a)エポキシ樹脂(日本化薬(株)製、EPPN501HY) 50重量部
(b)フェノール樹脂(明和化成(株)製、MEH7851) 50重量部
(c)アクリル樹脂(根上工業(株)製、パラクロンW−197C、ガラス転移温度:18℃) 1重量部
下記(a)〜(d)をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。
(a)エポキシ樹脂(日本化薬(株)製、EPPN501HY) 283重量部
(b)フェノール樹脂(明和化成(株)製、MEH7851) 283重量部
(c)アクリル樹脂(ナガセケムテックス(株)製、テイサンレジンSG−70L、ガラス転移温度:−13℃) 100重量部
(d)球状シリカ(アドマテックス(株)製、SO−E2) 10重量部
下記(a)〜(d)をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。
(a)エポキシ樹脂(日本化薬(株)製、EPPN501HY) 200重量部
(b)フェノール樹脂(明和化成(株)製、MEH7851) 200重量部
(c)アクリル樹脂(東亜合成(株)製、アロンタックS−2060、ガラス転移温度:−22℃) 100重量部
(d)球状シリカ(アドマテックス(株)製、SO−E2) 50重量部
下記(a)〜(d)をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。
(a)エポキシ樹脂(日本化薬(株)製、EPPN501HY) 4950重量部
(b)フェノール樹脂(明和化成(株)製、MEH7851) 4950重量部
(c)アクリル樹脂(根上工業(株)製、パラクロンW−248、ガラス転移温度:7℃)
100重量部
(d)球状シリカ(アドマテックス(株)製、SO−E2) 25重量部
下記(a)〜(d)をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。
(a)エポキシ樹脂(日本化薬(株)製、EPPN501HY) 2450重量部
(b)フェノール樹脂(明和化成(株)製、MEH7851) 2450重量部
(c)アクリル樹脂(根上工業(株)製、パラクロンW−248、ガラス転移温度:7℃)
100重量部
(d)球状シリカ(アドマテックス(株)製、SO−E2) 25重量部
下記(a)〜(d)をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。
(a)エポキシ樹脂(日本化薬(株)製、EPPN501HY) 12.5重量部
(b)フェノール樹脂(明和化成(株)製、MEH7851) 12.5重量部
(c)アクリル樹脂(ナガセケムテックス(株)製、テイサンレジンSG−P3、ガラス転移温度:12℃) 100重量部
(d)球状シリカ(アドマテックス(株)製、SO−E2) 10重量部
下記(a)〜(d)をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。
(a)エポキシ樹脂(日本化薬(株)製、EPPN501HY) 6重量部
(b)フェノール樹脂(明和化成(株)製、MEH7851) 6重量部
(c)アクリル樹脂(根上工業(株)製、パラクロンW−248、ガラス転移温度:7℃)
100重量部
(d)球状シリカ(アドマテックス(株)製、SO−E2) 70重量部
下記(a)〜(d)をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。
(a)エポキシ樹脂(日本化薬(株)製、EPPN501HY) 2.6重量部
(b)フェノール樹脂(明和化成(株)製、MEH7851) 2.6重量部
(c)アクリル樹脂(東亜合成(株)製、アロンタックS−2060、ガラス転移温度:−22℃) 100重量部
(d)球状シリカ(アドマテックス(株)製、SO−E2) 20重量部
本実施例1−2においては、厚さ5μmに変更したこと以外は、前記実施例1−1と同様にして、本実施例に係る接着フィルムを作製した。
本実施例2−2においては、厚さ5μmに変更したこと以外は、前記実施例2−1と同様にして、本実施例に係る接着フィルムを作製した。
本実施例3−2においては、厚さ5μmに変更したこと以外は、前記実施例3−1と同様にして、本実施例に係る接着フィルムを作製した。
本実施例4−2においては、厚さ5μmに変更したこと以外は、前記実施例4−1と同様にして、本実施例に係る接着フィルムを作製した。
本実施例5−2においては、厚さ5μmに変更したこと以外は、前記実施例5−1と同様にして、本実施例に係る接着フィルムを作製した。
