JP2011035343A - 半導体装置の製造方法 - Google Patents
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66833—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a charge trapping gate insulator, e.g. MNOS transistors
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/7926—Vertical transistors, i.e. transistors having source and drain not in the same horizontal plane
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- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
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Abstract
【解決手段】本発明の半導体装置の製造方法は、基板10上に第1の加工層を形成する工程と、第1の加工層に第1のコンタクトホールCS1を形成する工程と、第1のコンタクトホールCS1内に犠牲膜42aを埋め込む工程と、犠牲膜42aが埋め込まれた第1のコンタクトホールCS1上に第2の加工層44を形成する工程と、犠牲膜42a上の第2の加工層44に犠牲膜42aに達する第2のコンタクトホールCS2を形成する工程と、第2のコンタクトホールCS2を通じて第1のコンタクトホールCS1内から犠牲膜42aを除去し、第1のコンタクトホールCS1と第2のコンタクトホールCS2とを連通させる工程と、を備えた。
【選択図】図8
Description
前記基板上に設けられ、交互に積層された複数の導電層と複数の絶縁層とを有する積層体と、
前記積層体に形成されたコンタクトホール内に設けられたコンタクト電極と、
を備え、
前記コンタクトホールは、
前記基板に達する第1のコンタクトホールと、
前記第1のコンタクトホール上に形成され前記第1のコンタクトホールと連通し、前記第1のコンタクトホールよりも小さな孔径の第2のコンタクトホールと、
を有することを特徴とする半導体装置。
前記基板上に前記メモリセルアレイ領域及び前記周辺回路領域にわたって設けられ、交互に積層された複数の導電層と複数の絶縁層とを有する積層体と、
前記メモリセルアレイ領域の前記積層体に形成されたメモリホール内に設けられ、前記導電層と前記絶縁層との積層方向に延びる半導体層と、
前記導電層と前記半導体層との間に設けられた電荷蓄積層と、
前記周辺回路領域の前記積層体に形成されたコンタクトホール内に設けられたコンタクト電極と、
を備え、
前記コンタクトホールは、
前記基板に達する第1のコンタクトホールと、
前記第1のコンタクトホール上に形成され前記第1のコンタクトホールと連通し、前記第1のコンタクトホールよりも小さな孔径の第2のコンタクトホールと、
を有することを特徴とする半導体装置。
Claims (5)
- 基板上に第1の加工層を形成する工程と、
前記第1の加工層に第1のコンタクトホールを形成する工程と、
前記第1のコンタクトホール内に犠牲膜を埋め込む工程と、
前記犠牲膜が埋め込まれた前記第1のコンタクトホール上に、第2の加工層を形成する工程と、
前記犠牲膜上の前記第2の加工層に、前記犠牲膜に達する第2のコンタクトホールを形成する工程と、
前記第2のコンタクトホールを通じて、前記第1のコンタクトホール内から前記犠牲膜を除去し、前記第1のコンタクトホールと前記第2のコンタクトホールとを連通させる工程と、
前記第1のコンタクトホール及び前記第2のコンタクトホール内にコンタクト電極を設ける工程と、
を備えたことを特徴とする半導体装置の製造方法。 - 前記第2のコンタクトホールの底部の孔径は、前記第1のコンタクトホールの上部の孔径よりも小さいことを特徴とする請求項1記載の半導体装置の製造方法。
- 前記第1の加工層は前記第2の加工層よりも薄く、前記第1のコンタクトホールは前記第2のコンタクトホールよりもアスペクト比が低いことを特徴とする請求項1または2に記載の半導体装置の製造方法。
- 前記第2の加工層の形成後、前記第2の加工層に前記犠牲膜に達するダミーホールを形成する工程と、前記ダミーホール内に絶縁物を埋め込む工程とを有し、
前記絶縁物中に前記第2のコンタクトホールを形成することを特徴とする請求項1〜3のいずれか1つに記載の半導体装置の製造方法。 - 前記第1のコンタクトホールの形成後、前記第1のコンタクトホールの側壁に絶縁膜を形成する工程を有し、前記絶縁膜の内側に前記犠牲膜を埋め込むことを特徴とする請求項1または2に記載の半導体装置の製造方法。
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JP5121792B2 (ja) | 2013-01-16 |
US8912060B2 (en) | 2014-12-16 |
US20110031546A1 (en) | 2011-02-10 |
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