JP2011114312A - 薄膜コンデンサ - Google Patents
薄膜コンデンサ Download PDFInfo
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- JP2011114312A JP2011114312A JP2009271987A JP2009271987A JP2011114312A JP 2011114312 A JP2011114312 A JP 2011114312A JP 2009271987 A JP2009271987 A JP 2009271987A JP 2009271987 A JP2009271987 A JP 2009271987A JP 2011114312 A JP2011114312 A JP 2011114312A
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- 239000003990 capacitor Substances 0.000 title claims abstract description 62
- 239000010409 thin film Substances 0.000 title claims abstract description 62
- 230000000149 penetrating effect Effects 0.000 claims abstract description 6
- 238000004299 exfoliation Methods 0.000 abstract 2
- 238000003475 lamination Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 143
- 239000010408 film Substances 0.000 description 45
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 27
- 238000010304 firing Methods 0.000 description 19
- 238000000034 method Methods 0.000 description 18
- 206010040844 Skin exfoliation Diseases 0.000 description 16
- 239000000463 material Substances 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 11
- 238000004544 sputter deposition Methods 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 10
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 10
- 239000011651 chromium Substances 0.000 description 9
- 239000011241 protective layer Substances 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 7
- 239000000654 additive Substances 0.000 description 7
- 230000000996 additive effect Effects 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 239000010936 titanium Substances 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 238000005336 cracking Methods 0.000 description 6
- 239000003989 dielectric material Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000011888 foil Substances 0.000 description 6
- 239000011777 magnesium Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 230000036961 partial effect Effects 0.000 description 6
- 229910052721 tungsten Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 239000013039 cover film Substances 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 239000011572 manganese Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000010955 niobium Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 239000010948 rhodium Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 229910052715 tantalum Inorganic materials 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910052797 bismuth Inorganic materials 0.000 description 3
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910052741 iridium Inorganic materials 0.000 description 3
- 229910052748 manganese Inorganic materials 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 229910052762 osmium Inorganic materials 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 229910052702 rhenium Inorganic materials 0.000 description 3
- 229910052703 rhodium Inorganic materials 0.000 description 3
- 229910052707 ruthenium Inorganic materials 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- 229910000906 Bronze Inorganic materials 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- 229910052792 caesium Inorganic materials 0.000 description 2
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 2