本比較例1−2においては、厚さ5μmに変更したこと以外は、前記比較例1−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例2−2においては、厚さ5μmに変更したこと以外は、前記比較例2−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例3−2においては、厚さ5μmに変更したこと以外は、前記比較例3−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例4−2においては、厚さ5μmに変更したこと以外は、前記比較例4−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例5−2においては、厚さ5μmに変更したこと以外は、前記比較例5−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例6−2においては、厚さ5μmに変更したこと以外は、前記比較例6−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例7−2においては、厚さ5μmに変更したこと以外は、前記比較例7−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例8−2においては、厚さ5μmに変更したこと以外は、前記比較例8−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例9−2においては、厚さ5μmに変更したこと以外は、前記比較例9−1と同様にして、本比較例に係る接着フィルムを作製した。
本実施例1−3においては、厚さ10μmに変更したこと以外は、前記実施例1−1と同様にして、本実施例に係る接着フィルムを作製した。
本実施例2−3においては、厚さ10μmに変更したこと以外は、前記実施例2−1と同様にして、本実施例に係る接着フィルムを作製した。
本実施例3−3においては、厚さ10μmに変更したこと以外は、前記実施例3−1と同様にして、本実施例に係る接着フィルムを作製した。
本実施例4−3においては、厚さ10μmに変更したこと以外は、前記実施例4−1と同様にして、本実施例に係る接着フィルムを作製した。
本実施例5−3においては、厚さ10μmに変更したこと以外は、前記実施例5−1と同様にして、本実施例に係る接着フィルムを作製した。
本比較例1−3においては、厚さ10μmに変更したこと以外は、前記比較例1−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例2−3においては、厚さ10μmに変更したこと以外は、前記比較例2−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例3−3においては、厚さ10μmに変更したこと以外は、前記比較例3−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例4−3においては、厚さ10μmに変更したこと以外は、前記比較例4−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例5−3においては、厚さ10μmに変更したこと以外は、前記比較例5−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例6−3においては、厚さ10μmに変更したこと以外は、前記比較例6−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例7−3においては、厚さ10μmに変更したこと以外は、前記比較例7−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例8−3においては、厚さ10μmに変更したこと以外は、前記比較例8−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例9−3においては、厚さ10μmに変更したこと以外は、前記比較例9−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例1−4においては、厚さ25μmに変更したこと以外は、前記実施例1−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例2−4においては、厚さ25μmに変更したこと以外は、前記実施例2−1と同様にして、本比較例に係る接着フィルムを作製した。
本比較例3−4においては、厚さ25μmに変更したこと以外は、前記比較例3−1と同様にして、本比較例に係る接着フィルムを作製した。
得られた接着フィルムについて、40℃の条件下で厚さ100μmになるまで重ね合わせた後、175℃、5時間の条件下で熱硬化させた。その後、それぞれ幅10mmの短冊状の測定片となる様に切断した。次に、固定粘弾性測定装置(RSA‐III、レオメトリックサイエンティフィック社製)を用いて、−30〜280℃での引張貯蔵弾性率を周波数10Hz、昇温速度5℃/分の条件下にて測定した。その際の260℃における測定値を表1〜7に示す。
