JP2011044654A - 半導体装置 - Google Patents

半導体装置 Download PDF

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Publication number
JP2011044654A
JP2011044654A JP2009193318A JP2009193318A JP2011044654A JP 2011044654 A JP2011044654 A JP 2011044654A JP 2009193318 A JP2009193318 A JP 2009193318A JP 2009193318 A JP2009193318 A JP 2009193318A JP 2011044654 A JP2011044654 A JP 2011044654A
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JP
Japan
Prior art keywords
interposer
pad
chips
pads
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009193318A
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English (en)
Japanese (ja)
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JP2011044654A5 (enExample
Inventor
Akinori Shiraishi
晶紀 白石
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Industries Co Ltd
Original Assignee
Shinko Electric Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Priority to JP2009193318A priority Critical patent/JP2011044654A/ja
Publication of JP2011044654A publication Critical patent/JP2011044654A/ja
Publication of JP2011044654A5 publication Critical patent/JP2011044654A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/03—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10D89/00
    • H01L25/0655—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10D89/00 the devices being arranged next to each other
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/16227—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/16235—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a via metallisation of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73201—Location after the connecting process on the same surface
    • H01L2224/73203—Bump and layer connectors
    • H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73201—Location after the connecting process on the same surface
    • H01L2224/73207—Bump and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013—Alloys
    • H01L2924/0132—Binary Alloys
    • H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/102—Material of the semiconductor or solid state bodies
    • H01L2924/1025—Semiconducting materials
    • H01L2924/10251—Elemental semiconductors, i.e. Group IV
    • H01L2924/10253—Silicon [Si]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/1517—Multilayer substrate
    • H01L2924/15192—Resurf arrangement of the internal vias
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/153—Connection portion
    • H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191—Disposition
    • H01L2924/19101—Disposition of discrete passive components
    • H01L2924/19107—Disposition of discrete passive components off-chip wires

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Wire Bonding (AREA)
JP2009193318A 2009-08-24 2009-08-24 半導体装置 Pending JP2011044654A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009193318A JP2011044654A (ja) 2009-08-24 2009-08-24 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009193318A JP2011044654A (ja) 2009-08-24 2009-08-24 半導体装置

Publications (2)

Publication Number Publication Date
JP2011044654A true JP2011044654A (ja) 2011-03-03
JP2011044654A5 JP2011044654A5 (enExample) 2012-08-09

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JP (1) JP2011044654A (enExample)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015220291A (ja) * 2014-05-15 2015-12-07 株式会社ソシオネクスト 半導体装置及びその製造方法
JP2016018876A (ja) * 2014-07-08 2016-02-01 日本電気株式会社 電子装置又はその製造方法
CN107041137A (zh) * 2014-09-05 2017-08-11 英帆萨斯公司 多芯片模块及其制法
US9875969B2 (en) 2009-06-24 2018-01-23 Intel Corporation Multi-chip package and method of providing die-to-die interconnects in same
US10283434B2 (en) 2015-11-04 2019-05-07 Fujitsu Limited Electronic device, method for manufacturing the electronic device, and electronic apparatus
JP2021093515A (ja) * 2019-12-06 2021-06-17 インテル・コーポレーション 再構成ウェハアセンブリ
CN113948508A (zh) * 2021-10-12 2022-01-18 天津津航计算技术研究所 一种基于硅载板的芯片模块高密度互连方法
DE102014116417B4 (de) 2013-12-18 2022-01-27 Intel Corporation Paket integrierter Schaltungen mit eingebetteter Brücke, Verfahren zum Zusammenbau eines solchen und Paketzusammensetzung
CN116053229A (zh) * 2022-03-17 2023-05-02 海光信息技术股份有限公司 芯片封装基板和封装芯片
WO2024053103A1 (ja) * 2022-09-09 2024-03-14 ウルトラメモリ株式会社 Ｉｃブリッジ、ｉｃモジュールおよびｉｃモジュールの製造方法
US12446159B2 (en) 2021-05-26 2025-10-14 Murata Manufacturing Co., Ltd. Electronic circuit module

