JP2011071210A - 金属酸化膜の成膜方法、酸化マンガン膜の成膜方法及びコンピュータ読み取り可能な記憶媒体 - Google Patents
金属酸化膜の成膜方法、酸化マンガン膜の成膜方法及びコンピュータ読み取り可能な記憶媒体 Download PDFInfo
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- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
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- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
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- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
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Abstract
【解決手段】 下地上に有機金属化合物を含むガスを供給し、下地上に金属酸化膜を成膜する金属酸化膜の成膜方法であって、下地上に有機金属化合物を供給して下地上に金属酸化膜を成膜し(工程2)、かつ、金属酸化膜の成膜プロセスの最後に、金属酸化膜を酸素含有ガス又は酸素含有プラズマに曝す(工程4)。
【選択図】図3
Description
(MeCp)2Mn[=Mn(CH3C5H4)2]
(i−PrCp)2Mn[=Mn(C3H7C5H4)2]
MeCpMn(CO)3[=(CH3C5H4)Mn(CO)3]
(t−BuCp)2Mn[=Mn(C4H9C5H4)2]
Mn(DMPD)(EtCp)[=Mn(C7H11C2H5C5H4)]
((CH3)5Cp)2Mn[=Mn((CH3)5C5H4)2]
次に、この発明の一実施形態に係る酸化マンガンの成膜方法の一例を説明する。
上記反応式から、供給したマンガン有機化合物の量よりも多くH2Oを供給しても、反応に寄与しない。しかも、大半のマンガン有機化合物はMnO成膜反応に使われるか、成膜反応に関与することなく排気されており、酸化マンガン膜103上に残っている有機物成分は、供給したマンガン有機化合物に比べると大幅に少ない量である。このため、残っているマンガン有機化合物を過不足なく反応させるためには、H2Oの供給量をマンガン有機化合物の供給量と同じか、それ以下にすることが望ましい、ということになる。例えば、(EtCp)2Mnを4sccm流して10min成膜した場合、トータルのマンガン有機化合物の供給量は40ccとなる。この場合には、H2Oの供給量は、最大で40ccである。具体的には、H2Oの供給時間を1minとしたい場合には、H2Oの流量は40sccm以下とすれば良い。また、H2Oの供給時間を10minとしたい場合には、H2Oの流量は4sccm以下とすれば良い。
その他、この発明は、その趣旨を逸脱しない範囲で様々に変形することができる。
Claims (14)
- 下地上に有機金属化合物を含むガスを供給し、前記下地上に金属酸化膜を成膜する金属酸化膜の成膜方法であって、
前記下地上に前記有機金属化合物を供給して前記下地上に金属酸化膜を成膜し、かつ、前記金属酸化膜の成膜プロセスの最後に、前記金属酸化膜を酸素含有ガス又は酸素含有プラズマに曝すことを特徴とする金属酸化膜の成膜方法。 - 下地上にマンガン有機化合物を含むガスを供給し、前記下地上に酸化マンガン膜を成膜する酸化マンガン膜の成膜方法であって、
前記下地上に前記マンガン有機化合物を供給して前記下地上に酸化マンガン膜を成膜し、かつ、前記酸化マンガンの成膜プロセスの最後に、前記酸化マンガン膜を酸素含有ガス又は酸素プラズマに曝すことを特徴とする酸化マンガン膜の成膜方法。 - 前記酸素含有ガスが、水(H2O)又は酸素(O2)であることを特徴とする請求項2に記載の酸化マンガン膜の成膜方法。
- 前記マンガン有機化合物が、マンガンと配位子とがπ結合しているものであることを特徴とする請求項2又は請求項3に記載の酸化マンガン膜の成膜方法。
- 前記配位子が五員環であることを特徴とする請求項4に記載の酸化マンガン膜の成膜方法。
- 前記五員環の配位子が、Cp(シクロペンタジエニル)であることを特徴とする請求項5に記載の酸化マンガン膜の成膜方法。
- 前記マンガン有機化合物が、
(EtCp)2Mn[=Mn(C2H5C5H4)2]
Cp2Mn[=Mn(C5H5)2]
(MeCp)2Mn[=Mn(CH3C5H4)2]
(i−PrCp)2Mn[=Mn(C3H7C5H4)2]
MeCpMn(CO)3[=(CH3C5H4)Mn(CO)3]
(t−BuCp)2Mn[=Mn(C4H9C5H4)2]
Mn(DMPD)(EtCp)[=Mn(C7H11C2H5C5H4)]、及び
((CH3)5Cp)2Mn[=Mn((CH3)5C5H4)2]
のいずれかから選ばれることを特徴とする請求項6に記載の酸化マンガン膜の成膜方法。 - 前記酸素含有ガスの供給量が、前記酸化マンガン膜及び処理チャンバ内部に付着したマンガン有機化合物を過不足無く反応させ得る量であり、
前記過不足無く反応させ得る量が、前記π結合を切り、マンガンを露出させる量であることを特徴とする請求項2から請求項7のいずれか1項に記載の酸化マンガン膜の成膜方法。 - 前記酸素含有ガスの供給量が、前記マンガン有機化合物の供給量と同じか、それ以下であることを特徴とする請求項2から請求項7のいずれか一項に記載の酸化マンガン膜の成膜方法。