得られた接着フィルムについて、40℃の条件下で厚さ100μmになるまで重ねあわせた後、幅10mmの短冊状の測定片となる様に切断した。次に、固定粘弾性測定装置(RSA‐III、レオメトリックサイエンティフィック社製)を用いて、−30〜280℃での損失正接(tanδ)を周波数10Hz、昇温速度5℃/分の条件下にて測定した。その際のtanδのピーク値により得られたガラス転移温度を表1〜4に示す。
得られた接着フィルムについて、40℃の条件下で、10mm角、厚さ50μmの半導体チップに貼り付けた。次に、接着フィルムを介して半導体チップをソルダーレジスト付き樹脂基板(ガラスエポキシ系基板、基板厚さ0.23mm)にマウントした。その際の条件は、120℃、0.2MPa、1秒とした。次に、半導体チップがマウントされた前記樹脂基板を、乾燥機にて175℃、5時間熱処理し、接着フィルムを熱硬化させた。続いて、前記樹脂基板が下側になるように平板上に載置し、半導体チップの対角線上の凹凸を測定した。これにより、平板上から浮いている半導体チップの高さ、すなわち、反り量(μm)を測定した。測定に際しては、半導体チップの対角線上における両端部が平衡となるように補正した(0にした)。測定は、表面粗さ計(Vecco社製、DEKTAK8)を用いて、測定速度1.5mm/秒、加重1gの条件下で行った。測定の結果、反り量が100μmより大きいものを×、100μm以下を○と判定した。結果を表1〜7に示す。
得られた接着フィルムについて、40℃の条件下で、5mm角、厚さ500μmの半導体チップに貼り付けた。次に、接着フィルム付き半導体チップを120℃、0.1MPa、1秒のダイボンド条件でシリコン基板にマウントした。その後、175℃におけるせん断接着力を測定した。結果を表1〜7に示す。
JIS B0601に基づき、表面粗さ測定を、Veeco社製の非接触三次元粗さ測定装置(NT3300)を用いて行った。測定結果は、測定データを50倍の条件でメジアンフィルター(Median filter)にかけて処理することにより得た。結果を表1〜7に示す。
得られた接着フィルムについて、40℃の条件下で厚さ100μmになるまで重ねあわせた後、それぞれ幅10mmの短冊状の測定片となる様に切断した。次に、固定粘弾性測定装置(RSA‐III、レオメトリックサイエンティフィック社製)を用いて、−30〜280℃での引張貯蔵弾性率を周波数10Hz、昇温速度5℃/分の条件下にて測定した。その際の120℃における引張貯蔵弾性率の値を表1〜7に示す。
まず、ダイシングフィルム(日東電工(株)製、DU−300)に紫外線照射装置(日東精機株式会社製、UM−810)を用いて、紫外線照射した。このとき、紫外線照射積算光量は、300mJ/cm2とした。
次に、得られた接着フィルムに、紫外線照射した前記ダイシングフィルムを40℃にて貼り合わせ、その後20×20mmに切断した。次に、引張試験機
((株)島津製作所製、商品名;AGS−J)を用いて、ピール角度180°、剥離速度300mm/分で接着フィルムをダイシングフィルムから引き剥がした際の力を読み取った。結果を表1〜7に示す。
得られた接着フィルムのそれぞれに、ダイシングフィルムを貼り合わせ、ダイシングフィルム付き接着フィルムとした。ダイシングフィルムは、日東電工社製、DU−300を用いた。次に、ダイシングフィルム付き接着フィルムのそれぞれに、半導体ウェハ(厚さ30μm)を貼り合わせ、ダイシングフィルムの保持下で10mm角にダイシングした。続いて、基材を延伸して半導体チップを接着フィルムとともに剥離し、これを120℃、0.1MPa、1秒の条件下でリードフレームに接着した。これをそれぞれ20チップ実施し、ダイボンド時の圧力により破損が生じたチップ数をカウントした。カウントの結果、破損数が0のものを○、破損数が1以上のものを×と判定した。結果を表1〜7に示す。
得られた接着フィルムをそれぞれ40℃の条件下で5mm角の半導体チップに貼り付け、剥離ライナーを剥がした後、120℃、0.1MPa、1秒の条件下でリードフレームにマウントし、封止樹脂(GE−100、日東電工社製)を用いて封止した。樹脂封止条件は、加熱温度175℃、加熱時間3分とした。その後、175℃にて5時間の後硬化工程を行った。このような試料を、接着フィルムについてそれぞれ9個作成した。次に、60℃、80%RHの雰囲気下で168時間放置した。その後、260℃以上の温度を10秒保持するように温度設定したIRリフロー炉に通過させ、超音波顕微鏡にて半導体チップとリードフレームとの界面に剥離が発生しているか否かを観察した。観察の結果、剥離が生じている個数が0個であれば○、1個以上であれば×として評価した。なお、このハンダリフロー性試験は、リードフレームにマウント後に破損の確認がされなかった半導体チップを用いて行った。結果を表1〜7に示す。