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000223651A (ja) * 1999-01-28 2000-08-11 United Microelectronics Corp 対向マルチチップ用パッケージ
JP2001244388A (ja) * 2000-02-28 2001-09-07 Matsushita Electric Ind Co Ltd 半導体装置
JP2003303847A (ja) * 2002-04-10 2003-10-24 Kaijo Corp 半導体構造およびボンディング方法
JP2006073651A (ja) * 2004-08-31 2006-03-16 Fujitsu Ltd 半導体装置
JP2006261311A (ja) * 2005-03-16 2006-09-28 Sony Corp 半導体装置及びその製造方法
JP2008270446A (ja) * 2007-04-19 2008-11-06 Toshiba Corp 積層型半導体装置とその製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000223651A (ja) * 1999-01-28 2000-08-11 United Microelectronics Corp 対向マルチチップ用パッケージ
JP2001244388A (ja) * 2000-02-28 2001-09-07 Matsushita Electric Ind Co Ltd 半導体装置
JP2003303847A (ja) * 2002-04-10 2003-10-24 Kaijo Corp 半導体構造およびボンディング方法
JP2006073651A (ja) * 2004-08-31 2006-03-16 Fujitsu Ltd 半導体装置
JP2006261311A (ja) * 2005-03-16 2006-09-28 Sony Corp 半導体装置及びその製造方法
JP2008270446A (ja) * 2007-04-19 2008-11-06 Toshiba Corp 積層型半導体装置とその製造方法

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10763216B2 (en) 2009-06-24 2020-09-01 Intel Corporation Multi-chip package and method of providing die-to-die interconnects in same
US9875969B2 (en) 2009-06-24 2018-01-23 Intel Corporation Multi-chip package and method of providing die-to-die interconnects in same
US10510669B2 (en) 2009-06-24 2019-12-17 Intel Corporation Multi-chip package and method of providing die-to-die interconnects in same
US11824008B2 (en) 2009-06-24 2023-11-21 Intel Corporation Multi-chip package and method of providing die-to-die interconnects in same
US10923429B2 (en) 2009-06-24 2021-02-16 Intel Corporation Multi-chip package and method of providing die-to-die interconnects in same
DE112010002705B4 (de) 2009-06-24 2021-11-11 Intel Corporation Multi-Chip-Baugruppe und Verfahren zur Bereitstellung von Chip-Chip-Zwischenverbindungen in derselben
US12113026B2 (en) 2009-06-24 2024-10-08 Intel Corporation Multi-chip package and method of providing die-to-die interconnects in same
US11876053B2 (en) 2009-06-24 2024-01-16 Intel Corporation Multi-chip package and method of providing die-to-die interconnects in same
DE102014116417B4 (de) 2013-12-18 2022-01-27 Intel Corporation Paket integrierter Schaltungen mit eingebetteter Brücke, Verfahren zum Zusammenbau eines solchen und Paketzusammensetzung
JP2015220291A (ja) * 2014-05-15 2015-12-07 株式会社ソシオネクスト 半導体装置及びその製造方法
JP2016018876A (ja) * 2014-07-08 2016-02-01 日本電気株式会社 電子装置又はその製造方法
CN107041137A (zh) * 2014-09-05 2017-08-11 英帆萨斯公司 多芯片模块及其制法
US10283434B2 (en) 2015-11-04 2019-05-07 Fujitsu Limited Electronic device, method for manufacturing the electronic device, and electronic apparatus
JP2021093515A (ja) * 2019-12-06 2021-06-17 インテル・コーポレーション 再構成ウェハアセンブリ
US12446159B2 (en) 2021-05-26 2025-10-14 Murata Manufacturing Co., Ltd. Electronic circuit module
CN113948508A (zh) * 2021-10-12 2022-01-18 天津津航计算技术研究所 一种基于硅载板的芯片模块高密度互连方法
CN116053229A (zh) * 2022-03-17 2023-05-02 海光信息技术股份有限公司 芯片封装基板和封装芯片
WO2024053103A1 (ja) * 2022-09-09 2024-03-14 ウルトラメモリ株式会社 Ｉｃブリッジ、ｉｃモジュールおよびｉｃモジュールの製造方法

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