- 238000000224 chemical solution deposition Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 2
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 2
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/33—Thin- or thick-film capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/012—Form of non-self-supporting electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/20—Dielectrics using combinations of dielectrics from more than one of groups H01G4/02 - H01G4/06
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Ceramic Capacitors (AREA)
Abstract
【解決手段】本実施形態に係る薄膜コンデンサ100では、Niを主成分とする内部電極3,5,7,9が積層方向に貫通する貫通孔Hを有すると共に、この貫通孔Hの少なくとも一部の面積が0.19〜7.0μm2であって、且つ主面に対する貫通孔Hの面積の割合が0.05〜5%の範囲である内部電極3,5,7,9の主面全体の面積に対する貫通孔Hの面積が上記の範囲であることによって、内部電極3,5,7,9と誘電体層2,4,6,8,10との界面での剥離やクラックの発生が抑制され、この結果、歩留まりが向上される。
【選択図】図1
Description
実施例1として、図1に示す薄膜コンデンサ100を以下の方法により作製した。まず、図3に示すように、50μm厚のNi箔の表面を鏡面状に研磨して下地電極1とした。次に、BaTiO3をターゲットとしたスパッタリングによって、研磨されたNi箔の表面に誘電体膜2aとなるBaTiO3膜を成膜した。なお、誘電体膜2aの形成時のスパッタリングでは、Ni箔の温度を250℃に保持した。BaTiO3膜の厚さは300nmとした。
積層体100Aの焼成時の条件(焼成温度、酸素分圧)、内部電極3,5,7,9及び上部電極11の組成、内部電極3,5,7,9及び上部電極11形成時のガス圧、内部電極3,5,7,9及び上部電極11の膜厚、の少なくとも一つを変更した以外は、実施例1と同様の方法によって、実施例2〜11に係る薄膜コンデンサ100を作製した。
積層体100Aの焼成時の条件(焼成温度、酸素分圧)、内部電極3,5,7,9及び上部電極11の組成、内部電極3,5,7,9及び上部電極11形成時のガス圧、内部電極3,5,7,9及び上部電極11の膜厚、の少なくとも一つを変更した以外は、実施例1と同様の方法によって、比較例1〜9に係る薄膜コンデンサ100を作製した。なお、比較例5では、内部電極3,5,7,9及び上部電極11をスパッタリングではなく蒸着法を用いて形成した。
上記の実施例1〜11及び比較例1〜9に係る薄膜コンデンサの歩留まりと、焼成後の積層体における貫通孔の面積、真円に換算した場合の貫通孔の孔径、主面0.01mm2あたりの貫通孔の個数、及び最上位の電極である上部電極の主面における貫通孔の面積の割合を表2に示す。なお、実施例10では、貫通孔が中空ではなく、上下の誘電体層が貫通孔の内部に入り込んでいることが確認された。また、実施例11では、上部電極において、面積が大きな貫通孔と面積が小さな貫通孔とが混在していたため、面積が大きなものと面積が小さなものとを区別して示し、主面の面積に対する貫通孔の面積割合については、その合計を併せて示した。また、上述のように、比較例1〜5は、焼成後の積層体から薄膜コンデンサを作製することが困難であったため、不良率を0%としている。また、比較例1,4では、焼成後の積層体に貫通孔が全く形成されていなかったため、貫通孔に係る全ての結果を0としている。また、比較例1〜9に係る薄膜コンデンサでは、剥離又はクラックのいずれかが発生したため、その結果についても併せて表2に示す。
Claims (3)
- 下地電極と、
前記下地電極上に積層された二つ以上の誘電体層と、
前記誘電体層の間に積層されNiを主成分とする電極と、
を備える薄膜コンデンサであって、
前記電極は積層方向に貫通する貫通孔を有し、
少なくとも一部の前記貫通孔の面積は、0.19〜7.0μm2であり、
前記貫通孔を含む前記内部電極の主面全体の面積に対する前記貫通孔の面積の割合は0.05〜5%である
ことを特徴とする薄膜コンデンサ。 - 全ての前記貫通孔の面積は0.19〜7.0μm2である請求項1記載の薄膜コンデンサ。
- 前記貫通孔は中空である請求項1又は2記載の薄膜コンデンサ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009271987A JP5158061B2 (ja) | 2009-11-30 | 2009-11-30 | 薄膜コンデンサ |
US12/956,060 US8498095B2 (en) | 2009-11-30 | 2010-11-30 | Thin-film capacitor with internally hollow through holes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009271987A JP5158061B2 (ja) | 2009-11-30 | 2009-11-30 | 薄膜コンデンサ |
Publications (2)
Publication Number | Publication Date |
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JP2011114312A true JP2011114312A (ja) | 2011-06-09 |
JP5158061B2 JP5158061B2 (ja) | 2013-03-06 |
Family
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JP2009271987A Active JP5158061B2 (ja) | 2009-11-30 | 2009-11-30 | 薄膜コンデンサ |
Country Status (2)
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US (1) | US8498095B2 (ja) |
JP (1) | JP5158061B2 (ja) |
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JP2013229583A (ja) * | 2012-03-29 | 2013-11-07 | Tdk Corp | 薄膜コンデンサ |
JP2015119184A (ja) * | 2013-12-16 | 2015-06-25 | コリア・インスティテュート・オブ・サイエンス・アンド・テクノロジー | 積層セラミックキャパシタ及びその製造方法 |
KR20180028276A (ko) * | 2016-09-08 | 2018-03-16 | 삼성전기주식회사 | 커패시터 부품 |
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