下記表1〜7の結果から分かる通り、実施例のように、熱硬化後における260℃での引張貯蔵弾性率が2×105〜5×107Paであり、充填材が含有されておらず、厚みが1〜10μmの接着フィルムであると、ボンディング時の圧力により半導体チップが破損することはなく、熱硬化時に半導体チップが反ることもなかった。また、ハンダリフロー性にも優れていた。
2 粘着剤層
3、3’ 接着フィルム(熱硬化型接着フィルム)
4 半導体ウェハ
5 半導体チップ
6 被着体
7 ボンディングワイヤー
8 封止樹脂
10、12 ダイシングフィルム付き接着フィルム
11 ダイシングフィルム
Claims (11)
- 半導体装置の製造の際に用いる熱硬化型接着フィルムであって、
熱硬化後における260℃での引張貯蔵弾性率が2×105〜5×107Paであり、
充填材の含有量が熱硬化型接着フィルム全体に対して0.1重量%以下であり、
厚みが1〜10μmであることを特徴とする熱硬化型接着フィルム。 - 熱硬化前のガラス転移温度が15〜50℃であることを特徴とする請求項1に記載の熱硬化型接着フィルム。
- アクリル樹脂を含み、該アクリル樹脂のガラス転移温度が−15〜15℃であることを特徴とする請求項1又は2に記載の熱硬化型接着フィルム。
- エポキシ樹脂、フェノール樹脂、及び、アクリル樹脂を含有し、
前記エポキシ樹脂と前記フェノール樹脂と前記アクリル樹脂との合計重量をAとし、前記アクリル樹脂の重量をBとしたとき、B/(A+B)が0.15〜0.95であることを特徴とする請求項1〜3のいずれか1に記載の熱硬化型接着フィルム。 - 熱硬化後の反り量が100μm以下であることを特徴とする請求項1〜4のいずれか1に記載の熱硬化型接着フィルム。
- 熱硬化前のシリコン基板に対するせん断接着力が175℃の条件下において0.04MPa〜2MPaであることを特徴とする請求項1〜5のいずれか1に記載の熱硬化型接着フィルム。
- 熱硬化前の表面粗さが50nm以下であることを特徴とする請求項1〜6のいずれか1に記載の熱硬化型接着フィルム。
- 熱硬化前の120℃における引張貯蔵弾性率が1×104〜2.5×106Paであることを特徴とする請求項1〜7のいずれか1に記載の熱硬化型接着フィルム。
- 請求項1〜8のいずれか1に記載の熱硬化型接着フィルムが、ダイシングフィルム上に積層されていることを特徴とするダイシングフィルム付き接着フィルム。
- 前記熱硬化型接着フィルムの前記ダイシングフィルムからの剥離力が0.005〜0.2N/20mmであることを特徴とする請求項9に記載のダイシングフィルム付き接着フィルム。
- 請求項1〜8のいずれか1に記載の熱硬化型接着フィルム、若しくは、請求項9又は10に記載のダイシングフィルム付き接着フィルムを用いた半導体装置の製造方法であって、
半導体チップを熱硬化型接着フィルムを介して被着体にダイボンドするダイボンド工程におけるダイボンド温度が80〜150℃、ダイボンド圧力が0.05MPa〜5MPa、ダイボンド時間が0.1〜5秒であることを特徴とする半導体装置の製造方法。
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KR101753158B1 (ko) * | 2016-04-28 | 2017-08-09 | (주)이녹스첨단소재 | 비전도성 접착필름용 조성물 및 이를 포함하는 비전도성 접착필름 |
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- 2010-11-18 US US12/948,992 patent/US20110120614A1/en not_active Abandoned
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Also Published As
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CN102153956B (zh) | 2016-06-01 |
TWI477573B (zh) | 2015-03-21 |
TW201402757A (zh) | 2014-01-16 |
US20110120614A1 (en) | 2011-05-26 |
CN102153956A (zh) | 2011-08-17 |
JP5632695B2 (ja) | 2014-11-26 |
KR101048898B1 (ko) | 2011-07-12 |
KR20110058722A (ko) | 2011-06-01 |
TW201120178A (en) | 2011-06-16 |
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