- 前記酸素含有ガスを供給する時の処理チャンバ内部の酸素含有ガス分圧が、1ppb以上10ppm以下であることを特徴とする請求項2から請求項9のいずれか一項に記載の酸化マンガン膜の成膜方法。
- プロセスレシピが、前記酸素含有ガスを供給した後、前記マンガン有機化合物ガスを供給することなく前記成膜プロセスを終了させるものであることを特徴とする請求項2から請求項10のいずれか一項に記載の酸化マンガン膜の成膜方法。
- 前記プロセスレシピ終了後、引き続き、真空を破ることなく、又は前記酸化マンガン膜が酸素や水や大気に触れることなく、前記酸化マンガン膜上に銅又は銅を含む合金を成膜することを特徴とする請求項2から請求項11のいずれか一項に記載の酸化マンガン膜の成膜方法。
- 前記酸化マンガン膜の成膜法が、CVD法又はALD法であることを特徴とする請求項2から請求項12のいずれか一項に記載の酸化マンガン膜の成膜方法。
- コンピュータ上で動作し、成膜装置を制御する制御プログラムが記憶されたコンピュータ読取可能な記憶媒体であって、
前記制御プログラムは、実行時に、請求項1に記載の金属酸化膜の成膜方法、又は請求項2から請求項13のいずれか一項に記載の酸化マンガン膜の成膜方法が行われるように、前記成膜装置を制御させることを特徴とするコンピュータ読取可能な記憶媒体。
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JP2009219283A JP5653018B2 (ja) | 2009-09-24 | 2009-09-24 | 酸化マンガン膜の成膜方法 |
KR1020127009386A KR101449216B1 (ko) | 2009-09-24 | 2010-09-17 | 금속 산화막의 성막 방법, 산화 망간막의 성막 방법 및 컴퓨터 판독 가능한 기억 매체 |
CN2010800426606A CN102648513A (zh) | 2009-09-24 | 2010-09-17 | 金属氧化膜的成膜方法、氧化锰膜的成膜方法及计算机可读取存储介质 |
US13/497,929 US20120219724A1 (en) | 2009-09-24 | 2010-09-17 | Method for forming metal oxide film, method for forming manganese oxide film, and computer-readable storage medium |
PCT/JP2010/066228 WO2011037090A1 (ja) | 2009-09-24 | 2010-09-17 | 金属酸化膜の成膜方法、酸化マンガン膜の成膜方法及びコンピュータ読み取り可能な記憶媒体 |
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WO2014013941A1 (ja) * | 2012-07-18 | 2014-01-23 | 東京エレクトロン株式会社 | 半導体装置の製造方法 |
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CN105503618A (zh) | 2010-11-02 | 2016-04-20 | 宇部兴产株式会社 | (酰胺氨基烷烃)金属化合物及使用所述金属化合物制备含金属的薄膜的方法 |
WO2013125449A1 (ja) * | 2012-02-22 | 2013-08-29 | 東京エレクトロン株式会社 | 半導体装置の製造方法、記憶媒体及び半導体装置 |
JP2016003340A (ja) * | 2014-06-13 | 2016-01-12 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | 金属酸化物の薄膜、電池用電極及びそれらの製造方法 |
KR102000572B1 (ko) | 2016-11-21 | 2019-07-16 | 한국화학연구원 | 망간 아미노아미드 아미디네이트 전구체, 이의 제조방법, 및 이를 이용하여 박막을 형성하는 방법 |
KR101973700B1 (ko) | 2016-11-21 | 2019-04-30 | 한국화학연구원 | 망간 아미노아미드 아미드 전구체, 이의 제조방법, 및 이를 이용하여 박막을 형성하는 방법 |
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WO2014013941A1 (ja) * | 2012-07-18 | 2014-01-23 | 東京エレクトロン株式会社 | 半導体装置の製造方法 |
JPWO2014013941A1 (ja) * | 2012-07-18 | 2016-06-30 | 東京エレクトロン株式会社 | 半導体装置の製造方法 |
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US20120219724A1 (en) | 2012-08-30 |
KR20120056293A (ko) | 2012-06-01 |
JP5653018B2 (ja) | 2015-01-14 |
CN102648513A (zh) | 2012-08-22 |
WO2011037090A1 (ja) | 2011-03-31 |
KR101449216B1 (ko) | 2014-10-08 |
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